JPH10213502A - Pressure sensor characteristic measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressure sensor characteristic measuring device capable of restraining generation of mechanical stress and achieving highly accurate characteristic measurement. SOLUTION: This pressure sensor characteristic measuring device, which includes a pressure sensor body 1, a pressure induction tube 17 for inducing pressure to a diaphragm inside the pressure sensor body 1, and an external terminal 18 for fetching electrical signals outputted correspondingly to the deflection of the diaphragm to the exterior and which also includes a hollow part 51, pressure impression jig 5 including a plural number of openings 52 in which the pressure induction tube 17 is inserted, and a wiring substrate 4 provided with an electrode pin 41 for connecting it to the external terminal 18 and fetching the electrode, induces pressure to the diaphragm from the hollow part 51 through the pressure induction tube 17 by inserting the pressure induction tube 17 of the pressure sensor into the opining 52 on the pressure impression jig 5 so as to make the external terminal 18 of the pressure sensor to come in contact with the electrode pin 41 on the wiring substrate 4 and restraining it, by which electrical signals produced correspondingly to the deflection of the diaphragm generated by the induced pressure are fetched through the electrode pin 41 and the external terminal 18.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a characteristic measuring device for measuring a pressure characteristic of a pressure sensor.

[0002]

2. Description of the Related Art A pressure sensor having a diaphragm structure utilizes a piezo effect. As shown in FIG. 2, a piezo resistor 12, a field oxide film 13, a nitride An electrode wiring 15 for extracting an electrode from the silicon film 14 and the piezoresistor 12 is formed. On the back side, the semiconductor substrate 11 is anisotropically etched by an anisotropic etching technique to form a diaphragm 16. Then, these are covered with a cover to form a pressure sensor main body. A pressure sensor is composed of the pressure sensor main body and an external terminal connected to a pressure introducing pipe and electrode wiring 15 described later.

The principle of operation of this pressure sensor is that when the diaphragm 16 bends under pressure, a stress is generated in the piezoresistor 12 in accordance with the amount of deflection. The resistance value of the piezoresistor 12 changes according to this stress, and this is detected as a change in an electric signal.

[0004] The characteristics of this pressure sensor are that it is made of silicon, so that it is smaller and more sensitive than the conventional Bourdon tube type, and it has good reproducibility and high reliability. can give.

[0005] Measuring equipment for measuring the pressure characteristics of such a pressure sensor generally includes a pressure generator, a constant voltage power supply or a constant current power supply, a voltmeter or an ammeter, a thermostat, and automatic control of these. And the like. Then, the pressure sensor to be measured is incorporated in a pressure applying jig for applying pressure, and is put in a constant temperature layer together with an output extracting section for outputting a signal indicating a pressure characteristic from the pressure sensor to the outside. Various characteristics are measured in the temperature state.

Here, as shown in FIG. 3, the pressure applying jig 2 is made of a metal such as aluminum and has a hollow portion 21 therein.
It has a plurality of pressure introduction holes 22 connected to the hollow portion 21 and corresponding to the pressure introduction pipe 17 for introducing pressure to the diaphragm 16 in the pressure sensor main body 1. As the output take-out unit, a unit in which a plurality of IC sockets 31 are mounted on the wiring board 3 is used.

[0007] An external terminal 18 for taking out an electric signal of the pressure sensor to be measured to the outside is inserted into the IC socket 31 of the wiring board 3 so that the pressure introducing pipe 17 faces in the opposite direction to the wiring board 3 side. Next, the pressure applying jig 2 is mounted so that the pressure introducing pipe 17 fits into the pressure introducing hole 22. At this time, a stopper 32 as a spacer between the wiring board 3 and the pressure applying jig 2 is interposed therebetween. The stopper 32 is fixed to the wiring board 3 in advance, and the pressure applying jig 2 and the stopper 32 are fixed by screws 23. The pressure applying jig 2 is provided with a pressure pipe 24, and the pressure is applied from the pressure pipe 24 through the hollow portion 21 to the pressure introducing hole 2.
2 and further into a diaphragm 16 in the pressure sensor main body 1 via a pressure introducing pipe 17.

[0008]

However, in the above-described method of measuring the pressure characteristics of the pressure sensor, the method for measuring the pressure characteristics of the pressure sensor is described as follows. When the positional displacement occurs in the direction, a stress mainly in the horizontal direction is applied to the pressure introducing pipe 17 by the pressure applying jig 2. This stress is applied to the diaphragm 16 in the pressure sensor main body 1, and the pressure characteristic changes. Further, since the pressure applying jig 2 is formed integrally so as to measure the characteristics of a plurality of pressure sensors with one pressure applying jig 2, the displacement of one pressure sensor becomes the whole displacement, Stress will also be applied to other pressure sensors.

When the pressure applying jig 2 is fixed by a plurality of screws 23, if the tightening torque of the screws 23 varies, the pressure applying jig 2 is slightly tilted or warped, and There is a problem that the same stress as described above is applied to the pressure introducing pipe 17 and the pressure characteristics fluctuate.

The present invention has been made in view of the above points, and an object of the present invention is to provide a pressure sensor characteristic measuring device capable of suppressing the generation of mechanical stress and measuring characteristics with high accuracy. It is in.

[0011]

According to the first aspect of the present invention,
Pressure of a pressure sensor having a pressure sensor main body, a pressure introducing pipe for introducing pressure to a diaphragm in the pressure sensor main body, and an external terminal for taking out an electric signal output according to the deflection of the diaphragm to the outside. A pressure measuring jig for measuring characteristics, having a hollow portion inside, a pressure application jig having a plurality of openings connected to the hollow portion and inserting the pressure introduction pipe, and an electrode connected to the external terminal. And a wiring board provided with electrode pins for taking out a pressure sensor. A pressure introducing pipe of a pressure sensor is inserted into an opening of the pressure applying jig, and an external terminal of the pressure sensor is brought into contact with the electrode pin of the wiring board. Pressure is introduced into the pressure sensor main body from the hollow portion of the pressure applying jig through the pressure introducing pipe, and the pressure is generated according to the deflection of the diaphragm caused by the introduced pressure. It is characterized in that the electrical signal they were taken out through the electrode pins and the external terminals.

According to a second aspect of the present invention, in the first aspect of the invention, the electrode pins of the wiring board are formed in a flat plate shape.

According to a third aspect of the present invention, in the first or second aspect of the present invention, a projection is provided on the pressure sensor main body side of the wiring board.

According to a fourth aspect of the present invention, in the third aspect of the present invention, in a state where the pressure sensor is mounted on a pressure applying jig and a wiring board, a tip end surface of the convex portion and the convex portion of the sensor main body are formed. A play is formed between the front surface and the surface facing the front end surface.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram illustrating a cross section of a pressure sensor characteristic measuring device according to an example of an embodiment of the present invention. The pressure sensor characteristic measuring device according to the present embodiment includes a wiring board 4 for fixing the pressure sensor and extracting an electric signal to the outside, a pressure applying jig 5 for introducing pressure to the diaphragm 16 in the pressure sensor main body 1, and Consists of The same number of flat electrode pins 41 as the number of the external terminals 18 of the pressure sensor are mounted on the wiring board 4 for electrical connection with the external terminals 18 of the pressure sensor. In addition, a protrusion 42 is formed between the opposing electrode pins 41. The convex part 42 has the same width and length of the outer shape of the pressure sensor main body 1, and when the pressure sensor main body 1 is mounted, the back surface 19 of the pressure sensor main body 1 and the front end surface 43 of the convex part 42 are several hundred μm. It is formed by adhering a resin having such a size as to have the gap 6. Pressure introduction pipe 17 of pressure sensor
And the external terminal 18 are formed in the opposite direction.

The pressure applying jig 5 has a hollow portion 51 and is made of, for example, aluminum. Further, a pressure applying jig 5
Is formed with a pressure introducing hole (opening) 52 for fitting the pressure introducing pipe 17 of the pressure sensor. Although only one pressure introduction hole 52 is shown in FIG. 1, a plurality of pressure introduction holes 52 are formed so that the characteristics of a plurality of pressure sensors can be measured.

When the characteristic is measured by the pressure sensor characteristic measuring device of the present embodiment, the pressure introducing pipe 17 of the pressure sensor is inserted into the pressure introducing hole 52 of the pressure applying jig 5, and
Next, the wiring board 4 is fixed such that the external terminals 18 of the pressure sensor contact the electrode pins 41. In this state, when pressure is introduced through the hollow portion 51 of the pressure applying jig 5,
The pressure is applied to the diaphragm 16 in the pressure sensor main body 1 via the pressure introducing pipe 17 of the pressure sensor. By extracting an electric signal output from the external terminal 18 according to the pressure applied to the diaphragm 16 from the electrode pin 41 connected to the external terminal 18, the pressure characteristic can be measured.

According to this embodiment, since the pressure introducing pipe 17 of the pressure sensor is inserted into the pressure introducing hole 52 of the pressure applying jig 5, the stress from the pressure applying jig 5 to the pressure sensor is reduced. It does not take. Further, since the external terminals 18 and the electrode pins 41 have flexibility and the electrode pins 41 are flat, no mechanical stress is applied to the pressure sensor, and the external terminals 18 and the electrode pins 41 of the pressure sensor are not applied. When the connection is made, even if a displacement occurs, the connection is hard to be dislocated because it is absorbed by the electrode pins 41.

When pressure is applied through the hollow portion 51 of the pressure applying jig 5, the pressure introducing pipe 17 is connected to the pressure introducing hole 5.
Although it is conceivable that the pressure-introducing tube 17 may slightly deviate from the state in which the pressure-introducing tube 2 is fitted exactly, the projection 42 prevents the pressure-introducing tube 17 from being deviated. At this time, the convex portion 42 presses the back surface 19 side of the pressure sensor main body 1. However, since the diaphragm 16 is mounted on the pressure introducing pipe 17 side in the pressure sensor, the influence on the diaphragm 16 is small. Can be minimized. Furthermore, since the area of the front end surface 43 of the convex portion 42 is equal to the back surface 19 of the pressure sensor main body 1, local concentration of stress can be avoided. In addition, since the clearance 6 is provided between the back surface 19 of the pressure sensor main body 1 and the front end surface 43 of the convex portion 42, the pressure introducing pipe 1 is provided.
In a state where the pressure sensor 7 is fitted into the pressure introducing hole 52 exactly, no mechanical stress acts on the pressure sensor main body 1 from the convex portion 42.

[0020]

As described above, according to the first aspect of the present invention, the pressure sensor main body, the pressure introducing pipe for introducing pressure to the diaphragm in the pressure sensor main body, and the output according to the deflection of the diaphragm. A pressure sensor for measuring a pressure characteristic of a pressure sensor having an external terminal for taking out an electric signal to be output to the outside, wherein the pressure introduction pipe has a hollow portion therein and is connected to the hollow portion. A pressure applying jig having a plurality of openings into which the pressure application jigs are inserted, and a wiring board having electrode pins for taking out electrodes by connecting to the external terminals. Insert a pressure introduction tube, contact the external terminals of the pressure sensor with the electrode pins of the wiring board, and hold it, introduce pressure to the pressure sensor body from the hollow portion of the pressure application jig through the pressure introduction tube, The electrical signal generated in response to the deflection of the diaphragm caused by the applied pressure is taken out through the electrode pins and external terminals, so the occurrence of mechanical stress is suppressed and the characteristics of the pressure sensor that can measure characteristics with high accuracy A measuring device could be provided.

According to the second aspect of the present invention, in the first aspect of the present invention, since the electrode pins of the wiring board are formed in a flat plate shape, the position of the external terminals of the pressure sensor and the electrode pins of the wiring board is reduced. Even if displacement occurs, it is absorbed by the electrode pins, and the connection is less likely to be disconnected.

According to the third aspect of the present invention, in the first or second aspect of the present invention, since the convex portion is provided on the pressure sensor main body side of the wiring board, the pressure is introduced even when pressure is applied. The tube 17 is prevented from shifting.

According to a fourth aspect of the present invention, in the third aspect of the present invention, when the pressure sensor is mounted on a pressure applying jig and a wiring board, a tip end surface of the convex portion and the convex portion of the sensor main body are provided. Since a play is formed between the pressure introduction tube and the surface facing the front end surface of the portion, mechanical stress acts on the pressure sensor main body from the convex portion when the pressure introduction tube is tightly fitted in the pressure introduction hole. Never.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a cross section of a schematic configuration of a pressure sensor characteristic measuring device according to an embodiment of the present invention.

FIG. 2 is a schematic diagram showing a cross section of a pressure sensor chip.

FIG. 3 is a schematic diagram showing a schematic configuration of a conventional pressure sensor characteristic measuring device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Pressure sensor main body 4 Wiring board 5 Pressure applying jig 6 Air gap 16 Diaphragm 17 Pressure introduction pipe 18 External terminal 19 Back surface of pressure sensor main body 41 Electrode pin 42 Convex part 43 Tip surface 51 Hollow part 52 Pressure introduction hole (opening)

Claims (4)

[Claims] 1. A pressure sensor having a pressure sensor main body, a pressure introduction pipe for introducing pressure to a diaphragm in the pressure sensor main body, and an external terminal for taking out an electric signal output in accordance with the deflection of the diaphragm. A pressure measuring device for measuring pressure characteristics of a pressure sensor, comprising: a pressure applying jig having a hollow portion therein, and having a plurality of openings connected to the hollow portion and through which the pressure introducing pipe is inserted; A wiring board having an electrode pin for connecting to a terminal and taking out an electrode; a pressure introducing pipe of a pressure sensor is inserted into an opening of the pressure applying jig; and a pressure sensor is inserted into an electrode pin of the wiring board. The external terminals of the diaphragm are brought into contact with each other, and pressure is introduced from the hollow portion of the pressure applying jig into the pressure sensor main body through the pressure introducing pipe, and the deflection of the diaphragm caused by the introduced pressure is caused. An electric signal generated according to the above is taken out through an electrode pin and an external terminal. 2. An apparatus according to claim 1, wherein said electrode pins of said wiring board are formed in a flat plate shape. 3. The pressure sensor characteristic measuring device according to claim 1, wherein a projection is provided on the pressure sensor main body side of the wiring board. 4. When the pressure sensor is mounted on a pressure applying jig and a wiring board, a play is formed between a distal end surface of the convex portion and a surface of the sensor main body facing the distal end surface of the convex portion. 4. The pressure sensor characteristic measuring device according to claim 3, wherein