KR20010014675A - 진공펌프 - Google Patents

진공펌프 Download PDF

Info

Publication number
KR20010014675A
KR20010014675A KR1020000016918A KR20000016918A KR20010014675A KR 20010014675 A KR20010014675 A KR 20010014675A KR 1020000016918 A KR1020000016918 A KR 1020000016918A KR 20000016918 A KR20000016918 A KR 20000016918A KR 20010014675 A KR20010014675 A KR 20010014675A
Authority
KR
South Korea
Prior art keywords
rotating blade
blade
casing
disposed
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020000016918A
Other languages
English (en)
Korean (ko)
Inventor
가바사와다카시
노나카마나부
Original Assignee
다카키도시요시
세이코세이키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다카키도시요시, 세이코세이키 가부시키가이샤 filed Critical 다카키도시요시
Publication of KR20010014675A publication Critical patent/KR20010014675A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01B—PERMANENT WAY; PERMANENT-WAY TOOLS; MACHINES FOR MAKING RAILWAYS OF ALL KINDS
    • E01B7/00—Switches; Crossings
    • E01B7/20—Safety means for switches, e.g. switch point protectors, auxiliary or guiding rail members
    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01B—PERMANENT WAY; PERMANENT-WAY TOOLS; MACHINES FOR MAKING RAILWAYS OF ALL KINDS
    • E01B7/00—Switches; Crossings
    • E01B7/10—Frogs
    • E01B7/14—Frogs with movable parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01B—PERMANENT WAY; PERMANENT-WAY TOOLS; MACHINES FOR MAKING RAILWAYS OF ALL KINDS
    • E01B2201/00—Fastening or restraining methods
    • E01B2201/04—Fastening or restraining methods by bolting, nailing or the like
    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01B—PERMANENT WAY; PERMANENT-WAY TOOLS; MACHINES FOR MAKING RAILWAYS OF ALL KINDS
    • E01B2202/00—Characteristics of moving parts of rail systems, e.g. switches, special frogs, tongues
    • E01B2202/04—Nature of the support or bearing
    • E01B2202/06—Use of friction-reducing surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
KR1020000016918A 1999-03-31 2000-03-31 진공펌프 Withdrawn KR20010014675A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP99-91302 1999-03-31
JP09130299A JP4104098B2 (ja) 1999-03-31 1999-03-31 真空ポンプ

Publications (1)

Publication Number Publication Date
KR20010014675A true KR20010014675A (ko) 2001-02-26

Family

ID=14022682

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000016918A Withdrawn KR20010014675A (ko) 1999-03-31 2000-03-31 진공펌프

Country Status (4)

Country Link
US (1) US6290457B1 (https=)
EP (1) EP1041287A3 (https=)
JP (1) JP4104098B2 (https=)
KR (1) KR20010014675A (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP5149472B2 (ja) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー ガス摩擦ポンプ
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP2002242876A (ja) * 2001-02-19 2002-08-28 Stmp Kk 磁気軸受式ポンプ
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
JP2006344503A (ja) * 2005-06-09 2006-12-21 Boc Edwards Kk 端子構造及び真空ポンプ
US8231341B2 (en) 2009-03-16 2012-07-31 Pratt & Whitney Canada Corp. Hybrid compressor
DE102009039120A1 (de) * 2009-08-28 2011-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2472120B1 (en) * 2009-08-28 2022-11-30 Edwards Japan Limited Vacuum pump and member used for vacuum pump
CN102410238B (zh) * 2011-11-02 2014-04-30 北京中科科仪股份有限公司 一种磁悬浮分子泵升速过程中的平稳控制方法
CN102425559B (zh) * 2011-11-02 2014-06-25 北京中科科仪股份有限公司 一种磁悬浮分子泵降速过程中的平稳控制方法
JP6706553B2 (ja) * 2015-12-15 2020-06-10 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
JP6834845B2 (ja) * 2017-08-15 2021-02-24 株式会社島津製作所 ターボ分子ポンプ
JP7531313B2 (ja) * 2020-06-05 2024-08-09 エドワーズ株式会社 真空ポンプおよび真空ポンプの回転体

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR972751A (fr) * 1941-04-09 1951-02-02 Aviation Louis Breguet Sa Compresseur axial multicellulaire à compression continue
GB724120A (en) * 1948-08-05 1955-02-16 Edward Archibald Stalker Improvements in bladed structures for axial flow compressors and the like
US2952403A (en) * 1954-04-22 1960-09-13 Edward A Stalker Elastic fluid machine for increasing the pressure of a fluid
DE2229724B2 (de) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
JPH02502743A (ja) * 1987-12-25 1990-08-30 ショロホフ　ヴァレリイ　ボリソヴィチ 分子真空ポンプ
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
JPH1089284A (ja) * 1996-09-12 1998-04-07 Seiko Seiki Co Ltd ターボ分子ポンプ
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.

Also Published As

Publication number Publication date
JP4104098B2 (ja) 2008-06-18
JP2000283086A (ja) 2000-10-10
EP1041287A2 (en) 2000-10-04
EP1041287A3 (en) 2002-01-16
US6290457B1 (en) 2001-09-18

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20000331

PG1501 Laying open of application
N231 Notification of change of applicant
PN2301 Change of applicant

Patent event date: 20020311

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

N231 Notification of change of applicant
PN2301 Change of applicant

Patent event date: 20040315

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid