KR20010009179A - Epoxy Molding Compound for Semiconductor Encapsulement - Google Patents
Epoxy Molding Compound for Semiconductor Encapsulement Download PDFInfo
- Publication number
- KR20010009179A KR20010009179A KR1019990027439A KR19990027439A KR20010009179A KR 20010009179 A KR20010009179 A KR 20010009179A KR 1019990027439 A KR1019990027439 A KR 1019990027439A KR 19990027439 A KR19990027439 A KR 19990027439A KR 20010009179 A KR20010009179 A KR 20010009179A
- Authority
- KR
- South Korea
- Prior art keywords
- epoxy resin
- weight
- flame retardant
- parts
- resin composition
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 23
- 229920006336 epoxy molding compound Polymers 0.000 title 1
- 239000003822 epoxy resin Substances 0.000 claims abstract description 55
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 55
- 239000003063 flame retardant Substances 0.000 claims abstract description 41
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 claims abstract description 38
- 239000000203 mixture Substances 0.000 claims abstract description 38
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 23
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 21
- -1 phosphate ester Chemical class 0.000 claims abstract description 18
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 16
- 150000002367 halogens Chemical class 0.000 claims abstract description 16
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 16
- 239000011574 phosphorus Substances 0.000 claims abstract description 16
- 229910019142 PO4 Inorganic materials 0.000 claims abstract description 14
- 239000010452 phosphate Substances 0.000 claims abstract description 13
- 239000011256 inorganic filler Substances 0.000 claims abstract description 10
- 229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 10
- 238000005538 encapsulation Methods 0.000 claims abstract description 7
- 239000000654 additive Substances 0.000 claims abstract description 4
- 239000012796 inorganic flame retardant Substances 0.000 claims description 13
- 239000007822 coupling agent Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000004593 Epoxy Substances 0.000 claims description 7
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 claims description 7
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 claims description 6
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 claims description 5
- ZCILODAAHLISPY-UHFFFAOYSA-N biphenyl ether Natural products C1=C(CC=C)C(O)=CC(OC=2C(=CC(CC=C)=CC=2)O)=C1 ZCILODAAHLISPY-UHFFFAOYSA-N 0.000 claims description 5
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 claims description 5
- 239000000347 magnesium hydroxide Substances 0.000 claims description 5
- 229910001862 magnesium hydroxide Inorganic materials 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 4
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 239000004848 polyfunctional curative Substances 0.000 claims description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims description 2
- 150000001412 amines Chemical class 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 230000000704 physical effect Effects 0.000 abstract description 6
- 230000009931 harmful effect Effects 0.000 abstract description 3
- 235000021317 phosphate Nutrition 0.000 description 12
- 150000003014 phosphoric acid esters Chemical class 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 229920003986 novolac Polymers 0.000 description 5
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000003086 colorant Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000008393 encapsulating agent Substances 0.000 description 3
- 230000009477 glass transition Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229920002545 silicone oil Polymers 0.000 description 3
- 239000013589 supplement Substances 0.000 description 3
- 230000002195 synergetic effect Effects 0.000 description 3
- 239000001993 wax Substances 0.000 description 3
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- CIPOCPJRYUFXLL-UHFFFAOYSA-N 2,3,4-tris[(dimethylamino)methyl]phenol Chemical compound CN(C)CC1=CC=C(O)C(CN(C)C)=C1CN(C)C CIPOCPJRYUFXLL-UHFFFAOYSA-N 0.000 description 1
- HGUFODBRKLSHSI-UHFFFAOYSA-N 2,3,7,8-tetrachloro-dibenzo-p-dioxin Chemical compound O1C2=CC(Cl)=C(Cl)C=C2OC2=C1C=C(Cl)C(Cl)=C2 HGUFODBRKLSHSI-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical compound C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 239000004594 Masterbatch (MB) Substances 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002671 adjuvant Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000012752 auxiliary agent Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 125000006268 biphenyl-3-yl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C1=C([H])C(*)=C([H])C([H])=C1[H] 0.000 description 1
- 125000000319 biphenyl-4-yl group Chemical group [H]C1=C([H])C([H])=C([H])C([H])=C1C1=C([H])C([H])=C([*])C([H])=C1[H] 0.000 description 1
- 229910021538 borax Inorganic materials 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 231100000357 carcinogen Toxicity 0.000 description 1
- 239000003183 carcinogenic agent Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 229960002887 deanol Drugs 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- GPAYUJZHTULNBE-UHFFFAOYSA-N diphenylphosphine Chemical compound C=1C=CC=CC=1PC1=CC=CC=C1 GPAYUJZHTULNBE-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 229910000042 hydrogen bromide Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- RPGWZZNNEUHDAQ-UHFFFAOYSA-N phenylphosphine Chemical compound PC1=CC=CC=C1 RPGWZZNNEUHDAQ-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 150000003018 phosphorus compounds Chemical class 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000004328 sodium tetraborate Substances 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- 239000012756 surface treatment agent Substances 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
본 발명은 반도체 소자 봉지용 에폭시 수지 조성물에 관한 것으로, 더욱 상세하게는 에폭시 수지, 비할로겐계 난연제, 경화제, 무기충전제 및 기타 첨가제를 포함하는 에폭시 수지 조성물에 있어서, 상기 비할로겐계 난연제로서 적인(Red Phosphorus) 및 인산에스테르의 혼합물을 에폭시 수지 100중량부에 대하여 인 함량이 3∼19중량부가 되도록 함유하고, 상기 경화제로서 자일록(Xylok) 경화제를 에폭시 수지 100중량부에 대하여 20∼100중량부 함유하는 것을 특징으로 하는 반도체 소자 밀봉용 에폭시 수지 조성물에 관한 것이다.The present invention relates to an epoxy resin composition for semiconductor element encapsulation, and more particularly to an epoxy resin composition comprising an epoxy resin, a non-halogen-based flame retardant, a curing agent, an inorganic filler, and other additives. Red Phosphorus) and a mixture of phosphate esters so as to have a phosphorus content of 3 to 19 parts by weight based on 100 parts by weight of an epoxy resin, and 20 to 100 parts by weight of a Xylok curing agent as 100 parts by weight of an epoxy resin as the curing agent. It is related with the epoxy resin composition for semiconductor element sealing characterized by including.
최근 반도체 소자의 집적도는 나날이 향상되고 있으며 이에 따른 배선의 미세화, 소자 크기의 대형화 및 다층배선화가 급속히 진전되고 있다. 한편 반도체소자를 외부환경으로부터 보호하는 패키지(Package)는 프린트 기판으로의 고밀도 실장, 즉 표면 실장이라는 관점으로부터 소형·박형화가 가속화되고 있다.In recent years, the degree of integration of semiconductor devices has been improved day by day, and thus the size of wirings, the size of devices and the size of multilayer wirings are rapidly progressing. On the other hand, a package that protects a semiconductor device from an external environment is accelerating its size and thickness from the viewpoint of high-density mounting to a printed board, that is, surface mounting.
이와 같이 대형 반도체 소자를 소형·박형 패키지에 봉지한 수지 봉지형 반도체 장치는 열을 많이 방출하는 전자 제품 등에서 안정적으로 사용되기 위해 난연성을 가져야 하며, 대부분의 반도체 제조 분야에서는 UL-94에 따른 V-0등급 이상의 난연성을 요구하고 있다. 이러한 난연성을 확보하기 위해 에폭시 수지 조성물에 난연제를 첨가하여 사용하는 것이 일반적이다.The resin encapsulated semiconductor device encapsulating a large semiconductor device in a small and thin package must be flame retardant in order to be stably used in electronic products that emit a lot of heat. In most semiconductor manufacturing fields, V- Requires flame retardancy of 0 or higher. In order to secure such flame retardancy, it is common to add and use a flame retardant to an epoxy resin composition.
난연성 에폭시 수지 조성물을 제조하기 위해 첨가하는 종래의 난연제로는 브롬이나 염소계의 할로겐계 난연제가 대표적인데, 이러한 할로겐계 난연제를 적당한 보조제와 함께 혼합하여 사용하는 경우가 많다. 예를 들어, 브롬화에폭사이드 화합물과 삼산화안티몬을 혼합하여 첨가하는 방법, 기타 할로겐계 난연제와 난연 상승효과가 우수한 Sb203을 혼합하여 첨가하는 방법 등이 알려져 있다.Conventional flame retardants added to prepare a flame retardant epoxy resin composition are bromine or chlorine-based halogen flame retardants, which are often used in combination with a suitable auxiliary agent. For example, a method of mixing and adding an epoxide bromide compound and antimony trioxide, a method of mixing and adding another halogen-based flame retardant and Sb203 having excellent flame retardant synergistic effect, and the like are known.
그러나, 이러한 할로겐계 난연제를 사용하여 난연성 에폭시 수지를 제조할 경우에는, 소각시나 화재시에 다이옥신(dioxine)이나 다이퓨란(difuran) 등의 유독성 발암물질이 발생하게 된다. 또한 연소시 브롬화수소나 염화수소 등의 가스가 발생하여 인체에 유독하며 반도체 칩이나 리드 프레임(Lead Frame)에서 부식을 유발하는 주요한 원인이 되는 문제가 있다.However, when the flame-retardant epoxy resin is manufactured using such a halogen-based flame retardant, toxic carcinogens such as dioxine or difuran are generated during incineration or fire. In addition, when combustion, gas such as hydrogen bromide or hydrogen chloride is toxic to the human body, there is a problem that is a major cause of corrosion in the semiconductor chip or lead frame (Lead Frame).
본 발명의 목적은 인체와 기기에 유해한 할로겐계 난연제를 사용하지 않고 유해성이 없는 비할로겐계 난연제를 사용하면서 또한 성형성 등의 물성이 우수한 반도체 봉지제용 에폭시 수지 조성물을 제공하는 것이다.An object of the present invention is to provide an epoxy resin composition for a semiconductor encapsulant having excellent physical properties such as moldability without using a halogen-based flame retardant that is harmful to a human body and a device, and having no harmful effects.
본 발명의 이러한 목적은 적인(Red Phosphrus)과 인산에스테르 화합물을 적절한 조성비로 조합한 난연제와 자일록 경화제를 적당량 첨가함에 의해 달성될 수 있다.This object of the present invention can be achieved by adding an appropriate amount of a flame retardant and a xylox curing agent that combine red phosphorus and phosphate ester compounds in an appropriate composition ratio.
즉, 본 발명은 에폭시 수지, 비할로겐계 난연제, 경화제, 무기충전제 및 기타 첨가제를 포함하는 에폭시 수지 조성물에 있어서, 상기 비할로겐계 난연제로서 하기 화학식 1의 적인(Red Phosphorus) 및 하기 화학식 2의 인산에스테르의 혼합물을 에폭시 수지 100중량부에 대하여 인 함량이 3∼19중량부가 되도록 함유하고, 상기 경화제로서 자일록(Xylok) 경화제를 에폭시 수지 100중량부에 대하여 20∼100중량부 함유하는 것을 특징으로 하는 반도체 소자 밀봉용 에폭시 수지 조성물에 관한 것이다.That is, the present invention is an epoxy resin composition comprising an epoxy resin, a non-halogen-based flame retardant, a curing agent, an inorganic filler, and other additives, wherein the non-halogen-based flame retardant is Red Phosphorus of Formula 1 and phosphoric acid of Formula 2 The mixture of esters is contained so that the phosphorus content is 3 to 19 parts by weight based on 100 parts by weight of the epoxy resin, and 20 to 100 parts by weight of the Xylok curing agent is contained based on 100 parts by weight of the epoxy resin as the curing agent. It relates to the epoxy resin composition for semiconductor element sealing.
단, 상기 식에서 X는 페닐렌기이고, R은 각각 독립적인 수소 또는 알킬기이다.Wherein X is a phenylene group and R is an independent hydrogen or alkyl group, respectively.
이하에서 본 발명을 더욱 상세히 설명하면 다음과 같다.Hereinafter, the present invention will be described in more detail.
본 발명의 에폭시 수지는 당량이 100∼250인 고순도의 에폭시 수지로서 1분자중 2개 이상의 에폭시기를 갖는 것이면 어느 것이라도 적용 가능하다. 예를 들면 일반적으로 사용되는 크레졸 노볼락 수지, 페놀 노볼락 수지, 바이페닐, 바이페닐에테르, 비스페놀 A, 디사이클로펜타디엔 등을 단독 또는 2종류 이상 병행해서 사용할 수 있지만, 난연제와의 혼합성, 성형성의 관점에서 에폭시 당량이 150∼190인 하기 화학식 3의 바이페닐에테르계 에폭시 수지가 적합하며, 이를 전체 조성물에 대하여 5.0∼15.0 중량% 사용하는 것이 바람직하다.As the epoxy resin of the present invention, a high purity epoxy resin having an equivalent weight of 100 to 250 may be applied as long as it has two or more epoxy groups in one molecule. For example, although generally used cresol novolak resin, phenol novolak resin, biphenyl, biphenyl ether, bisphenol A, dicyclopentadiene, etc. can be used singly or in combination of two or more kinds thereof, From the standpoint of moldability, a biphenyl ether epoxy resin of formula (3) having an epoxy equivalent of 150 to 190 is suitable, and it is preferable to use 5.0 to 15.0 wt% of the total composition.
단, 상기 식에서 R은 각각 독립적인 수소 또는 알킬기이다.Provided that R is an independent hydrogen or alkyl group, respectively.
본 발명의 비할로겐계 난연제로는 상기 화학식 1의 적인과 상기 화학식 2의 인산에스테르를 혼합하여 사용하는 것을 특징으로 한다.As the non-halogen-based flame retardant of the present invention, it is characterized by using a mixture of the phosphate ester of the formula (1) and the formula (2).
본 발명에서 난연제를 이루는 일 성분인 적인은 인원소 단독으로 이루어져 있으며 미량으로도 좋은 난연효과를 얻을 수 있는 난연성이 우수한 장점을 가지고 있다. 본 발명에서 적인은 페놀 수지로 코팅을 하고 다시 무기물로 이중 코팅코팅을 하여 사용하는 것이 우수한 전기전도도와 내습성을 갖게 한다는 점에서 바람직하다. 또한 본 발명에서는 난연제로서 적인과 혼합하여 인산에스테르 성분을 사용하는데, 본 발명의 인산에스테르 화합물은 일반적인 인산에스테르 화합물이 인화점이 낮은 단점을 지니는데 비해 250℃ 이상의 높은 인화점을 갖는 것을 특징으로 한다. 난연제로서 적인과 인산에스테르의 사용량은 에폭시 수지 100중량부에 대하여 인 함량이 3∼19중량부가 되도록 사용한다. 인 함량이 19중량부를 초과하면 난연제 휘발에 의해 스트레스 크랙이 발생하거나 성형품 표면에 휘발된 난연제가 묻어나오는 문제가 발생하고, 3중량부 미만으로 사용하면 목적하는 난연 효과를 거두기가 어려우므로 바람직하지 않다.In the present invention, one component of the flame retardant is composed of phosphorus alone and has the advantage of excellent flame retardancy to obtain a good flame retardant effect even in a small amount. In the present invention, the red is preferably coated with a phenol resin and then double coated with an inorganic material in that it has excellent electrical conductivity and moisture resistance. In addition, the present invention uses a phosphate ester component by mixing with a red as a flame retardant, the phosphate ester compound of the present invention is characterized by having a high flash point of more than 250 ℃ compared to the disadvantage that the general phosphate ester compound has a low flash point. The amount of phosphorus and phosphate ester used as a flame retardant is used so that phosphorus content may be 3-19 weight part with respect to 100 weight part of epoxy resins. If the phosphorus content exceeds 19 parts by weight, a stress crack may occur due to volatilization of the flame retardant, or a volatilized flame retardant may be buried on the surface of the molded article. .
상기와 같은 본 발명의 난연제에는 다른 무기계 난연 보조제를 병용하여 사용할 수 있다. 이러한 무기계 난연 보조제로는 징크보레이트나 수산화마그네슘, 수산화알루미늄 등의 금속수산화물을 사용할 수 있는데, 이들을 상기의 인 화합물들과 혼합하여 첨가함으로써 난연 상승 효과를 가져오고 특히 징크보레이트를 첨가할 경우 전기전도도가 지나치게 높아지는 현상까지도 방지할 수 있다. 난연제로서 적인과 인산에스테르만을 사용할 경우 인산염 등이 발생하여 일반적인 할로겐계 난연제를 사용할 때보다 전기전도도가 5∼10배 정도 증대하여 80∼120㎲/㎝로 되는데, 징크보레이트를 첨가하면 여기서 나오는 히드록실기가 인산염을 중화하는 이온 트래퍼(Ion Trapper)역할을 하여 전기전도도의 급격한 상승을 완화시킴으로써 50㎲/㎝ 수준으로 낮춰주는 것이다. 난연 보조제의 사용량은 에폭시 수지 100중량부에 대하여 0∼100중량부가 적합하다. 난연 보조제의 사용량은 적인과 인산에스테르의 사용량과 관계가 있어 적인과 인산에스테르를 많이 사용하면 상대적으로 적은 양의 무기계 난연 보조제를 사용하고 적인과 인산에스테르를 소량 사용할 때에는 무기계 난연 보조제를 다량 사용하는 것이 필요하다. 이러한 무기계 난연 보조제의 사용은 난연성의 상승효과를 가져와 소량의 적인과 인산에스테르를 사용할 수 있게 함으로써 봉지제의 물성에 큰 변화가 없이 난연성을 확보할 수 있도록 한다.In the flame retardant of the present invention as described above, other inorganic flame retardant auxiliaries can be used in combination. Such inorganic flame retardant aids may be metal hydroxides such as zinc borate, magnesium hydroxide, aluminum hydroxide, etc., which are mixed with the above phosphorus compounds to produce a flame retardant synergistic effect, and especially when zinc borate is added. Even an excessively high phenomenon can be prevented. When only phosphorus and phosphate esters are used as a flame retardant, phosphates are generated, and the electrical conductivity is increased by 5 to 10 times compared to that of general halogen flame retardants, resulting in 80 to 120 kW / cm. The actual group acts as an ion trapper to neutralize phosphate, thereby lowering the electrical conductivity to a level of 50 kW / cm. As for the usage-amount of a flame retardant adjuvant, 0-100 weight part is suitable with respect to 100 weight part of epoxy resins. The amount of flame retardant supplements is related to the amount of phosphorus and phosphate esters. Therefore, when a large amount of phosphorus and phosphate esters are used, a relatively small amount of inorganic flame retardant aids are used. need. The use of such inorganic flame retardant aids have a synergistic effect of flame retardancy to enable the use of small amounts of phosphorus and phosphate esters to ensure flame retardancy without major changes in the physical properties of the encapsulant.
본 발명에서 적인과 인산에스테르 및 난연 보조제를 함께 사용하는 경우에는 커플링 에이전트(Coupling Agent)를 미리 무기계 난연 보조제에 코팅하여 사용한다. 적인과 인산에스테르 및 무기계 난연 보조제와 함께 사용할 경우 혼합시 분산이 잘 되지 않고 다른 여타의 원료와의 상용성이 좋지 않아 반도체 조립시 성형불량이 발생하는 문제점이 발생할 수 있으므로, 분산성을 향상시키고 무기물과 유기물간에 상용성을 증대시켜 성형성을 우수하게 하기 위한 방법으로 커플링 에이전트를 무기계 난연 보조제에 코팅하여 사용하는 것이다. 본 발명의 커플링 에이전트로는 실란계(silane) 또는 아민계 화합물을 단독 또는 혼합하여 사용할 수 있고, 사용량은 에폭시 수지 100중량부에 대해 0.2∼10중량부를 사용한다. 10중량부를 초과하여 사용하면 미반응 커플링 에이전트가 잔류하여 성형성에 취약한 결과를 초래하게 되고, 0.2중량부 미만으로 사용하면 난연제의 분산성 증대 효과를 기대하기 어렵다.In the present invention, when the phosphorus ester and the flame retardant aid are used together, a coupling agent is coated on the inorganic flame retardant aid in advance. When used in combination with phosphorous and phosphate esters and inorganic flame retardant aids, poor dispersion during mixing and poor compatibility with other raw materials can lead to poor molding during semiconductor assembly. In order to increase the compatibility between the organic material and the organic material to excellent moldability, the coupling agent is used by coating the inorganic flame retardant auxiliary. As the coupling agent of the present invention, a silane or amine compound may be used alone or in combination. The amount of the coupling agent used is 0.2 to 10 parts by weight based on 100 parts by weight of the epoxy resin. If the amount is more than 10 parts by weight, the unreacted coupling agent remains, resulting in a weakness in moldability. If the amount is less than 0.2 part by weight, it is difficult to expect the effect of increasing the dispersibility of the flame retardant.
본 발명의 수지 조성물의 경화제로는 자일록(Xylok) 경화제를 에폭시 수지 100중량부에 대하여 20∼100중량부 사용한다. 20중량부 미만으로 사용하게 되면 경화반응이 충분히 일어나지 않아 성형이 이루어지지 않고 물성이 현저히 저하되며, 100중량부를 초과하면 봉지재 내에 잔류물이 형성되어 신뢰성에 불량이 발생하게 되고 불필요한 원가상승의 원인이 된다.As a hardening | curing agent of the resin composition of this invention, 20-100 weight part of Xylok hardening | curing agents are used with respect to 100 weight part of epoxy resins. If the amount is less than 20 parts by weight, the curing reaction does not occur sufficiently, so that the molding is not performed and the physical properties are significantly lowered. If the amount is more than 100 parts by weight, residues are formed in the encapsulant, resulting in poor reliability and unnecessary cost increase. Becomes
본 발명의 에폭시 수지 조성물에서 에폭시 수지와 경화제 사이의 경화반응을 촉진하기 위해서는 경화 촉진제를 첨가하는 것이 바람직하다. 경화 촉진제의 예들은 벤질디메틸아민, 트리에탄올아민, 트리에틸렌디아민, 디메틸아미노에탄올, 트리(디메틸아미노메틸)페놀 등의 3급 아민류, 2-메틸이미다졸, 2-페닐이미다졸 등의 이미다졸류, 트리페닐포스핀, 디페닐포스핀, 페닐포스핀 등의 유기 포스핀류, 테트라페닐포스포니움 테트라페닐보레이트, 트리페닐포스핀 테트라페닐보레이트 등의 테트라페닐보론염 등을 포함한다. 본 발명에서 상술한 바와 같은 경화 촉진제는 1종 또는 2종 이상을 병용해도 좋은데, 바람직하기로는 트리페닐포스핀(Triphenylphosphine)을 단독 또는 경화제와 혼합, 용융하여 멜트마스타배치(MMB)를 만들어 사용하는 것이 좋으며, 그 함량은 에폭시 수지 100중량부에 대하여 0.02∼2.5중량부인 것이 바람직하다. 경화촉진제를 2.5중량부를 초과하여 사용할 경우 경화 반응에 이상이 생겨 물성이 저하되고, 0.02중량부 미만으로 사용할 경우 경화 반응의 촉진 효과가 나타나지 않는다.In order to accelerate the curing reaction between the epoxy resin and the curing agent in the epoxy resin composition of the present invention, it is preferable to add a curing accelerator. Examples of curing accelerators are imides such as benzyldimethylamine, triethanolamine, triethylenediamine, dimethylaminoethanol, tertiary amines such as tri (dimethylaminomethyl) phenol, 2-methylimidazole, and 2-phenylimidazole. Organic phosphines such as sol, triphenylphosphine, diphenylphosphine, phenylphosphine, tetraphenylboron salts such as tetraphenylphosphonium tetraphenylborate, triphenylphosphine tetraphenylborate and the like. In the present invention, the curing accelerator as described above may be used alone or in combination of two or more, preferably triphenylphosphine alone or mixed with a curing agent to melt to form a melt master batch (MMB). The content is preferably 0.02 to 2.5 parts by weight based on 100 parts by weight of the epoxy resin. If the curing accelerator is used in excess of 2.5 parts by weight, abnormalities occur in the curing reaction, and the physical properties are lowered. If the curing accelerator is used at less than 0.02 parts by weight, the effect of promoting the curing reaction does not appear.
본 발명의 에폭시 수지 조성물에서는 무기충전제를 첨가할 수 있는데, 무기충전제로는 일반적인 무기충전제를 대부분 사용할 수 있지만, 그 평균입도가 0.1∼40㎛인 고순도 용융 또는 합성 실리카를 사용하는 것이 바람직하고 충전량은 에폭시 수지 조성물에 대해 74∼90중량%를 사용하는 것이 좋다. 무기충전제를 74중량% 미만의 양으로 사용할 경우에는 충분한 강도를 얻기 어려우며 수분 흡수로 인한 알루미늄 패드 부식이 일어날 가능성이 높고, 90중량%을 초과할 경우 유동성이 좋지 않아서 반도체 조립시 성형성에서 불량이 발생할 가능성이 높다.In the epoxy resin composition of the present invention, an inorganic filler may be added. Although most inorganic fillers may be used as the inorganic filler, it is preferable to use high purity molten or synthetic silica having an average particle size of 0.1 to 40 μm. It is preferable to use 74 to 90% by weight based on the epoxy resin composition. If the inorganic filler is used in an amount of less than 74% by weight, it is difficult to obtain sufficient strength, and it is highly likely to cause corrosion of the aluminum pad due to moisture absorption. If the inorganic filler exceeds 90% by weight, the fluidity is poor, so that moldability during semiconductor assembly is poor. It is likely to occur.
또한 본 발명의 반도체 소자 봉지형 에폭시 수지 조성물에는 상기 성분 이외에도 표면처리제, 착색제, 이형제, 가소성 부여제 등이 필요에 따라 첨가될 수 있다.In addition to the above components, a surface treatment agent, a colorant, a mold releasing agent, a plasticizer and the like may be added to the semiconductor element encapsulated epoxy resin composition of the present invention as needed.
본 발명에서 가소성 부여제로는 통상적으로 실리콘 고무나 에폭시 변성 실리콘 오일을 사용할 수 있고, 이형제로서는 고급 지방산, 고급 지방산 금속염, 에스테르계 왁스 등을 사용할 수 있다. 이 밖에 착색제로는 카본블랙, 유·무기염료 등을 사용할 수 있다.In the present invention, a plasticizer may be generally used a silicone rubber or epoxy modified silicone oil, and as the release agent, higher fatty acids, higher fatty metal salts, ester waxes, and the like may be used. In addition, carbon black, an organic or inorganic dye, etc. can be used as a coloring agent.
본 발명의 반도체 봉지형 에폭시 수지 조성물은 일반적으로 소정의 배합량의 각 성분들을 헨셀믹서나 뢰디게 믹서를 이용하여 1차로 균일하게 혼합한 뒤, 롤밀이나 니이더를 이용하여 용융 혼련하고나서 냉각시키고 분쇄기를 이용하여 분쇄함으로써 최종 분말 제품을 수득하는 방법으로 제조될 수 있다.In general, the semiconductor encapsulated epoxy resin composition of the present invention is uniformly mixed with each component of a predetermined amount by a Henschel mixer or a Rodige mixer, and then melt-kneaded using a roll mill or a kneader, and then cooled and pulverized. It can be prepared by the method of obtaining the final powder product by grinding using.
본 발명의 에폭시 수지 조성물을 사용하여 반도체 소자를 봉지하는 방법으로는 저압 트랜스퍼 성형법이 가장 일반적으로 사용되는 방법이나, 사출성형법(Injection Molding) 또는 캐스팅(Casting) 등의 방법으로도 성형할 수 있다.As a method of encapsulating a semiconductor device using the epoxy resin composition of the present invention, a low pressure transfer molding method is most commonly used, but it can also be molded by an injection molding method or a casting method.
이하 본 발명을 실시예에 의거 상세히 설명하나, 본 발명이 하기 실시예에 의해 한정되는 것은 아니다.Hereinafter, the present invention will be described in detail with reference to Examples, but the present invention is not limited by the following Examples.
실시예 1Example 1
하기 표 1에 나타낸 바와 같은 조성으로 각 성분들을 평량한 뒤, 헨셀 믹서를 이용하여 균일하게 혼합하여 분말 상태의 1차 조성물을 제조하고, 이어서 상기 1차 조성물을 믹싱하고 2-롤밀을 이용하여 100℃에서 7분간 용융혼련하여 공기 중에서 냉각시킨 후 후드 믹서를 사용 분쇄하여 최종의 에폭시 수지 조성물을 제조하였다.After weighing each component with a composition as shown in Table 1 below, the mixture was uniformly mixed using a Henschel mixer to prepare a primary composition in a powder state, and then the primary composition was mixed and 100 using a 2-roll mill. After melt-kneading at 7 ° C. for cooling in air, the resultant was ground using a hood mixer to prepare a final epoxy resin composition.
이렇게 하여 수득된 에폭시 수지 조성물에 대해 UL94 시험법인 수직난연실험법으로 난연성을 측정하였고, 스파이럴 플로우와 겔타임 및 부착강도를 측정하였으며, 굴곡실험용 몰드를 사용하여 시험편을 제작, 175℃에서 6시간 동안 포스트큐어(postcure)한 후에 유리전이온도를 측정하였다. 그리고 스파이럴 플로우 몰드로 샘플을 만들어 막자사발 및 믹서를 사용, 미세하게 파우더로 만들고 샘플 2g에 증류수 80㎖를 넣어 100℃에서 24시간 오븐에 가열 환류시킨 후 전기전도도를 측정하였고, 50/44TSOP에 조립시편을 만들어 스티킹(Sticking)회수와 틸트(tilt)와 같은 성형성을 평가하였으며 후경화한 후 85℃/상대습도 85%의 항온항습 조건에서 각각 168시간 동안 처리하여 흡습율을 평가하였고 또한 조립시편을 IR 리플로우(reflow)에서 245℃, 10초 동안 통과시킨 다음 121℃/상대습도 100%의 프레셔 쿠커 테스트(pressure cooker test, PCT)를 사용하여 168시간 동안 처리한 후 칩 패드의 부식 발생상태를 평가하였다. 모든 측정결과를 표 1에 나타내었다.The epoxy resin composition thus obtained was measured for flame retardancy by a vertical flame retardancy test, which is a UL94 test method, spiral flow, gel time, and adhesive strength were measured. A test piece was prepared using a bending test mold, and the post was made at 175 ° C. for 6 hours. After curing, the glass transition temperature was measured. After making a sample with a spiral flow mold, using a mortar and mixer, finely powdered, 80 ml of distilled water was added to 2 g of the sample, heated at reflux for 24 hours in an oven at 100 ° C., and then the electrical conductivity was measured and assembled to 50/44 TSOP. The specimens were made and evaluated for moldability such as sticking recovery and tilt. After curing, the moisture absorption rate was evaluated by 168 hours at 85 ° C / 85% RH. The specimens were passed through IR reflow for 245 ° C for 10 seconds and then treated for 168 hours using a pressure cooker test (PCT) at 121 ° C / 100% RH, resulting in corrosion of the chip pads. The condition was evaluated. All measurement results are shown in Table 1.
실시예 2Example 2
적인과 인산에스테르의 총합을 0.5중량%로 하고, 무기계 난연보조제인 징크보레이트(Borax사)를 0.5중량% 사용한 것을 제외하고는 실시예 1과 동일하게 실시하고 그 측정결과를 표 1에 나타내었다.The total of phosphorus and phosphate esters was 0.5% by weight, and the same procedure as in Example 1 was carried out except that 0.5% by weight of zinc borate (Borax), an inorganic flame retardant aid, was used and the measurement results are shown in Table 1.
실시예 3Example 3
적인과 인산에스테르의 총합을 0.5중량%로 하고, 무기계 난연보조제인 수산화알루미늄을 0.5중량% 사용한 것을 제외하고는 실시예 1과 동일하게 실시하고 그 측정결과를 표 1에 나타내었다.The total of red and phosphate esters was 0.5% by weight, except that 0.5% by weight of aluminum hydroxide, an inorganic flame retardant aid, was used in the same manner as in Example 1, and the measurement results are shown in Table 1.
실시예 4Example 4
적인과 인산에스테르의 총합을 0.5중량%로 하고, 무기계 난연보조제인 수산화마그네슘을 0.5중량% 사용한 것을 제외하고는 실시예 1과 동일하게 실시하고 그 측정결과를 표 1에 나타내었다.The total of phosphorus and phosphate esters was 0.5% by weight, except that 0.5% by weight of magnesium hydroxide, an inorganic flame retardant aid, was used in the same manner as in Example 1, and the measurement results are shown in Table 1.
비교예 1Comparative Example 1
적인과 인산에스테르의 총합을 0.5중량%로 하고, 할로겐계 난연제인 브롬화에폭사이드 0.5중량%와 삼산화안티몬 0.5중량%를 사용한 것을 제외하고는 실시예 1과 동일하게 실시하고 그 측정결과를 표 2에 나타내었다.The total of phosphorus and phosphate ester was 0.5% by weight, and the same procedure as in Example 1 was carried out except that 0.5% by weight of brominated epoxide bromide and 0.5% by weight of antimony trioxide were used. Shown in
비교예 2Comparative Example 2
자일록 경화제 대신 페놀노볼락 경화제를 사용한 것을 제외하고는 실시예 1과 동일하게 실시하고 그 측정결과를 표 2에 나타내었다.Except for using a phenol novolak curing agent instead of a xyloco hardener was carried out in the same manner as in Example 1 and the measurement results are shown in Table 2.
비교예 3Comparative Example 3
적인과 인산에스테르의 총합을 0.5중량%로 하고, 자일록 경화제 대신 페놀노볼락 경화제를 사용하였으며, 난연보조제로 징크보레이트 0.5중량%를 사용하고. 커플링 에이전트를 무기계 난연 보조제에 코팅 처리하지 않고 직투입하여 사용한 것을 제외하고는 실시예 1과 동일하게 실시하고 그 측정결과를 표 2에 나타내었다.The total amount of red phosphorus and phosphate ester was 0.5% by weight, and a phenol novolac curing agent was used instead of the xylox curing agent, and 0.5% by weight of zinc borate was used as a flame retardant aid. The coupling agent was applied in the same manner as in Example 1 except that the coupling agent was directly added without coating the inorganic flame retardant and the measurement results are shown in Table 2.
(단위:중량%)(Unit: weight%)
(단위:중량%)(Unit: weight%)
본 발명의 비할로겐계 난연제와 자일록 경화제를 함유한 반도체 소자 봉지용 에폭시 수지 조성물은 전기전도도, 성형성, 틸트 등의 물성에서 우수한 것은 물론 부식을 발생시키지 않으므로, 인체와 반도체 장치에 해로운 영향을 끼치지 않는 반도체 소자 봉지제를 제공할 수 있다.The epoxy resin composition for semiconductor element encapsulation containing the non-halogen flame retardant and the xylox curing agent of the present invention is excellent in physical properties such as electrical conductivity, formability, tilt, and the like, and does not cause corrosion. A semiconductor element sealing agent which does not interfere can be provided.
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KR100407209B1 (en) * | 2000-12-06 | 2003-11-28 | 제일모직주식회사 | Epoxy resin composition for encapsulating semiconductor device |
KR100497065B1 (en) * | 1999-08-09 | 2005-06-23 | 제일모직주식회사 | Epoxy resin composition for semiconductor encapsulant |
KR100599865B1 (en) * | 2004-05-04 | 2006-07-13 | 제일모직주식회사 | Epoxy resin composition for sealing Semiconductor device |
KR100843874B1 (en) * | 2005-04-28 | 2008-07-03 | 다테호 가가쿠 고교 가부시키가이샤 | Magnesium hydroxide particle, manufacturing method thereof and resin composition containing the particle |
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KR100384273B1 (en) * | 1995-12-30 | 2003-11-20 | 고려화학 주식회사 | Epoxy resin composition for semiconductor device package |
KR100201708B1 (en) * | 1997-06-16 | 1999-06-15 | 유현식 | Epoxy resin composition for encapsulation of semiconductor |
KR19990001511A (en) * | 1997-06-16 | 1999-01-15 | 박홍기 | Epoxy Resin Compositions for Semiconductor Device Sealing |
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KR100497065B1 (en) * | 1999-08-09 | 2005-06-23 | 제일모직주식회사 | Epoxy resin composition for semiconductor encapsulant |
KR100407209B1 (en) * | 2000-12-06 | 2003-11-28 | 제일모직주식회사 | Epoxy resin composition for encapsulating semiconductor device |
KR100599865B1 (en) * | 2004-05-04 | 2006-07-13 | 제일모직주식회사 | Epoxy resin composition for sealing Semiconductor device |
KR100843874B1 (en) * | 2005-04-28 | 2008-07-03 | 다테호 가가쿠 고교 가부시키가이샤 | Magnesium hydroxide particle, manufacturing method thereof and resin composition containing the particle |
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