KR100407209B1 - Epoxy resin composition for encapsulating semiconductor device - Google Patents
Epoxy resin composition for encapsulating semiconductor device Download PDFInfo
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- KR100407209B1 KR100407209B1 KR10-2000-0073743A KR20000073743A KR100407209B1 KR 100407209 B1 KR100407209 B1 KR 100407209B1 KR 20000073743 A KR20000073743 A KR 20000073743A KR 100407209 B1 KR100407209 B1 KR 100407209B1
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- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
- C08L63/04—Epoxynovolacs
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/40—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
- C08G59/4007—Curing agents not provided for by the groups C08G59/42 - C08G59/66
- C08G59/4014—Nitrogen containing compounds
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- C08K5/00—Use of organic ingredients
- C08K5/54—Silicon-containing compounds
- C08K5/541—Silicon-containing compounds containing oxygen
- C08K5/5415—Silicon-containing compounds containing oxygen containing at least one Si—O bond
- C08K5/5419—Silicon-containing compounds containing oxygen containing at least one Si—O bond containing at least one Si—C bond
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- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K9/00—Use of pretreated ingredients
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
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- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
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- C08L2201/00—Properties
- C08L2201/02—Flame or fire retardant/resistant
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Abstract
본 발명은 반도체 소자 밀봉용 에폭시 수지 조성물에 관한 것으로, 보다 상세하게는The present invention relates to an epoxy resin composition for sealing semiconductor elements, more specifically
(1)하기 화학식 1의 다방향족 에폭시 수지 5.0~15.0중량%,(1) 5.0-15.0 wt% of the multi-aromatic epoxy resin of the following formula (1),
(2)하기 화학식 2의 아미노 트리아진 노볼락 경화제,(2) an amino triazine novolac curing agent of Formula 2,
하기 화학식 3의 인변성 페놀 노볼락 경화제 또는 그들의 혼합물Phosphorus-modified phenol novolac curing agents of formula 3 or mixtures thereof
2.0~8.0중량%,2.0-8.0 wt%,
(3)하기 화학식 4의 적인 및 하기 화학식 5의 실리콘 화합물이(3) a silicone compound of Formula 4 and Formula 5
혼합된 비할로겐계 난연제 0.1~2.5중량%,0.1-2.5% by weight of mixed non-halogen-based flame retardant,
(4)커플링제 0.2~0.6중량%,(4) 0.2-0.6 weight% of coupling agents,
(5)경화 촉진제 0.1~0.3중량% 및(5) 0.1 to 0.3% by weight curing accelerator and
(6)무기 충전제 74.0~90.0중량%(6) Inorganic filler 74.0-90.0 weight%
를 포함하는 반도체 소자 밀봉용 에폭시 수지 조성물에 관한 것이며, 본 발명의 에폭시 수지 조성물은 연소시 인체 및 환경에 유해한 부산물을 발생시키는 난연제를 사용하지 않고서도 우수한 난연성을 달성할 수 있으며, 이외에도 내습성, 내열성 및 성형성이 우수한 이점을 갖는다.It relates to an epoxy resin composition for sealing a semiconductor device comprising, the epoxy resin composition of the present invention can achieve excellent flame resistance without using a flame retardant that generates by-products harmful to humans and the environment during combustion, in addition to moisture resistance, It has the advantage of excellent heat resistance and moldability.
(상기 화학식중 n은 0~7임)(N in the formula is 0-7)
(상기 화학식중 n은 0~7임)(N in the formula is 0-7)
(상기 화학식중 R은 아미노기 함유 폴리에테르기이고, m 및 n은 각각 1~100임)(Wherein R is an amino group-containing polyether group and m and n are each 1-100)
Description
본 발명은 반도체 소자 밀봉용 에폭시 수지 조성물에 관한 것으로, 보다 상세하게는 비할로겐계 난연제로 적인 및 실리콘 화합물을 포함하는 난연성이 우수한 반도체 소자 밀봉용 에폭시 수지 조성물에 관한 것이다.The present invention relates to an epoxy resin composition for sealing semiconductor elements, and more particularly, to an epoxy resin composition for sealing semiconductor elements excellent in flame retardancy comprising a silicone compound and a non-halogen flame retardant.
일반적으로 반도체 소자 밀봉용 소재의 난연성은 UL 94 V-0 정도로 요구되고 있다. 이와 같은 난연성을 확보하기 위하여 보통 난연제로서 브롬이나 염소계의 할로겐계 난연제와 난연성 상승효과가 뛰어난 삼산화안티몬(Sb203)이 많이 사용되고 있는 실정이다.In general, the flame retardancy of the semiconductor element sealing material is required to be about UL 94 V-0. In order to secure such flame retardancy, bromine or chlorine-based halogen flame retardants and antimony trioxide (Sb 2 0 3 ) having excellent synergistic effects are widely used as flame retardants.
그러나 할로겐계 난연제 또는 삼산화안티몬을 포함하는 에폭시 수지 조성물은 소각시 또는 화재시에 다이옥신이나 다이퓨란 등의 유독성 발암 물질이 발생된다는 문제점이 있다. 특히, 할로겐계 난연제를 포함하는 에폭시 수지 조성물의 연소시 발생하는 HBr 및 HCl 등의 가스는 인체에 유독하며, 반도체 칩이나 리드 프레임의 부식을 초래한다는 문제점을 가지고 있다.However, an epoxy resin composition containing a halogen-based flame retardant or antimony trioxide has a problem in that toxic carcinogens such as dioxins and difuran are generated during incineration or fire. In particular, gases such as HBr and HCl generated during combustion of an epoxy resin composition containing a halogen-based flame retardant are toxic to humans and have a problem of causing corrosion of semiconductor chips or lead frames.
따라서 상기의 문제점들을 해결할 수 있는 난연성 반도체 소자 밀봉용 소재의 개발이 시급한 실정이다.Therefore, it is urgent to develop a flame retardant semiconductor element sealing material that can solve the above problems.
본 발명의 목적은 상기와 같은 종래 기술의 문제점들을 해결하기 위한 것으로, 비할로겐계 난연제로 적인 및 실리콘 화합물을 혼합하여 사용함으로써, 인체 및 환경에 유해한 부산물의 발생 우려가 없으면서도 우수한 난연성을 달성한 반도체 소자 밀봉용 에폭시 수지 조성물을 제공하는 것이다.An object of the present invention is to solve the problems of the prior art as described above, by using a non-halogen-based flame retardant mixed with a silicon compound, to achieve excellent flame retardancy without fear of generation of by-products harmful to humans and the environment It is providing the epoxy resin composition for semiconductor element sealing.
즉, 본 발명은That is, the present invention
(1)하기 화학식 1의 다방향족 에폭시 수지 5.0~15.0중량%,(1) 5.0-15.0 wt% of the multi-aromatic epoxy resin of the following formula (1),
(2)하기 화학식 2의 아미노 트리아진 노볼락 경화제,(2) an amino triazine novolac curing agent of Formula 2,
하기 화학식 3의 인변성 페놀 노볼락 경화제 또는 그들의 혼합물Phosphorus-modified phenol novolac curing agents of formula 3 or mixtures thereof
2.0~8.0중량%,2.0-8.0 wt%,
(3)하기 화학식 4의 적인 및 하기 화학식 5의 실리콘 화합물이(3) a silicone compound of Formula 4 and Formula 5
혼합된 비할로겐계 난연제 0.1~2.5중량%,0.1-2.5% by weight of mixed non-halogen-based flame retardant,
(4)커플링제 0.2~0.6중량%,(4) 0.2-0.6 weight% of coupling agents,
(5)경화 촉진제 0.1~0.3중량% 및(5) 0.1 to 0.3% by weight curing accelerator and
(6)무기 충전제 74.0~90.0중량%(6) Inorganic filler 74.0-90.0 weight%
를 포함하는 반도체 소자 밀봉용 에폭시 수지 조성물을 제공한다.It provides an epoxy resin composition for sealing a semiconductor device comprising a.
[화학식 1][Formula 1]
(상기 화학식중 n은 0~7임)(N in the formula is 0-7)
[화학식 2][Formula 2]
[화학식 3][Formula 3]
(상기 화학식중 n은 0~7임)(N in the formula is 0-7)
[화학식 4][Formula 4]
[화학식 5][Formula 5]
(상기 화학식중 R은 아미노기 함유 폴리에테르기이고, m 및 n은 각각 1~100임)(Wherein R is an amino group-containing polyether group and m and n are each 1-100)
이하에서 본 발명을 보다 상세하게 설명한다.Hereinafter, the present invention will be described in more detail.
본 발명의 반도체 밀봉용 에폭시 수지 조성물은 다방향족 에폭시 수지, 경화제, 비할로겐계 난연제, 커플링제, 경화촉진제 및 무기 충전제를 포함하는데, 이하 각각의 구성 성분에 대하여 더욱 상세히 설명하면 다음과 같다.The epoxy resin composition for semiconductor encapsulation of the present invention includes a polyaromatic epoxy resin, a curing agent, a non-halogen flame retardant, a coupling agent, a curing accelerator, and an inorganic filler, which will be described in more detail below with respect to each component.
본 발명에서 사용된 다방향족(multi-aromatic) 에폭시 수지(이하 성분(1)이라 칭함)는 에폭시기 당량이 250~300이고 하기 화학식 1의 구조를 갖는다.The multi-aromatic epoxy resin (hereinafter, referred to as component (1)) used in the present invention has an epoxy group equivalent of 250 to 300 and has a structure represented by the following formula (1).
[화학식 1][Formula 1]
(상기 화학식중 n은 0~7임)(N in the formula is 0-7)
상기 성분(1)은 페놀 골격을 기본으로 하여 중간에 바이페닐기를 가지고 있는 구조로 되어 있기 때문에, 수분 흡수율이 낮고 인성이 우수하며 내산화성이 좋고 접착력이 우수하다. 또한 상기 성분(1)은 가교 밀도가 낮아서 착화시 고온에서 고무 형태의 발포층이 형성된다. 이와 같은 가교 구조에 의한 다방향족 구조의 내열분해성과 발포층의 안정성에 의해서 난연성이 확보되는 것으로 파악되고 있다.Since the said component (1) has a structure which has a biphenyl group in the middle based on a phenol skeleton, it has low water absorption rate, excellent toughness, oxidation resistance, and excellent adhesive force. In addition, the component (1) has a low crosslinking density, so that a foamed layer in the form of a rubber is formed at a high temperature during ignition. It is understood that flame retardance is ensured by the thermal decomposition resistance of the multi-aromatic structure and the stability of the foam layer by such a crosslinked structure.
상기 성분(1)의 함량은 전체 조성물에 대하여 5.0~15.0중량%인 것이 바람직하며, 상기 범위를 벗어나면 본 발명의 목적을 달성할 수 없다.The content of the component (1) is preferably 5.0 to 15.0% by weight based on the total composition, it can not achieve the object of the present invention outside the above range.
본 발명에서 사용된 경화제(이하 성분(2)라 칭함)는 하기 화학식 2의 아미노 트리아진 노볼락 경화제 및 하기 화학식 3의 인변성 페놀 노볼락 경화제를 혼합한 것이다.The curing agent (hereinafter referred to as component (2)) used in the present invention is a mixture of an amino triazine novolac curing agent of the following formula (2) and a modified phenol novolak curing agent of the following formula (3).
[화학식 2][Formula 2]
[화학식 3][Formula 3]
(상기 화학식중 n은 0~7임)(N in the formula is 0-7)
상기 성분(2)중 아미노 트리아진 노볼락 경화제는 트리아진 고리와 아미노 관능기의 형태로 질소를 포함하고 있으며, 열안정성, 내습성 및 구리 리드 프레임과의 접착력이 우수한 특징을 갖는다. 상기 아미노 트리아진 노볼락 경화제는 연소시 상기 성분(1)과 반응하여 발포층을 형성하며, 상기 발포층에 의하여 주변의 산소 및 연소열의 전달이 차단됨으로써 난연성이 확보된다.The amino triazine novolac curing agent in component (2) contains nitrogen in the form of a triazine ring and an amino functional group, and has excellent thermal stability, moisture resistance, and adhesion to a copper lead frame. The amino triazine novolac curing agent reacts with the component (1) upon combustion to form a foam layer, and the flame layer ensures flame retardancy by blocking the transfer of surrounding oxygen and combustion heat.
이와 같이 상기 성분(1)과 상기 아미노 트리아진 노볼락 경화제에 의하여 어느 정도의 난연성이 확보되지만, 본 발명에서는 난연성을 더욱 보강하기 위해서 인변성 페놀 노볼락 경화제를 상기 트리아진 노볼락 경화제와 함께 혼합하여 사용할 수 있다. 상기 인변성 페놀 노볼락 경화제는 기존의 페놀 노볼락 경화제에 인을 함유한 형태의 경화제로서 내산화성, 내후성, 내열성 및 난연성이 우수한 특징을 갖는다.Thus, although the flame retardance to some extent is ensured by the said component (1) and the said amino triazine novolak hardener, in order to further strengthen a flame retardance, in this invention, a modified phenol novolak hardener is mixed with the said triazine novolak hardener. Can be used. The modified phenol novolac curing agent is a curing agent in the form of phosphorus in the existing phenol novolak curing agent has excellent characteristics of oxidation resistance, weather resistance, heat resistance and flame retardancy.
상기 성분(2)의 함량은 전체 조성물에 대하여 2.0~8.0중량%인 것이 바람직하다. 상기 함량이 2.0중량% 미만일 경우에는 경화 반응이 충분히 수행되지 이루어 지지 않고 물성이 현저하게 저하되어 좋지 않으며, 8.0중량%를 초과하는 경우에는 밀봉 소재내에 잔류물이 형성되어 신뢰성이 저하되고 비경제적이므로 좋지 않다.The content of the component (2) is preferably 2.0 to 8.0% by weight based on the total composition. When the content is less than 2.0% by weight, the curing reaction may not be sufficiently performed, and the physical properties may be remarkably lowered. If the content is more than 8.0% by weight, residues are formed in the sealing material, so that the reliability is lowered and it is uneconomical. Not good.
본 발명에서 사용된 비할로겐계 난연제(이하 성분(3)이라 칭함)는 하기 화학식 4의 구조를 갖는 적인 및 하기 화학식 5의 실리콘 화합물을 혼합한 것이다.The non-halogen-based flame retardant (hereinafter referred to as component (3)) used in the present invention is a mixture of a silicon compound of the formula (5) having a structure of the following formula (4).
[화학식 4][Formula 4]
[화학식 5][Formula 5]
(상기 화학식중 R은 아미노기 함유 폴리에테르기이고, m 및 n은 각각 1~100임)(Wherein R is an amino group-containing polyether group and m and n are each 1-100)
상기 성분(3) 중 적인은 인(P)원소 단독으로 이루어진 화합물로서 미량으로도 우수한 난연 효과를 얻을 수 있으나, 수분의 양과 온도가 상승하면 산소산과 포스핀을 서서히 방출하는 것으로 알려져 있다. 따라서 본 발명에서는 통상의 것 대신에 적인에 페놀 수지와 수산화 알루미늄을 미세 코팅한 것(FE-140; 인 화학 社)을 사용하였으며, 이와 같은 적인은 경화물에 대한 추출수 전기 전도도 및 내습성이 우수한 것이 특징이다.Among the components (3), the intermediate is a compound composed of phosphorus (P) element alone, but excellent flame retardant effect can be obtained even in a small amount, but it is known that the oxygen acid and phosphine are gradually released when the amount of water and the temperature increase. Therefore, in the present invention, instead of the conventional one, a fine coating of phenol resin and aluminum hydroxide (FE-140; Phosphorus Chemical Co., Ltd.) was used. It is excellent.
본 발명에서는 보다 우수한 난연성을 확보하기 위하여, 비할로겐계 난연제로서 상기 적인과 함께 실리콘 화합물을 병용하였다. 상기 실리콘 화합물은 아미노기를 함유한 폴리에테르 변성 폴리실록산 화합물로서 접착제 등으로 널리 사용되고 있는 안정성이 높은 화합물이며, 난연성 뿐만 아니라 반도체 조립시 성형성 및 신뢰성이 우수한 것이 특징이다.In the present invention, in order to ensure more flame retardancy, a silicone compound was used together with the above as a non-halogen flame retardant. The silicone compound is an amino group-containing polyether-modified polysiloxane compound, which is widely used as an adhesive and has high stability, and is characterized by not only flame retardancy but also excellent moldability and reliability when assembling semiconductors.
상기 성분의 함량은 전체 조성물에 대해서 0.1~2.5중량%인 것이 바람직하며, 상기 범위를 벗어나면 본 발명의 목적을 달성할 수 없다.The content of the component is preferably 0.1 to 2.5% by weight based on the total composition, it can not achieve the object of the present invention outside the above range.
본 발명에서 커플링제(이하 성분(4)라 칭함)로서는 아민계 실란 화합물이 사용되었다. 상기 성분(4)의 함량은 전체 조성물에 대해서 0.2~0.6중량%인 것이 바람직한다. 상기 함량이 0.2중량% 미만일 경우에는 조성물의 분산성이 떨어져서 니딩(kneading)시 겔이 발생하여 반도체 조립시 성형성이 저하되므로 좋지 않다.In the present invention, as the coupling agent (hereinafter referred to as component (4)), an amine silane compound was used. The content of the component (4) is preferably 0.2 to 0.6% by weight based on the total composition. When the content is less than 0.2% by weight, the dispersibility of the composition is inferior, so that a gel is generated when kneading, and thus moldability is degraded when assembling the semiconductor.
본 발명에서 경화촉진제(이하 성분(5)라 칭함)로서는 인계 촉매인 TPP(triphenylphosphine; 트리페닐포스핀)를 사용하였다. 상기 성분(5)는 단독으로 사용되거나, 또는 경화제와 혼합 용융시켜 멜트 마스타베치(Melt Master Batch)를 만들어 사용될 수 있다. 상기 성분(5)의 함량은 전체 조성물에 대해서 0.1~0.3중량%인 것이 바람직하다. 상기 함량이 0.1중량% 미만일 경우에는 본 발명의 목적을 달성하기 어려우므로 좋지 않고, 0.3중량%를 초과할 경우에는 경화 반응에 이상이 생겨서 물성이 저하될 수 있으므로 좋지 않다. 상기 경화촉진제의 함량은 본 발명의 에폭시 수지 조성물의 사용 조건에 따라서 정해진 함량 범위내에서 조절 가능하다.In the present invention, as a curing accelerator (hereinafter referred to as component (5)), TPP (triphenylphosphine; triphenylphosphine) which is a phosphorus catalyst was used. The component (5) may be used alone, or may be used by mixing and melting with a curing agent to form a melt master batch. The content of the component (5) is preferably 0.1 to 0.3% by weight based on the total composition. When the content is less than 0.1% by weight it is not good because it is difficult to achieve the object of the present invention, when the content is more than 0.3% by weight is not good because an abnormality in the curing reaction may be lowered. The content of the curing accelerator can be adjusted within a predetermined content range according to the conditions of use of the epoxy resin composition of the present invention.
본 발명에서 무기 충전제(이하 성분(6)이라 칭함)로서는 평균 입도가 0.1~40㎛인 용융 실리카를 사용하였다. 상기 성분(6)의 함량은 전체 조성물에 대해서 74.0~90.0중량%인 것이 바람직하다. 상기 함량이 74.0중량% 미만일 경우에는 충분한 강도를 얻기 어려울 뿐만 아니라 수분 흡수로 인하여 알루미늄 패드가 부식될 가능성이 높아져서 좋지 않고, 90.0중량%를 초과하는 경우에는 유동성이 떨어짐으로 인하여 성형성이 불량해져서 좋지 않다.In the present invention, as the inorganic filler (hereinafter referred to as component (6)), fused silica having an average particle size of 0.1 to 40 µm was used. The content of the component (6) is preferably 74.0 to 90.0% by weight based on the total composition. When the content is less than 74.0% by weight, not only is it difficult to obtain sufficient strength, but it is not good to increase the possibility of corrosion of the aluminum pad due to moisture absorption, and when it exceeds 90.0% by weight, the moldability is poor due to the poor fluidity. not.
상기 성분(6)을 직접 투입할 경우 혼합시 분산이 잘되지 않고 다른 성분들과의 상용성도 좋지 않기 때문에 반도체 조립시 성형성이 불량해진다는 문제점이 있다. 따라서 본 발명에서는 상기 성분(4)의 커플링제를 상기 성분(6)의 무기 충전제에 코팅시켜 사용함으로써 그러한 문제점을 해결하였다.When the component 6 is directly added, there is a problem in that moldability is poor when assembling a semiconductor because dispersion is not well performed when mixing and compatibility with other components is not good. Therefore, in the present invention, such a problem is solved by coating and using the coupling agent of the component (4) to the inorganic filler of the component (6).
또한, 본 발명의 에폭시 수지 조성물에는 상기 성분(1) 내지 성분(6) 이외에 착색제, 변성 실리콘 오일, 카르복실계 왁스, 에스테르계 왁스 및 응력 저감화제 등을 필요에 따라서 첨가할 수 있다.In addition to the components (1) to (6), colorants, modified silicone oils, carboxyl waxes, ester waxes, stress reducing agents and the like can be added to the epoxy resin composition of the present invention as necessary.
본 발명의 에폭시 수지 조성물은 상술한 성분들을 통상의 헨셀(Hanssel) 믹서 또는 뢰디게(Loedige) 믹서를 이용하여 균일하게 충분히 건식 혼합한 후, 롤밀(roll mill) 또는 니이더(kneader)로 용융혼련하고, 냉각 및 분쇄하는 공정을 거쳐 최종 타블렛 제품으로서 제조된다.In the epoxy resin composition of the present invention, the above-mentioned components are uniformly sufficiently dry mixed using a conventional Henssel mixer or Loedige mixer, and then melt kneaded with a roll mill or kneader. It is prepared as a final tablet product through a process of cooling, grinding and grinding.
이와 같이 제조된 에폭시 수지 조성물을 사용하여 반도체 소자를 밀봉하는 방법으로는 저압 트랜스퍼 성형법이 가장 일반적으로 사용되나, 인젝션(injection) 또는 캐스팅(casting) 등의 방법으로도 성형 가능하다.As a method of sealing a semiconductor device using the epoxy resin composition prepared as described above, a low pressure transfer molding method is most commonly used, but it can also be molded by injection or casting.
이하, 실시예를 통하여 본 발명을 보다 구체적으로 설명하고자 하나, 이러한 실시예들은 단지 설명의 목적을 위한 것으로 본 발명을 제한하는 것으로 해석되어서는 안된다.Hereinafter, the present invention will be described in more detail with reference to examples, but these examples are for illustrative purposes only and should not be construed as limiting the present invention.
실시예 1Example 1
표 1에 나타낸 각각의 성분들을 정확히 계량하여(오차 범위:±0.1%) 헨셀 믹서로 균일하게 혼합한 후, 2-롤밀(2-roll mill)을 사용하여 100℃에서 7분 동안 용융 혼련시키고 공기중에서 냉각시켰다. 냉각된 혼련물을 후드 믹서를 사용하여 분쇄시켜 에폭시 수지 조성물을 제조하였다. 이때 커플링제는 무기 충전제 상에 코팅된 형태로 투입되었다. 이렇게 하여 얻어진 에폭시 수지 조성물에 대해서 물성 평가를 하였으며 평가 결과를 하기 표 1에 나타내었다.Accurately weigh each component shown in Table 1 (error range: ± 0.1%), uniformly mix in a Henschel mixer, melt knead at 100 ° C. for 7 minutes using a 2-roll mill and air Cooled in the middle. The cooled kneaded mixture was ground using a hood mixer to prepare an epoxy resin composition. At this time, the coupling agent was added in a form coated on the inorganic filler. Physical properties were evaluated for the epoxy resin composition thus obtained, and the evaluation results are shown in Table 1 below.
실시예 2Example 2
아미노 트리아진 노볼락 경화제를 5.56중량%에서 3.84중량%로 감소시키는 대신 인변성 페놀 노볼락 경화제를 1.72중량% 추가하고, 적인을 0.32중량%에서 0.40중량%로 증가시킨 것을 제외하고는, 상기 실시예 1과 동일한 방법으로 에폭시 수지 조성물을 제조하였다. 이렇게 하여 얻어진 에폭시 수지 조성물에 대해서 물성 평가를 하였으며 평가 결과를 하기 표 1에 나타내었다.The above procedure was performed except that 1.72% by weight of a modified phenol novolac curing agent was added instead of reducing the amino triazine novolac curing agent from 5.56% by weight to 3.84% by weight, and the enemy was increased from 0.32% by weight to 0.40% by weight. An epoxy resin composition was prepared in the same manner as in Example 1. Physical properties were evaluated for the epoxy resin composition thus obtained, and the evaluation results are shown in Table 1 below.
실시예 3Example 3
아미노 트리아진 노볼락 경화제를 5.56중량%에서 4.38중량%로 감소시키는 대신 인변성 페놀 노볼락 경화제를 1.18중량% 추가하고, 적인을 0.32중량%에서 0.50중량%로 증가시킨 것을 제외하고는, 상기 실시예 1과 동일한 방법으로 에폭시 수지 조성물을 제조하였다. 이렇게 하여 얻어진 에폭시 수지 조성물에 대해서 물성 평가를 하였으며 평가 결과를 하기 표 1에 나타내었다.The above procedure was performed except that 1.18% by weight of a modified phenol novolac curing agent was added instead of reducing the amino triazine novolac curing agent from 5.56% by weight to 4.38% by weight, and the enemy was increased from 0.32% by weight to 0.50% by weight. An epoxy resin composition was prepared in the same manner as in Example 1. Physical properties were evaluated for the epoxy resin composition thus obtained, and the evaluation results are shown in Table 1 below.
실시예 4Example 4
아미노 트리아진 노볼락 경화제를 5.56중량%에서 4.91중량%로 감소시키는 대신 인변성 페놀 노볼락 경화제를 0.65중량% 추가하고, 적인을 0.32중량%에서 0.60중량%로 증가시킨 것을 제외하고는, 상기 실시예 1과 동일한 방법으로 에폭시 수지 조성물을 제조하였다. 이렇게 하여 얻어진 에폭시 수지 조성물에 대해서 물성 평가를 하였으며 평가 결과를 하기 표 1에 나타내었다.The above procedure was performed except that 0.65% by weight of a modified phenol novolac curing agent was added instead of reducing the amino triazine novolac curing agent from 5.56% by weight to 4.91% by weight, and an increase of 0.3% by weight from 0.62% by weight was performed. An epoxy resin composition was prepared in the same manner as in Example 1. Physical properties were evaluated for the epoxy resin composition thus obtained, and the evaluation results are shown in Table 1 below.
비교예 1Comparative Example 1
다방향족 에폭시 수지 대신에 오르쏘 크레졸 노볼락 수지를 6.40중량% 사용하고, 아미노 트리아진 노볼락 경화제 대신에 페놀 노볼락 경화제를 6.16중량% 사용한 것을 제외하고는, 상기 실시예 1과 동일한 방법으로 에폭시 수지 조성물을 제조하였다. 이렇게 하여 얻어진 에폭시 수지 조성물에 대해서 물성 평가를 하였으며 평가 결과를 하기 표 2에 나타내었다.Epoxy was prepared in the same manner as in Example 1, except that 6.40% by weight of ortho cresol novolac resin was used instead of the polyaromatic epoxy resin and 6.16% by weight of phenol novolac curing agent was used instead of the amino triazine novolac curing agent. A resin composition was prepared. Physical properties were evaluated for the epoxy resin composition thus obtained, and the evaluation results are shown in Table 2 below.
비교예 2Comparative Example 2
다방향족 에폭시 수지 대신에 오르쏘 크레졸 노볼락 수지를 6.90중량% 사용하고, 아미노 트리아진 노볼락 경화제를 5.56중량%에서 4.48중량%로 감소시키는 대신 인변성 노볼락 경화제를 1.18중량% 추가한 것을 제외하고는, 상기 실시예 1과 동일한 방법으로 에폭시 수지 조성물을 제조하였다. 이렇게 하여 얻어진 에폭시 수지 조성물에 대해서 물성 평가를 하였으며 평가 결과를 하기 표 2에 나타내었다.6.90% by weight of ortho cresol novolac resin was used in place of polyaromatic epoxy resin and 1.18% by weight of denatured novolac curing agent was added instead of reducing amino triazine novolac curing agent from 5.56% to 4.48% by weight. Then, an epoxy resin composition was prepared in the same manner as in Example 1. Physical properties were evaluated for the epoxy resin composition thus obtained, and the evaluation results are shown in Table 2 below.
비교예 3Comparative Example 3
다방향족 에폭시 수지를 7.00중량%에서 6.90중량%로 감소시키고, 아미노 트리아진 노볼락 경화제 대신에 페놀 노볼락 경화제 5.66중량%를 사용한 것을 제외하고는, 상기 실시예 1과 동일한 방법으로 에폭시 수지 조성물을 제조하였다. 이렇게 하여 얻어진 에폭시 수지 조성물에 대해서 물성 평가를 하였으며 평가 결과를 하기 표 2에 나타내었다.The epoxy resin composition was prepared in the same manner as in Example 1, except that the polyaromatic epoxy resin was reduced from 7.00% to 6.90% by weight, and 5.66% by weight of the phenol novolac curing agent was used instead of the amino triazine novolac curing agent. Prepared. Physical properties were evaluated for the epoxy resin composition thus obtained, and the evaluation results are shown in Table 2 below.
비교예 4Comparative Example 4
다방향족 에폭시 수지를 7.00중량%에서 7.84중량%로 증가시키고, 아미노 트리아진 노볼락 경화제 대신에 페놀 노볼락 경화제 5.34중량%를 사용하였으며, 비할로겐계 난연제를 사용하지 않은 것을 제외하고는, 상기 실시예 1과 동일한 방법으로 에폭시 수지 조성물을 제조하였다. 이렇게 하여 얻어진 에폭시 수지 조성물에 대해서 물성 평가를 하였으며 평가 결과를 하기 표 2에 나타내었다.The polyaromatic epoxy resin was increased from 7.00% to 7.84% by weight and 5.34% by weight of phenol novolac curing agent was used in place of the amino triazine novolac curing agent, except that a non-halogen-based flame retardant was not used. An epoxy resin composition was prepared in the same manner as in Example 1. Physical properties were evaluated for the epoxy resin composition thus obtained, and the evaluation results are shown in Table 2 below.
[물성 평가 방법][Property evaluation method]
* 스파이럴 플로우Spiral Flow
: EMMI 규격을 기준으로 금형을 제작하여 성형온도 175℃, 성형압력 70㎏f/㎠인 조건하에서 유동길이를 평가하였다.: Mold was manufactured based on EMMI standard and flow length was evaluated under molding condition of 175 ℃ and molding pressure of 70kgf / cm2.
* 유리전이온도* Glass transition temperature
: 굴곡 실험용 몰드를 사용하여 시험편을 제작한 후 175℃에서 6시간 동안 후경화시켜 측정하였다.: After the test piece was produced using the bending test mold, it was measured by post-curing at 175 ° C. for 6 hours.
* 난연성* Flame retardant
: UL94 실험법(수직 난연 실험법)으로 측정하였다.: It was measured by UL94 test method (vertical flame retardant test method).
* 성형성* Moldability
: 50/44TSOP(thin small outline package)에 조립 시편을 만들어 스티킹(sticking) 횟수 및 틸트를 평가하였다.: Assembled specimens were made in 50/44 TSOP (thin small outline package) to evaluate the number of sticking and the tilt.
* 흡습률* Moisture absorption rate
: 50/44TSOP에 조립 시편을 만들어 175℃에서 6시간 동안 후경화시킨 후, PCT(pressure cooker tester)로 2기압하, 120℃/100%RH의 항온항습 조건하에서 24시간 동안 처리한 다음 흡습률을 평가하였다.: Assembled specimens were made in 50/44 TSOP, post-cured at 175 ° C for 6 hours, treated with PCT (pressure cooker tester) for 2 hours at 120 ° C / 100% RH under constant temperature and humidity conditions, and then absorbed. Was evaluated.
* 부식발생* Corrosion
: 50/44TSOP에 조립 시편을 만들어 245℃에서 10초 동안 IR 리플로우(reflow)를 통과시켜 전처리하였다. 이어서, PCT로 121℃/100%RH의 항온항습 조건하에서 168 시간 동안 처리한 다음, 칩 패드의 부식발생 정도를 평가하였다. : Assembly specimens were made in 50/44 TSOP and pretreated by passing IR reflow for 10 seconds at 245 ° C. Subsequently, PCT was treated for 168 hours under constant temperature and humidity conditions of 121 ° C / 100% RH, and then the degree of corrosion of the chip pads was evaluated.
이상에서 상세히 설명한 바와 같이, 본 발명의 반도체 소자 밀봉용 에폭시 수지 조성물은 연소시 인체 및 환경에 유해하고 반도체 칩 및 리드 프레임의 부식을 초래하는 부산물을 발생시키는 할로겐계 난연제를 사용하지 않고도 우수한 난연성을 달성할 수 있다. 또한 본 발명의 에폭시 수지 조성물은 종래의 수지 조성물 보다 내습성, 내열성 및 성형성이 우수하다.As described in detail above, the epoxy resin composition for sealing a semiconductor device of the present invention has excellent flame retardancy without using a halogen-based flame retardant that generates by-products that are harmful to human body and environment during combustion and cause corrosion of semiconductor chips and lead frames. Can be achieved. Moreover, the epoxy resin composition of this invention is excellent in moisture resistance, heat resistance, and moldability compared with the conventional resin composition.
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