KR20000067665A - Method for loading/unloading device of shooting handler for burn-in tester and apparatus the same - Google Patents

Abstract

PURPOSE: A loading and unloading method is provided to obtain double work efficiency by making devices loaded or unloaded at both sides of a burn-in board at the same times. CONSTITUTION: A loading and unloading method comprises locating an empty tray at a stacker and a burn-in board, to which a burn-in test completed device is fixed, at working area. An empty tray is separated from the stacker, and is transferred to a main working line. Forking and unforking pickers hold a device from the burn-in board, and put the held device on an unloading buffer. The working is repeatedly performed at which loading and unloading pickers holds a good device put on the unloading buffer and unloads the held device in the empty tray. If devices are full in the tray, the tray is loaded in a front stacker, and a new tray is separated from a rear stacker so as to correspond to the main working line. If a burn-in failed device is loaded on the unloading buffer, a corresponding unloading buffer is shifted into a sorting line so as to be sorted by a sorting part. If devices are all unloaded from the burn-in board, a new burn-in board is exchanged.

Description

METHOD FOR LOADING / UNLOADING DEVICE OF SHOOTING HANDLER FOR BURN-IN TESTER AND APPARATUS THE SAME}

The present invention relates to a sorting handler used when testing electrical characteristics of a finished device, and more particularly, to loading / unloading devices from both sides of a burn-in board in a sorting handler for a burn-in tester. A method and apparatus therefor.

1 is a plan view schematically showing the configuration of a sorting handler for a burn-in tester according to the related art, and FIG. 2 is a schematic view for explaining the operation of the transfer means in the handler for the burn-in tester according to the related art.

The burn-in board loader part 2 and the unloader part 3 are provided in the upper side of the main body 1, and the DC reject part 4, the tray loader part 5, and the DC test part 6 at one side thereof are installed. Y table 8 is provided with a turn return device portion 7 that rotates 90 ° on one side of the bottom surface, and an empty pocket portion 9 and a tray unloader portion 10 and sorting on one side thereof. The unit 11 is provided in order.

In addition, the upper part of the DC reject part 4, the tray loader part 5, and the DC test part 6 is provided with the first tool 12 which operates left, right, up, and down by a servo motor. On the upper side of the Y table 8 in which the 6 and the turn return device portion 7 are provided, the second tool 13 that is operated between the gaps is provided.

In addition, a third tool 14 that is operated between the gaps is provided at the upper portion of the Y table 8, the empty pocket portion 9, and the tray unloader portion 10, and the empty pocket portion 9 and the sorting portion ( On the upper side of 11), the fourth tool 15 which is operated between the gaps is provided.

Therefore, the tray filled with the device to be burned-in is placed in the tray loader part 5, and then the burn-in board with the burned-in tested device is inserted into the test socket in the burn-in board loader part 2.

When the burn-in board is located in the burn-in board loader unit 2 as described above, the burn-in board is located on the rotating plate (not shown) installed on the upper part of the Y table 8 and is coupled to the connector of the handler. It is conveyed to the Y table 8, and rotated 90 degrees by the turn return device part 7.

As described above, when the rotating plate rotates by 90 °, the ball screw is rotated by the sub-motor, so that the Y table 8 moves to the process line where the tools 12, 13, 14 operate. .

Therefore, the four devices plugged into the test socket of the burn-in board after the burn-in test are taken out at the same time by the tool No. 3 installed on the upper side, and the empty pocket part 9 or the tray unloader part 10 according to the grade. ), And the device determined to be defective is transferred from the empty pocket portion 9 to the sorting portion 11 by the fourth tool 15.

On the other hand, if the burn-in tested device inserted into the test socket of the burn-in board is exited by the above-described operation, the tool No. 1 holds four devices in the tray loader section 5 so that the DC test section 6 DC test is performed for a predetermined time by inserting into the test socket of. The device which was previously in the DC test unit is inserted into the test socket on the burn-in board by the tool 2.

That is, the device that is plugged into the test socket of the burn-in board is the burn-in test is completed, and is transported and classified by the tool 3 and the tool 15 by the grade, the tool 3 and the tool 4 (15) When the device is pulled out of the test socket by 1), tool 1 and 2 (12) are operated in the empty space to perform DC test and insert the device judged as good quality, so that the device loading and unloading operation is performed. Will be.

However, when looking at the semiconductor process, efficient work can be progressed as planned only when each process (FAB process, test process, etc.) is performed sequentially.

In other words, the FAB process proceeds quickly and produces a lot, but if the test process is delayed and congestion occurs, no matter how fast the FAB process proceeds, there is a shortage in which the amount of the final device is reduced.

Therefore, in order to control the amount of work between the processes, the burn-in test process usually only processes loading the device to be burn-in test on the burn-in board at the beginning of the month, and at the end of the month, only the process of unloading the burn-in test device from the burn-in board and putting it in the tray Will proceed.

However, in the conventional sorting handler, since the work flow is performed only in one direction, that is, from the loader part 5 to the unloader part 10, the DC-tested device cannot be loaded quickly into the burn-in board, or the tested device. Since it is not possible to unload the burn-in board from the burn-in board, a big problem has arisen in carrying out the entire production process according to the semiconductor (device) production as planned.

In other words, when loading the device in the burn-in board, only the tool 1 and 2 tools 12 and 13 are used, and the tool 3 and 4 tools 14 and 15 are not used. On the contrary, the burn-in tested device is unloaded from the burn-in board. In the case of using tools 3 and 4 (14) and 15 only, and tools 1 and 2 (12 and 13) are not used, a large number of equipments are needed to increase the production volume, and a large number of equipments are installed. In order to do so, a large area of space is required, which adds to the cost burden due to the expansion of facilities.

The present invention has been made to solve such a problem in the prior art, and as necessary, it is possible to simultaneously load or unload the device on both sides of the burn-in board to obtain twice the work efficiency with one equipment The purpose is.

According to the aspect of the present invention for achieving the above object, the tray or bin tray containing the device on both sides of the main body to transfer in accordance with the main work line, and at the same time the empty burn-in board or burn-in device without the device is burned-in Positioning the board into the workspace, and loading and unloading the picker by holding the devices positioned in the loading and unloading units, respectively, with the DC test units installed on both sides of the workspace in line with the main work line. DC test is performed on the DC test unit, and then the DC test unit is forked and unforged picker held by the DC test unit and loaded into the burn-in board located in the workspace, or the unloading buffers installed at both sides of the workspace are connected to the main work line. Burn-in tested devices that have been forked and unforked pickers burned-in And holding the device in an unloading buffer located on both sides of the workspace, and loading and unloading the device in the unloading buffer into an empty tray located in the loading and unloading unit. A method of loading / unloading devices from both sides of a burn-in board is provided in a sorting handler for a burn-in tester.

According to another aspect of the present invention, in a sorting handler for loading and unloading a device in a burn-in board by a plurality of horizontally moving pickers, trays each of which is provided at both sides of the main body and filled with devices are moved from the front to the main work line. The stacker and burn-in board are located after transporting and loading all the devices, and then transported backwards to be stacked one by one, or empty trays are transported from the rear to the main work line and burned forward and stacked one after the other. DC test unit for performing a DC test of the device to be loaded on the burn-in board is installed on both sides of the work space to be matched with the main work line or sorting line, respectively on both sides of the workspace in close proximity to the DC test unit Unloaded device containing installed and burn-in tested devices A loading buffer, an X axis spindle installed in parallel with the main work line, a loading and unloading picker installed horizontally on the X axis spindle to simultaneously load or unload a device from a tray, and the loading; And an unloading picker installed on the X-axis spindle so as to be positioned between the unloading pickers and unloading the DC-tested device from the burn-in board to the unloading buffer side or loading from the DC test unit to the burn-in board side. An apparatus for loading / unloading devices from both sides of a burn-in board is provided in a sorting handler for a burn-in tester.

1 is a plan view schematically showing the configuration of a sorting handler for a conventional burn-in tester

Figure 2 is a schematic diagram for explaining the operation of the transfer means in the sorting handler for a burn-in tester according to the prior art

Figure 3 is a perspective view showing a part of the sorting handler to which the present invention is omitted

Figure 4 is a perspective view of the DC test unit and the unloading buffer of the present invention

5 is a plan view schematically showing the configuration of the present invention

6 is a flow chart illustrating a process of loading a device to be burned-in in the burn-in board.

FIG. 7 is a plan view of a DC test unit for explaining a state in which a device is simultaneously loaded from both sides on a burn-in board located in a workspace; FIG.

8 is a flowchart illustrating a process of unloading a burn-in tested device from a burn-in board.

9 is a plan view of the DC test unit for explaining a state of unloading the burn-in tested device from the burn-in board at the same time

Explanation of symbols for main parts of the drawings

16: main body 17a, 17b, 18a, 18b: stacker

21: main working line 24: workspace

25a, 25b: DC test unit 27: sorting line

28a, 28b: unloading buffer 34: forking picker

35: unforking picker 37a, 37b: loading buffer

Hereinafter, with reference to Figures 3 to 9 showing an embodiment of the present invention in more detail as follows.

Figure 3 is a perspective view showing a part of the sorting handler to which the present invention is omitted, Figure 4 is a perspective view showing the DC test unit and the unloading buffer of the present invention and Figure 5 is a plan view schematically showing the configuration of the present invention, the present invention Stackers 17a and 18a are provided respectively on both sides of the main body 16 to stack trays filled with devices, and stackers 17b and 18b are installed on both sides of the blank tray. Between each stacker is provided with a rail 22 for guiding the tray when the conveying means (not shown) transfers the tray to the main work line 21 of the loading and unloading portions 19 and 20. have.

In addition, DC test units 25a and 25b for performing a DC test are symmetrically installed on both sides of the work space 24 where the burn-in board 23 is located, before loading the device to be burn-in test in the burn-in board. The DC test units 25a and 25b coincide with the main work line 21 when the device is loaded and unloaded by the DC test unit variable means 26, and a sorting line for sorting when DC defects are generated as a result of the DC test. It is comprised so that it may correspond with (27).

In addition, unloading buffers 28a and 28b, which contain devices to be unloaded from the burn-in board 23, are provided on the bottom of the DC test units 25a and 25b, respectively. Each 28b is individually driven in accordance with the driving of the cylinder 29, coincides with the main work line 21 when the device is unloaded, and the sorting line 27 by the driving of the cylinder 29 during the sorting operation of the defective device. )

That is, the DC test units 25a and 25b and the unloading buffers 28a and 28b are positioned on the same vertical line and individually operated by the DC test unit variable means 26 and the cylinder 29 to operate the main work line ( 21) or the sorting line 27.

An X-axis main shaft 30 is installed in parallel to the upper part of the main work line 21, and the X-axis main shaft is between the loading and unloading sections 19, 20 and the DC test section 25a, 25b. While holding the device from the trays 31a and 31b located in the loading and unloading sections while reciprocating, loading the device into the DC test sections 25a and 25b, or the devices contained in the unloading buffers 28a and 28b. The loading and unloading pickers 32 and 33 for unloading into empty trays 31a and 31b located in the loading and unloading sections are installed to be movable horizontally. The X-axis main shaft 30 positioned in between is held by the burn-in board 23 and unloaded to the unloading buffers 28a and 28b, or held by the DC test units 25a and 25b. The forking and unforking pickers 34 and 35 for loading to the burn-in board 23 are provided.

The forking and unforking pickers 34 and 35 are installed on the slider 36 which moves horizontally along the X-axis main axis 30 and are configured to move simultaneously in one direction as the slider is driven.

Thus, when the forking picker 34 holds the device in the DC test section 25a, the unforking picker 35 loads the device to be burned-in test in the burn-in board 23, on the contrary, the forking picker 34 burns in. When loading the device to be burn-in test in the board 23, the unforking picker 35 will hold the device to be burn-in test in the DC test section 25b.

If any one or more devices are determined to be DC defective between the loading unit 19 and the unloading unit 20 and the DC test units 25a and 25b, the sorting picker (not shown) may be used. More preferably, the device further includes loading buffers 37a and 37b on which the device is placed.

This is to allow the forking and unforking pickers 34 and 35 to quickly load the device into the burn-in board 23 even if a failure occurs in any one or more devices as a result of the DC test.

In this case, it is to be understood that the strokes should be varied to reciprocate the forking and unforking pickers 34 and 35 in the interval between the respective loading buffers 37a and 37b.

Referring to the operation of the present invention configured as described above is as follows.

FIG. 6 is a flowchart illustrating a process of loading a device to be burned-in in the burn-in board, and FIG. 7 is a plan view of a DC test unit for explaining a state in which devices are simultaneously loaded on both sides of the burn-in board located in the workspace. The process of simultaneously loading the devices to be burn-in-tested in the empty burn-in board 23 located in (24) on both sides of the workspace 24 will be described.

Burn-in the stacker 17a (18a) installed in the front of the main body 16, a plurality of trays filled with the device to be tested is loaded and the empty burn-in board 23 is placed in the work space 24, the burn-in The DC test units 25a and 25b which perform DC test of the device loaded on the board coincide with the main work line 21 by the DC test unit variable means 26 (S ₁ ).

At this time, the tray is not mounted on the stackers 17b and 18b provided behind the main body 16.

In this state, each of the trays 31a and 31b is separated from the bottom of the stackers 17a and 18a installed in the front so as to be placed on the upper surface of the rail 22, and then the loading unit 19 is carried by the transfer means. ) And the main work line 21 of the unloading unit 20. (S ₂ )

Detailed description of the process of separating one tray from the stackers 17a and 18a will be omitted.

After the device to be loaded on the burn-in board 23 reaches the main work line 21, the loading and unloading pickers 32 and 33 moving along the X-axis spindle 30 are provided as trays 31a and 31b. By simultaneously holding a plurality of devices from each other and loading them into the DC test units 25a and 25b, a DC test of the device is performed for a set time (S ₃ ).

After a DC test of the device is performed for a predetermined time period in the DC test units 25a and 25b and determined to be good, the slider 36 on which the forking and unforking pickers 34 and 35 are installed is the X-axis main shaft 30. Along the right side of the drawing, the picking picker 34 simultaneously holds a plurality of DC-tested devices from one side of the DC test unit 25a and then moves in a direction opposite to the initial moving direction to burn-in the board. (23) is loaded into the test socket, when the device is loaded into the burn-in board 23, the unfortuned picker 35 located on the other side is DC-tested good from the DC test unit 25b located on the other side Will hold the device.

In this operation, the loading picker 32 holds a new device from the tray and loads the new device into the DC test unit 25a, so the DC test unit 25a is in a state where a DC test is in progress.

After that, when the picking picker 34 moves down to the right in the drawing to hold a new device from the DC test unit 25a, the unpicking picker 35 moves to the workspace 24 where the burn-in board 23 is located. Since the picking picker 34 is holding the device from the DC test unit 25a, the unpicking picker 35 loads the holding device into the test socket of the burn-in board 23.

The operation as described above is performed continuously until the device to be burn-in test is filled in the burn-in board 23, the loading and unloading picker 32, 33 is the loading unit 19 and the unloading unit 20 After holding the device from the trays 31a and 31b located in the tray, the tray is advanced backward by one step by the transfer means, and as the device is loaded into the test socket installed in the burn-in board 23, the burn-in board ( 23) moves by one step along the X-Y coordinate, so that the device can be loaded (S ₄ ).

However, if any one or more of the devices that have been DC-tested are determined to be DC failures during the loading operation of the DC-tested device, for example, if a DC failure occurs in the DC test unit 25a located on the right side of the drawing, the DC test unit is variable. The means 26 is driven to vary the DC test section 25a from the main work line 21 to the sorting line 27, as indicated by the dotted lines in FIG. 7, and at the same time, a sorting picker (not shown) is transferred. And simultaneously holding a plurality of devices from the DC test unit 25a, the good device is placed in a loading buffer 37a installed on one side of the DC test unit 25a, and only a device having a DC defect is empty in the sorting unit 38. (S ₆ )

In the above operation, the picking picker 34 moves slightly toward the loading buffer 37a to hold a good device that has been matched with the main work line 21, and loads the burner in the burn-in board 23. The delay can be prevented in advance.

After continuing to load the device in the burn-in board 23 by holding the device from the trays 31a and 31b located in the loading unit 19 and the unloading unit 20 in the continuous operation as described above, The empty tray is moved and loaded in turn into the stackers 17b and 18b installed at the rear of the main body 16, and at the same time, the tray filled with the device is removed from the stacker 17a and 18a located at the front and reloaded or according to Sikkim unloading position in the main assembly line (21) of the loading unit 19, 20 it is possible to continue to load the device in the burn-in board (23). ₍₅ S)

On the other hand, after the device is fully loaded in the burn-in board 23, by replacing with a new burn-in board, it is possible to continue to load the device (S ₇ ).

What has been described so far has described a method of simultaneously loading devices on both sides of the workspace 24 in the empty burn-in board 23. Hereinafter, as shown in FIGS. 8 and 9, the burn-in-tested device is burn-in board 23. The method of simultaneously unloading them into the empty trays 31a and 31b of the loading unit 19 and the unloading unit 20 in the state filled in will be described.

In this case, a plurality of empty trays are loaded into the stackers 17b and 18b installed at the rear of the main body 16, and the burn-in board 23 in which the burn-in-tested device is inserted is placed in the work space 24. sikimyeo, the main processing line 21, where the individual unloading buffer (28a) (28b) driven by the cylinder (29). (S ₁₁₎

At this time, the tray is not mounted in the stackers 17a and 18a provided in front of the main body 16.

In this state, each of the empty trays 31a and 31b is separated from the bottom of the stacker 17b and 18b installed at the rear so as to be placed on the upper surface of the rail 22, and then the loading unit 19) and the main work line 21 of the unloading unit 20. (S ₁₂ )

As such, when the empty trays 31a and 31b reach the main work line 21, the slider 36 on which the forking and unforking pickers 34 and 35 moving along the X-axis main axis 30 are installed is X. Move left along the axis main axis 30 in the drawing to descend with the forking picker 34 positioned on the workspace 24 to hold a plurality of devices from the burn-in board 23 and then reverse the initial direction of travel. Direction and the holding device is placed on the upper surface of the unloading buffer 28a coinciding with the main work line 21. The picking picker 34 unloads the device into the unloading buffer 28a. The un-forking picker 35 located at the other side of the time is located directly above the workspace 24 to hold the burn-in tested device from the burn-in board.

Thereafter, when the forking picker 34 moves and descends to the left in the drawing to hold a new device from the burn-in board 23, the unforking picker 35 is above the unloading buffer 28b located on the left in the drawing. Since the position to put the forking topped picker (34) for the burn-in board 23, the holding and loading buffer (28b), the unloading device that when holding the device from a. (S ₁₃₎

After the burn-in tested good quality device is placed on the upper surface of the unloading buffers 28a and 28b, the loading unit moves the sections of the loading and unloading units 19 and 20 and the unloading buffers 28a and 28b. The picker 32 and the unloading picker 33 hold a good device placed in the unloading buffers 28a and 28b to place empty trays 31a located in the loading unit 19 and the unloading unit 20 ( Unloaded in 31b) (S ₁₄ ).

The above operation is repeated until all the devices in the burn-in board 23 are unloaded, and the burn-in test in the empty trays 31a and 31b located in the loading and unloading sections 19 and 20 is performed. After the completed device is full, the tray is conveyed to the front of the main body 16 by the transfer means, which is sequentially loaded into the stackers 17a and 18a, and at the same time the empty tray from the stackers 17b and 18b installed at the rear. Is separated and transported to the main work line 21 of the loading and unloading unit 19, 20 by the conveying means is carried out unloading of the device continuously (S ₁₅ ).

However, if any of the devices placed on the unloading buffers 28a and 28b is determined to be defective, the unloading buffers 28a and 28b on which the device is loaded are driven by the driving of the cylinder 29 as indicated by the dotted lines in FIG. Since it moves in line with the sorting line 27, the sorting picker holds the device loaded on the unloading buffer and sorts it to the sorting unit 38 side according to the grade, and at the same time, the unloading buffer 28a that has been matched with the sorting line 27. Reference numeral 28b returns to coincide with the main work line 21 by re-driving the cylinder 29. (S ₁₆ )

On the other hand, after unloading all devices from the burn-in board 23, by replacing the burn-in-tested device with a new burn-in board, the device can be unloaded continuously (S ₁₇ ).

As described above, the present invention simultaneously loads a device to be burned-in at both sides of the workspace 24 in a test socket of the burn-in board, or unloads the burned-tested device at the same time and puts it in the tray, thereby reducing the working time of the sorting handler. It can be reduced to 1/2, thereby obtaining an effect of obtaining twice the work efficiency as compared to the conventional sorting handler.

Claims (7)

At both sides of the main body, the tray or bin tray containing the device is transported in accordance with the main work line, and the empty burn-in board without the device or the burn-in board with the burn-in tested device is placed in the workspace. With the DC test units installed on both sides in line with the main work line, the loading and unloading pickers hold devices located in the loading and unloading units, respectively, to perform a DC test on the DC test unit, and then Forking and un-forking pickers are held from the DC test unit and loaded into burn-in boards located in the workspace, or the forking and un-forking pickers are burn-in tested with the unloading buffers installed on both sides of the workspace in line with the main work line. Unloading located on both sides of the workspace by holding the device from the burn-in board The device from both sides of the burn-in board in the sorting handler for burn-in testers, characterized in that the loading and unloading of the device in the unloading buffer is placed in an empty tray located in the loading and unloading section. How to load / unload. The method of claim 1, The forking picker holds the device from the burn-in board when unloading the holding device in the unloading buffer by allowing the forking and un-forking picker to move horizontally at the same time so that both sides of the burn-in board are in the sorting handler for burn-in testers. How to load / unload devices from a computer. The method of claim 1, If one or more devices are determined to be DC defective as a result of the DC test, the sorting picker simultaneously holds the devices from the DC test unit while the DC test unit is aligned with the sorting line, puts the good devices in the loading buffer, and sorts only the DC defective devices. A method for loading / unloading devices from both sides of a burn-in board in a sorting handler for a burn-in tester characterized by sorting by a negative. A sorting handler for loading and unloading a device into a burn-in board by a plurality of horizontally moving pickers, wherein trays filled with devices, which are installed at both front and rear sides of the main body, are transferred from the front to the main work line to completely load the devices. Main work on both sides of the work area where the stacker and burn-in board are located, which are transported to the rear and stacked one by one, or the empty tray is transported from the rear to the main work line, and the stacker is transported and stacked one by one as the burn-in tested device is filled. Includes a DC test unit for performing a DC test of a device to be loaded on the burn-in board to be matched with a line or a sorting line, and a burn-in-tested device installed on both sides of the workspace in proximity to the DC test unit. Losing unloading buffer, the main working line An X-axis spindle installed in parallel and horizontally movable on the X-axis spindle so as to be positioned between the loading and unloading picker for simultaneously loading or unloading devices from the tray and the loading and unloading picker. Burn-in board in the sorting handler for burn-in testers, which consists of forking and un-forking pickers installed on the X-axis spindle and unloaded from the burn-in board to the unloading buffer side of the burn-in board. Apparatus for loading / unloading devices from both sides. The method of claim 4, wherein 12. An apparatus for loading / unloading devices from both sides of a burn-in board in a sorting handler for a burn-in tester, wherein the pick-up and un-forking picker is mounted on a slider so that the forking and un-forking pickers move horizontally along the X axis major axis simultaneously. The method of claim 4, wherein The DC test unit is installed on the upper side so that the DC test unit is matched to the main work line or the sorting line by the DC test unit variable means, and the unloading buffer is installed on the bottom of the DC test unit to be individually retracted by a cylinder. A device for loading / unloading devices from both sides of a burn-in board in a sorting handler for a burn-in tester. The method of claim 4, wherein An apparatus for loading / unloading devices from both sides of a burn-in board in a sorting handler for a burn-in tester, wherein a loading buffer is placed between the loading unit and the unloading unit and a DC test unit.