KR20000021335A - Indexer for wafer cassette - Google Patents

Indexer for wafer cassette Download PDF

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Publication number
KR20000021335A
KR20000021335A KR1019980040354A KR19980040354A KR20000021335A KR 20000021335 A KR20000021335 A KR 20000021335A KR 1019980040354 A KR1019980040354 A KR 1019980040354A KR 19980040354 A KR19980040354 A KR 19980040354A KR 20000021335 A KR20000021335 A KR 20000021335A
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KR
South Korea
Prior art keywords
indexer
wafer
pedestal
base plate
cassette
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KR1019980040354A
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Korean (ko)
Inventor
서광하
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윤종용
삼성전자 주식회사
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Priority to KR1019980040354A priority Critical patent/KR20000021335A/en
Publication of KR20000021335A publication Critical patent/KR20000021335A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: An indexer for a wafer cassette is to utilize in various wafers having different diameters to each other and increase a compatibility of a parts of the indexer, thereby reducing a maintaining cost of the indexer. CONSTITUTION: An indexer for a wafer cassette comprises a detecting portion(10) in whicha sensor(12) for detecting a size of a wafer is disposed at an upper portion thereof, a base plate(20) on which a cassette containing the wafers therein is laid and vertically moved along the detecting portion, a lifter for moving the base plate upward and downward, a lower supporter(30) formed at a lower portion of the detecting portion and supporting the detecting portion and a wing portion coupled to a right and left side of the base plate. The lifter has a lead screw formed parallel with the detecting portion and a lifting plate(42) being moved along the lead screw and coupled to the base plate. The wing portion is assembled or disassembled to the base plate by a bolt and a nut.

Description

웨이퍼 카세트용 인덱서 ( Indexer for wafer cassette )Indexer for wafer cassette

본 발명은 반도체 제조 장치에 관한 것이며, 더욱 구체적으로는 카세트에 적재되어 있는 각 웨이퍼를 제조 장치의 내부로 이송할 때 사용되는 인덱서(Indexer)에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus, and more particularly, to an indexer used when transferring each wafer loaded in a cassette into the manufacturing apparatus.

반도체 소자가 가공되는 웨이퍼는 카세트와 같은 적재용기에 약 25매씩 담겨져 이송되거나 각 제조 장치로 공급되는 것이 일반적이다. 이들 카세트에서 개개의 웨이퍼를 꺼내거나 적재할 때 사용되는 장치는 각 제조 장치에 따라 다양한 형태로 구성될 수 있다.Wafers in which semiconductor devices are processed are generally contained in about 25 sheets in a loading container such as a cassette, or are supplied to each manufacturing apparatus. The apparatus used to take out or load individual wafers from these cassettes may be configured in various forms according to each manufacturing apparatus.

미국 램 리서치 사(美國 LAM Research 社)의 제품군(製品群)인 반도체 제조 장치들 - LAM490,590, RAINBOW4400,4620,4420, TCP 등 - 은 소위 인덱서(Indexer)라 불리는 장치를 이용하여 각 제조 장치 내로 웨이퍼를 공급/수납한다.Semiconductor manufacturing devices, such as LAM490,590, RAINBOW4400,4620,4420, TCP, etc., which are a product of LAM Research, Inc., are each manufactured using a device called an indexer. The wafer is supplied / stored into the container.

도 1은 기존의 웨이퍼 카세트용 인덱서(100)를 이용하여 웨이퍼(70)를 운반하는 모습을 도시한 단면도이며, 도 2는 기존의 인덱서(100)를 도시한 사시도이다. 도 1 및 도 2를 참조하여 기존의 인덱서(100)의 구조와 그를 이용한 웨이퍼 공급/수납 과정을 설명하면 다음과 같다.1 is a cross-sectional view illustrating a state in which a wafer 70 is transported by using a conventional wafer cassette indexer 100, and FIG. 2 is a perspective view illustrating a conventional indexer 100. Referring to FIGS. 1 and 2, a structure of a conventional indexer 100 and a wafer supply / storage process using the indexer 100 are as follows.

기존의 인덱서(100)는 감지기(12)가 형성된 감지대(10)와, 카세트(60)가 놓여지며 감지대를 따라 수직으로 움직이는 받침대(20)와, 받침대를 상하로 움직이는 승강장치(40) 및 감지대의 하부에 형성되어 감지대를 지지하는 하부 지지대(40)를 포함한다.The existing indexer 100 has a sensing table 10 having a detector 12, a cassette 60, and a pedestal 20 moving vertically along the sensing table, and a lifting device 40 moving the pedestal up and down. And a lower support 40 formed at a lower portion of the sensing table to support the sensing table.

승강장치(40)는 감지대와 평행하게 형성된 리드 스크류(44)와 리드 스크류를 따라 움직이며 받침대에 결합되어 있는 받침대 승강대(42)를 포함한다.The lifting device 40 includes a lead screw 44 formed in parallel with the sensing table and a pedestal lifting table 42 which moves along the lead screw and is coupled to the pedestal.

이와 같은 구조의 인덱서(100)를 이용하여 웨이퍼를 공급/수납하는 과정을 간략히 설명하면 다음과 같다. 카세트(60)의 하부를 관통하여 감지기(12)가 웨이퍼(70)를 감지할 수 있으며, 감지될 때 컨베이어 벨트(Conveyor belt)와 같은 이송수단을 통해 웨이퍼가 제조 장치 내로 공급되고 리드 스크류(44)가 회전함에 따라 받침대 승강대(42)가 받침대(20)를 하강시킨다. 받침대(20) 위의 카세트(60)가 함께 하강되면서 다른 웨이퍼(70)가 감지기(12)에 감지되고 이와 같은 과정이 반복되면서 웨이퍼들이 모두 공급 또는 수납될 수 있다.The process of supplying / storing a wafer using the indexer 100 having such a structure will be briefly described as follows. The detector 12 can detect the wafer 70 by penetrating the bottom of the cassette 60, and when detected, the wafer is fed into the manufacturing apparatus through a transfer means such as a conveyor belt and the lead screw 44. As the pivot rotates, the pedestal platform 42 lowers the pedestal 20. As the cassette 60 on the pedestal 20 is lowered together, the other wafer 70 is sensed by the detector 12, and the above process is repeated, so that all of the wafers may be supplied or received.

이때, 각 제조 장치들은 소정의 직경을 갖는 웨이퍼들에 대응하는 인덱서를 구비하고 있으며, 이로 인하여 웨이퍼의 크기에 따라 서로 다른 인덱서를 사용하여야 한다. 따라서, 크기에 상관없이 동일한 동작기능을 갖는 서로 다른 인덱서들을 모두 갖추어야 하며, 이는 각각의 인덱서에 대한 부품을 구비하고 있어야 하는 등의 유지비용의 증가를 가져올 수 있다.At this time, each manufacturing apparatus is provided with an indexer corresponding to the wafer having a predetermined diameter, for this reason it is necessary to use a different indexer according to the size of the wafer. Therefore, it is necessary to have all different indexers having the same operation function regardless of the size, which can lead to an increase in maintenance cost, such as having parts for each indexer.

본 발명의 목적은 서로 다른 크기의 웨이퍼에 대응되는 웨이퍼 카세트용 인덱서를 제공하는 것이다.It is an object of the present invention to provide an indexer for wafer cassettes corresponding to wafers of different sizes.

본 발명의 또 다른 목적은 카세트가 놓여지는 받침대에 날개를 포함시킴으로써 호환성을 갖는 인덱서를 제공하는 것이다.It is a further object of the present invention to provide a compatible indexer by including a vane in the support on which the cassette is placed.

도 1은 기존의 웨이퍼 카세트용 인덱서를 이용하여 웨이퍼를 운반하는 모습을 도시한 단면도,1 is a cross-sectional view showing a state of transporting a wafer using an existing wafer cassette indexer,

도 2는 기존의 웨이퍼 카세트용 인덱서를 도시한 사시도,Figure 2 is a perspective view showing an indexer for a conventional wafer cassette,

도 3은 본 발명에 따른 웨이퍼 카세트용 인덱서를 도시한 사시도,3 is a perspective view showing an indexer for a wafer cassette according to the present invention;

도 4는 도 3의 받침대를 도시한 분해 사시도이다.4 is an exploded perspective view illustrating the pedestal of FIG. 3.

<도면의 주요 부분에 대한 설명>Description of the main parts of the drawing

10, 110 : 감지대 12, 112 : 감지기10, 110: detector 12, 112: detector

20, 120 : 받침대 30, 130 : 하부 지지대20, 120: pedestal 30, 130: lower support

40, 140 : 승강장치 42, 142 : 받침대 승강대40, 140: lifting device 42, 142: pedestal platform

44, 144 : 리드 스크류 60 : 카세트44, 144: lead screw 60: cassette

70 : 웨이퍼 100, 200 : 인덱서(Indexer)70 wafer 100, 200 indexer

124 : 날개 150 : 결합수단124: wing 150: coupling means

이러한 목적을 달성하기 위하여 본 발명은 소정의 웨이퍼를 감지하는 감지기가 상부에 형성된 감지대와; 소정의 웨이퍼들이 적재된 카세트가 놓여지며, 감지대를 따라 수직으로 움직이는 받침대와; 상판을 상하로 움직이는 승강장치; 및 감지대의 하부에 형성되며, 감지대를 지지하는 하부 지지대;를 포함하는 웨이퍼 카세트용 인덱서에 있어서, 받침대의 좌우로 결합되는 날개;를 더 포함함으로써 소정의 웨이퍼의 직경보다 큰 대형 웨이퍼를 공급/수납할 수 있는 것을 특징으로 하는 웨이퍼 카세트용 인덱서를 제공한다.In order to achieve the above object, the present invention includes a sensing table formed on top of the detector for detecting a predetermined wafer; A cassette on which predetermined wafers are loaded is placed, which moves vertically along the sensing table; Lifting device for moving the top and bottom; And a lower supporter formed at a lower part of the sensing table and supporting the sensing table, wherein the blades are coupled to the left and right sides of the pedestal to supply a large wafer larger than the diameter of the predetermined wafer. Provided are an indexer for a wafer cassette, which can be stored.

또한, 본 발명에 따른 구성요소인 날개는 받침대에 볼트와 너트와 같은 결합수단을 통하여 분해/조립될 수 있는 것을 특징으로 한다.In addition, the wing is a component according to the invention is characterized in that it can be disassembled / assembled via a coupling means such as bolts and nuts to the pedestal.

이하, 첨부도면을 참고로 하여 본 발명에 따른 바람직한 실시예를 설명한다.Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

도 3은 본 발명에 따른 웨이퍼 카세트용 인덱서(200)를 도시한 사시도이며, 도 4는 도 3의 받침대(120)를 도시한 분해 사시도이다. 도 3 및 도 4를 참고로 하여 본 발명에 따른 웨이퍼 카세트용 인덱서(200)의 구조를 설명하면 다음과 같다.3 is a perspective view of the wafer cassette indexer 200 according to the present invention, Figure 4 is an exploded perspective view of the pedestal 120 of FIG. The structure of the wafer cassette indexer 200 according to the present invention will be described with reference to FIGS. 3 and 4 as follows.

본 발명에 따른 인덱서(200)는 감지기(112)가 형성된 감지대(110)와, 카세트가 놓여지며 감지대를 따라 수직으로 움직이는 받침대(120)와, 받침대를 상하로 움직이는 승강장치(140) 및 감지대의 하부에 형성되어 감지대를 지지하는 하부 지지대(140)를 포함한다.The indexer 200 according to the present invention includes a detector 110 on which a detector 112 is formed, a pedestal 120 on which a cassette is placed, and moves vertically along the detector, an elevator 140 for moving the pedestal up and down, and It is formed in the lower portion of the sensor includes a lower support 140 for supporting the sensor.

승강장치(140)는 감지대와 평행하게 형성된 리드 스크류와 리드 스크류를 따라 움직이며 받침대에 결합되어 있는 받침대 승강대(142)를 포함한다.The lifting device 140 includes a lead screw formed parallel to the sensing table and a pedestal lifting table 142 which is coupled to the pedestal and moves along the lead screw.

이에 더하여, 본 발명에 따른 웨이퍼 카세트용 인덱서(200)는 받침대(120)의 좌우로 분해/결합될 수 있는 날개(124)를 포함하는 것을 특징으로 한다. 날개(124)는 볼트(154)와 너트(156)의 쌍으로 구성된 결합수단(150)을 통해 일시적으로 결합될 수 있다.In addition, the wafer cassette indexer 200 according to the present invention is characterized in that it comprises a wing 124 that can be disassembled / coupled to the left and right of the pedestal 120. The wing 124 may be temporarily engaged via a coupling means 150 composed of a pair of bolts 154 and nuts 156.

본 발명에 따른 받침대(120)에 관하여 좀 더 상세히 설명하면 다음과 같다. 감지대가 관통되는 감지대 관통홀(126)이 형성된 받침대 몸체(122)의 좌우 양쪽으로 턱이 형성되어 있으며, 이에 대응하는 턱이 형성된 날개(124)가 볼트(154)와 너트(156)에 의해 결합/분해될 수 있는 구조이다. 웨이퍼의 직경이 커질 때 그에 맞추어 날개의 크기를 크게 함으로써 보다 대형의 웨이퍼가 탑재된 카세트가 놓여질 수 있으며, 본 발명에서는 약 6 inch용 웨이퍼에 대응되는 인덱서에 날개를 결합시켜 약 8 inch용 웨이퍼에 대응될 수 있도록 한 구성을 실시예로 설명하고 있다.When described in more detail with respect to the pedestal 120 according to the present invention. A jaw is formed on both the left and right sides of the pedestal body 122 where the sensing table penetrates the hole 126 through which the sensing table penetrates. It is a structure that can be bound / decomposed. When the diameter of the wafer increases, the size of the blades can be increased according to the size of the cassette, and a wafer having a larger wafer can be placed thereon. In the present invention, the blades are coupled to an indexer corresponding to a wafer of about 6 inches. One configuration is described as an example so as to be compatible.

이상에서 설명된 바와 같이, 웨이퍼를 공급/수납하기 위한 장치인 인덱서의 받침대를 날개를 결합시켜 확장함으로써 보다 큰 웨이퍼에 적용할 수 있도록 하여 호환성을 높이고, 이에 따라 각각의 부품을 따로 구비하는 등의 비용을 절감하여 장치의 유지비용을 줄일 수 있다.As described above, by extending the base of the indexer, which is a device for supplying / storing wafers, by combining wings to be applied to a larger wafer, the compatibility is increased, and thus each component is separately provided. The cost can be reduced to reduce the maintenance costs of the device.

본 발명에 따른 웨이퍼 카세트용 인덱서는 받침대에 결합수단을 통하여 결합될 수 있는 날개를 더 포함한 구조를 특징으로 하며, 이러한 구조적 특징에 따라 웨이퍼의 크기가 서로 다른 경우에도 동일한 인덱서에 날개와 같은 보조도구를 사용하여 호환성을 높임으로써 개별 부품을 구비하는 등의 유지비용을 줄일 수 있다.The indexer for a wafer cassette according to the present invention is characterized in that the structure further includes a wing that can be coupled to the pedestal through the coupling means, according to the structural feature, even if the wafer size is different from each other, such as a winger auxiliary tool By increasing the compatibility with the use, it is possible to reduce the maintenance costs, such as having individual parts.

Claims (4)

소정의 웨이퍼를 감지하는 감지기가 상부에 형성된 감지대;A sensing table on which a detector for sensing a predetermined wafer is formed; 상기 소정의 웨이퍼들이 적재된 카세트가 놓여지며, 상기 감지대를 따라 수직으로 움직이는 받침대;A pedestal in which the predetermined wafers are loaded, the pedestal moving vertically along the sensing table; 상기 상판을 상하로 움직이는 승강장치; 및An elevator for moving the upper plate up and down; And 상기 감지대의 하부에 형성되며, 상기 감지대를 지지하는 하부 지지대;A lower supporter formed below the sensing stand and supporting the sensing stand; 를 포함하는 웨이퍼 카세트용 인덱서에 있어서,In the wafer cassette indexer comprising: 상기 받침대의 좌우로 결합되는 날개;Wings coupled to the left and right sides of the pedestal; 를 더 포함함으로써 상기 소정의 웨이퍼의 직경보다 큰 대형 웨이퍼를 공급/수납할 수 있는 것을 특징으로 하는 웨이퍼 카세트용 인덱서.By further comprising a wafer cassette indexer, characterized in that for supplying / storing a large wafer larger than the diameter of the predetermined wafer. 제 1 항에 있어서, 상기 날개는 상기 받침대에 볼트와 너트를 통하여 분해/조립될 수 있는 것을 특징으로 하는 웨이퍼 카세트용 인덱서.The indexer of claim 1, wherein the vanes are disassembled / assembled to the pedestal through bolts and nuts. 제 1 항에 있어서, 상기 소정의 웨이퍼의 직경은 약 6 inch 인 것을 특징으로 하는 웨이퍼 카세트용 인덱서.The indexer of claim 1, wherein the predetermined wafer has a diameter of about 6 inches. 제 1 항에 있어서, 상기 대형 웨이퍼의 직경은 적어도 약 8 inch 인 것을 특징으로 하는 웨이퍼 카세트용 인덱서.2. The wafer cassette indexer of claim 1, wherein the large wafer has a diameter of at least about 8 inches.
KR1019980040354A 1998-09-28 1998-09-28 Indexer for wafer cassette KR20000021335A (en)

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KR1019980040354A KR20000021335A (en) 1998-09-28 1998-09-28 Indexer for wafer cassette

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103681428A (en) * 2013-12-17 2014-03-26 苏州博众精工科技有限公司 Clamping pre-pressing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103681428A (en) * 2013-12-17 2014-03-26 苏州博众精工科技有限公司 Clamping pre-pressing device
CN103681428B (en) * 2013-12-17 2016-05-25 苏州博众精工科技有限公司 A kind of prepressing device that clamps

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