JPH10279067A - Tray carrying device of handler - Google Patents

Abstract

PROBLEM TO BE SOLVED: To dispense with the change of the fitting position of a tray position detection sensor when the thickness of a tray is changed. SOLUTION: In an empty tray buffer stage 9, a tray position detection sensor 30 of one stage system is fitted to the position slightly lower than an upper surface of a tray on the highest stage. A control part 18 lowers an elevator 21 by the distance of ΔH=Wd-(Wd-Ws)/2 (where, Wd is the thickness of two laminated tray, and Ws is the thickness of one tray.), and when the tray position detection sensor 30 detects the tray, a judgment is made that at least two trays are stacked, and when the tray does not detect it, it is judged that there is only one tray.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tray transfer device for a handler used in combination with an IC tester, and more particularly to a reduction in man-hours for changing the thickness of a tray.

[0002]

2. Description of the Related Art As shown in FIGS. 3 and 4, a rotary arm (also referred to as a contact arm) 3, a measuring section 4, a soak stage 5, and an exit (EXIT) are provided in a chamber (constant temperature chamber) 2 of a handler 1. A part of the stage 6 is arranged. The rotary arm 3 sucks a DUT (device under test) 7 placed on the soak stage 5 and transports it to the measuring unit 4, and after the measurement is completed, transports the DUT 7 to the exit stage 6. The exit stage 6 conveys the measured DUT 7 to the unloader section 8.

The unloader section 8 has a chuck 8d for picking up a DUT from the exit stage 6,
Y carrier arm 8 movable in Y direction (vertical direction in the figure)
y and its Y carrier arm 8y in the X direction (lateral direction in the figure)
An X carrier arm 8x for transporting the DUT received from the exit stage 6 to the unloader 8a for accommodating a non-defective product, the unloader 8b for accommodating a first type defective product, or a second type. Are sorted and stored in the unloader 8c for storing defective products.

[0004] In the loader section 10, trays containing DUTs are stacked in multiple stages on the elevator base, and the DUTs in the uppermost tray are held in the chuck 1 of the loader carrier arm 11.
1a, and supplied to the soak stage 5. The empty uppermost tray is conveyed by the tray carrier 12 onto the uppermost tray of the empty tray / buffer stage 9 and is stacked in several stages. The empty tray of the empty tray / buffer stage 9 is conveyed by the tray carrier 12 so as to overlap the tray filled with the tested DUT of the unloader section 8 when necessary.

The rotary arm 3 has a rotating shaft 3a, and three arms 3b are protruded from the rotating shaft 3a in the radial direction at intervals of 120 °. A device chuck is attached to the tip of each arm 3b so as to be able to move up and down. The uppermost empty tray of the loader unit 10 is sucked by the tray chuck 12a of the tray carrier 12 (FIG. 5), and the sucked empty tray is lifted to a predetermined height by the cylinder 12c and is moved along the carrier arm 12b. Is transported above the empty tray / buffer stage 9. The tray chuck 12a is moved down by the cylinder 12c, and the sucked empty tray is released, and is stacked on the uppermost empty tray that has been in front.

In the unloader section 8a, for example, when the uppermost tray is full of the tested DUT, the empty tray / buffer stage 9 is moved by the tray chuck 12a.
After the uppermost empty tray is sucked and lifted to a predetermined height by the cylinder 12c, the carrier arm 12
The sheet is conveyed over the unloader section 8a along the line b, is lowered to a predetermined position by the cylinder 12c, the suction of the tray chuck is released, and the sheet is stacked on the full tray.

In the above description, when the tray emptied from the loader unit 10 is transported to the empty tray / buffer stage 9, or when the empty tray is transported from the empty tray / buffer stage 9 to the unloader unit 8a, the tray chuck 12
When “a” sucks and lifts the uppermost empty tray, the lower tray may accompany it. In order to detect this state, the light emitting elements 20 a and 21 a and the light receiving element 2
Two-stage light (beam) sensor 20 composed of 0b and 21b,
21 is a loader section 10 and an empty tray / buffer stage 9
And check whether there is a double stack.

[0008]

In the conventional tray transfer device of the handler, when the thickness of the tray is changed, the interval between the two-stage light (beam) sensors attached to the housing must be adjusted. There is a problem that requires a lot of manpower and work time. An object of the present invention is to solve the above-mentioned conventional problems.

[0009]

[Means for Solving the Problems]

(1) The invention according to claim 1 relates to a tray transport device of a handler including a loader unit, an unloader unit, an empty tray / buffer stage, a tray carrier, and a control unit. The loader unit places trays containing DUTs (devices under test) in multiple stages on an elevator, and is constantly adjusted so that the uppermost tray has a predetermined height. Supply to the soak stage. The unloader unit stores the tested DUT conveyed from the exit stage in the uppermost tray, and places the already full tray on the elevator in multiple stages under the uppermost tray. Is constantly adjusted so that the upper surface of the tray is at a predetermined height. The empty tray / buffer stage is constantly adjusted so that the multistage empty trays are stocked on the elevator, and the upper surface of the uppermost empty tray is at a predetermined height. When the uppermost tray of the loader section becomes empty, the tray carrier conveys the empty tray so as to overlap the uppermost tray of the empty tray / buffer stage, and the uppermost tray of the unloader section has been tested. When the DUT becomes full, the uppermost empty tray of the empty tray / buffer stage is transported so as to overlap the tray. The control unit controls the operation of each unit.

[0010] In the tray transport device of the first aspect, in particular, the position of the single-stage tray position detecting sensor is slightly lower than the height of the upper surface of the uppermost tray adjusted to the predetermined height of the empty tray / buffer stage. Attached to When the empty tray is conveyed from the loader unit so that the empty tray overlaps the empty tray of the empty tray / buffer stage, the control unit moves the elevator of the empty tray / buffer stage to ΔH = W.
d- (Wd-Ws) / 2 (Wd is the thickness of a stack of two trays, Ws is the thickness of one tray), and then the sheet is conveyed when the tray position detection sensor detects the tray. It is determined that at least two trays are stacked, and when no tray is detected, it is determined that only one transported tray is normal.

(2) In the tray transport device of the second aspect, the one-stage tray position detecting sensor is located at a position slightly lower than the height of the upper surface of the uppermost tray adjusted to a predetermined height of the unloader section. Mounted. When the empty tray is stacked on the full tray of the unloader unit from the empty tray / buffer stage, the control unit lowers the elevator of the unloader unit by ΔH = Wd− (Wd−Ws) / 2. Thereafter, when the tray position detection sensor detects a tray, it is determined that at least two transported trays are stacked, and when no tray is detected, it is determined that only one transported tray is normal.

(3) In the invention of claim 3, in the above (1) or (2), the tray position detecting sensor is composed of a pair of light emitting element and light receiving element, and the light receiving element detects the light of the light emitting element. The absence of the tray and the presence of the tray are detected depending on whether the tray is present or not. (4) In the invention of claim 4, in the above (1) or (2), the control unit is configured such that the elevator descends from the predetermined thickness Ws of one tray and the thickness Wd of two trays set in advance. ΔH is calculated and stored in the storage means.

(5) In the invention of claim 5, in the above (1) or (2), the descending distance ΔH of the elevator is previously input to the storage means from outside.

[0014]

In the present invention, the uppermost tray in the loader section 10, empty tray / buffer stage 9, and unloader sections 8a and 8b is always adjusted to a predetermined position as in the prior art. According to the present invention, when the empty tray is conveyed from the loader unit 10 to the empty tray / buffer stage 9 or when the empty tray is conveyed from the empty tray / buffer stage 9 to the unloader units 8a and 8b, two overlapping trays are detected. For this purpose, the tray position detection sensor 30 having a one-stage configuration is mounted at a position slightly lower than the height of the upper surface of the uppermost tray which is adjusted to a predetermined height of the empty tray / buffer stage 9 and the unloader sections 8a and 8b. Can be In the embodiment of FIGS. 1 and 2, the tray position detection sensor 30 includes a pair of light emitting elements 30a and a light receiving element 30b. Detect (claim 3).

When the empty tray is conveyed from the loader unit 10 and is superimposed on the empty tray of the empty tray / buffer stage 9 (FIG. 2A), the controller 18 is conveyed from the empty tray / buffer stage 9 and unloads. Parts 8a, 8b
When the elevator is overlaid on the elevator, ΔH = Wd− (Wd−W
s) / 2 (Wd is the thickness of a stack of two trays, Ws is the thickness of one tray) (FIG. 2B). Thereafter, when the tray position detection sensor 30 detects the tray, the control unit 18 determines that the transported trays are at least two stacks, and generates, for example, a visual and audible alarm. It is determined that only one transported tray is normal.

When the above-mentioned two sheets overlap, an operator removes an extra tray by an alarm. When the elevator is normal, the controller 18 raises the elevator so that the upper surface of the uppermost tray has a predetermined height H (see FIG. 2).
C). In the illustrated example, the light of the light emitting element 30a is cut off at the upper end of the uppermost tray, and the elevator is raised until the light receiving element 30b no longer detects the light.

It is desirable to provide a tray transport mechanism for detecting the overlap of two trays using the tray position detection sensor 30 in each of the empty tray / buffer stage 9 and the unloader sections 8a and 8b. However, the present invention is limited to this case. However, it is only necessary that at least one of the portions be provided.
The control unit 18 is related to the descending distance ΔH of the elevator.
Calculates the elevator descending distance ΔH from the preset thickness Ws for one tray and the thickness Wd of two trays stacked and stores the calculated value in the storage means (claim 4). Alternatively, as another method, for example, when the operator moves the elevator down distance Δ
H may be input to the storage means (claim 5).

The position detection sensor 30 is not limited to a light (beam) sensor, but may be a microswitch or another sensor.

[0019]

According to the present invention, in the empty tray / buffer stage 9 or the unloader section 8a or 8b, the one-stage tray is located at a position slightly lower than the height of the upper surface of the uppermost tray adjusted to a predetermined height. Position detection sensor 30
Is mounted, and the empty tray / buffer stage 9 is mounted.
Alternatively, when an empty tray is stacked on the uppermost tray of the unloader section 8a or 8b, the elevator is lowered by the appropriate distance ΔH. With this configuration, when the thickness Ws of one tray is changed, the operator does not need to manually adjust the distance between the two-stage light (beam) sensors 20 and 21 as in the conventional case, and the operator does not need to adjust the distance. Tray 1
By simply re-entering the thickness Ws of the sheets and the thickness Wd of the two trays or the descending distance ΔH of the elevator, it is possible to easily detect whether or not the two trays have occurred on the transported tray. it can.

[Brief description of the drawings]

FIG. 1 is a principle perspective view showing a main part of an embodiment of the present invention.

FIG. 2 is a front view in principle showing a main part of a tray group in the empty tray / buffer stage 9 in FIG. 1 when the height of a tray conveyed so as to overlap the uppermost tray is changed by an elevator; .

FIG. 3 is a plan view schematically showing a configuration of a handler.

FIG. 4 is a theoretical perspective view showing a main part of a conventional tray transport device of a handler.

FIG. 5 is a front view in principle showing a state before and after the uppermost empty tray 1 is lifted by a tray chuck in the loader unit 10 of FIG. 4;

Claims (5)

[Claims] 1. A tray accommodating a DUT (device under test) is placed in multiple stages on an elevator, and the uppermost tray is constantly adjusted so as to have a predetermined height. The loader unit that supplies the DUT to the soak stage and the tested DUT conveyed from the exit stage are stored in the uppermost tray, and under the uppermost tray, the already full tray is placed on the elevator in multiple stages. Put on,
An unloader that is constantly adjusted so that the upper surface of the uppermost tray is at a predetermined height, and stocks multiple empty trays on the elevator so that the upper surface of the uppermost empty tray is at a predetermined height. An empty tray / buffer stage that is constantly adjusted; and when the uppermost tray of the loader section becomes empty, the empty tray is conveyed so as to overlap the uppermost tray of the empty tray / buffer stage, and the unloader When the uppermost tray of the unit is filled with the tested DUT, the tray carrier that conveys the uppermost empty tray of the empty tray / buffer stage so as to overlap the tray, and controls the operation of each unit. A tray transporting device for a handler, comprising: a tray position detecting sensor having a one-stage configuration, wherein the tray position detecting sensor is adjusted to the predetermined height of the empty tray / buffer stage. Are attached to a slightly lower position than the height of the upper surface of the uppermost tray, the control unit, an empty tray from the loader section is superimposed on the empty tray of the empty tray buffer stage,
The elevator of the empty tray / buffer stage is Δ
When H = Wd− (Wd−Ws) / 2 (Wd is the thickness of two stacked trays, Ws is the thickness of one tray), and then the tray position detection sensor detects a tray. A tray transport device for a handler, which determines that at least two transported trays are stacked, and when no tray is detected, determines that only one transported tray is normal. 2. A tray containing a DUT (device under test) is placed in multiple stages on an elevator, and the uppermost tray is constantly adjusted so as to have a predetermined height. The loader unit that supplies the DUT to the soak stage and the tested DUT conveyed from the exit stage are stored in the uppermost tray, and under the uppermost tray, the already full tray is placed on the elevator in multiple stages. Put on,
An unloader that is constantly adjusted so that the upper surface of the uppermost tray is at a predetermined height, and stocks multiple empty trays on the elevator so that the upper surface of the uppermost empty tray is at a predetermined height. An empty tray / buffer stage that is constantly adjusted; and when the uppermost tray of the loader section becomes empty, the empty tray is conveyed so as to overlap the uppermost tray of the empty tray / buffer stage, and the unloader When the uppermost tray of the unit is filled with the tested DUT, the tray carrier that conveys the uppermost empty tray of the empty tray / buffer stage so as to overlap the tray, and controls the operation of each unit. A tray transport device for a handler, comprising: a tray position detection sensor having a one-stage configuration; The controller is mounted at a position slightly lower than the height of the upper surface of the ray, and when the empty tray is superimposed on the full tray of the unloader section from the empty tray / buffer stage, the control section controls the elevator of the unloader section. To ΔH
= Wd− (Wd−Ws) / 2, and then when the tray position detection sensor detects a tray, it is determined that the transported trays are at least two stacked, and when not detected, the transported tray is transported. The tray transfer device of the handler, wherein only one tray is determined to be normal. 3. The tray position detecting sensor according to claim 1, wherein the tray position detecting sensor includes a pair of light emitting elements and a light receiving element, and determines whether there is a tray or not, depending on whether the light receiving element detects light of the light emitting element. A tray transport device for a handler, wherein the tray is detected. 4. The tray according to claim 1, wherein the controller sets a predetermined thickness Ws for one tray and the tray 2
A tray transport device for a handler, wherein a descending distance ΔH of the elevator is calculated from a thickness Wd of stacked sheets and stored in a storage unit. 5. The tray transfer device for a handler according to claim 1, wherein a descending distance ΔH of the elevator is previously input to a storage unit from outside.