KR19990014755U - Probe unit and work bench flatness inspection device - Google Patents

Abstract

This invention relates to a probe unit and a work bench flatness inspection apparatus, comprising: a flat rectangular plate 70; Supports 20, 30, 40, 50 installed on four corners of the rectangular plate 70 and having holes 80, 90, 100, and 110 through which height measuring devices 60 for measuring heights are inserted are formed. It may include, and to easily check the flatness of the probe unit and the workbench to position the probe unit and the workbench flat, so as to accurately test the glass substrate.

Description

Probe unit and work bench flatness inspection device

This invention relates to a probe unit and a work table flatness inspection apparatus, and more particularly, to a probe unit and a device for checking the flatness of the work table for inspecting the characteristics of the thin film transistor substrate.

In general, a manufacturing process of a thin film transistor liquid crystal display device includes an array manufacturing process for forming a thin film transistor, and a cell manufacturing in which a liquid crystal material is encapsulated between the thin film transistor array substrate and a color filter substrate. Process and a module manufacturing process in which a driving electric circuit is mounted to drive the thin film transistor array and the cell substrate.

Among them, special equipment is needed to inspect the characteristics of the thin film transistors of the array substrate manufactured in the array manufacturing process, which is an array tester.

The array tester turns on an indium titan oxide (ITO) electrode of the thin film transistor and determines whether the thin film transistor is normal by using an electric field intensity applied thereto.

Thin film transistor array testers usually consist of a main body, a control computer and an auto loader.

Here, the portion of the tester array that is in contact with the glass substrate to turn on the electrode of the glass substrate is the probe unit, and the glass substrate is placed on the work table.

When the glass substrate is moved and fixed on the workbench, an error occurs in the board inspection if the workbench and the probe unit are not laid flat.

The flatness of the probe unit and the work platform has no way of inspecting, and thus it is not possible to determine whether the probe unit and the work table are at fault when the glass substrate inspection error occurs.

1 is a view showing the position of a typical probe unit and work table.

As shown in FIG. 1, the probe unit 1 is placed on the worktable 3, and the worktable 3 or the probe unit 1 is not laid flat so that the probe unit 1 and the worktable 3 are at an angle. (θ °).

In this way, when the probe unit 1 or the work table 3 is not laid flat, a test error of the glass substrate occurs.

Accordingly, an object of the present invention is to solve the above-mentioned problems, and to check the flatness of the probe unit and the workbench so as to position the probe unit and the workbench flat, thereby making it possible to accurately test the glass substrate. It is to provide a flatness inspection device.

1 is a view showing the position of a typical probe unit and work table,

FIG. 2 is a view showing a probe unit and a work bench flatness checking device placed on the probe unit according to an embodiment of the present invention;

3 is an enlarged view of portion A of the probe unit and work bench flatness inspection apparatus according to the embodiment of the present invention.

As a means for achieving the above object, the present invention,

Flat square plate;

It is installed on the four corners of the rectangular plate, characterized in that it comprises a support portion is formed a hole into which the height measuring device is inserted.

Hereinafter, with reference to the accompanying drawings, preferred embodiments that can be easily implemented by those skilled in the art to which the present invention pertains will be described in detail.

FIG. 2 is a view showing a probe unit and a work bench flatness inspection device according to an embodiment of the present invention on the probe unit, and FIG. 3 is an enlarged view of part A of the device.

As shown in Figures 2 and 3, the probe unit and worktable flatness inspection apparatus according to the embodiment of the present invention includes a flat rectangular plate (70); And supporting members 20, 30, 40, and 50 installed on the four corners of the rectangular plate 70, respectively.

The support parts 20, 30, 40, and 50 according to the embodiment of the present invention are formed with holes 80, 90, 100, and 110 to which the height measuring device 60 is inserted and fixed.

The operation of the probe unit and work bench flatness inspection device according to the embodiment of the present invention by the above-described configuration is as follows.

First, a probe unit 10 is positioned on a work bench (not shown) to inspect a glass substrate.

Next, the square plate 70 is placed on the probe unit 10.

At this time, since the holes 80, 90, 100, 110 are formed in the support portions 20, 30, 40, 50 of the rectangular plate 70, four heights are provided in the holes 80, 90, 100, 110. Each measuring device 60 is inserted and fixed.

Next, zero scales of the four height measuring devices are adjusted.

Move the workbench up or down to a certain height.

For example, raise the platform up to 10 cm so that the position of the probe goes up 10 cm.

At this time, it is checked whether the scale of the height measuring device 60 provided in each of the support parts 20, 30, 40, and 50 is represented by 10 cm.

If all four scales of the height measuring device 60 show the amount of movement by 10 cm, the probe unit 10 and the work table are laid flat, and any one of the height measuring devices 60 has a scale corresponding to 10 cm. If it is not displayed, since the part is not flat, the height of the part is adjusted so that the scale of the height measuring device 60 is 10 cm.

As described above, in the embodiment of the present invention, the probe unit and the work bench flatness inspection device for accurately testing the glass substrate by easily checking the flatness of the probe unit and the work table so as to position the probe unit and the work table flat. can do.

Claims (1)

A flat rectangular plate 70; Support portions 20, 30, 40, 50 are installed on the four corners of the rectangular plate 70, the hole (80, 90, 100, 110) is formed is inserted into the height measuring device 60 for measuring the height Probe unit and work surface flatness inspection apparatus comprising a.