KR19990003791A - Probe pad of LCD panel - Google Patents

Abstract

The present invention relates to the efficient configuration of a probe pad (probing pad) used for the electrical inspection of the active matrix liquid crystal display panel on the glass substrate, so that the same inspection jig can be used regardless of the model and size of the liquid crystal display panel The purpose is to reduce the number of inspection equipment and reduce the jig replacement time of the inspection equipment.

The PP of the liquid crystal display panel according to the present invention is based on the odd PP 590 of the gate bus line 530 and the excellent PP 591 and the odd PP 592 of the data bus line 520 at a predetermined position of the glass substrate 510 regardless of the model and size of the liquid crystal display panel. Excellent PP 593 and so on.

More specifically, the radix PP 590 of the gate bus line 530 is formed at the same coordinates (X, Y) of the glass substrate 510 regardless of the 5-inch or 10-inch class of the liquid crystal display panel, and the PP 591, 592, 593 is also formed in a predetermined position in the same manner.

Description

Probe pad of LCD panel

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to efficiently constructing a probing pad (hereinafter referred to as PP) on a glass substrate, which is used for electrical inspection of an active matrix liquid crystal display panel so that an inspection apparatus of an active matrix liquid crystal display panel can be efficiently used. . More specifically, to inspect the disconnection and short of the gate bus line and the data bus line of the active matrix liquid crystal display panel, the PP is formed at a fixed position on the glass substrate regardless of the model or size of the active matrix liquid crystal display panel. The present invention relates to the inspection of a plurality of models of active matrix liquid crystal display panels with one inspection device and a jig.

In general, an active matrix liquid crystal display panel has a complicated manufacturing process and is formed in a fine pattern so that many defects occur in the manufacturing process. Therefore, after a certain process step, various defect inspection and repair steps are essential for improving the yield. As a representative defect inspection step, a metal film, a semiconductor layer, an insulating film, or the like is formed on the surface of a glass substrate as a thin film, and the patterning process is repeated several times by a photolithography method. There is an electrical functional test carried out after manufacture in the state of the cross section taken along line nn).

Prior to the description of the electrical functional test, the structure of FIGS. 1 and 2 will be described.

The gate bus line 30 and the gate electrode 31 branching from the gate bus line are formed in a predetermined pattern on the glass substrate 10, and a gate insulating film 50 covering the gate bus line 30 and the gate electrode 31 is formed. The semiconductor layer 55 is formed on the gate insulating layer on which the gate electrode 31 is disposed, and the ohmic contact layers 56 and 57 are formed on both sides of the semiconductor layer 55. A data bus line 20 is formed on the gate insulating film 50 to intersect with the gate bus line 30, and a source electrode 21 branching from the data bus line 20 is formed in contact with the ohmic contact layer 56. The drain electrode 22 is formed in contact with the ohmic contact layer 57 at a position opposite to the source electrode 21. By forming the gate electrode, the semiconductor layer, the ohmic contact layer, the source and the drain electrode, the TFT 15 is formed, and the passivation layer 60 including the TFT 15 is formed to cover the entire surface of the substrate. A contact hole is formed in the passivation film of the drain electrode 22 part, and the pixel electrode 40 which is in contact with the drain electrode 22 through the contact hole is formed on the passivation film 60. A portion of the pixel electrode 40 overlaps with a portion of the gate bus line 30 to form the storage capacitor electrode 35.

However, in the active matrix liquid crystal display panel having the structure of FIGS. 1 and 2, typical wiring defects at intersections of the thin films are shown as shown in FIGS. 3 and 4.

In FIG. 3, when holes 70 are formed in the gate insulating film 50 by dust 70, the gate bus line 30 comes into contact with the exposed data bus line 20. Such a state is called an interlayer short circuit or a short.

4 illustrates a case where the disconnection portion 80 is formed on the data bus line 20 due to a line step at the portion where the gate bus line 30 intersects with the gate insulating film 50.

As described above, in the wiring structure, the main defect modes are interlayer short circuit and disconnection. In either case, not only the defective pixel portion but also one column in which the defective pixels and the wiring share the wiring cause display defects.

Therefore, in order to check the wiring defect as described above, after the TFT and the pixel electrode are formed, an electrical functional test is performed.

A conventional electrical functional test method of an active matrix liquid crystal display panel will be described with reference to FIGS. 1 and 5.

In the operation of the active matrix liquid crystal display panel, when the turn-on voltage of the TFT 15 is applied to the gate bus line 30, information sent to the data bus line 20 is sent to the pixel electrode 40 through the TFT 15, and the storage capacitor electrode Stored at 35 A method of forming the storage capacitor electrode 35 includes a method of forming a gate bus line and a method of forming a separate line. The former is called an additional capacitance method. That is, the structure of FIG. 1 becomes a storage capacitance method.

As an example, the electrical functional test of an active matrix liquid crystal display panel having a lateral capacitance type structure is performed by shorting the gate bus line 30 into storm water and odd numbers, and then turning the gate bus line to PP 90 and the gate bus line. Connect the storm line of PP 91 to PP 91. In order to efficiently detect defects, data bus lines are divided into 20 degree rainwater and odd numbers, and after shortening, respectively, the nose lines of the data bus lines are connected to PP 92 and the storm line of data bus lines are connected to PP 93. The active matrix liquid crystal display panel configured as described above is set in the inspection apparatus, and each PP is brought into contact with the terminal pad of the inspection apparatus.

In FIG. 5, first, when a turn-on voltage is applied to the nose line of the gate bus line through PP 90, the information input to the even line and the nose line of the data bus line through PP 92 and 93 is the superior of the gate bus line through TFT 15. It is stored in the storage capacitor electrode 35 and the pixel electrode 40 formed in the line. Thereafter, the TFT 15 is closed by the turn-off voltage. Then, when the turn-on voltage is applied to the even line of the gate bus line through the PP 91, the information is stored in the remaining pixel electrode 40 and the like.

Therefore, the information is stored throughout the active matrix liquid crystal display panel, and the inspection device which performs the electrical functional inspection of the stored information is read to check the normal part and the defective part.

However, the position of the PP formed in the conventional active matrix liquid crystal display panel varies depending on the model as shown in FIGS. 6 and 7.

6 is a structure in which two liquid crystal display panels 100 of a 5 inch model are formed on a glass substrate 10, and a PP (gate excellent PP, gate radix) for use in performing electrical functional inspection of the liquid crystal display panel around the liquid crystal display panel 100. PP, data storm PP, data radix PP, etc.) are formed. The PP is formed in each of the selected regions of 1, 2, 3, 4, 5, 6 of FIG.

In addition, in FIG. 7, the glass substrate 10 has a structure in which one 10-inch liquid crystal display panel 200 is formed on the glass substrate 10. Gate odd PP, data even PP, data odd PP, etc.) are formed. The PP is formed in each of the selected areas of 101, 102, 103 and 104 of FIG.

As can be seen from FIG. 6 and FIG. 7, since the position of the PP formed on the glass substrate is different according to the model of the liquid crystal display panel, an inspection apparatus and a jig are separately required for each model to perform the electrical functional test of the liquid crystal display panel. Will be done.

According to the present invention, PP, which is used to perform an electrical function test of a liquid crystal display panel, is formed at a fixed position of a glass substrate regardless of the model of the liquid crystal display panel.

That is, in an exemplary embodiment of the present invention, as shown in FIG. 9, the radix PP 590 of the gate bus line 530 and the even PP591 of the gate bus line 530 and the radix PP 592 of the data bus line 520 are located at a predetermined position of the glass substrate 510 regardless of the model of the liquid crystal display panel as shown in FIG. Excellent PP 593 and so on.

More specifically, the base PP 590 of the gate bus line 530 is formed at the same coordinates (X, Y) regardless of the 5-inch or 10-inch class of the liquid crystal display panel, and the PP 5 [91,592,593 degrees is a predetermined position. Is formed in the same way.

Accordingly, an object of the present invention is to reduce the number of C inspection equipment and to reduce the jig replacement time of the inspection equipment by allowing the same inspection jig and apparatus to be used regardless of the size of the liquid crystal display panel.

1 is a plan view of a general liquid crystal display panel,

2 is a cross-sectional view of FIG. 1,

3 and 4 are cross-sectional views illustrating line breaks and shorts in a process of manufacturing a general liquid crystal display panel.

5 is a circuit diagram illustrating a state in which a conventional PP and a liquid crystal display panel are connected.

6 and 7 are diagrams schematically showing a state in which a conventional PP formation region and a liquid crystal display panel are formed on a glass substrate.

8A is a circuit diagram illustrating a state in which a part of the PP of the present invention, a gate bus line, and the like are patterned,

8B is a circuit diagram illustrating a state in which a part of the PP and a data bus line of the present invention are patterned,

8C is a cross-sectional view showing an example of the structure of a switching element and a pixel electrode of the present invention;

9 is a circuit diagram showing a state in which a PP and a liquid crystal display panel of the present invention are connected;

10 and 11 are diagrams schematically showing a state in which the PP and the liquid crystal display panel of the present invention are configured on a glass substrate.

* Explanation of symbols for main parts of the drawings

10,510: glass substrate 15: switching element (TFT)

20,520: data bus line 21,521: source electrode

22,522 drain electrode 30,530 gate bus line

31,531: gate electrode 35: storage capacitor electrode

40,540: pixel electrode 50,550: gate insulating film

55,555: Semiconductor layer 56,57,556,557: Ohmic contact layer

60,560: Shield

90,91,92,93,590,591,592,593: probe pad (PP)

100,600: 5-inch liquid crystal display panel 200,700: 10-inch liquid crystal display panel

According to the present invention, a plurality of gate bus lines and a plurality of data bus lines are formed in a matrix on a glass substrate, a switching element is formed at an intersection point of the gate bus line and the data bus line, and the pixel electrode connected to the switching element is A liquid crystal display panel is formed in an area surrounded by a gate bus line and the data bus line, and a plurality of probe pads PP for inspecting the electrical function of the liquid crystal display panel are related to the size and model of the liquid crystal display panel. Cushing so that the fin is fixed to a predetermined position of the glass substrate.

Each of the PPs includes at least one PP connected by shorting an excellent line of a gate bus line, a PP connected by shorting a radix line of a gate bus line with a PP, and a PP connected by shorting an excellent line of a data bus line with one. The PP connected by shorting the nose line of a bus line into one is comprised.

PP of the liquid crystal display panel of the present invention will be described in detail with reference to FIGS. 8, 9, 10, and 11.

EXAMPLE

First, as shown in FIG. 8A, a gate bus line 530 and a gate electrode (not shown) branching from the gate bus line are formed in a predetermined patine in the F region (region of the liquid crystal display panel) surrounded by a dotted line on the glass substrate 510. At this time, after the switching element and the pixel electrode are formed in the area F of the liquid crystal display panel, part of the PP for the electrical functional inspection of the liquid crystal display panel, that is, the PP 590 and the data connected by shorting all the odd lines of the gate bus line are connected. PP 593, which is connected by shorting all the good lines of the bus line, is formed by simultaneously patterning the edges of the glass substrate 510. However, in order to achieve the object of the present invention, PP 590 and 593 should be formed at a predetermined position regardless of the model or size of the liquid crystal display panel formed on the glass substrate. The shape may be flexibly changed according to the line pattern of the liquid crystal display panel.

Subsequently, as shown in FIG. 8A, a gate insulating film is coated on the entire surface of the substrate on which the gate bus line, some PP, etc. are patterned, and contact holes are formed in portions 910, 920, 930, and 940 in the flow region to form metals at the end portions of the patterned lines. Allow the membrane to be exposed.

After the above process, a semiconductor layer and an ohmic contact layer are formed in an island shape on the gate insulating film of the gate electrode portion, a data bus line is formed in the F region in a pattern shape of FIG. 8B, and a predetermined position of the edge portion of the glass substrate is formed. On the other hand, short circuits of gate bus lines and short circuits of connected PF 591 and data bus lines are all shorted to form connected PP 592 at the same time. As described above, when the pattern of FIG. 8B is formed on the substrate on which the pattern of FIG. 8A is formed, the metal exposed by the contact holes 910, 920, 930, and 940 of FIG. 8A is exposed at line ends of portions 810, 820, 830, and 840 of FIG. 8B. Are in contact with each other.

Like PP 590 and 593, the PP 591 and 592 should always be formed at a predetermined position regardless of the model or size of the liquid crystal display panel formed on the glass substrate. Can be changed to

The reason why the PP is connected to the gate bus line and the data bus line through the contact flows 910, 920, 930 and 940 is to prevent the short circuit between the odd and even lines.

8A and 8B, the switching element and the pixel electrode as shown in FIG. 8C are formed in the intersection area of the data bus line and the gate bus line. 8C, 510 is a glass substrate, 531 is a gate electrode, 550 is a gate insulating film, 555 is a semiconductor layer, 556, 557 is an ohmic contact layer, 520 is a data bus line, 521 is a source electrode, 522 is a drain electrode, and 560 is a protective film. 540 denotes a pixel electrode.

When the liquid crystal display panel is configured through the processes of FIGS. 8A, 8B, and 8C, the liquid crystal display panel and the PP are formed on the glass substrate as shown in FIG. 9.

The substrate of FIG. 9 is subjected to an electrical functional test such as disconnection and short-circuit of the gate bus line and the data bus line, and then cut along the dotted line of the region of the liquid crystal display panel, that is, the F region, to assemble the liquid crystal display panel.

For the sake of understanding, referring to the structure in which two 5-inch liquid crystal display panels are formed on the same size glass substrate (FIG. 10) and the structure in which one 10-inch liquid crystal display panel is formed (FIG. 11), The formation position of PP is explained in full detail.

Assuming that the glass substrate 510 of FIG. 10 and the glass substrate 510 of FIG. 11 have the same size, the liquid crystal display panel formed in the area of the glass substrate 510 is designed differently according to the model or size.

For example, in FIG. 10, two 5-inch LCD panels 600 are formed in the area of the glass substrate 510. PP 590, 591, 592, and 593 for the electrical functional inspection of the liquid crystal display panel are defined in the glass substrate 510. It is formed at a fixed position of.

In FIG. 11, one 10-inch liquid crystal display panel 700 is formed in the area of the glass substrate 510, and PP 590, 591, 592, and 593 for the electrical functional inspection of the liquid crystal display panel are prescribed by the glass substrate 510. It is formed in a fixed position.

10 and 11, PP 590, 591, 592 and 593 are formed at the same position regardless of the size and model of the liquid crystal display panel formed on the glass substrate.

That is, the formation position (coordinate XY) of PP 590 of FIG. 10 and the formation position (coordinate XY) of PP 590 of FIG. 11 are the same, and remainder PP 591, 592, 593 is similarly formed in the same position.

In particular, when one liquid crystal display panel is formed in FIG. 11 and two PP groups are formed, one PP group may be used as a spare.

PP 590, 591, 592, and 593 of the liquid crystal display panel of the present invention are always formed at a predetermined position of the glass substrate 510 regardless of the model or the number of sizes of the liquid crystal display panel as shown in FIGS. According to the design of the model, there is no need to manufacture different inspection jig, and it is effective to reduce the time to replace the inspection jig.

Claims (2)

A plurality of gate bus lines and a plurality of data bus lines are formed in a matrix on a glass substrate, a switching element is formed at an intersection point of the gate bus line and the data bus line, and a pixel electrode connected to the switching element is the gate bus line. And a liquid crystal display panel formed in an area enclosed by the data bus line, and a plurality of probe pads for inspecting the electrical function of the liquid crystal display panel, regardless of the size and model of the liquid crystal display panel. The probe pad of the liquid crystal display panel, characterized in that the configuration is fixed to the position. The method of claim 1, wherein the plurality of probe pads include: a probe pad connected by shorting an even line of a gate bus line to one; a probe pad connected by shorting a radix line of a gate bus line into one; A probe pad of a liquid crystal display panel, comprising: a probe pad connected by shorting and a probe pad connected by shorting the nose line of the data bus line into one.