KR19980072355A - Liquid crystal display device and manufacturing method thereof - Google Patents

Abstract

The present invention is formed by simultaneously patterning the slit repair wiring 102 separated from the gate bus line when the gate bus line 115 is patterned on the transparent substrate. An insulating film is deposited on the entire surface of the substrate on which the repair wiring 102 and the like are formed, and a data bus line 116 intersecting the gate bus line 115 is formed on the insulating film. Both edge portions of the data busline 116 overlap part of the slit repair wiring 102.

By forming the repair wiring 102 in the above manner, a separate mask process for forming the repair wiring can be omitted, and the disconnection state of the data bus line 116 can be easily inspected.

In addition, when the pixel electrode 106 is shorted in the manufacturing process of the liquid crystal display device and the data bus line 116 is disconnected, the data of the 145 and 160 portions are irradiated with lasers having less energy than before. The disconnection of the bus line 116 and the short defect of the pixel electrode 106 can be repaired.

Description

Liquid crystal display device and manufacturing method thereof

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a liquid crystal display device widely used in portable information communication devices such as a personal computer, a mobile computer, an audio visual (AV), a game or a simulation device, and a manufacturing method thereof.

More specifically, when a defect occurs in which the data bus line is disconnected or the pixel electrode is shorted in the manufacturing process of the liquid crystal display device, a repair wiring can be formed in the liquid crystal display device which can be used as a means for repairing the defect. And a liquid crystal display device provided with the repair wiring.

Methods for repairing disconnection of a data bus line or short circuit defect of a pixel electrode generated in the manufacturing process of the liquid crystal display have been actively studied in related companies and research institutes.

The method for repairing the defect will be described below by taking the conventionally proposed technique as an example.

Japanese Patent Publication (Publication No. 02-254419) proposes that a repair wiring is constructed as shown in FIGS. 1, 2, and 3.

The gate bus line 15 and the data bus line 16 cross each other, and the pixel electrode 6 is formed in an area surrounded by the gate bus line 15 and the data bus line 16.

A TFT 7 serving as a switching element is formed at a portion where the gate bus line 15 and the data bus line 16 cross each other, and a pixel electrode 6 is connected to the TFT 7. The repair wiring 2, which is used as a means for repairing pixel defects or disconnection of the data bus line due to FTF defects, is part of the edges of the data bus line 16 and the gate bus line 15, and the edge of the pixel electrode 6. It is formed to overlap with part of.

The structure of FIG. 1 in which the repair wiring 2 is formed will be described more reliably by FIGS. 2 and 3.

FIG. 2 is a cross-sectional view taken along line a-a of FIG. 1, and the repair wiring 2 is formed on the transparent glass substrate 10.

An insulating film 3 covering the repair wiring 2 is formed. On the insulating film 3, a gate electrode 15a, a channel layer 25, a source electrode 16a, and a drain electrode 16b constituting the TFT are formed.

The pixel electrode 6 is in contact with the drain electrode 16b.

A protective layer 26 is formed to cover the pixel electrode 6, the source electrode 16a, the drain electrode 16b, and the like.

Reference numeral 23, which is not described, is a gate insulating film.

3 is a cross-sectional view taken along line b-b of FIG. 1, and the repair line 2 is formed on the transparent glass substrate 10.

An insulating film 3 and a gate insulating film 23 are formed on the repair wiring 2.

A disconnected data bus line 16 is formed on the gate insulating layer 23, and a passivation layer 26 covering the data bus line 16 is formed.

The disconnected data bus line 16 and the repair wiring 2 are connected to each other by a connecting line 50 formed by laser irradiation or the like.

Since the repair wiring 2 formed as described above is patterned after forming a separate metal film or the like, a mask process is additionally required.

Another method for repairing disconnection defects between the pixel electrode short and the data bus line of the conventional liquid crystal display will be described with reference to the structures of FIGS. 4 and 5.

In FIG. 4, the TFT 7 is formed at the intersection of the data bus line 16 and the gate bus line 15, and the pixel electrode 6 in contact with the TFT is formed in an area surrounded by the gate bus line 15 and the data bus line 16.

The pixel electrode 6 is shorted with an adjacent pixel electrode.

As described above, when the pixel electrode is in contact with an adjacent pixel electrode, the conventional repairing method irradiates a 45 part with a laser to separate the shorted pixel electrode.

The repair method of FIG. 4 requires a laser having high energy and high frequency in order to cut the shorted pixel electrode because the pixel electrode is transparent and does not absorb the laser well. It creates another problem that causes damage.

5, data bus line 16 and gate bus line 15 are formed in a matrix. 47 of the data bus line 16 are disconnected.

As described above, when the data bus line 16 is disconnected, in the conventional repair method, a separate repair wiring 2 is formed, and 46 parts intersecting the repair wiring 2 and the disconnected data bus line are connected.

The problem with the repairing method of FIG. 5 is that the repair wiring is long and the resistance is increased, and the signal delay is increased because parasitic capacitance is generated at the intersection of the repair wiring and each line, in particular, at the intersection with the gate bus line.

Therefore, the larger the liquid crystal display device is, the larger the signal delay and the lower the image quality.

1 is a plan view of a conventional liquid crystal display device;

2 and 3 are cross-sectional views of FIG. 1,

4 is a plan view of a conventional liquid crystal display device in which a pixel electrode is shorted;

5 is a wiring diagram of a conventional liquid crystal display device in which a repair wiring is formed;

6, 7, and 8 are plan views of the liquid crystal display of the present invention in which the repair wiring is formed;

9 and 10 are cross-sectional views of FIG. 6,

11, 12A and 12B are plan views illustrating the repair wiring of FIG. 6,

13 is a cross-sectional view of FIG. 12B,

FIG. 14 is a plan view illustrating another structure of the gate bus line of FIG. 6;

15 is a plan view for explaining another structure of the repair wiring of FIG. 6;

16 is a cross-sectional view of FIG. 15,

17 and 18 are cross-sectional views of FIG. 7,

FIG. 19 is a plan view illustrating the repair wiring of FIG. 7;

20 and 21 are cross-sectional views of FIG. 8,

22 and 23 are plan views illustrating the repair wiring of FIG. 8.

* Description of the symbols for the main parts of the drawings *

2, 102, 102a, 102b: Repair wiring

6, 106 pixel electrodes

7, 107: TFT

10, 110: transparent glass substrate

15, 115: Gate Bus Line

15a, 115a: gate electrode

16, 116: data bus line

16a, 116a: source electrode

16b, 116b: drain electrode

23, 123: gate insulating film

26, 126: protective shield

The present invention for improving the above problems is an object to improve the yield of the liquid crystal display device by efficiently forming the repair wiring.

Another object of the present invention is to efficiently form a repair wiring to prevent signal delay.

Still another object of the present invention is to repair a liquid crystal display by irradiating a laser of less energy than before, so that the switching element and the liquid crystal of the liquid crystal display are not damaged.

The liquid crystal display of the present invention for achieving the above object is provided with a gate bus line 115 and a data bus line 116 intersecting without contact with each other on the transparent glass substrate as shown in FIG. The intersection portion of the gate bus line 115 and the data bus line 116 is provided with a TFT 107 which is a switching element connected to the gate bus line 115 and the data bus line 116. The pixel electrode 106 connected to the TFT 107 is provided in an area surrounded by the gate bus line 115 and the data bus line 116. Two isolated slit repair wiring 102 is provided near the data bus line 116. The slit repair wiring 102 is formed on the same layer as the gate bus line 115 and partially overlaps the edge of the data bus line 116 via an insulating film.

The process of providing a liquid crystal display device having a structure as shown in FIG. 6 includes simultaneously forming a gate bus line, a gate electrode branching from the gate bus line, and the isolated slit repair wiring on a transparent glass substrate;

Forming an insulating film on the gate bus line, the gate electrode, and the substrate on which the slit repair wiring is isolated;

Forming a channel layer in an island shape on the insulating film of the gate electrode portion, intersecting the gate bus line on a substrate on which the insulating film and the channel layer are formed, overlapping an edge portion of the slit repair wiring, Forming a data bus line whose portion does not overlap with the slit repair wiring, and forming source and drain electrodes branching from the data bus line in the island-like channel layer;

Forming a protective film on the substrate on which the data bus line and the source and drain electrodes are formed;

And forming a pixel electrode connected to the drain electrode on the substrate on which the passivation layer is formed.

Another structure for achieving the object of the present invention is provided with a gate bus line 115 and a data bus line 116 intersecting without contact with each other on the transparent glass substrate as shown in FIG.

The intersection portion of the gate bus line 115 and the data bus line 116 is provided with a TFT 107 which is a switching element connected to the gate bus line 115 and the data bus line 116. The pixel electrode 106 connected to the TFT 107 is provided in an area surrounded by the gate bus line 115 and the data bus line 116. Two isolated slit repair wiring 102 is provided near the data bus line 116. The slit-shaped repair wiring 102 is disposed parallel to both sides of the data bus line 116 at a predetermined interval from the data bus line 116 on the same floor as the data bus line 116, and the data bus line 116 and the slit type. A protective film is interposed between the repair wiring 102 layer and the pixel electrode 106 layer.

The process of manufacturing a liquid crystal display device having a structure as shown in FIG. 7 includes forming a gate bus line and a gate electrode branching from the gate bus line on a transparent glass substrate;

Forming an insulating film on the substrate on which the gate bus line and the gate electrode are formed;

Simultaneously forming a channel layer and two slit repair wirings on the insulating film;

Forming a data bus line intersecting the gate bus line on the insulating film and positioned between the slit repair line and a source / drain electrode branching from the data bus line on the channel layer;

Forming a protective film on the substrate on which the data bus line, the source and drain electrodes and the slit repair wiring are formed;

And forming a pixel electrode connected to the drain electrode on the substrate on which the passivation layer is formed.

The slit repair wiring formed simultaneously with the channel layer may be formed using a metal film or the like in a separate process, and may be formed simultaneously with the data bus line when the data bus line is formed.

In still another embodiment of the present invention, a gate bus line 115 and a data bus line 116 are provided on the transparent glass substrate to cross each other without being in contact with each other.

An intersection point of the gate bus line 115 and the data bus line 116 is provided with a TFT 107 which is a switching element connected to the gate bus line 115 and the data bus line 116. The pixel electrode 106 connected to the TFT 107 is provided in an area surrounded by the gate bus line 115 and the data bus line 116. Two isolated slit repair wirings 102a and 102b are provided near the data bus line 116. The slit repair wiring 102a is formed on the same layer as the gate bus line 115, and a part of the slit repair wiring 102b overlaps an edge portion of the data bus line 116 via an insulating film, and the slit repair wiring 102b is the data bus line. It is formed on the same layer as 116 at regular intervals from the data bus line 116, and is disposed on both sides of the data bus line 116, and a part of the pixel electrode 106 is overlapped with a protective film.

8 is a process of simultaneously forming a gate bus line, a gate electrode branching from the gate bus line, and an isolated first slit repair wiring on a transparent glass substrate.

Forming an insulating film on the substrate on which the gate bus line and the slit repair wiring 102a are formed.

Simultaneously forming a channel layer and a slit repair wiring 102b on the insulating film.

A data bus line intersecting the gate bus line on the insulating film, overlapping an edge portion of the slit repair wiring 102a, spaced at a predetermined distance from the repair wiring 102b, and branching from the data bus line on the channel layer. A step of forming a source and drain electrode.

Forming a protective film on the substrate on which the data bus line, the source and drain electrodes, and the slit repair wiring 102b are formed.

And forming a pixel electrode connected to the drain electrode on the substrate on which the passivation layer is formed.

The slit repair wiring 102b formed at the same time as the channel layer may be formed using a metal film or the like in a separate process, and may be formed simultaneously with the data bus line when the data bus line is formed.

The manufacturing method of the liquid crystal display device of the present invention having the above structure and process will be described in detail in the embodiment.

Example 1

The manufacturing process of the liquid crystal display device having the structure as shown in FIG. 6 will be described with reference to FIGS. 9 (cross section taken along line a-a of FIG. 6) and FIG. 10 (cross section taken along line b-b of FIG. 6).

First, any one of metals such as Al, Cr, Mo, Ta, and W is deposited on the transparent glass substrate 110, and the metal is patterned to form a gate bus line 115 and a gate electrode 115a branching from the gate bus line. A slit repair wiring 102 separated from the line 115 is formed at the same time.

Subsequently, a gate insulating film 123 made of an inorganic film such as SiNx or SiOx, a semiconductor layer made of an a-Si layer, and a semiconductor layer doped with impurities are formed on the substrate on which the gate bus line 115 and the gate electrode 115a and the slit repair wiring 102 are formed. After successive deposition, the semiconductor layer is patterned to form a channel layer 125 in an island shape on the gate electrode 115a.

Depositing any one of metals such as Cr, Mo, Ta, and W on the substrate on which the channel layer 125 is formed, and patterning the metal to intersect the gate bus line 115, and the edge portion of the slit repair wiring 102; A data bus line 116 is formed which overlaps with the center portion and does not overlap the slit repair wiring 102. A source electrode 116a and a drain electrode 116b branching from the data bus line 116 are formed on the island-like channel layer 125. do.

Subsequently, a protective film 126 made of an organic insulating film, an inorganic insulating film, or the like is formed on the substrate on which the data bus line 116, the source electrode 116a, and the drain electrode 116b are formed.

Subsequently, a contact hole is formed in the passivation layer 126 of the drain electrode 116b, an indium tin oxide (ITO) film is deposited on the passivation layer 126, and then patterned to form a pixel electrode 106.

The slit-type repair wiring 102 is a portion overlapping with the edge portion of the data bus line, where a is 20 μm or more so as not to short with the gate bus line 115 as shown in FIG. 11, and b is 2 μm or more so as not to overlap the pixel electrode 106. d is formed to maintain an interval of 3 m, e is 4 m, and c is 1 m.

By forming the slit-type repair wiring 102 as described above, when the light is irradiated on the front surface of the substrate and the disconnection of the data bus line is inspected on the back surface, light leakage occurs in the center portion of the data bus line, that is, the portion e of FIG. By observing the disconnection of the data line can be easily inspected.

In addition, since the repair wiring is formed at the same time as the gate bus line, there is no need to perform a separate mask process to form the repair wiring.

In addition, when the pixel electrode 106 is shorted, the shorted pixel electrode can be separated by irradiating the c portion of the opaque slit-type repair wiring with less energy than conventionally, so that the liquid crystal display is not damaged without TFT or liquid crystal. The device can be repaired.

12A illustrates a state in which the pixel electrode 106 is shorted in the manufacturing process of the liquid crystal display.

FIG. 12B illustrates a state in which the data bus line 116 is disconnected in the manufacturing process of the LCD.

As shown in FIG. 12A, when the adjacent pixel electrode 106 is shorted, the shorted pixel electrode 106 is separated by irradiating a laser on the portion 145. By irradiating the laser on the 145 portion, the slit repair wiring 102, which is opaque in the lower layer, absorbs the energy of the laser.

Therefore, the shorted pixel electrode can be easily separated even by irradiating a laser having low energy and low frequency as compared with the conventional art.

In addition, when the data bus line 116 is disconnected as shown in FIG. 12B, the data bus line 116 and the slit repair wiring 102 disconnected as shown in FIG. 13 (cross section taken along line aa in FIG. 12B) are irradiated with a laser. The data bus lines are melted to form interconnects 150 so that the interconnects are connected to each other.

As described above, since the slit-type repair wiring 102 connects the data bus lines directly at the disconnected portion, signal delay due to the repair wiring is not generated as in the structure of FIG. 5.

Example 2

In the same method of manufacturing a liquid crystal display device as in Example 1, the gate bus line 115 is a first metal layer 300 made of Al or the like and a second metal selected from Cr, Mo, Ta, W, etc. as shown in FIG. A metal layer is formed by laminating the transparent glass substrate 110, and the gate electrode 115a and the slit repair wiring 102 are simultaneously formed of the second metal layer.

As described above, when the gate bus line 115 is formed with only Al metal by forming Al metal of the first metal having a lower resistance than the second metals such as Cr, Mo, Ta, and W in the lower layer. That is, it is possible to prevent the lines from shorting to each other due to the occurrence of a hillock, and to reduce the resistance of the gate bus line 115.

The repairing method of disconnection of the data bus line and short defect of the pixel electrode is the same as in the first embodiment.

Example 3

In the same method of manufacturing a liquid crystal display device as in Example 1, the slit-shaped repair wiring 102 formed on the transparent glass substrate 110 has an island shape at both ends overlapping the data bus line 116 as shown in FIGS. 15 and 16. An Al metal 330 from which hillocks are generated is formed.

When Al metal 330 is formed in an island shape on the slit-shaped repair wiring 102 as described above, when the data bus line 116 is disconnected at 129 part, when the heat is applied at 300 to 400 ° C. with a laser or the like on 160 part, the heel lock is formed on the Al metal 330. As a result, the hillock serves as a connection line 150 connecting the disconnected data bus line 116 and the slit repair wiring 102 to each other.

When the slit-type repair wiring 102 is formed as described above, since Al metal has a lower melting point than the metals such as Cr, Mo, Ta, and W, which constitute the slit-type repair wiring, fewer than those in Examples 1 and 2 Irradiation of an energy laser can also repair the disconnection of the data bus line.

The repairing method when the pixel electrode 106 is shorted is the same as in the first embodiment.

Example 4

The manufacturing process of the liquid crystal display device having the structure as shown in FIG. 7 will be described with reference to FIGS. 17 (cross section taken along line a-a of FIG. 7) and FIG. 18 (cross section taken along line b-b of FIG. 7).

First, any one of metals such as Al, Cr, Mo, Ta, and W is deposited on the transparent glass substrate 110, and the metal is patterned to form a gate bus line 115 and a gate electrode 115a branching from the gate bus line.

Subsequently, a gate insulating film 123 made of an inorganic film such as SiNx or SiOx, a semiconductor layer made of an a-Si layer, and a semiconductor layer doped with impurities are successively deposited on the substrate on which the gate bus line 115 and the gate electrode 115a are formed. The layer is patterned to form the channel layer 125 in an island shape on the gate electrode 115a.

Depositing any one of metals such as Cr, Mo, Ta, and W on the substrate on which the gate insulating layer 123 and the channel layer 125 are formed, and patterning the metal to cross the gate bus line 115; A source electrode 116a and a drain electrode 116b branching from the data bus line 116 are formed on the channel layer.

A slit repair line 102 is formed on the gate insulating layer 123 at a predetermined distance from the data bus line 116 and disposed parallel to both sides of the data bus line 116.

The slit repair wiring 102 is simultaneously patterned when the channel layer 125 is formed.

The semiconductor layer may be formed of a material constituting the channel layer, that is, a-Si.

The slit repair wiring 102 may be formed of metal such as Cr, Ta, Mo, or W by simultaneously patterning the data bus line 116.

A protective film 126 made of an organic insulating film, an inorganic insulating film, or the like is formed on the substrate on which the data bus line 116, the source electrode, the drain electrode, and the slit repair wiring 102 are formed.

In an exemplary embodiment, a contact hole is formed in the passivation layer 126 of the drain electrode 116b, an ITO (Indium Tin Oxide) film is deposited on the passivation layer 126, and then patterned to form a pixel electrode 106.

When the slit repair wiring 102 is formed of a semiconductor layer such as a-Si, the pixel electrode is transparent even if the repair wiring is transparent even if a part of the slit repair wiring 102 overlaps, as shown in FIG. Does not affect

When the slit-type repair wiring 102 is formed at the same time as the data bus line 116 or the channel layer 125, there is no need to perform a separate mask process to form the repair wiring.

In addition, when the pixel electrode 106 is shorted as shown in FIG. 19, the 145 portion of the slit repair wiring 102 can be irradiated with a laser having a lower energy and a lower frequency than the conventional FIG. 4 to separate the shorted pixel electrode. The liquid crystal display can be repaired without damaging the TFT or liquid crystal.

The slit repair wiring made of a-Si absorbs the visible light region well when the laser is irradiated to 145 parts, so that the effect is almost the same as that of separating the shorted part using the repair wiring made of opaque metal. Can be.

Example 5

The manufacturing process of the liquid crystal display device having the structure shown in FIG. 8 will be described with reference to FIGS. 20 (cross section taken along the line a-a of FIG. 8) and 21 (cross section taken along the line b-b of FIG. 8).

First, any one of metals such as Al, Cr, Mo, Ta, and W is deposited on the transparent glass substrate 110, and the metal is patterned to form a gate bus line 115 and a gate electrode 115a branching from the gate bus line. A line 115 and a branched slit repair wiring 102a are simultaneously formed.

Subsequently, the gate bus line 115, the gate electrode 115a, and the slit repair wiring 102a are formed on the substrate. After successive deposition, the semiconductor layer is patterned to form a channel layer 125 in an island shape on the gate electrode 115a.

Deposit any one of metals such as Cr, Mo, Ta, W, and the like on the substrate on which the gate insulating layer 123 and the channel layer 125 are formed, and pattern the metal to cross the gate bus line 115, and the slit repair wiring 102a. A data bus line 116 overlapping with an edge portion of the data bus line 116 is formed, and a source electrode 116a and a drain electrode 116b branching from the data bus line 116 are formed on the island-like channel layer 125.

Subsequently, a slit repair wiring 102b made of metal, a-Si, or the like is formed on the gate insulating layer 123 so as to be parallel to the data bus line 116 at regular intervals from the data bus line 116.

When viewed in plan view, the slit repair wiring 102a partially overlaps and parallels the data bus line 116. In addition, the slit repair wiring 102b is disposed in parallel with the data bus line 116 at a side where the slit repair wiring 102a is not formed.

The slit repair wiring 102a has a width of 20 μm or more so as not to overlap with the gate bus line 115 and a short as shown in FIG. 22, and b is 2 μm or more so as not to overlap the pixel electrode 106, and the width does not overlap with the data bus line. c is 1 탆, and the portion d overlapping the edge of the data bus line is formed to maintain a spacing of 3 탆.

The slit-type repair wiring 102b is formed to maintain the width of e or more so as not to short with the data bus line 116.

Particularly, when the channel layer 125 is formed, the slit repair wiring 102b may be formed of a semiconductor layer made of a material, that is, a-Si, by simultaneously patterning the channel layer 125.

In addition, the slit-type repair wiring 102b may be formed of metal such as Cr, Ta, Mo, and W by simultaneously patterning the data bus line 116.

Subsequently, a protective film 126 made of an organic insulating film, an inorganic insulating film, or the like is formed on the substrate on which the data bus line 116, the source electrode 116a, the drain electrode 116b, and the slit-type aqueous wiring 102b are formed.

Subsequently, a contact hole is formed in the passivation layer 126 of the drain electrode 116b, an indium tin oxide (ITO) film is deposited on the passivation layer 126, and then patterned to form a pixel electrode 106.

By forming the slit-type repair wirings 102a and 102b in the liquid crystal display device as described above, the disconnection of the data bus line 116 and the short defect of the pixel electrode 106 can be efficiently repaired.

FIG. 23 is a diagram illustrating a state in which a data bus line is disconnected and a pixel electrode is shorted in the process of manufacturing a liquid crystal display according to the fifth embodiment.

The repair process of the disconnection of the data bus line 116 and the short defect of the pixel electrode 106 will be described using the slit-type repair wirings 102a and 102b shown in FIG.

The inspection of the disconnection defect of the data bus line 116 is performed by observing the leakage of light in a portion where the slit repair wiring 102a and the data bus line 116 do not overlap in the same manner as in the first embodiment.

As a result of the inspection, when the data bus line 116 is disconnected as shown in FIG. 23, a laser beam is irradiated to 160 portions of the disconnected data bus line to connect the disconnected data bus line 116 and the slit repair wiring 102 to each other. The structure in which the data bus line is repaired is the same as in FIG.

In addition, when the pixel electrode 106 is shorted, the shortened pixel electrode 106 is separated by irradiating a laser on the portion 145 so that the lower slit repair wirings 102a and 102b absorb the laser energy.

Therefore, the shorted pixel electrode can be easily separated even by irradiating a laser having a low energy and a low frequency compared with the conventional one, so that the liquid crystal display device can be repaired without damaging the TFT or liquid crystal.

In addition to the features described above, in the structure of the present embodiment, since the repair wiring is formed at the same time as forming the gate bus line, the channel layer, and the data bus line, there is no need to perform a separate mask process to form the repair wiring.

The present invention includes a plurality of gate bus lines and data bus lines intersecting each other without contacting each other on a transparent substrate,

A switching element connected to the gate bus line and the data bus line at each intersection portion of the gate bus line and the data bus line;

A pixel electrode connected to the switching element in an area surrounded by the gate bus line and the data bus line,

In the liquid crystal display device provided with a plurality of slit-type repair wiring in the vicinity of the data bus line,

The slit repair wiring is formed on the same layer as the gate bus line,

A portion of the data bus line is overlapped with an insulating layer interposed therebetween.

The slit-shaped repair wiring formed by another method is formed on the same layer as the data bus line, parallel to both sides of the data bus line, at regular intervals from the data bus line.

The first slit repair wiring of the slit repair wiring formed by another method is formed on the same layer at the same time as the gate bus line. ,

The second slit repair wiring is disposed parallel to the data bus line on the same layer as the data bus line, at a predetermined distance from the data bus line, and on the side where the first slit repair wiring is not formed. It features.

By forming the slit-type repair wiring as described above, a separate mask process for forming the repair wiring can be omitted, and the manufacturing yield of the liquid crystal display device can be improved.

12A, 12B, 19, and 23, in the manufacturing process of the liquid crystal display device, when the pixel electrode is shorted and the data bus line is disconnected, a laser having low energy and low frequency in the slit repair wiring part is provided. There is an effect that the disconnection of the data bus line and the short defect of the pixel electrode can be repaired without damaging the TFT or the liquid crystal by irradiating.

In addition, the slit-type repair wiring of the present invention is effective when applied to a large-area liquid crystal display device because there is no signal delay occurring when configuring the repair wiring as shown in FIG.

Claims (45)

A plurality of gate bus lines and data bus lines intersecting without contact with each other on a transparent substrate, An intersection portion of the gate bus line and the data bus line is provided with a switching element connected to the gate bus line and the data bus line; A pixel electrode connected to the switching element in an area surrounded by the gate bus line and the data bus line, In the liquid crystal display device provided with at least one isolated slit repair line in the vicinity of the data bus line, And the slit-type repair wiring is formed on the same layer as the gate bus line and partially overlaps an edge portion of the data bus line via an insulating film. The liquid crystal display device according to claim 1, wherein the slit repair wiring is made of an opaque conductive material. The liquid crystal display device according to claim 1, wherein the gate bus line and the slit repair line are made of the same material. 4. The liquid crystal display device according to claim 3, wherein the gate bus line and the slit repair wiring are any one selected from Al, Cr, Mo, Ta, and W. The liquid crystal display of claim 1, wherein the gate bus line is formed by stacking a first metal layer and a second metal layer, and the slit repair wiring is formed of the second metal layer. The liquid crystal display of claim 5, wherein the first metal layer is Al, and the second metal layer is any one selected from Cr, Mo, Ta, and W. 7. 2. The liquid crystal display device according to claim 1, wherein the slit-type repair wiring comprises a first metal layer and a second metal layer stacked in island shapes at both ends of the first metal layer. The method of claim 7, wherein The first metal layer is any one selected from Cr, Mo, Ta, and W, and the second metal layer is Al. It is provided with a gate bus line and a data bus line intersecting without contacting each other on the transparent substrate, A switching element connected to the gate bus line and the data bus line at an intersection of the gate bus line and the data bus line; A pixel electrode connected to the switching element in an area surrounded by the gate bus line and the data bus line; In the manufacturing method of the liquid crystal display device provided with at least one isolated slit repair wiring in the vicinity of the data bus line, A method of manufacturing a liquid crystal display device comprising the following steps. (1) forming a gate bus line, a gate electrode branching from the gate bus line, and the isolated slit repair wiring on the transparent substrate. (2) forming an insulating film on the substrate on which the gate bus line, the gate electrode, and the isolated slit repair wiring are formed. (3) forming a channel layer in an island shape on the insulating film of the gate electrode portion. (4) a data bus line intersecting the gate bus line on the substrate on which the insulating film and the channel layer are formed, overlapping an edge portion of the slit repair line, and a central portion not overlapping the slit repair line Form the Forming a source-drain electrode branching from said data bus line in said island-like channel layer. The method of manufacturing a liquid crystal display device according to claim 9, wherein the following step is added. (1) A step of forming a protective film on a substrate on which the data bus line and the source and drain electrodes are formed. (2) forming a pixel electrode connected to the drain electrode on the substrate on which the protective film is formed. The method of manufacturing a liquid crystal display device according to claim 9, wherein the slit repair wiring is made of an opaque conductive material. 10. The method of claim 9, wherein the gate bus line and the slit repair line are made of the same metal. The method of claim 12, wherein the metal is any one selected from Al, Cr, Mo, Ta, and W. 13. 10. The method of claim 9, wherein the gate bus line is formed by stacking a first metal layer and a second metal layer, and the slit repair wiring is formed of a second metal layer. The method of claim 14, wherein the first metal layer is Al, and the second metal layer is any one selected from Cr, Mo, Ta, and W. 15. 16. The disconnection of the data bus line according to any one of claims 9 to 15, wherein when the data bus line is disconnected, a laser is irradiated to a portion where the data bus line and the slit repair wiring overlap. A method of manufacturing a liquid crystal display device, comprising adding a process of connecting wealth. The pixel electrode according to any one of claims 9 to 15, wherein when the pixel electrode is in contact with a neighboring pixel electrode, the pixel electrode is irradiated with a laser to the slit repair wiring that does not overlap with the data bus line. Method of manufacturing a liquid crystal display device comprising the step of separating the separation from each other. 10. The method of claim 9, wherein the slit repair wiring is formed of a first metal layer and a second metal layer stacked in island shapes at both ends of the first metal layer. The method of claim 18, wherein the first metal layer is any one selected from Cr, Mo, Ta, and W, and the second metal layer is Al. 20. The process according to claim 18 or 19, wherein when the data bus line is disconnected, heat is applied to the second metal layer of the slit repair wiring overlapping the data bus line to connect the disconnection part of the data bus line. The manufacturing method of the liquid crystal display device added. 20. The first line of the slit repair wiring of claim 18 or 19, wherein when the pixel electrode is in contact with a neighboring pixel electrode, the first line of the slit repair wiring not overlapping the data bus line and not overlapping the second metal layer. And a step of separating the pixel electrodes from each other by irradiating a laser to a metal layer. It is provided with a gate bus line and a data bus line intersecting without contacting each other on the transparent substrate, An intersection portion of the gate bus line and the data bus line is provided with a switching element connected to the gate bus line and the data bus line; A pixel electrode connected to the switching element and surrounded by the gate bus line and the data bus line; In the liquid crystal display device provided with at least one or more slit repair wiring in the vicinity of the data bus line, And the slit-type repair wiring is disposed on both sides of the data bus line at regular intervals from the data bus line on the same layer as the gate bus line. 23. The liquid crystal display device according to claim 22, wherein a part of the slit repair wiring and a part of the pixel electrode overlap. 23. The liquid crystal display device according to claim 22, wherein the slit repair wiring is made of a-Si. 23. The liquid crystal display device according to claim 22, wherein the slit repair wiring is made of an opaque material. 23. The liquid crystal display device according to claim 22, wherein the slit repair wiring is the same as the material of the data bus line. 23. The apparatus of claim 22, wherein any one of the slit repair wirings is formed on the same layer as the gate bus line, and a portion of the slit repair wiring overlaps an edge portion of the data bus line via an insulating film. The other is a liquid crystal display comprising a parallel to the data bus line on the same layer as the data bus line, spaced apart from the data bus line. 28. The slit repair wiring disposed in parallel with the data bus line on a same layer as the data bus line and partially overlapping with the pixel electrode through a protective film. Liquid crystal display comprising a. 28. The slit repair wiring of claim 27, wherein the slit repair wiring formed on the same layer as the gate bus line is made of the same material as the gate bus line and is formed on the same layer as the data bus line. The liquid crystal display device which consists of a-Si. 28. The liquid crystal display device according to claim 27, wherein the slit repair wiring formed on the same layer as the gate bus line uses at least one of Cr, Ta, Mo, W, and Al. 28. The slit repair wiring of claim 27, wherein the slit repair wiring formed on the same layer as the gate bus line is made of the same material as the gate bus line and is formed on the same layer as the data bus line. Is a liquid crystal display device composed of the same material as the data bus line. The method of claim 31, wherein The slit repair wiring formed on the same layer as the gate bus line is any one selected from Cr, Ta, Mo, W, and Al, and the slit repair wiring formed on the same layer as the data bus line is Liquid crystal display device which is any one selected from Cr, Ta, Mo, W, Al. It is provided with a gate bus line and a data bus line intersecting without contacting each other on the transparent substrate, An intersection portion of the gate bus line and the data bus line is provided with a switching element connected to the gate bus line and the data bus line; A pixel electrode connected to the switching element and surrounded by the gate bus line and the data bus line; In the manufacturing method of the liquid crystal display device provided with a plurality of slit-type repair wiring in the vicinity of the data bus line, A method of manufacturing a liquid crystal display device comprising the following steps. (1) forming a gate electrode branching from the gate bus line on the transparent substrate. (2) forming an insulating film on the substrate on which the gate bus line and the gate electrode are formed. (3) forming a channel layer in an island shape on the insulating film of the gate electrode portion. (4) forming a data bus line intersecting the gate bus line on the insulating film and a source / drain electrode branching from the data bus line on the channel layer. (5) forming said slit repair wiring on said insulating film at a predetermined interval from said data bus line and arranged on both sides of said data bus line. (6) A step of forming a protective film on the substrate on which the data bus line, the source and drain electrodes, and the slit repair wiring are formed. (7) forming a pixel electrode connected to the drain electrode on the substrate on which the protective film is formed. 34. The method of claim 33, wherein the slit repair wiring is formed simultaneously with the channel layer. 35. The method of claim 34, wherein the slit repair wiring is a-Si. 34. The method of claim 33, wherein the slit repair wiring is formed simultaneously with the data bus line. 37. The manufacturing method of a liquid crystal display device according to claim 36, wherein said slit repair wiring is made of the same material as said data bus line. 38. The method of manufacturing a liquid crystal display device according to claim 37, wherein the slit repair wiring is any one selected from Cr, Ta, Mo, and W. 36. The method of manufacturing a liquid crystal display device according to any one of claims 33 to 35, wherein a part of the slit repair wiring and a part of the pixel electrode overlap. The method of manufacturing a liquid crystal display device according to claim 33, comprising the following steps. (1) forming a gate bus line, a gate electrode branching from the gate bus line, and an isolated first slit repair wiring on the transparent substrate. (2) A step of forming an insulating film on the substrate on which the gate bus line and the first slit repair wiring are formed. (3) forming a channel layer in an island shape on the insulating film of the gate electrode portion. (4) a data bus line intersecting the gate bus line on the insulating film and overlapping an edge portion of the first slit repair wiring, and a source / drain electrode branching from the data bus line on the channel layer; Forming process. (5) forming an isolated second slit repair wiring arranged on the insulating film in parallel with the data bus line at a predetermined distance from the data bus line. (6) A step of forming a protective film on the substrate on which the data bus line, the source and drain electrodes, and the second slit repair wiring are formed. (7) forming a pixel electrode connected to the drain electrode on the substrate on which the protective film is formed. 41. The method of claim 40, wherein the second slit repair wiring is formed simultaneously with the channel layer. 42. The method of manufacturing a liquid crystal display device according to claim 41, wherein the second slit repair wiring is made of a-Si. 43. The method of claim 42, wherein a part of the second slit repair wiring overlaps the pixel electrode. 41. The method of claim 40, wherein the second slit repair wiring is formed simultaneously with the data bus line. The method of claim 40, And wherein the first slit repair wiring is any one selected from Cr, Mo, Ta, W, and Al.