KR102941903B1 - 구조화된 벽을 갖는 유리 소자 및 그 제조방법 - Google Patents

구조화된 벽을 갖는 유리 소자 및 그 제조방법

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Publication number
KR102941903B1
KR102941903B1 KR1020237015746A KR20237015746A KR102941903B1 KR 102941903 B1 KR102941903 B1 KR 102941903B1 KR 1020237015746 A KR1020237015746 A KR 1020237015746A KR 20237015746 A KR20237015746 A KR 20237015746A KR 102941903 B1 KR102941903 B1 KR 102941903B1
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KR
South Korea
Prior art keywords
glass element
recess
less
wall
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020237015746A
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English (en)
Korean (ko)
Other versions
KR20230086721A (ko
Inventor
안드레아스 오르트너
파비앙 바그너
마르쿠스 하이스-슈케트
미하엘 드리쉬
바넷사 글래써
안니카 회르베르그
루카스 발터
라스 뮐러
다비드 소르
미하엘 클루게
베른드 호페
안드레아스 코글바우어
슈테판 무트
울리히 포이셔트
Original Assignee
쇼오트 아게
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 쇼오트 아게 filed Critical 쇼오트 아게
Publication of KR20230086721A publication Critical patent/KR20230086721A/ko
Application granted granted Critical
Publication of KR102941903B1 publication Critical patent/KR102941903B1/ko
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Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0738—Shaping the laser spot into a linear shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/55—Working by transmitting the laser beam through or within the workpiece for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/001—Other surface treatment of glass not in the form of fibres or filaments by irradiation by infrared light
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0015—Other surface treatment of glass not in the form of fibres or filaments by irradiation by visible light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials
    • B23K2103/54—Glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laser Beam Processing (AREA)
  • Glass Compositions (AREA)
KR1020237015746A 2020-10-13 2021-09-30 구조화된 벽을 갖는 유리 소자 및 그 제조방법 Active KR102941903B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020126856.4 2020-10-13
DE102020126856.4A DE102020126856A1 (de) 2020-10-13 2020-10-13 Glaselement mit strukturierter Wandung und Verfahren zu dessen Herstellung
PCT/EP2021/077030 WO2022078774A1 (de) 2020-10-13 2021-09-30 Glaselement mit strukturierter wandung und verfahren zu dessen herstellung

Publications (2)

Publication Number Publication Date
KR20230086721A KR20230086721A (ko) 2023-06-15
KR102941903B1 true KR102941903B1 (ko) 2026-03-19

Family

ID=78134920

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237015746A Active KR102941903B1 (ko) 2020-10-13 2021-09-30 구조화된 벽을 갖는 유리 소자 및 그 제조방법

Country Status (7)

Country Link
US (1) US20230311248A1 (https=)
EP (1) EP4229016A1 (https=)
JP (1) JP7826605B2 (https=)
KR (1) KR102941903B1 (https=)
CN (1) CN116323509A (https=)
DE (1) DE102020126856A1 (https=)
WO (1) WO2022078774A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022104180B4 (de) 2022-02-22 2026-04-30 Schott Ag Abschirmmaske für ionisierende Streustrahlung und Verfahren zu dessen Herstellung
DE102022120050A1 (de) * 2022-08-09 2024-02-15 RENA Technologies GmbH Verfahren und System zum Substratätzen sowie Substrathalter
DE102023205565A1 (de) * 2023-06-14 2024-12-19 Carl Zeiss Smt Gmbh Verfahren zur Einarbeitung von Temperierhohlstrukturen in ein Substrat, insbesondere in ein Substrat für ein optisches Element, Verfahren und Substrat zur Herstellung eines optischen Elements, optisches Element sowie Anlage der Halbleitertechnologie und strukturiertes elektronisches Bauelement
DE102023205563A1 (de) * 2023-06-14 2024-12-19 Carl Zeiss Smt Gmbh Verfahren zur Einarbeitung von Temperierhohlstrukturen in ein Substrat, insbesondere in ein Substrat für ein optisches Element für eine EUV-Projektionsbelichtungsanlage sowie Bearbeitungssystem hierfür, Verfahren und Substrat zur Herstellung eines optischen Elements, optisches Element sowie Anlage der Halbleitertechnologie und strukturiertes elektronisches Bauteil
DE102023125725A1 (de) 2023-09-22 2025-03-27 Schott Ag Laser-strukturiertes optisches Element
DE102023126424A1 (de) * 2023-09-28 2025-04-03 Schott Ag Verfahren und Vorrichtung zum Einfügen eines hohlkanalförmigen Filaments in ein sprödbrechendes Werkstück sowie dessen Verwendung
EP4575669A1 (fr) * 2023-12-19 2025-06-25 Nivarox-FAR S.A. Procédé de réalisation d'une ouverture sur un composant horloger en verre ou saphir

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10366904B2 (en) 2016-09-08 2019-07-30 Corning Incorporated Articles having holes with morphology attributes and methods for fabricating the same
DE102018100299A1 (de) 2017-01-27 2018-08-02 Schott Ag Strukturiertes plattenförmiges Glaselement und Verfahren zu dessen Herstellung
US11344973B2 (en) 2018-04-19 2022-05-31 Corning Incorporated Methods for forming holes in substrates
DE102018110210A1 (de) 2018-04-27 2019-10-31 Schott Ag Mikrofluidikzelle und Verfahren zu deren Herstellung
DE102018110211A1 (de) 2018-04-27 2019-10-31 Schott Ag Verfahren zum Erzeugen feiner Strukturen im Volumen eines Substrates aus sprödharten Material
WO2020149040A1 (ja) 2019-01-17 2020-07-23 日本板硝子株式会社 微細構造付ガラス基板及び微細構造付ガラス基板の製造方法

Also Published As

Publication number Publication date
CN116323509A (zh) 2023-06-23
DE102020126856A1 (de) 2022-04-14
EP4229016A1 (de) 2023-08-23
WO2022078774A1 (de) 2022-04-21
KR20230086721A (ko) 2023-06-15
US20230311248A1 (en) 2023-10-05
JP2023546072A (ja) 2023-11-01
JP7826605B2 (ja) 2026-03-10
TW202233537A (zh) 2022-09-01

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