JP7826605B2 - 構造化壁を有するガラスエレメントおよびその製造方法 - Google Patents

構造化壁を有するガラスエレメントおよびその製造方法

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Publication number
JP7826605B2
JP7826605B2 JP2023522473A JP2023522473A JP7826605B2 JP 7826605 B2 JP7826605 B2 JP 7826605B2 JP 2023522473 A JP2023522473 A JP 2023522473A JP 2023522473 A JP2023522473 A JP 2023522473A JP 7826605 B2 JP7826605 B2 JP 7826605B2
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JP
Japan
Prior art keywords
glass element
wall
recess
less
roughness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023522473A
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English (en)
Japanese (ja)
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JP2023546072A5 (https=
JP2023546072A (ja
Inventor
オアトナー アンドレアス
ヴァーグナー ファビアン
ハイス－シュケ マークス
ドリシュ ミヒャエル
グレーサー ヴァネッサ
ヘルベルク アニカ
ヴァルター ルーカス
ミュラー ラース
ゾーア ダーフィト
クルーゲ ミヒャエル
ホッペ ベアント
コーグルバウアー アンドレアス
ムート シュテファン
ポイヒャート ウルリヒ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott AG filed Critical Schott AG
Publication of JP2023546072A publication Critical patent/JP2023546072A/ja
Publication of JP2023546072A5 publication Critical patent/JP2023546072A5/ja
Application granted granted Critical
Publication of JP7826605B2 publication Critical patent/JP7826605B2/ja
Active legal-status Critical Current
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0738—Shaping the laser spot into a linear shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/55—Working by transmitting the laser beam through or within the workpiece for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/001—Other surface treatment of glass not in the form of fibres or filaments by irradiation by infrared light
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0015—Other surface treatment of glass not in the form of fibres or filaments by irradiation by visible light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials
    • B23K2103/54—Glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laser Beam Processing (AREA)
  • Glass Compositions (AREA)
JP2023522473A 2020-10-13 2021-09-30 構造化壁を有するガラスエレメントおよびその製造方法 Active JP7826605B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020126856.4 2020-10-13
DE102020126856.4A DE102020126856A1 (de) 2020-10-13 2020-10-13 Glaselement mit strukturierter Wandung und Verfahren zu dessen Herstellung
PCT/EP2021/077030 WO2022078774A1 (de) 2020-10-13 2021-09-30 Glaselement mit strukturierter wandung und verfahren zu dessen herstellung

Publications (3)

Publication Number Publication Date
JP2023546072A JP2023546072A (ja) 2023-11-01
JP2023546072A5 JP2023546072A5 (https=) 2025-10-20
JP7826605B2 true JP7826605B2 (ja) 2026-03-10

Family

ID=78134920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023522473A Active JP7826605B2 (ja) 2020-10-13 2021-09-30 構造化壁を有するガラスエレメントおよびその製造方法

Country Status (7)

Country Link
US (1) US20230311248A1 (https=)
EP (1) EP4229016A1 (https=)
JP (1) JP7826605B2 (https=)
KR (1) KR102941903B1 (https=)
CN (1) CN116323509A (https=)
DE (1) DE102020126856A1 (https=)
WO (1) WO2022078774A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022104180B4 (de) 2022-02-22 2026-04-30 Schott Ag Abschirmmaske für ionisierende Streustrahlung und Verfahren zu dessen Herstellung
DE102022120050A1 (de) * 2022-08-09 2024-02-15 RENA Technologies GmbH Verfahren und System zum Substratätzen sowie Substrathalter
DE102023205565A1 (de) * 2023-06-14 2024-12-19 Carl Zeiss Smt Gmbh Verfahren zur Einarbeitung von Temperierhohlstrukturen in ein Substrat, insbesondere in ein Substrat für ein optisches Element, Verfahren und Substrat zur Herstellung eines optischen Elements, optisches Element sowie Anlage der Halbleitertechnologie und strukturiertes elektronisches Bauelement
DE102023205563A1 (de) * 2023-06-14 2024-12-19 Carl Zeiss Smt Gmbh Verfahren zur Einarbeitung von Temperierhohlstrukturen in ein Substrat, insbesondere in ein Substrat für ein optisches Element für eine EUV-Projektionsbelichtungsanlage sowie Bearbeitungssystem hierfür, Verfahren und Substrat zur Herstellung eines optischen Elements, optisches Element sowie Anlage der Halbleitertechnologie und strukturiertes elektronisches Bauteil
DE102023125725A1 (de) 2023-09-22 2025-03-27 Schott Ag Laser-strukturiertes optisches Element
DE102023126424A1 (de) * 2023-09-28 2025-04-03 Schott Ag Verfahren und Vorrichtung zum Einfügen eines hohlkanalförmigen Filaments in ein sprödbrechendes Werkstück sowie dessen Verwendung
EP4575669A1 (fr) * 2023-12-19 2025-06-25 Nivarox-FAR S.A. Procédé de réalisation d'une ouverture sur un composant horloger en verre ou saphir

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018123048A (ja) 2017-01-27 2018-08-09 ショット アクチエンゲゼルシャフトＳｃｈｏｔｔ ＡＧ 構造化されたプレート状のガラスエレメント、およびその製造方法
US20190321921A1 (en) 2018-04-19 2019-10-24 Corning Incorporated Methods for forming holes in substrates
JP2019530629A (ja) 2016-09-08 2019-10-24 コーニング インコーポレイテッド 形態的属性を備えた孔を有する物品及びその製作方法
WO2020149040A1 (ja) 2019-01-17 2020-07-23 日本板硝子株式会社 微細構造付ガラス基板及び微細構造付ガラス基板の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018110210A1 (de) 2018-04-27 2019-10-31 Schott Ag Mikrofluidikzelle und Verfahren zu deren Herstellung
DE102018110211A1 (de) 2018-04-27 2019-10-31 Schott Ag Verfahren zum Erzeugen feiner Strukturen im Volumen eines Substrates aus sprödharten Material

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019530629A (ja) 2016-09-08 2019-10-24 コーニング インコーポレイテッド 形態的属性を備えた孔を有する物品及びその製作方法
JP2018123048A (ja) 2017-01-27 2018-08-09 ショット アクチエンゲゼルシャフトＳｃｈｏｔｔ ＡＧ 構造化されたプレート状のガラスエレメント、およびその製造方法
US20190321921A1 (en) 2018-04-19 2019-10-24 Corning Incorporated Methods for forming holes in substrates
WO2020149040A1 (ja) 2019-01-17 2020-07-23 日本板硝子株式会社 微細構造付ガラス基板及び微細構造付ガラス基板の製造方法

Also Published As

Publication number Publication date
CN116323509A (zh) 2023-06-23
DE102020126856A1 (de) 2022-04-14
EP4229016A1 (de) 2023-08-23
WO2022078774A1 (de) 2022-04-21
KR20230086721A (ko) 2023-06-15
KR102941903B1 (ko) 2026-03-19
US20230311248A1 (en) 2023-10-05
JP2023546072A (ja) 2023-11-01
TW202233537A (zh) 2022-09-01

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