CN116323509A - 具有结构化的壁的玻璃元件及其制造方法 - Google Patents

具有结构化的壁的玻璃元件及其制造方法 Download PDF

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Publication number
CN116323509A
CN116323509A CN202180069869.XA CN202180069869A CN116323509A CN 116323509 A CN116323509 A CN 116323509A CN 202180069869 A CN202180069869 A CN 202180069869A CN 116323509 A CN116323509 A CN 116323509A
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CN
China
Prior art keywords
glass element
recess
wall
glass
roughness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180069869.XA
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English (en)
Chinese (zh)
Inventor
A·奥特纳
F·瓦格纳
M·海斯-周奎特
M·德里奇
V·格莱瑟
A·霍尔伯格
L·沃尔特
L·穆勒
D·苏赫
M·克鲁格
B·霍普
A·科格鲍尔
S·穆特
U·普切尔特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott AG filed Critical Schott AG
Publication of CN116323509A publication Critical patent/CN116323509A/zh
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0738—Shaping the laser spot into a linear shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/55—Working by transmitting the laser beam through or within the workpiece for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/001—Other surface treatment of glass not in the form of fibres or filaments by irradiation by infrared light
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0015—Other surface treatment of glass not in the form of fibres or filaments by irradiation by visible light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials
    • B23K2103/54—Glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laser Beam Processing (AREA)
  • Glass Compositions (AREA)
CN202180069869.XA 2020-10-13 2021-09-30 具有结构化的壁的玻璃元件及其制造方法 Pending CN116323509A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020126856.4 2020-10-13
DE102020126856.4A DE102020126856A1 (de) 2020-10-13 2020-10-13 Glaselement mit strukturierter Wandung und Verfahren zu dessen Herstellung
PCT/EP2021/077030 WO2022078774A1 (de) 2020-10-13 2021-09-30 Glaselement mit strukturierter wandung und verfahren zu dessen herstellung

Publications (1)

Publication Number Publication Date
CN116323509A true CN116323509A (zh) 2023-06-23

Family

ID=78134920

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180069869.XA Pending CN116323509A (zh) 2020-10-13 2021-09-30 具有结构化的壁的玻璃元件及其制造方法

Country Status (7)

Country Link
US (1) US20230311248A1 (https=)
EP (1) EP4229016A1 (https=)
JP (1) JP7826605B2 (https=)
KR (1) KR102941903B1 (https=)
CN (1) CN116323509A (https=)
DE (1) DE102020126856A1 (https=)
WO (1) WO2022078774A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022104180B4 (de) 2022-02-22 2026-04-30 Schott Ag Abschirmmaske für ionisierende Streustrahlung und Verfahren zu dessen Herstellung
DE102022120050A1 (de) * 2022-08-09 2024-02-15 RENA Technologies GmbH Verfahren und System zum Substratätzen sowie Substrathalter
DE102023205565A1 (de) * 2023-06-14 2024-12-19 Carl Zeiss Smt Gmbh Verfahren zur Einarbeitung von Temperierhohlstrukturen in ein Substrat, insbesondere in ein Substrat für ein optisches Element, Verfahren und Substrat zur Herstellung eines optischen Elements, optisches Element sowie Anlage der Halbleitertechnologie und strukturiertes elektronisches Bauelement
DE102023205563A1 (de) * 2023-06-14 2024-12-19 Carl Zeiss Smt Gmbh Verfahren zur Einarbeitung von Temperierhohlstrukturen in ein Substrat, insbesondere in ein Substrat für ein optisches Element für eine EUV-Projektionsbelichtungsanlage sowie Bearbeitungssystem hierfür, Verfahren und Substrat zur Herstellung eines optischen Elements, optisches Element sowie Anlage der Halbleitertechnologie und strukturiertes elektronisches Bauteil
DE102023125725A1 (de) 2023-09-22 2025-03-27 Schott Ag Laser-strukturiertes optisches Element
DE102023126424A1 (de) * 2023-09-28 2025-04-03 Schott Ag Verfahren und Vorrichtung zum Einfügen eines hohlkanalförmigen Filaments in ein sprödbrechendes Werkstück sowie dessen Verwendung
EP4575669A1 (fr) * 2023-12-19 2025-06-25 Nivarox-FAR S.A. Procédé de réalisation d'une ouverture sur un composant horloger en verre ou saphir

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108358461A (zh) * 2017-01-27 2018-08-03 肖特股份有限公司 经结构化的板形玻璃元件及其制造方法
CN109843819A (zh) * 2016-09-08 2019-06-04 康宁股份有限公司 具有具形态学属性的孔的制品及其制造方法
CN110407158A (zh) * 2018-04-27 2019-11-05 肖特股份有限公司 微流体单元及其制造方法
CN110405369A (zh) * 2018-04-27 2019-11-05 肖特股份有限公司 用于在由脆硬材料制成的基板的体积中产生微结构的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11344973B2 (en) 2018-04-19 2022-05-31 Corning Incorporated Methods for forming holes in substrates
WO2020149040A1 (ja) 2019-01-17 2020-07-23 日本板硝子株式会社 微細構造付ガラス基板及び微細構造付ガラス基板の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109843819A (zh) * 2016-09-08 2019-06-04 康宁股份有限公司 具有具形态学属性的孔的制品及其制造方法
CN108358461A (zh) * 2017-01-27 2018-08-03 肖特股份有限公司 经结构化的板形玻璃元件及其制造方法
CN110407158A (zh) * 2018-04-27 2019-11-05 肖特股份有限公司 微流体单元及其制造方法
CN110405369A (zh) * 2018-04-27 2019-11-05 肖特股份有限公司 用于在由脆硬材料制成的基板的体积中产生微结构的方法

Also Published As

Publication number Publication date
DE102020126856A1 (de) 2022-04-14
EP4229016A1 (de) 2023-08-23
WO2022078774A1 (de) 2022-04-21
KR20230086721A (ko) 2023-06-15
KR102941903B1 (ko) 2026-03-19
US20230311248A1 (en) 2023-10-05
JP2023546072A (ja) 2023-11-01
JP7826605B2 (ja) 2026-03-10
TW202233537A (zh) 2022-09-01

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