KR102888626B1 - 자동화된 회전 사전 정렬을 사용한 에지 링 이송 - Google Patents

자동화된 회전 사전 정렬을 사용한 에지 링 이송

Info

Publication number
KR102888626B1
KR102888626B1 KR1020227028959A KR20227028959A KR102888626B1 KR 102888626 B1 KR102888626 B1 KR 102888626B1 KR 1020227028959 A KR1020227028959 A KR 1020227028959A KR 20227028959 A KR20227028959 A KR 20227028959A KR 102888626 B1 KR102888626 B1 KR 102888626B1
Authority
KR
South Korea
Prior art keywords
edge ring
carrier plate
substrate
end effector
paragraph
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020227028959A
Other languages
English (en)
Korean (ko)
Other versions
KR20220127926A (ko
Inventor
다몬 타이론 제네티
다릴 안젤로
리차드 에이치. 굴드
로이 스캇 포웰
Original Assignee
램 리써치 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 램 리써치 코포레이션 filed Critical 램 리써치 코포레이션
Priority to KR1020257038381A priority Critical patent/KR20250165690A/ko
Publication of KR20220127926A publication Critical patent/KR20220127926A/ko
Application granted granted Critical
Publication of KR102888626B1 publication Critical patent/KR102888626B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H01L21/68707—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32642—Focus rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01L21/67742—
    • H01L21/681—
    • H01L21/68735—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0462—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7611—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Drying Of Semiconductors (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Feeding Of Articles To Conveyors (AREA)
KR1020227028959A 2020-01-23 2021-01-20 자동화된 회전 사전 정렬을 사용한 에지 링 이송 Active KR102888626B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020257038381A KR20250165690A (ko) 2020-01-23 2021-01-20 자동화된 회전 사전 정렬을 사용한 에지 링 이송

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062964908P 2020-01-23 2020-01-23
US62/964,908 2020-01-23
PCT/US2021/014089 WO2021150548A1 (en) 2020-01-23 2021-01-20 Edge ring transfer with automated rotational pre-alignment

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020257038381A Division KR20250165690A (ko) 2020-01-23 2021-01-20 자동화된 회전 사전 정렬을 사용한 에지 링 이송

Publications (2)

Publication Number Publication Date
KR20220127926A KR20220127926A (ko) 2022-09-20
KR102888626B1 true KR102888626B1 (ko) 2025-11-19

Family

ID=76991736

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020227028959A Active KR102888626B1 (ko) 2020-01-23 2021-01-20 자동화된 회전 사전 정렬을 사용한 에지 링 이송
KR1020257038381A Pending KR20250165690A (ko) 2020-01-23 2021-01-20 자동화된 회전 사전 정렬을 사용한 에지 링 이송

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020257038381A Pending KR20250165690A (ko) 2020-01-23 2021-01-20 자동화된 회전 사전 정렬을 사용한 에지 링 이송

Country Status (6)

Country Link
US (1) US12575365B2 (https=)
JP (1) JP7719781B2 (https=)
KR (2) KR102888626B1 (https=)
CN (1) CN115004352A (https=)
TW (1) TWI891711B (https=)
WO (1) WO2021150548A1 (https=)

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* Cited by examiner, † Cited by third party
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JP2022139927A (ja) * 2021-03-12 2022-09-26 キオクシア株式会社 半導体製造装置および半導体装置の製造方法
JP7720235B2 (ja) * 2021-11-26 2025-08-07 株式会社安川電機 アライメント装置、基板搬送システム、アライメント方法、及びプログラム
JP7749165B1 (ja) * 2024-02-22 2025-10-03 東京エレクトロン株式会社 基板処理装置
US12603261B2 (en) * 2024-04-04 2026-04-14 Applied Materials, Inc. Aligner station with lifting mechanism

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WO2010054076A2 (en) * 2008-11-06 2010-05-14 Applied Materials, Inc. Rapid thermal processing chamber with micro-positioning system
JP2016146472A (ja) * 2015-01-16 2016-08-12 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 半導体ウエハ処理中におけるエッジ処理制御のための可動式エッジ連結リング
JP2017098540A (ja) * 2015-10-22 2017-06-01 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 正面開口式リングポッド
US20180138069A1 (en) * 2016-11-14 2018-05-17 Lam Research Corporation Edge ring centering method using ring dynamic alignment data
US20190088531A1 (en) * 2017-09-21 2019-03-21 Applied Materials, Inc. In-situ apparatus for semiconductor process module

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US7066707B1 (en) * 2001-08-31 2006-06-27 Asyst Technologies, Inc. Wafer engine
US7251883B2 (en) * 2002-09-30 2007-08-07 Sony Corporation Electronic-component alignment method and apparatus therefor
JP2004289003A (ja) * 2003-03-24 2004-10-14 Seiko Epson Corp 石英リング、プラズマ処理装置および半導体装置の製造方法
KR101590655B1 (ko) 2007-12-27 2016-02-18 램 리써치 코포레이션 동적 정렬 빔 교정의 방법 및 시스템
JP5227197B2 (ja) * 2008-06-19 2013-07-03 東京エレクトロン株式会社 フォーカスリング及びプラズマ処理装置
TWI421945B (zh) 2008-11-06 2014-01-01 Applied Materials Inc 含有微定位系統之快速熱處理腔室與處理基材之方法
SG170717A1 (en) * 2009-11-02 2011-05-30 Lam Res Corp Hot edge ring with sloped upper surface
JP5258981B2 (ja) * 2010-02-05 2013-08-07 東京エレクトロン株式会社 基板保持具及び基板搬送装置及び基板処理装置
JP6003011B2 (ja) 2011-03-31 2016-10-05 東京エレクトロン株式会社 基板処理装置
JP6212455B2 (ja) * 2014-03-12 2017-10-11 東芝メモリ株式会社 マーキング装置およびマーキング方法
JP6316082B2 (ja) 2014-04-30 2018-04-25 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
US10242848B2 (en) * 2014-12-12 2019-03-26 Lam Research Corporation Carrier ring structure and chamber systems including the same
US10062599B2 (en) 2015-10-22 2018-08-28 Lam Research Corporation Automated replacement of consumable parts using interfacing chambers
US10124492B2 (en) 2015-10-22 2018-11-13 Lam Research Corporation Automated replacement of consumable parts using end effectors interfacing with plasma processing system
US9892956B1 (en) 2016-10-12 2018-02-13 Lam Research Corporation Wafer positioning pedestal for semiconductor processing
KR102433436B1 (ko) * 2018-07-04 2022-08-17 삼성전자주식회사 기판 처리 시스템, 기판 처리 시스템에서의 에지 링 정렬 검사 방법 및 이를 수행하기 위한 원반형 비젼 센서
KR102702089B1 (ko) * 2019-03-22 2024-09-03 삼성전자주식회사 에지 링을 갖는 기판 처리 장치
US10964584B2 (en) * 2019-05-20 2021-03-30 Applied Materials, Inc. Process kit ring adaptor
KR102946972B1 (ko) * 2019-06-06 2026-04-01 램 리써치 코포레이션 회전 정렬이 필요한 에지 링의 자동화된 이송
US11626305B2 (en) * 2019-06-25 2023-04-11 Applied Materials, Inc. Sensor-based correction of robot-held object
JPWO2024071073A1 (https=) * 2022-09-30 2024-04-04

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WO2010054076A2 (en) * 2008-11-06 2010-05-14 Applied Materials, Inc. Rapid thermal processing chamber with micro-positioning system
JP2016146472A (ja) * 2015-01-16 2016-08-12 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 半導体ウエハ処理中におけるエッジ処理制御のための可動式エッジ連結リング
JP2017098540A (ja) * 2015-10-22 2017-06-01 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 正面開口式リングポッド
US20180138069A1 (en) * 2016-11-14 2018-05-17 Lam Research Corporation Edge ring centering method using ring dynamic alignment data
US20190088531A1 (en) * 2017-09-21 2019-03-21 Applied Materials, Inc. In-situ apparatus for semiconductor process module

Also Published As

Publication number Publication date
US12575365B2 (en) 2026-03-10
TWI891711B (zh) 2025-08-01
JP2023514065A (ja) 2023-04-05
KR20250165690A (ko) 2025-11-26
KR20220127926A (ko) 2022-09-20
US20230047039A1 (en) 2023-02-16
CN115004352A (zh) 2022-09-02
TW202147376A (zh) 2021-12-16
WO2021150548A1 (en) 2021-07-29
JP7719781B2 (ja) 2025-08-06

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