KR102788789B1 - 반송 시스템, 가동 요소, 제어 장치, 제어 방법 및 물품의 제조 방법 - Google Patents

반송 시스템, 가동 요소, 제어 장치, 제어 방법 및 물품의 제조 방법 Download PDF

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KR102788789B1
KR102788789B1 KR1020200167172A KR20200167172A KR102788789B1 KR 102788789 B1 KR102788789 B1 KR 102788789B1 KR 1020200167172 A KR1020200167172 A KR 1020200167172A KR 20200167172 A KR20200167172 A KR 20200167172A KR 102788789 B1 KR102788789 B1 KR 102788789B1
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South Korea
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movable element
coils
coil
coil group
return
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KR1020200167172A
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Korean (ko)
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KR20210071844A (ko
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다케시 야마모토
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캐논 가부시끼가이샤
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H01L21/67706—
    • H01L21/67709—
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3204—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K3/00—Details of windings
    • H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
KR1020200167172A 2019-12-06 2020-12-03 반송 시스템, 가동 요소, 제어 장치, 제어 방법 및 물품의 제조 방법 Active KR102788789B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2019-221444 2019-12-06
JP2019221444A JP7467093B2 (ja) 2019-12-06 2019-12-06 搬送システムおよび物品の製造方法

Publications (2)

Publication Number Publication Date
KR20210071844A KR20210071844A (ko) 2021-06-16
KR102788789B1 true KR102788789B1 (ko) 2025-03-31

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KR1020200167172A Active KR102788789B1 (ko) 2019-12-06 2020-12-03 반송 시스템, 가동 요소, 제어 장치, 제어 방법 및 물품의 제조 방법

Country Status (4)

Country Link
US (1) US11843299B2 (https=)
JP (1) JP7467093B2 (https=)
KR (1) KR102788789B1 (https=)
CN (1) CN112928886B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022264287A1 (ja) * 2021-06-15 2022-12-22 株式会社日立ハイテク ステージ装置、荷電粒子線装置および真空装置
JP7786807B2 (ja) * 2021-08-31 2025-12-16 キヤノン株式会社 搬送装置、加工システム、制御方法及び物品の製造方法
JP7834464B2 (ja) * 2021-12-13 2026-03-24 キヤノン株式会社 搬送装置
JP2024027985A (ja) * 2022-08-19 2024-03-01 Ｐａｃｒａｆｔ株式会社 処理システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004343105A (ja) * 2003-05-01 2004-12-02 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
CN105119463A (zh) * 2015-07-22 2015-12-02 北京顿一科技有限公司 新型有铁芯直线电机、电机伺服系统及铁芯的制备方法

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
JP2879934B2 (ja) * 1990-04-27 1999-04-05 住友重機械工業株式会社 ステージ装置
US6208045B1 (en) * 1998-11-16 2001-03-27 Nikon Corporation Electric motors and positioning devices having moving magnet arrays and six degrees of freedom
JP4590846B2 (ja) 2003-09-01 2010-12-01 株式会社ニコン 磁気浮上式ステージ装置及び露光装置
JP4566697B2 (ja) * 2004-11-08 2010-10-20 キヤノン株式会社 位置決め装置およびそれを用いた露光装置、デバイス製造方法
KR100726711B1 (ko) * 2005-12-30 2007-06-12 한국전기연구원 자기부상방식의 대면적 스테이지 장치
KR20120019298A (ko) * 2010-08-25 2012-03-06 주식회사 져스텍 리니어 모터를 이용하는 반송 장치 및 그 반송 장치의 제어 방법.
KR20140084238A (ko) * 2011-10-27 2014-07-04 더 유니버시티 오브 브리티쉬 콜롬비아 변위 장치 및 변위 장치의 제조, 사용 그리고 제어를 위한 방법
NL2015092B1 (en) 2015-07-06 2017-01-30 Ding Chenyang Displacement device.
JP7066333B2 (ja) * 2017-05-17 2022-05-13 キヤノン株式会社 搬送システム、加工システム、物品の製造方法、搬送システムの制御方法及び可動機構

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004343105A (ja) * 2003-05-01 2004-12-02 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
CN105119463A (zh) * 2015-07-22 2015-12-02 北京顿一科技有限公司 新型有铁芯直线电机、电机伺服系统及铁芯的制备方法

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Publication number Publication date
CN112928886A (zh) 2021-06-08
KR20210071844A (ko) 2021-06-16
CN112928886B (zh) 2024-08-09
US11843299B2 (en) 2023-12-12
US20210175787A1 (en) 2021-06-10
JP7467093B2 (ja) 2024-04-15
JP2021093781A (ja) 2021-06-17

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