KR102699387B1 - Dressing apparatus for double-side polisher - Google Patents

Abstract

The present invention aims to provide a dressing device for a double-sided polisher capable of reducing the action of a lateral load on a piston rod that presses a dressing member.
In a dressing device (1) for dressing polishing pads (11a, 12a) by relative motion between a polishing pad (11a) attached to a lower platen (11) and a polishing pad (12a) attached to an upper platen (12), and a dressing member (33), the dressing device comprises: an arm member (2) that can advance and retreat between the lower platen (11) and the upper platen (12); a support member (31) installed at a tip end (2b) of the arm member (2); a power cylinder (32) installed on the support member (31) and pressing the dressing member (33) toward the polishing pads (11a, 12a) by means of a piston rod (32a); and a load reducing means (34) interposed between the dressing member (33) and the power cylinder (32) and reducing the action of a lateral load on the piston rod (32a).

Description

{DRESSING APPARATUS FOR DOUBLE-SIDE POLISHER}

The present invention relates to a dressing device for a double-sided polishing machine that dresses a polishing pad attached to a platen of a double-sided polishing machine that polishes both sides of a workpiece.

Conventionally, a dressing device (hereinafter referred to as a "dressing device") for a double-side polishing machine that dresses polishing pads attached to a lower platen and an upper platen, respectively, for polishing both sides of a workpiece such as a silicon wafer, has been known. In this conventional dressing device, a dress head installed at the tip of an arm member is inserted between the lower platen and the upper platen, and a dressing member installed on the dress head is pressed by a power cylinder to be pushed against the polishing pad. Then, the lower platen and the upper platen are rotated in opposite directions. As a result, the polishing pad and the dressing member are made to move relative to each other, and the polishing pad is dressed (see, for example, Patent Document 1).

[Patent Document 1] Japanese Patent Publication No. 2006-272498

However, in the conventional dressing device, the dressing member is fixed to the piston rod of the power cylinder that presses the dressing member. Therefore, when the polishing pad and the dressing member move relative to each other, a horizontal load acts on the dressing member, and this horizontal load also acts on the piston rod. Therefore, a problem occurs in that the durability of the power cylinder is reduced.

The present invention has been made in consideration of the above problem, and has as its object the provision of a dressing device for a double-sided polisher capable of reducing the action of a lateral load on a piston rod that presses a dressing member.

In order to achieve the above object, the dressing device for a double-sided polisher of the present invention inserts a dressing member between a lower platen rotatable about a rotation axis and an upper platen rotatable about a rotation axis, pushes the dressing member against at least one of a polishing pad attached to the lower platen and a polishing pad attached to the upper platen, and dresses the polishing pad by relative motion between the polishing pad and the dressing member.

This dressing device comprises an arm member that can be moved forward and backward between a lower plate and an upper plate, a support member installed at a tip of the arm member, a power cylinder installed on the support member and pressing the dressing member toward a polishing pad by a piston rod, and a load reducing means interposed between the dressing member and the power cylinder and reducing the action of a lateral load on the piston rod of the power cylinder.

In the dressing device for a double-sided polisher of the present invention, by providing a load reducing means between the dressing member and the power cylinder, the action of the lateral load on the piston rod that presses the dressing member can be reduced.

Figure 1 is a schematic diagram illustrating the overall configuration of the dressing device and double-sided polisher of Example 1.
Figure 2 is a plan view schematically illustrating the dressing device of Example 1 and its operation.
Figure 3 is a perspective view illustrating a dressing head of the dressing device of Example 1.
Figure 4 is a side view of the dressing head of the dressing device of Example 1.
Figure 5 is a perspective view illustrating a dressing head of the dressing device of Example 2.
Figure 6 is a side view of the dressing head of the dressing device of Example 2.
Figure 7 is a perspective view illustrating a dressing head of the dressing device of Example 3.
Figure 8 is a perspective view illustrating a dressing head of the dressing device of Example 4.

Hereinafter, a form for implementing a dressing device for a double-sided polisher of the present invention (hereinafter referred to as a “dressing device”) will be described based on Examples 1 to 4 illustrated in the drawings.

(Example 1)

Below, the configuration of the dressing device (1) of Example 1 is described.

The dressing device (1), as illustrated in Fig. 1, inserts a dressing head (3) having a dressing member (33) described below between a lower platen (11) rotatable about a rotation axis (13) and an upper platen (12) rotatable about a rotation axis (13). Then, the dressing head (3) is inserted between the lower platen (11) and the upper platen (12), and the dressing member (33) is pushed against the polishing pads (11a, 12a) by the power cylinder (32). Thereafter, the lower platen (11) is rotated in a first direction (e.g., clockwise), and the upper platen (12) is rotated in a second direction (e.g., counterclockwise) opposite to the first direction. As a result, the polishing pads (11a, 12a) and the dressing member (33) are moved relative to each other, thereby dressing the polishing pads (11a, 12a).

The dressing device (1) comprises an arm member (2), a dressing head (3) installed at the tip (2b) of the arm member (2), a driving mechanism (4) that rotates the arm member (2), and a control unit (not shown) that controls the driving of a power cylinder (32) that presses the dressing member (33).

The arm member (2) is a pipe member that extends horizontally from a driving mechanism (4) arranged near a double-sided polisher (10), and is rotated about a base (2a) by the driving mechanism (4) so as to enter and exit between the lower platen (11) and the upper platen (12). That is, the tip (2b) of the arm member (2) moves along an arc-shaped orbit (2c) centered about the base (2a), as illustrated in Fig. 2. The arm member (2) is rotated so that the dress head (3) moves along the orbit (2c) between the lower platen (11) and the upper platen (12) during dressing, and is rotated to a position where the dress head (3) retracts from between the lower platen (11) and the upper platen (12) during other than dressing. In addition, cleaning water flows inside the arm member (2) during dressing.

The dress head (3) has a support member (31), a pair of power cylinders (32, 32), a pair of dressing members (33, 33), and a pair of load reduction means (34, 34), as shown in FIGS. 3 and 4.

The support member (31) is a metal rigid body fixed to the tip (2b) of the arm member (2), and has a central standing member (31a), a first horizontal member (31b), and a second horizontal member (31c).

In the central standing member (31a), a plurality of outlets (31e) are formed that can discharge the cleaning water flowing inside the support member (31) during dressing. A high-pressure nozzle (31f) (injection nozzle) is attached to each outlet (31e). Meanwhile, the upper surface (311a) is a surface facing the upper plate (12) when the dress head (3) is inserted between the lower plate (11) and the upper plate (12), and the lower surface (312a) is a surface facing the lower plate (11) when the dress head (3) is inserted between the lower plate (11) and the upper plate (12).

The first horizontal portion (31b) is formed on the first side surface (313a) of the central standing portion (31a) facing the arm member (2) and has a plate shape extending in the horizontal direction. Meanwhile, an attachment portion (318b) is formed on the side surface of the first horizontal portion (31b). The support member (31) is fixed to the tip end (2b) of the arm member (2) via this attachment portion (318b). Furthermore, a power cylinder (32) is fixed to the upper surface (311b) of the first horizontal portion (31b). In addition, a pair of guide holes (316b, 316b) through which a guide shaft (34b) described below is inserted and retracted are formed through the first horizontal portion (31b). Meanwhile, the upper surface (311b) of the first horizontal portion (31b) is the surface facing the upper plate (12) when the dress head (3) is inserted between the lower plate (11) and the upper plate (12).

The second horizontal portion (31c) is formed on the second side surface (314a) of the central standing portion (31a) and has a plate shape extending in the horizontal direction. The second side surface (314a) of the central standing portion (31a) is a surface opposite to the first side surface (313a). Here, the second horizontal portion (31c) and the first horizontal portion (31b) are offset in the height direction, and the first horizontal portion (31b) is formed at a position close to the lower surface (312a) of the central standing portion (31a), and the second horizontal portion (31c) is formed at a position close to the upper surface (311a) of the central standing portion (31a).

And, on the lower surface (312c) of the second horizontal portion (31c), the other power cylinder (32) is fixed. In addition, a pair of guide holes (316c, 316c) are penetrated through the second horizontal portion (31c) so that a guide shaft (34b) described later can be inserted therethrough. Meanwhile, the lower surface (312c) of the second horizontal portion (31c) is a surface facing the lower plate (11) when the dress head (3) is inserted between the lower plate (11) and the upper plate (12).

A pair of power cylinders (32, 32) are pneumatic cylinders that, here, extend a piston rod (32a) by supplying and exhausting air. One power cylinder (32) is fixed to a first horizontal portion (31b) of a support member (31) and extends a piston rod (32a) toward the top of a dress head (3). In addition, the other power cylinder (32) is fixed to a second horizontal portion (31c) of the support member (31) and extends a piston rod (32a) toward the bottom of a dress head (3). Meanwhile, air is supplied to each power cylinder (32) through an air tube (32b).

A pair of dressing members (33, 33) are grinding stones that contact the polishing pads (11a, 12a) during dressing to perform grinding. Each dressing member (33) is formed by forming a plating layer on the surface of a base metal made of iron or carbon steel, and fixing diamond abrasive grains or CBN (cubic boron nitride) abrasive grains to the formed plating layer. In addition, as the dressing member (33), a functional surface material such as a metal wire or ceramic may be used. In addition, the dressing member (33) exhibits an elongated shape that substantially follows the orbit (2c) along which the tip (2b) of the arm member (2) moves. In addition, each dressing member (33) is attached to the surface (341a) of a cylinder plate (34a) described later.

In addition, as illustrated in FIG. 2, for example, the rotational direction of the lower platen (11) and the upper platen (12) and the insertion direction of the dressing head (3) are adjusted, and the outlet (31e) to which the high-pressure nozzle (31f) is attached is arranged upstream of the dressing member (33) in the direction in which the polishing pads (11a, 12a) move (hereinafter referred to as “pad movement direction”). That is, the positional relationship between the outlet (31e) [high-pressure nozzle (31f)] and the dressing member (33) is such that when the polishing pads (11a, 12a) and the dressing member (33) move relative to each other, the outlet (31e) [high-pressure nozzle (31f)] faces, and then the dressing member (33) faces, in a region where dressing of the polishing pads (11a, 12a) is not performed.

A pair of load reducing means (34, 34) is a mechanism that is interposed between a power cylinder (32) and a dressing member (33), respectively, and reduces the action of a lateral load, which is a load acting in a horizontal direction with respect to a piston rod (32a). In the pair of load reducing means (34, 34) of Example 1, the lateral load acting on the piston rod (32a) is supported by the supporting member (31), thereby reducing the action of the lateral load on the piston rod (32a). The pair of load reducing means (34, 34) of Example 1 each have a cylinder plate (34a) and a pair of guide shafts (34b, 34b).

The cylinder plate (34a) is a plate member fixed to the tip of the piston rod (32a). A dressing member (33) is attached to a surface (341a) of the cylinder plate (34a). Meanwhile, the surface (341a) is a surface facing the polishing pads (11a, 12a) when the dressing head (3) is inserted between the lower plate (11) and the upper plate (12).

And, by attaching the dressing member (33) to the cylinder plate (34a), when the piston rod (32a) is extended, the dressing member (33) becomes integral with the cylinder plate (34a) and approaches the polishing pad (11a, 12a). Also, when the piston rod (32a) is contracted, the dressing member (33) becomes integral with the cylinder plate (34a) and moves away from the polishing pad (11a, 12a).

In addition, the first end (341b) of the guide shaft (34b) is fixed to the back surface (342a) of the cylinder plate (34a). Here, two guide shafts (34b, 34b) are fixed at positions that are point-symmetrical with respect to the axial direction of the piston rod (32a).

The guide shaft (34b) is a metal rod-shaped member, and one end, i.e., a first end (341b), is fixed to a cylinder plate (34a), and the other end, i.e., a second end (342b), is inserted and retracted into a guide hole (316b, 316c) formed in the first horizontal portion (31b) or the second horizontal portion (31c). In addition, the insertion length of the guide shaft (34b) into the guide hole (316b, 316c) is longer than the extension stroke of the piston rod (32a). Therefore, even when the piston rod (32a) is fully extended, the second end (342b) of the guide shaft (34b) does not fall out of the guide hole (316b, 316c).

Next, the operation of the dressing device (1) of Example 1 will be described.

In order to dress the polishing pads (11a, 12a) of the double-sided polisher (10) by the dressing device (1) of Example 1, each part is controlled by a control unit (not shown), and first, the arm member (2) is rotated by the driving mechanism (4). Then, the dress head (3) installed at the tip (2b) of the arm member (2) is inserted between the lower platen (11) and the upper platen (12). At this time, the piston rod (32a) is in the maximum retracted and maximum contracted state, and a gap is created between the dressing member (33) and the polishing pad (11a, 12a), or the dressing member (33) is in contact with the polishing pad (11a, 12a) in a state where no load in the upper and lower direction is applied.

Next, the gap height between the lower plate (11) and the upper plate (12) is set to a predetermined height. Then, the piston rod (32a) of the power cylinder (32) is extended to bring the dressing member (33) and the cylinder plate (34a) close to the polishing pad (11a, 12a). As a result, the dressing member (33) is pressed toward the polishing pad (11a, 12a), and the dressing member (33) is pushed against the polishing pad (11a, 12a).

And, while the dressing member (33) is pressed against the polishing pad (11a, 12a), the lower platen (11) and the upper platen (12) are rotated in opposite directions centered on the rotation axis (13). At this time, the driving mechanism (4) is driven to rotate the arm member (2). As a result, the dressing head (3) moves along the orbit (2c), and the polishing pad (11a, 12a) and the dressing member (33) move relative to each other, so that the polishing pad (11a, 12a) is dressed. Meanwhile, the “relative motion” means that the polishing pad (11a, 12a) and the dressing member (33) move relatively toward opposite directions.

Here, during dressing, since the dressing member (33) is pressed against the polishing pad (11a, 12a) and the polishing pad (11a, 12a) and the dressing member (33) move relative to each other, a lateral load (a load acting in the horizontal direction) is applied to the dressing member (33). Meanwhile, the dressing member (33) is attached to a cylinder plate (34a) fixed to the piston rod (32a). Therefore, the lateral load applied to the dressing member (33) also acts on the piston rod (32a).

In this regard, in the dressing device (1) of Example 1, a load reducing means (34) is interposed between the dressing member (33) and the piston rod (32a). That is, the first end (341b) of the guide shaft (34b) is fixed to the cylinder plate (34a) to which both the dressing member (33) and the piston rod (32a) are fixed. Then, the second end (342b) of the guide shaft (34b) is inserted into the guide hole (316b) penetrating the first horizontal portion (31b) or the guide hole (316c) penetrating the second horizontal portion (31c).

Accordingly, when the lateral load applied to the dressing member (33) applies to the cylinder plate (34a), the guide shaft (34b) interferes with the inner surface of the guide holes (316b, 316c), so that the guide shaft (34b) is supported by the support member (31). For this reason, the cylinder plate (34a) can be supported by the support member (31) through the guide shaft (34b), and the piston rod (32a) fixed to the cylinder plate (34a) can also be supported by the support member (31).

As a result, the lateral load applied to the piston rod (32a) can be reduced. In addition, the lateral load applied to the piston rod (32a) can be suppressed, and the durability of the power cylinder (32) can be prevented from deteriorating.

In addition, in the dressing device (1) of Example 1, the load reducing means (34) has a cylinder plate (34a) and a guide shaft (34b). Therefore, the lateral load transmitted from the dressing member (33) to the piston rod (32a) can be appropriately supported by the support member (31), and the action of the lateral load on the piston rod (32a) can be effectively reduced.

In addition, in the dressing device (1) of Example 1, during dressing, cleaning water is supplied to the support member (31) through the arm member (2). The cleaning water supplied to the support member (31) is discharged from a plurality of outlets (31e) formed in the support member (31). Here, the outlets (31e) are formed on the upper surface (311a) of the central standing portion (31a) facing the upper platen (12) and the lower surface (312a) of the central standing portion (31a) facing the lower platen (11) among the support members (31). In addition, a high-pressure nozzle (31f) is attached to each outlet (31e). Therefore, the cleaning water is sprayed at high pressure from the outlets (31e) through the high-pressure nozzle (31f) and sprayed onto the polishing pads (11a, 12a).

Meanwhile, a pair of dressing members (33, 33) are attached to a power cylinder (32) on one side fixed to a first horizontal portion (31b) of a support member (31) and a power cylinder (32) on the other side fixed to a second horizontal portion (31c) of the support member (31) via cylinder plates (34a). In addition, an outlet (31e) to which a high-pressure nozzle (31f) is attached is arranged upstream of the dressing member (33) in the pad movement direction.

By this, the polishing pad (11a, 12a) can be cleaned by spraying high-pressure cleaning water from the high-pressure nozzle (31f), and then the polishing pad (11a, 12a) can be dressed by the dressing member (33).

That is, when dressing a polishing pad (11a, 12a) that is in a compressed state due to polishing with a load, or a polishing pad (11a, 12a) that is in a state of insufficient wetness, it is difficult to perform dressing stably because the contact state or grinding state of the dressing member (33) to the polishing pad (11a, 12a) tends to become uneven during dressing.

In this regard, by high-pressure spraying cleaning water onto the polishing pad (11a, 12a) before dressing, the surface layer of the polishing pad (11a, 12a) which is in a compressed state can be released and then dressed. In addition, the polishing pad (11a, 12a) can be made thoroughly wet before dressing. Therefore, compared to a case where dressing is performed when the polishing pad (11a, 12a) is in a compressed state or when the degree of wetting of the polishing pad (11a, 12a) is insufficient, the contact state and grinding state of the dressing member (33) with respect to the polishing pad (11a, 12a) during dressing become uniform, and stabilization and uniformization of the pad surface quality after dressing can be promoted.

In addition, on the contact surface of the dressing member (33) to the polishing pad (11a, 12a), unnecessary residual abrasive particles, etc. that may become a physical obstacle can be removed by washing water before performing the dressing.

(Example 2)

The dressing device (1A) of Example 2 is an example in which a load reduction means is configured by a thin plate member supporting a dressing member. Hereinafter, the configuration of the dressing device (1A) of Example 2 will be described based on FIGS. 5 and 6. Meanwhile, for the configuration identical to that of Example 1, the same reference numerals as those of Example 1 are given, and a detailed description is omitted.

The dressing device (1A) of Example 2, as shown in FIGS. 5 and 6, comprises an arm member (2), a dressing head (3A) installed at the tip (2b) of the arm member (2), a driving mechanism (not shown here) for rotating the arm member (2), and a control unit (not shown) for controlling the driving of a power cylinder (32) for pressing the dressing member (33).

The dress head (3A) has a support member (31), a pair of power cylinders (32, 32), a pair of dressing members (33, 33), and a pair of load reduction means (35, 35), as shown in FIGS. 5 and 6.

A pair of load reducing means (35, 35) of Example 2 is a mechanism that reduces the action of a lateral load on the piston rod (32a) by maintaining the dressing member (33) in a non-fixed state with respect to the piston rod (32a) at a position facing the piston rod (32a). The pair of load reducing means (35, 35) of Example 2 are each composed of a thin metal plate member. Hereinafter, the pair of load reducing means (35, 35) are each made of a thin plate member (35a, 35b).

The thin plate members (35a, 35b) are metal plates that can be elastically deformed in the thickness direction and are fixed to the support member (31) in a cantilevered state. Here, one thin plate member (35a) is fixed to the upper surface (311c) of the second horizontal portion (31c) of the support member (31), and the other thin plate member (35b) is fixed to the lower surface (312b) of the first horizontal portion (31b) of the support member (31). Meanwhile, the upper surface (311c) of the second horizontal portion (31c) is a surface facing the upper plate (12) when the dress head (3A) is inserted between the lower plate (11) and the upper plate (12). In addition, the lower surface (312b) of the first horizontal portion (31b) is the surface facing the lower plate (11) when the dress head (3A) is inserted between the lower plate (11) and the upper plate (12).

And, one side of the thin plate member (35a) fixed to the second horizontal portion (31c) has a dressing member (33) attached to the surface (351a). In addition, this one side of the thin plate member (35a) extends from the fixing position for the second horizontal portion (31c) beyond the central standing portion (31a) to a position facing the first horizontal portion (31b). And, among the one side of the thin plate member (35a), the attachment region (352a), which is the region where the dressing member (33) is attached, faces the piston rod (32a) of one side of the power cylinder (32) fixed to the first horizontal portion (31b). Meanwhile, the surface (351a) is a surface facing the polishing pad (12a) attached to the upper plate (12) when the dress head (3A) is inserted between the lower plate (11) and the upper plate (12). In addition, an opening is appropriately formed in this thin plate member (35a) to avoid interference with the high-pressure nozzle (31f).

In addition, the other thin plate member (35b) fixed to the first horizontal portion (31b) has a dressing member (33) attached to the surface (351b). In addition, the other thin plate member (35b) extends from the fixing position for the first horizontal portion (31b) beyond the central standing portion (31a) to a position facing the second horizontal portion (31c). Then, among the other thin plate member (35b), the attachment region (352b), which is the region where the dressing member (33) is attached, faces the piston rod (32a) of the other power cylinder (32) fixed to the second horizontal portion (31c). Meanwhile, the surface (351b) is a surface facing the polishing pad (11a) attached to the lower plate (11) when the dress head (3A) is inserted between the lower plate (11) and the upper plate (12). In addition, an opening is appropriately formed in this thin plate member (35b) to avoid interference with the high-pressure nozzle (31f).

And, in the dressing device (1A) of Example 2, the rotational direction of the lower platen (11) and the upper platen (12) and the insertion direction of the dressing head (3A) are adjusted, and the thin plate members (35a, 35b) are arranged so as to extend along the moving direction of the polishing pads (11a, 12a), respectively. In addition, among the thin plate members (35a, 35b), the fixed region (353a, 353b) fixed to the support member (31) is arranged on the upstream side in the moving direction of the polishing pads (11a, 12a), and the attachment region (352a, 352b) to which the dressing member (33) is attached is arranged on the downstream side in the moving direction of the polishing pads (11a, 12a).

In addition, in the dressing device (1A) of Example 2, the rotational direction of the lower plate (11) and the upper plate (12) and the insertion direction of the dressing head (3A) are adjusted, and the outlet (31e) formed in the central standing portion (31a) of the support member (31) and to which the high-pressure nozzle (31f) is attached is arranged on the upstream side in the moving direction of the polishing pads (11a, 12a) relative to the dressing member (33).

Next, the operation of the dressing device (1A) of Example 2 will be described.

When dressing the polishing pad (11a, 12a) of the double-sided polisher (10) by the dressing device (1A) of Example 2, similarly to Example 1, the polishing pad (11a, 12a) and the dressing member (33) are moved relative to each other while the dressing member (33) is pressed against the polishing pad (11a, 12a).

Here, in the dressing device (1A) of Example 2, the dressing member (33) is attached to a thin plate member (35a, 35b) that is fixed in a cantilevered state to a support member (31). And, among the thin plate members (35a, 35b), an attachment area (352a, 352b) to which the dressing member (33) is attached faces the piston rod (32a).

Therefore, when the piston rod (32a) is extended, the piston rod (32a) comes into contact with the attachment area (352a, 352b) of the plate member (35a, 35b) and presses the dressing member (33) through the plate member (35a, 35b). Meanwhile, the dressing member (33) is attached to the surface (351a, 351b) of the plate member (35a, 35b). However, the plate member (35a, 35b) and the piston rod (32a) are not fixed. As a result, the lateral load applied to the dressing member (33) is not completely transmitted to the piston rod (32a).

As a result, the lateral load applied to the piston rod (32a) can be reduced. In addition, by suppressing the lateral load applied to the piston rod (32a), the durability of the power cylinder (32) can be prevented from deteriorating.

In addition, in the dressing device (1A) of Example 2, the thin plate members (35a, 35b) are arranged to extend along the moving direction of the polishing pads (11a, 12a). In addition, the thin plate members (35a, 35b) have a fixed region (353a, 353b) arranged on the upstream side in the moving direction of the polishing pads (11a, 12a), and an attachment region (352a, 352b) arranged on the downstream side in the moving direction of the polishing pads (11a, 12a). Therefore, when the polishing pads (11a, 12a) and the dressing member (33) move relative to each other, a lateral load is applied to the dressing member (33) in a direction from the fixed region (353a, 353b) toward the attachment region (352a, 352b). By this, the free end attachment area (352a, 352b) is raised, so that the dressing member (33) can be prevented from being caught on the polishing pad (11a, 12a).

In addition, in the dressing device (1A) of Example 2, the outlet (31e) to which the high-pressure nozzle (31f) is attached is arranged upstream of the dressing member (33) in the moving direction of the polishing pads (11a, 12a). Therefore, both the high-pressure nozzle (31f) for spraying cleaning water onto the polishing pad (12a) of the upper platen (12) and the high-pressure nozzle (31f) for spraying cleaning water onto the polishing pad (11a) of the lower platen (11) can be installed in the central standing portion (31a). In addition, it becomes possible to arrange the fixing regions (353a, 353b) of the thin platen members (35a, 35b) upstream of the moving direction of the polishing pads (11a, 12a), and to arrange the attachment regions (352a, 352b) downstream of the moving direction of the polishing pads (11a, 12a).

(Example 3)

The dressing device (1B) of Example 3 is an example in which a dressing member is attached to a cylinder plate fixed to a piston rod via an elastic member. Hereinafter, the configuration of the dressing device (1B) of Example 3 will be described based on Fig. 7. Meanwhile, for the configuration identical to that of Example 1, the same reference numerals as those of Example 1 are given, and a detailed description is omitted.

The dressing device (1B) of Example 3, as illustrated in Fig. 7, comprises an arm member (2), a dressing head (3B) installed at the tip (2b) of the arm member (2), a driving mechanism (not illustrated here) for rotating the arm member (2), and a control unit (not illustrated) for controlling the driving of a power cylinder (32) for pressing the dressing member (33).

The dress head (3B), as shown in Fig. 7, has a support member (31), a pair of power cylinders (32, 32), a pair of dressing members (33, 33), and a pair of load reduction means (36, 36).

A pair of load reducing means (36, 36) of Example 3 is a mechanism that reduces the action of a lateral load on a piston rod (not shown here) by supporting the lateral load applied to the piston rod by a supporting member (31). A pair of load reducing means (36, 36) of Example 3 each has a cylinder plate (36a), a pair of guide shafts (34b, 34b), a plurality (four in this case) of supporting spring bodies (36c), and a plurality (four in this case) of guide pins (36d).

The cylinder plate (36a) is a plate member fixed to the piston rod. A plurality of support spring bodies (36c) and a plurality of guide pins (36d) are attached to the surface (361a) of this cylinder plate (36a). Meanwhile, the surface (361a) is a surface facing the polishing pads (11a, 12a) when the dress head (3B) is inserted between the lower plate (11) and the upper plate (12). In addition, a first end (not shown here) of a guide shaft (34b) is fixed to the back surface (362a) of this cylinder plate (36a).

The plurality of support spring bodies (36c) are elastic members made of metal that can be elastically deformed in the direction of expansion of the piston rod. In this case, the support spring bodies (36c) are formed by a plate spring in which a metal piece is bent, but this is not limited to this, and the support spring bodies (36c) may be formed by, for example, a coil spring or other elastic members.

The support spring body (36c) is interposed between the cylinder plate (36a) and the dressing member (33), and the dressing member (33) is attached to the cylinder plate (36a) via the support spring body (36c).

A plurality of guide pins (36d) are rod-shaped members that rise from the surface (361a) of the cylinder plate (36a) and regulate the supporting posture of the dressing member (33). In Example 3, the longitudinal end of the dressing member (33) is fitted by a pair of guide pins (36d).

Next, the operation of the dressing device (1B) of Example 3 will be described.

When dressing the polishing pad (11a, 12a) of the double-sided polisher (10) by the dressing device (1B) of Example 3, similarly to Examples 1 and 2, the polishing pad (11a, 12a) and the dressing member (33) are moved relative to each other while the dressing member (33) is pressed against the polishing pad (11a, 12a).

Here, in the dressing device (1B) of Example 3, a support spring body (36c) is interposed between the dressing member (33) and the cylinder plate (36a) fixed to the piston rod, and the dressing member (33) is attached to the cylinder plate (36a) via the support spring body (36c).

For this reason, when the gap height between the lower plate (11) and the upper plate (12) changes due to the unevenness of the polishing pad (11a, 12a) during dressing, the support spring body (36c) can be deformed to absorb the change in the gap height. As a result, it becomes possible to uniformly bring the entire length of the dressing member (33) into contact with the polishing pad (11a, 12a) without controlling the expansion and contraction of the piston rod.

In addition, in the dressing device (1B) of this embodiment 3, a plurality of guide pins (36d) are raised from the cylinder plate (36a). Then, the longitudinal end of the dressing member (33) is fitted by a pair of guide pins (36d).

For this reason, when a lateral load is applied to the dressing member (33) during dressing and the support spring body (36c) is tilted, the dressing member (33) interferes with the guide pin (36d). As a result, the change in the support posture of the dressing member (33) by the support spring body (36c) is regulated by the guide pin (36d). Therefore, the lateral load applied to the support spring body (36c) can be suppressed, and the horizontal deformation of the support spring body (36c) can be prevented.

(Example 4)

The dressing device (1C) of Example 4 is an example in which the dressing member is supported by a slide member through which a support shaft standing up from the support member passes. Hereinafter, the configuration of the dressing device (1C) of Example 4 will be described based on Fig. 8. Meanwhile, for the configuration identical to that of Example 1, the same reference numerals as those of Example 1 are given, and a detailed description is omitted.

The dressing device (1C) of Example 4, as illustrated in Fig. 8, comprises an arm member (2), a dressing head (3C) installed at the tip (2b) of the arm member (2), a driving mechanism (not illustrated here) for rotating the arm member (2), and a control unit (not illustrated) for controlling the driving of a power cylinder (32) for pressing the dressing member (33).

The dress head (3C), as shown in Fig. 8, has a support member (31), a pair of power cylinders (32, 32), a pair of dressing members (33, 33), and a pair of load reduction means (37, 37).

A pair of load reducing means (37, 37) of Example 4 is a mechanism that reduces the action of a lateral load on a piston rod by maintaining a dressing member (33) in a non-fixed state with respect to the piston rod at a position facing the piston rod (not shown here). A pair of load reducing means (37, 37) of Example 4 each has four support shafts (37a), a pair of slide members (37b), and four pressure members (37c).

Four support shafts (37a) are erected from the upper surface (311b) of the first horizontal portion (31b) of the support member (31), or the lower surface (312c) of the second horizontal portion (31c). These support shafts (37a) are arranged around one power cylinder (32) fixed to the upper surface (311b) of the first horizontal portion (31b), or around the other power cylinder (32) fixed to the lower surface (312c) of the second horizontal portion (31c). In addition, the four support shafts (37a) are connected two by two through connecting plates (37d) extending along the longitudinal direction of the dressing member (33).

A pair of slide members (37b) each have two support shafts (37a) that can slide through them, and have a longitudinal end of a dressing member (33) attached thereto. Here, the two support shafts (37a) that pass through the same slide member (37b) are not connected to each other by a connecting plate (37d). Then, the pair of slide members (37b) face each other with a power cylinder (32) therebetween, and the dressing member (33) faces the piston rod. As a result, the dressing member (33) comes into contact with the piston rod.

The four pressure members (37c) are all coil springs, each having a support shaft (37a) inserted therein, and are arranged between the slide member (37b) and the connecting plate (37d). In addition, each pressure member (37c) is prevented from falling out by the connecting plate (37d) and presses the slide member (37b) toward the supporting member (31).

Next, the operation of the dressing device (1C) of Example 4 will be described.

When dressing the polishing pad (11a, 12a) of the double-sided polisher (10) by the dressing device (1C) of Example 4, similarly to Examples 1 to 3, the dressing member (33) is pressed against the polishing pad (11a, 12a) and the polishing pad (11a, 12a) and the dressing member (33) are moved relative to each other.

Here, in the dressing device (1C) of Example 4, a dressing member (33) is attached to a slide member (37b) through which a support shaft (37a) passes, and this dressing member (33) is positioned opposite to a piston rod.

Therefore, when the piston rod is extended, the piston rod comes into contact with the dressing member (33) and presses it. On the other hand, the dressing member (33) presses the piston rod, but only comes into contact with the piston rod and is not fixed. As a result, the lateral load applied to the dressing member (33) is not completely transmitted to the piston rod.

As a result, the lateral load applied to the piston rod can be reduced. In addition, by suppressing the lateral load applied to the piston rod, the durability of the power cylinder (32) can be prevented from deteriorating.

Meanwhile, a support shaft (37a) penetrates the slide member (37b) to which the dressing member (33) is attached. Therefore, the position of the slide member (37b) is determined by the support shaft (37a), and the dressing member (33) can be appropriately pressed by the piston rod. In addition, the slide member (37b) is pressed toward the support member (31) by the pressing member (37c). Therefore, the dressing member (33) is pressed toward the piston rod, and even if a lateral load is applied to the dressing member (33), it is difficult for a positional misalignment to occur with respect to the piston rod, and the dressing member (33) can be more appropriately pressed by the piston rod.

Above, the dressing device for a double-sided polisher of the present invention has been described based on Examples 1 to 4, but the specific configuration is not limited to these Examples, and changes or additions to the design are permitted as long as they do not depart from the gist of the invention according to each claim of the scope of the patent claims.

The dressing devices (1 to 1C) of Examples 1 to 4 are all provided with a pair of dressing members (33, 33) and are shown as examples capable of simultaneously dressing the polishing pads (11a, 12a), but are not limited to this. For example, it may be possible to alternately dress the polishing pads (11a, 12a) by having only one dressing member (33). In addition, it may be possible to dress only one of the polishing pads (11a, 12a).

In addition, for the polishing pad (11a) or the polishing pad (12a), a plurality of dressing members (33) may be installed, respectively. In addition, in Examples 1 to 4, examples were shown in which the dressing member (33) had an elongated shape, but this is not limited thereto. For example, it may have any shape, such as a disc shape or a rectangular plate shape.

In the dressing devices (1 to 1C) of Examples 1 to 4, an example using a pneumatic cylinder as the power cylinder (32) is shown, but this is not limited to this. The power cylinder (32) may be arbitrarily selected as long as it can drive the piston rod (32a) to expand and contract by means of pneumatic pressure, hydraulic pressure, water pressure, electric power, or the like.

In the dressing devices (1 to 1C) of Examples 1 to 4, an example is shown in which cleaning water can be sprayed toward the polishing pads (11a, 12a) through a high-pressure nozzle (31f), but the cleaning water does not necessarily have to be sprayed.

In addition, in the dressing devices (1 to 1C) of Examples 1 to 4, an example of pressing one dressing member (33) by one power cylinder (32) is shown, but this is not limited to this. One dressing member may be pressed by a plurality of power cylinders (32).

In addition, in the dressing devices (1, 1B) of Examples 1 and 3, an example is shown in which a first end (341b) of a guide shaft (34b) is fixed to a cylinder plate (34a), and a second end (342b) is inserted into a guide hole (316b, 316c) formed in a support member (31). However, this is not limited to this. A guide hole into which a guide shaft (34b) can be inserted may be formed in a cylinder plate (34a), a second end (342b) of the guide shaft (34b) may be fixed to a support member (31), and a first end (341b) of the guide shaft (34b) may be inserted into a guide hole formed in the cylinder plate (34a).

1, 1A, 1B, 1C: Dressing device 2: Arm absence
2b: Fleet 10: Double-sided grinder
11: Lower plate 11a: Polishing pad
12: Top plate 12a: Polishing pad
13: Rotation axis 31: Support member
31f: High pressure nozzle (injection nozzle) 316b, 316c: Guide hole
32: Power cylinder 32a: Piston rod
33: Absence of dressing 34: Load reducing means
34a: Cylinder plate 34b: Guide shaft
35: Load reduction means 35a: Thin plate member
35b: Sheet metal member 36: Load reducing means
36a: Cylinder plate 36c: Support spring body (elastic member)
36d: Guide pin 37: Load reducing means
37a: Support shaft 37b: Slide member
37c: Absence of pressure

Claims (7)

A dressing device for a double-sided polishing machine, which inserts a dressing member between a lower plate rotatable about a rotation axis and an upper plate rotatable about the rotation axis, pushes the dressing member against at least one of a polishing pad attached to the lower plate and a polishing pad attached to the upper plate, and dresses the polishing pad by relative motion between the polishing pad and the dressing member,
An arm member that can be moved forward and backward between the lower and upper plates,
A support member fixed to the tip of the above arm member,
A power cylinder installed on the above support member and pressing the dressing member toward the polishing pad by a piston rod,
A load reducing means interposed between the dressing member and the power cylinder, which reduces the action of a lateral load applied to the dressing member by the relative motion between the polishing pad and the dressing member and transmitted from the dressing member to the piston rod.
Equipped with,
The above load reduction means are,
A cylinder plate having the dressing member attached to a surface facing the polishing pad and fixed to the piston rod;
A guide shaft in which the first end is fixed to the cylinder plate and the second end is inserted and penetrated into a guide hole formed in the support member, or in which the first end is inserted and penetrated into a guide hole formed in the cylinder plate and the second end is fixed to the support member.
Have,
A dressing device for a double-sided polisher, characterized in that the dressing member is attached to the cylinder plate via an elastic member. A dressing device for a double-sided polishing machine, which inserts a dressing member between a lower plate rotatable about a rotation axis and an upper plate rotatable about the rotation axis, pushes the dressing member against at least one of a polishing pad attached to the lower plate and a polishing pad attached to the upper plate, and dresses the polishing pad by relative motion between the polishing pad and the dressing member,
An arm member that can be moved forward and backward between the lower and upper plates,
A support member fixed to the tip of the above arm member,
A power cylinder installed on the above support member and pressing the dressing member toward the polishing pad by a piston rod,
A load reducing means interposed between the dressing member and the power cylinder, which reduces the action of a lateral load applied to the dressing member by the relative motion between the polishing pad and the dressing member and transmitted from the dressing member to the piston rod.
Equipped with,
The above load reduction means has a thin plate member that is fixed to the support member in a cantilever state and is capable of elastic deformation in the thickness direction,
A dressing device for a double-sided polisher, characterized in that the dressing member is attached to a surface of the thin plate member facing the polishing pad, and an area to which the dressing member is attached is arranged at a position facing the piston rod. A dressing device for a double-sided polisher, characterized in that in the second paragraph, the thin plate member extends along the moving direction of the polishing pad, the upstream side of the moving direction is fixed to the support member, and the dressing member is attached to the downstream side of the moving direction. A dressing device for a double-sided polishing machine, which inserts a dressing member between a lower plate rotatable about a rotation axis and an upper plate rotatable about the rotation axis, pushes the dressing member against at least one of a polishing pad attached to the lower plate and a polishing pad attached to the upper plate, and dresses the polishing pad by relative motion between the polishing pad and the dressing member,
An arm member that can be moved forward and backward between the lower and upper plates,
A support member fixed to the tip of the above arm member,
A power cylinder installed on the above support member and pressing the dressing member toward the polishing pad by a piston rod,
A load reducing means interposed between the dressing member and the power cylinder, which reduces the action of a lateral load applied to the dressing member by the relative motion between the polishing pad and the dressing member and transmitted from the dressing member to the piston rod.
Equipped with,
The above load reduction means are,
A support shaft standing up from the above support member,
A slide member having the dressing member attached to a surface facing the polishing pad and through which the support shaft passes;
A pressing member that presses the above slide member toward the above support member
Have,
A dressing device for a double-sided polisher, characterized in that the dressing member is positioned opposite the piston rod. A dressing device for a double-sided polisher, characterized in that in any one of claims 1 to 4, the support member is provided with a spray nozzle that sprays cleaning water toward the polishing pad, and the spray nozzle is arranged on the upstream side of the dressing member in the moving direction of the polishing pad.
delete delete

Images