JP7283750B2 - Facing device and facing method - Google Patents

Description

The present invention relates to a facing apparatus and a facing method for facing a polishing pad attached to a surface plate of a polishing machine for polishing a substrate material.

2. Description of the Related Art Conventionally, there has been known a dressing device for dressing polishing pads respectively attached to a lower surface plate and an upper surface plate of a polishing machine for polishing a substrate material such as a silicon wafer. In this conventional dressing apparatus, the dressing is performed after the surface plates are preliminarily subjected to deformation equivalent to the deformation that occurs in the upper and lower surface plates by heat load or stress load (see, for example, Patent Document 1).

JP-A-2002-46058

By the way, the surface plate of the polishing machine is cold before starting the polishing process of the substrate material, and when the polishing process starts, the temperature starts to rise, and by continuously repeating this polishing process, the temperature is stabilized at a predetermined temperature. At this time, the surface plate of the polishing machine undergoes a subtle change in shape as the surface plate temperature fluctuates. However, it is very difficult to apply this subtle shape change to the surface plate for dressing. When unstable, it has been difficult to create a suitable surface topography on the surface of the polishing pad. As a result, there is a problem that the yield of high-precision polishing of the substrate material is lowered during the period from the start of the polishing of the substrate material to the stabilization of the surface plate temperature.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and is a facing apparatus and facing capable of improving the yield of high-precision polishing of a substrate material performed from the start of polishing until the surface plate temperature stabilizes. The challenge is to provide a method.

To achieve the above object, the facing apparatus of the present invention comprises a facing member pressed against a polishing pad provided on a surface plate of a polishing machine for polishing a substrate material, a drive mechanism for moving the facing member, and a drive mechanism. a controller that controls and faces the polishing pad; and a first autofacing execution recipe that is a facing that is executed from the start of polishing of the substrate material until the temperature of the surface plate stabilizes, comprising: A recipe setting unit is provided for setting based on changes in the shape of the platen. Then, the control unit controls the drive mechanism according to the execution recipe of the first autofacing, and performs the first autofacing from the start of polishing of the substrate material until the temperature of the platen stabilizes.

In order to achieve the above object, the facing method of the present invention faces the polishing pad by moving the facing member while pressing the facing member against the polishing pad provided on the surface plate of the polishing machine that polishes the substrate material. Here, a first step of setting an execution recipe for a first autofacing, which is a facing performed from the start of polishing of the substrate material until the temperature of the platen stabilizes, based on changes in the shape of the platen; and a second step of performing the first autofacing from the start of polishing of the substrate material until the temperature of the platen stabilizes according to the execution recipe of the first autofacing set in the first step.

In the facing apparatus and facing method of the present invention, from the start of polishing of the substrate material until the temperature of the surface plate stabilizes, the first autofacing is performed based on the execution recipe set based on the change in the shape of the surface plate. . This makes it possible to create an appropriate surface shape on the surface of the polishing pad even if the surface plate undergoes a slight change in shape due to fluctuations in the temperature of the surface plate. Therefore, it is possible to improve the yield of high-precision polishing of the substrate material performed from the start of polishing until the temperature of the platen stabilizes.

1 is an explanatory view schematically showing the schematic configuration of a double-side polishing machine and a facing device of Example 1. FIG. 4 is a plan view schematically showing the operation of the facing device of Example 1. FIG. 4 is a flow chart showing the flow of steps S1 to S10 of facing control processing using the facing apparatus of the first embodiment; 5 is a flow chart showing the flow of steps S11 to S29 of facing control processing using the facing apparatus of the first embodiment; It is a flow chart which shows a flow of dressing control processing of a comparative example. 4 is a graph showing changes in the degree of divergence from the ideal surface plate pressure distribution through the pad from the start of polishing of the workpiece until the temperature of the surface plate stabilizes. 7 is a graph showing changes in the degree of deviation from the ideal pad state from after the surface plate temperature is stabilized until the pad life is reached, in the dressing device of the comparative example. 5 is a graph showing changes in the degree of deviation from the ideal pad state from after the surface plate temperature is stabilized until the pad life is reached, in the facing device of Example 1. FIG. FIG. 11 is a plan view schematically showing a modification of the driving mechanism of the facing device;

A mode for carrying out the facing device of the present invention will be described below based on Embodiment 1 shown in the drawings.

(Example 1)
The configuration of the facing device 1 of Example 1 will be described below with reference to FIGS. 1 and 2. FIG.

The facing apparatus 1 of Embodiment 1 comprises a polishing pad 11a attached to a lower surface plate 11 of a double-sided polishing machine 10 for polishing both the front and back surfaces of a thin plate-like work (substrate material), and an upper surface of the double-sided polishing machine 10. It is a device for facing and dressing the polishing pad 12a attached to the disk 12. FIG. Here, "facing" refers to the purpose of creating a desired pad shape and desired pad state (desired surface roughness, etc.) while removing degraded substances from the surface of the polishing pad, roughening, and dressing. , the facing member 22 is used to grind the surfaces of the polishing pads 11a and 12a. On the other hand, "dressing" differs from facing in that it does not create the desired pad shape or desired pad state, but instead grinds along the surface of the polishing pad to remove degraded substances on the surface of the polishing pad and roughen the surface. , is to sharpen. In the facing apparatus 1 of Example 1, the common facing head 2 is used for facing and dressing.

In order to face or dress the polishing pads 11a and 12a with this facing apparatus 1, first, the facing head 2 provided with the facing member 22 is inserted between the lower surface plate 11 and the upper surface plate 12 of the double-sided polishing machine 10. enter. The facing head 2 is sandwiched between the lower surface plate 11 and the upper surface plate 12, and the facing member 22 is pressed against the polishing pads 11a and 12a by a pressing mechanism (not shown). After that, the lower surface plate 11 is rotated in a first direction (for example, clockwise direction), and the upper surface plate 12 is rotated in a second direction opposite to the first direction (for example, counterclockwise direction). Thereby, the polishing pads 11a and 12a and the facing member 22 move relative to each other, and the polishing pads 11a and 12a can be faced or dressed.

The facing apparatus 1 includes a facing head 2, a driving mechanism 3 for moving the facing head 2, a control section 4 for controlling the driving mechanism 3, and a recipe setting section 5 for setting an execution recipe for facing or dressing. ing.

The facing head 2 includes a support member 21 and a pair of facing members 22, 22, as shown in FIG.

Here, the support member 21 is a rigid body made of metal or the like, has a pressing mechanism (not shown), and is formed with ejection holes through which fluid such as cleaning water or compressed air can be ejected. The pressing mechanism is, for example, a power cylinder having a piston that protrudes upward or downward from the support member 21 .

The pair of facing members 22, 22 are grindstones that grind by contacting the polishing pads 11a, 12a, respectively. The pair of facing members 22 , 22 are provided on the top and bottom surfaces of the support member 21 at positions that can be pressed by the pressing mechanism. The facing member 22 is pressed against the polishing pads 11a and 12a by being pressed by the pressing mechanism. Here, each facing member 22 is formed by adhering diamond abrasive grains or CBN (cubic boron nitride) abrasive grains to a plated layer formed on the surface of a base metal made of iron, carbon steel, or the like. As the facing member 22, other functional surface materials such as metal wires and ceramics may be used.

The drive mechanism 3 is a so-called slider link mechanism including a first arm 31, a second arm 32, and a rotary motor (swing actuator) 33, as shown in FIG. In this driving mechanism 3 , the facing head 2 is supported by the first arm 31 and the second arm 32 .

The first arm 31 is a horizontally extending pipe member, and the facing head 2 having the facing member 22 is fixed to the tip 31a. A base end portion 31 b of the first arm 31 is fixed to the peripheral surface of the rotating shaft 34 . Here, the rotary shaft 34 is a shaft member whose axial direction is vertical and is rotated by the rotary motor 33 . The rotation of the rotating shaft 34 causes the first arm 31 to swing horizontally, and the distal end portion 31a moves along the arc-shaped track 2a centering on the rotating shaft 34 . As a result, the facing head 2 fixed to the distal end portion 31 a of the first arm 31 moves in and out between the lower surface plate 11 and the upper surface plate 12 . The first arm 31 is rotated to a position where the facing head 2 is retracted from between the lower surface plate 11 and the upper surface plate 12 when not in use. Further, a flow path may be formed inside the first arm 31 through which cleaning water or the like ejected from the facing head 2 flows.

The second arm 32 is a bar member extending in the horizontal direction, and the tip 32a is rotatably connected to the facing head 2 via a universal joint 32c. In addition, the base end portion 32b of the second arm 32 is rotatably supported by a shaft member 35 capable of advancing and retreating along a predetermined direction (the direction indicated by the arrow α in FIG. 2). In addition, the shaft member 35 is arranged at a position where it does not interfere with the upper and lower surface plates 11 and 12 .

The rotary motor 33 is an electric motor having an output shaft arranged along the vertical direction at a position that does not interfere with the upper and lower surface plates 11 and 12, and a rotary shaft 34 is fixed to the output shaft. Further, the rotary motor 33 receives a control command from the control unit 4, and based on this control command, its driving, stopping, rotation direction, and rotation speed are controlled.

The control unit 4 includes a control calculation unit composed of a CPU (Central Processing Unit), a memory, etc., and controls the rotary motor 33 according to programs stored in the memory and various facing or dressing execution recipes input from the recipe setting unit 5. It outputs a control command and controls the operation of the driving mechanism 3 . By outputting a request signal to the recipe setting unit 5, the control unit 4 also outputs information on the shape of the work during polishing or at the end of polishing (hereinafter referred to as "polishing state of the work"), information on both sides of the work, and It is possible to obtain necessary information such as information on the number of times polishing has been performed in the polishing machine 10 (hereinafter referred to as "batch number").

Based on information such as the number of batches, the control unit 4 determines the timing for starting polishing in the double-side polishing machine 10 and the timing for stabilizing the temperatures of the upper and lower platens 11 and 12, respectively. After judging the start of polishing by the double-side polishing machine 10 , the control section 4 reads the execution recipe of the first autofacing from the recipe setting section 5 . The controller 4 controls the rotary motor 33 in accordance with the execution recipe of the first autofacing each time the workpiece is polished from the start of polishing until it is determined that the temperatures of the upper and lower surface plates 11 and 12 have stabilized. It outputs commands and controls the drive mechanism 3 . As a result, the first autofacing is performed at predetermined intervals from the start of polishing of the workpiece until it is determined that the temperatures of the upper and lower surface plates 11 and 12 have stabilized. Note that the execution interval of the first autofacing can be arbitrarily set, for example, each time the workpiece is polished, or every predetermined number of batches.

Here, the "first autofacing" is a facing that is executed from the start of polishing of the workpiece until it is determined that the temperature of the upper and lower surface plates 11, 12 has stabilized. Partially or fully facing the pad surface based on the change. In the first autofacing, both of the polishing pads 11a and 12a may be faced at the same time, either one of them may be faced, or the polishing pads 11a and 12a may be faced alternately. Further, "it is determined that the temperature of the upper and lower surface plates 11 and 12 has stabilized" means that it is determined that the temperature change of the surface plates that occurs during the polishing process of the workpiece has converged and the temperature of the surface plates has stabilized. be. That is, both the upper and lower surface plates 11 and 12 are cold at the start of polishing, and the surface plate temperature is relatively low. As the workpiece is polished, the surface plate temperature gradually rises, and when it reaches a predetermined temperature, the temperature rise converges and stabilizes. Here, temperature convergence may be determined by measuring the temperatures of the polishing pads 11a and 12a and the surface plate temperature. is completed, it may be determined that the platen temperature has stabilized. Furthermore, the convergence determination of the surface plate temperature may be performed based on the distance between the surface plates.

Further, after determining that the temperatures of the upper and lower surface plates 11 and 12 have stabilized, the control unit 4 executes the second autofacing based on the number of batches, the environmental conditions during the polishing process, and the transition of the polishing state of the workpiece. It is determined whether or not a predetermined condition is met. The control unit 4 reads the execution recipe of the second autofacing from the recipe setting unit 5 when determining that the predetermined condition is satisfied. Then, the control unit 4 outputs a control command to the rotary motor 33 according to the execution recipe of the second autofacing, and controls the drive mechanism 3 . As a result, after the temperatures of the upper and lower surface plates 11 and 12 are stabilized, the second autofacing is performed.

Here, the "second auto facing" is a facing that is executed when it is determined that a predetermined condition is satisfied after the surface plate temperature is stabilized, and is based on changes in the workpiece polishing environment after the surface plate temperature is stabilized. Facing the pad surface partially or entirely. In the second autofacing, both of the polishing pads 11a and 12a may be faced at the same time, either one of them may be faced, or the polishing pads 11a and 12a may be faced alternately. Further, the "polishing environment of the work" is a factor that affects the polishing state of the work. Specifically, the local temperature of the upper and lower surface plates 11 and 12 and their support, the distance between the surface plates during polishing, the change in surface plate shape due to long-term heat accumulation, the drive motor load factor of the double-sided polishing machine 10, Deterioration of carrier, wear/surface roughness/heat accumulation/temperature distribution of polishing pads 11a and 12a, temperature of cooling water for cooling upper and lower surface plates 11 and 12, type and temperature of slurry supplied during polishing, upper and lower surface plates 11, 12 and the like. The second autofacing is performed based on the degree of change in the polishing environment of the workpiece.

Further, ``when it is determined that a predetermined condition has been established'' means that it is determined that maintenance of the polishing pads 11a and 12a cannot be performed only by performing auto-dressing, which is dressing for uniformly dressing the entire surfaces of the polishing pads 11a and 12a. It is time to "Maintenance of the polishing pads 11a and 12a" means restoring or changing the surface shape of the pads to a desired surface shape, recovering the state of the pads, and controlling the shape and state of the pads.

Also, the "predetermined condition" is determined in advance based on experiments, etc. Specifically, for example, when the number of batches subjected to polishing processing is greater than or equal to the predetermined number of batches, or when the polishing state of the workpiece tends to deviate from the acceptance criteria and so on.

Furthermore, the control unit 4 monitors the shape of the workpiece and changes in the polishing environment of the workpiece in real time during the polishing process, and when it determines that the situation deviates from the polishing environment capable of achieving high-precision polishing of the workpiece. Alternatively, it may be determined that the "predetermined condition" has been established. Further, when the control unit 4 determines that the correlation between the shape of the workpiece after polishing and the polishing environment of the workpiece after polishing deviates from the polishing environment in which high-precision polishing of the workpiece can be achieved. Alternatively, it may be determined that the "predetermined condition" has been established. That is, by monitoring the correlation between the polishing state of the workpiece and the polishing environment of the workpiece, the pressure distribution between the polishing pads, and the It is possible to estimate the degree of deviation from the ideal pad state that appears in the polishing parameters of the workpiece. Then, this assumption can be used as a barometer to execute the second autofacing. The "transition of the polishing state of the work" can be grasped by arranging the polishing state of the work in chronological order and analyzing it.

Further, after the temperatures of the upper and lower surface plates 11 and 12 are stabilized, the control section 4 reads out the auto-dressing execution recipe from the recipe setting section 5 until it is determined that the above-described predetermined condition is satisfied. Then, the control unit 4 outputs a control command to the rotary motor 33 according to the auto-dressing execution recipe at predetermined intervals from when the temperatures of the upper and lower surface plates 11 and 12 are stabilized until the predetermined conditions are satisfied, It controls the drive mechanism 3 . As a result, auto-dressing, which is dressing for uniformly dressing the entire surfaces of the polishing pads 11a and 12a, is performed at predetermined intervals. The execution interval of the auto dressing can be arbitrarily set, for example, every time the workpiece is polished or every predetermined number of batches.

Further, when the control unit 4 determines that the double-sided polishing machine 10 is to be started, the control unit 4 reads out the basic facing execution recipe from the recipe setting unit 5 . Then, the control unit 4 drives and controls, for example, a ring-shaped facing member (not shown) according to the basic facing execution recipe. As a result, basic facing is performed after the double-sided polishing machine 10 is started. Here, the "basic facing" refers to the surface shape of the polishing pads 11a and 12a required before the start of processing (hereinafter referred to as "basic pad shape"), assuming the pad surface shape after warm-up of the double-sided polishing machine 10. It is a facing that creates Note that the shape of the base pad is created corresponding to each of the diameter and radius of the upper and lower surface plates 11 and 12, or any one of them.

Further, when the controller 4 determines that the maintenance of the polishing pads 11a and 12a cannot be performed only by performing auto-dressing or second auto-facing after polishing the workpiece, the recipe setting part 5 instructs the controller 4 to perform the second basic facing. Read the run recipe. Then, the control unit 4 drives and controls, for example, a ring-shaped facing member (not shown) according to the execution recipe of the second basic facing, and executes the second basic facing. Here, the term "second basic facing" refers to the removal of denatured substances on the pad surface caused by the polishing of the workpiece, as well as the grinding of the entire pad surface and the creation of a predetermined shape on the pad surface. This is a facing that creates a predetermined surface shape (hereinafter referred to as "second base pad shape") on the polishing pads 11a and 12a. The shape of the second base pad is created corresponding to each of the diameter and radius of the upper and lower surface plates 11 and 12, or any one of them.

Also, the facing member used when executing the base facing and the second base facing is arranged between the lower surface plate 11 and the upper surface plate 12 each time it is used. Therefore, the temperature of the upper and lower surface plates 11 and 12 is lowered by executing the basic facing and the second basic facing. Moreover, the facing member used for the base facing and the second base facing is not limited to the ring shape, and any shape of facing member can be used.

The recipe setting unit 5 includes a control calculation unit including a CPU (Central Processing Unit), a memory, and the like. The recipe setting unit 5 receives various information input from the surface plate measuring device 14, the work shape measuring device 15, the number of polishing times counter 16, the pad temperature sensor 17, the information input means 18, etc., and the information stored in the memory. etc., the execution recipes for various facings and dressings are automatically calculated and set. Here, the ``execution recipe for facing and dressing'' refers to the position at which the facing member 22 or the ring-shaped facing member is pressed against the pad during facing or dressing, and the scanning speed of the facing member 22 or the like for each pad position. , pressing time, pressing force, and the like.

The surface plate measuring device 14 is a sensor that measures the surface-to-surface distance between the lower surface plate 11 and the upper surface plate 12 . The work shape measuring device 15 is a sensor that measures the shape of the work being polished. The number-of-polishing counter 16 is a sensor that measures the number of batches in the double-sided polishing machine 10 . Pad temperature sensor 17 is a sensor that measures the temperature of polishing pads 11a and 12a. The information input means 18 is a device for inputting information on the polishing environment of the workpiece. The information input means 18 is composed of a touch panel, a keyboard, or the like, and may be one that allows manual input by the operator of the double-sided polishing machine 10, or one that automatically inputs detection values from various sensors. may

When setting the execution recipe for the first autofacing, the recipe setting unit 5 first estimates the surface shapes of the upper and lower surface plates 11 and 12 from the measurement result of the surface plate measuring device 14 . Subsequently, by analyzing the estimated surface shape along the time series, change information of the surface shape of the upper and lower surface plates 11 and 12 is acquired. Then, based on the change in the surface shape of the upper and lower surface plates 11 and 12, the recipe setting unit 5 calculates the required surfaces of the polishing pads 11a and 12a when the temperatures of the upper and lower surface plates 11 and 12 are stabilized from the basic pad shape. A transitional pad shape is obtained as a target pad shape at predetermined intervals when the pad shape is transformed into a shape (hereinafter referred to as "necessary pad shape"). An execution recipe for correcting the difference between the target pad shape and the actual pad shape of the polishing pads 11a and 12a is used as the first autofacing execution recipe. Here, the execution recipe for correcting the difference between the target pad shape and the actual pad shape is experimentally determined in advance and stored in the memory of the recipe setting unit 5 .

Also, when setting the execution recipe for the second autofacing, the recipe setting unit 5 first acquires information on the polishing state of the workpiece that has been polished after the surface plate temperature has stabilized from the measurement result of the workpiece shape measuring device 15. do. Subsequently, changes in the polishing environment of the work are estimated from the acquired information on the polishing state of the work. Based on the estimated change in the polishing environment of the workpiece, the recipe setting unit 5 obtains a target pad shape/state for suppressing or mitigating the change in the polishing environment of the workpiece. The execution recipe for correcting the difference from the actual pad shapes/states of 11a and 12a is set as the execution recipe for the second autofacing. The execution recipe for the second autofacing is obtained, for example, empirically or inductively based on the dynamic and time-dependent denaturation characteristics of the double-side polishing machine 10 and selected secondary materials (such as slurry).

Also, when setting the execution recipe for auto-dressing, the recipe setting unit 5 first determines the surface plate based on the state information of the double-sided polishing machine 10 input via the information input means 18, the information input in advance in the memory, and the like. The state of the polishing pads 11a and 12a when the temperature is stable is recognized. Then, an execution recipe for uniformly dressing the entire surfaces of the polishing pads 11a and 12a obtained from the recognized pad state is set as an execution recipe for auto-dressing. The execution recipe for uniformly dressing the entire surfaces of the polishing pads 11a and 12a is experimentally determined in advance according to the state of the pads when the platen temperature is stable, and is stored in the memory of the recipe setting unit 5.

Furthermore, when setting the execution recipe for the basic facing, the recipe setting unit 5 first determines the basic facing from the state information of the double-side polishing machine 10 input via the information input means 18, the information previously input to the memory, and the like. The state of the previous polishing pads 11a, 12a is recognized. An execution recipe for creating a basic pad shape obtained from the recognized pad state is used as an execution recipe for basic facing. Here, the execution recipe for creating the basic pad shape is experimentally determined in advance according to the state of the pad before basic facing, and is stored in the memory of the recipe setting unit 5 .

Also, when setting the execution recipe for the second basic facing, the recipe setting unit 5 first uses the state information of the double-sided polishing machine 10 input via the information input means 18, the information previously input to the memory, and the like. The state of the polishing pads 11a and 12a before the second base facing is recognized. Then, the execution recipe for creating the second basic pad shape obtained from the recognized pad state is used as the execution recipe for the second basic facing. Here, the execution recipe for creating the second base pad shape is experimentally determined in advance according to the state of the pad before the second base facing, and is stored in the memory of the recipe setting section 5 .

A processing procedure of facing control processing using the facing apparatus of the first embodiment will be described below with reference to FIGS. 3A and 3B.

In step S1, the operator of the double-sided grinder 10 attaches polishing pads 11a and 12a to the upper and lower platens 11 and 12, respectively, in order to polish the workpiece by the double-sided grinder 10, and the process proceeds to step S2.

In step S2, following the attachment of the pad in step S1, the execution recipe for basic facing is set by the recipe setting unit 5, and the process proceeds to step S3. Here, the recipe setting section 5 sets a basic facing execution recipe for creating a basic pad shape from the state of the polishing pads 11a and 12a before basic facing.

In step S3, following the setting of the basic facing execution recipe in step S2, the controller 4 drives and controls, for example, a ring-shaped facing member according to the execution recipe set in step S2 to execute basic facing, Go to step S4. By executing the basic facing, a basic pad shape is created on the surfaces of the polishing pads 11a and 12a. The ring-shaped facing member is placed between the upper and lower surface plates 11 and 12 in advance before performing the basic facing.

In step S4, subsequent to the execution of the basic facing in step S3, the control section 4 determines whether or not the basic facing has been completed. If YES (end of basic facing), go to step S5. If NO (basic facing not completed), step S3 is repeated. Here, the end of the basic facing is judged from the facing time and the surface shape of the polishing pads 11a and 12a. Also, the ring-shaped facing member is removed from between the upper and lower surface plates 11 and 12 after completion of the basic facing.

In step S5, following the determination in step S4 that the basic facing has been completed, the double-side polishing machine 10 performs polishing of the workpiece, and the process proceeds to step S6.

In step S6, it is determined whether or not the polishing process has been completed following the execution of the polishing process of the workpiece in step S5. In the case of YES (end of polishing), the process proceeds to step S7. In the case of NO (polishing not completed), step S5 is repeated. Here, the polishing of the workpiece may be determined to be finished for each batch, or may be determined to be finished at the timing when a predetermined number of batches have been polished.

In step S7, following the judgment in step S6 that the polishing process is finished, the recipe setting unit 5 sets the execution recipe for the first autofacing, and the process proceeds to step S8. Here, the recipe setting unit 5, based on the change in the surface shape of the upper and lower surface plates 11 and 12 estimated from the measurement result of the surface plate measuring device 14, changes the basic pad shape to the required pad shape. A first autofacing execution recipe for correcting the difference between the target pad shape and the actual pad shape is set.

In step S8, following the setting of the execution recipe for the first autofacing in step S7, the control unit 4 outputs a control command to the rotary motor 33 according to the execution recipe set in step S7 to control the drive mechanism 3. Then, the first autofacing is executed, and the process proceeds to step S9. By executing the first autofacing, the actual pad shape of the polishing pads 11a and 12a is finely corrected each time so as to have a transitional target pad shape when changing from the basic pad shape to the required pad shape. .

In step S9, subsequent to the execution of the first autofacing in step S8, the controller 4 determines whether or not the first autofacing has ended. If YES (end of the first autofacing), the process proceeds to step S10. If NO (the first autofacing has not been completed), step S8 is repeated. Here, the end of the first autofacing is judged from the facing time and the surface shape of the polishing pads 11a and 12a.

In step S10, it is determined whether or not the temperatures of the lower surface plate 11 and the upper surface plate 12 have stabilized following the determination in step S9 that the first autofacing has ended. In the case of YES (stable platen temperature), the process proceeds to step S11. In the case of NO (surface plate temperature unstable), the process returns to step S5.

In step S11, following the determination in step S10 that the surface plate temperature is stable, the double-side polishing machine 10 performs polishing of the workpiece, and the process proceeds to step S12.

In step S12, it is determined whether or not the polishing process has been completed following the execution of the polishing process of the workpiece in step S11. In the case of YES (end of polishing), the process proceeds to step S13. In the case of NO (polishing not completed), step S11 is repeated. Here, the polishing of the workpiece may be determined to be finished for each batch, or may be determined to be finished at the timing when a predetermined number of batches have been polished.

In step S13, subsequent to the determination in step S12 that the polishing process is completed, the controller 4 monitors the number of batches and the polishing state of the workpiece, and proceeds to step S14. Here, the number of batches is measured by the number-of-polishing counter 16 . Also, the transition of the polishing state of the workpiece is grasped by arranging the measurement results of the workpiece shape measuring device 15 in chronological order and analyzing them.

In step S14, following the monitoring of the number of batches and the transition of the polishing state of the work in step S13, the controller 4 performs auto-dressing for maintenance of the polishing pads 11a and 12a based on the monitoring results in step S13. Determine if it is possible. If YES (possible), pad maintenance by auto-dressing is possible, and the process proceeds to step S15. In the case of NO (cannot be handled), it is determined that pad maintenance by auto-dressing is impossible, and the process proceeds to step S18.

In step S15, following the determination in step S14 that pad maintenance by auto-dressing is possible, the recipe setting unit 5 sets the execution recipe for auto-dressing, and the process proceeds to step S16. Here, the recipe setting unit 5 sets an auto-dressing execution recipe for uniformly dressing the entire surfaces of the polishing pads 11a and 12a from the state of the polishing pads 11a and 12a when the platen temperature is stable.

In step S16, following the setting of the auto-dressing execution recipe in step S15, the control unit 4 outputs a control command to the rotary motor 33 according to the execution recipe set in step S15 to control the driving mechanism 3. Auto-dressing is executed, and the process proceeds to step S17. By executing auto-dressing, the entire surfaces of the polishing pads 11a and 12a are uniformly ground.

In step S17, subsequent to execution of auto-dressing in step S16, the controller 4 determines whether or not auto-dressing is completed. In the case of YES (end of auto dressing), the process returns to step S11. In the case of NO (incomplete auto-dressing), step S16 is repeated. Here, the end of auto dressing is determined from the dressing time or the like.

In step S18, following the determination in step S14 that pad maintenance by auto-dressing is impossible, the controller 4 performs maintenance of the polishing pads 11a and 12a by the second auto-facing based on the monitoring results in step S13. It is determined whether or not the countermeasure is possible, that is, whether or not the pad surfaces of the polishing pads 11a and 12a can be restored to the desired shape and state (for example, the required pad shape and surface roughness) by performing the second autofacing. . If YES (possible), it is determined that the pad maintenance can be performed by the second autofacing, and the process proceeds to step S19. In the case of NO (cannot be handled), it is determined that the pad maintenance cannot be performed with the second autofacing, and the process proceeds to step S22. It should be noted that it is determined by this step S18 whether or not a predetermined condition is established after the surface plate temperature is stabilized. Further, this judgment is made based on the monitoring result in step S13, and is made based not only on the number of batches but also on the transition of the polishing state of the work.

In step S19, following the judgment in step S18 that the pad maintenance can be performed by the second autofacing (predetermined condition is met), the recipe setting unit 5 sets the execution recipe for the second autofacing, and the process proceeds to step S20. Here, the recipe setting unit 5 estimates a change in the polishing environment of the workpiece that affects the polishing state of the workpiece from the measurement result of the workpiece shape measuring device 15 and the monitoring result of the polishing environment of the workpiece. Then, with respect to the change in the polishing environment of the work estimated to have a high correlation, a target pad shape/state that suppresses or mitigates the influence of the change in the polishing environment of the work is obtained, and the target pad shape/state and the actual pad shape/state are obtained. A second autofacing execution recipe is set to correct the difference between .

In step S20, following the setting of the second autofacing execution recipe in step S19, the control unit 4 outputs a control command to the rotary motor 33 according to the execution recipe set in step S19, thereby controlling the driving mechanism 3. Then, the second autofacing is executed, and the process proceeds to step S21. By executing the second autofacing, the actual pad shape/state of the polishing pads 11a and 12a is corrected to the target pad shape/state that suppresses or mitigates the influence of changes in the polishing environment of the workpiece.

In step S21, subsequent to execution of the second autofacing in step S20, the control unit 4 determines whether or not the second autofacing has ended. If YES (end of the second autofacing), the process returns to step S11. If NO (the second autofacing has not been completed), step S20 is repeated. Here, the end of the second autofacing is judged from the facing time and the surface shape/state of the polishing pads 11a and 12a.

In step S22, following the determination in step S18 that the pad maintenance by the second autofacing is impossible, the controller 4 performs the second maintenance of the polishing pads 11a and 12a based on the monitoring result in step S13. It is determined whether or not it is possible to deal with it by facing, that is, whether or not the shape of the second base pad can be created by performing the second base facing. If YES (possible), the process proceeds to step S23. In the case of NO (cannot be handled), the process proceeds to step S26.

In step S23, following the determination in step S22 that the pad maintenance can be performed by the second basic facing, the recipe setting unit 5 sets the execution recipe for the second basic facing, and the process proceeds to step S24. Here, the recipe setting section 5 sets the execution recipe of the second basic facing for creating the shape of the second basic pad from the state of the polishing pads 11a and 12a before the second basic facing.

In step S24, following the setting of the execution recipe for the second basic facing in step S23, the controller 4 drives and controls, for example, a ring-shaped facing member according to the execution recipe set in step S23, thereby performing the second basic facing. and proceed to step S25. By performing the second basic facing, a second basic pad shape is created on the surfaces of the polishing pads 11a and 12a. Also, the platen temperature is lowered. The ring-shaped facing member is arranged between the upper and lower surface plates 11 and 12 in advance before the execution of the second basic facing.

In step S25, subsequent to the execution of the second basic facing in step S24, the control unit 4 determines whether or not the second basic facing has ended. If YES (end of the second basic facing), the process returns to step S5. If NO (the second basic facing has not been completed), step S24 is repeated. Here, the end of the second basic facing is judged from the facing time and the surface shape of the polishing pads 11a and 12a. Also, the ring-shaped facing member is removed from between the upper and lower surface plates 11 and 12 after the completion of the second basic facing.

In step S26, following the determination in step S22 that pad maintenance by the second basic facing is impossible, the controller 4 determines that the service life (pad life) of the polishing pads 11a and 12a has been reached, and step S27. proceed to It should be noted that the decision to reach the pad life may be made, for example, when the specified number of batches or more is reached, but by comparing the performance of the executed facing with the playback status of the pad status, the playback status of the pad status is less than expected. Also in this case, it may be determined that the pad life has been reached.

In step S27, following the determination in step S26 that the pad life has been reached, the progress from the start of use of the polishing pads 11a and 12a to the end of the pad life is confirmed, and the process proceeds to step S28. Here, the progress until reaching the life of the pad is confirmed based on the shape of the pad at the time of reaching the life of the pad, the number of batches, the number of times of facing, the details of facing, and the like.

In step S28, following the pad life confirmation in step S27, it is determined whether or not there is an abnormality in the pad life. In the case of YES (no abnormality), it is judged that there was no defect in the execution of facing, and the process proceeds to the end. In the case of NO (abnormal), the process proceeds to step S29.

In step S29, following the determination in step S28 that there is an abnormality in the pad life, the cause of the abnormality in the pad life is presumed, and predetermined measures are taken to prevent the presumed cause from occurring. move on. Here, the cause of the abnormal pad life is determined by empirical rules or cases determined to be abnormal in the past by checking the conditions of the double-sided polishing machine 10 and auxiliary materials such as slurry, and the polishing environment of the work such as the polishing processing conditions of the work. is estimated based on the comparison calculation of

General characteristics of the double-sided polishing machine 10 will be described below.

In the double-side polishing machine 10, generally, the temperature of the upper and lower surface plates 11 and 12 is low before starting the polishing process of the work, and the temperature of the surface plates gradually rises as the polishing process is performed. In addition, the surface plate temperature rises sharply immediately after the start of the polishing process of the work, and the temperature rise gradually settles down. do.

That is, in the double-side polishing machine 10, heat changes occur in the upper and lower surface plates 11 and 12 for a while after the start of polishing of the workpiece. Due to the effect of this change due to heat, the upper and lower surface plates 11 and 12 undergo subtle changes in shape from the start of work polishing until the temperature of the surface plates stabilizes. Therefore, uniform dressing of the entire surfaces of the polishing pads 11a and 12a is not sufficient to suppress the effects of changes in the shape of the surface plate itself, local temperature differences and deformation of the surface plate and pads, and denaturation of secondary materials used. A suitable pad shape and condition could not be created.

Hereinafter, based on FIG. 4, the dressing process in the dressing apparatus of the comparative example and its problems will be described.

In the dressing process in the dressing apparatus of the comparative example, in step S101, polishing pads 11a and 12a are attached to the upper and lower surface plates 11 and 12, respectively. In step S102, an execution recipe for basic facing is set, and in step S103, basic facing is executed. Note that this basic facing does not necessarily have to be performed.

Subsequently, in step S104, it is determined whether or not the basic facing has been completed. If it is determined that the basic facing has been completed, the process proceeds to step S105, where the double-sided grinder 10 polishes the workpiece.

In step S106, it is determined whether or not the polishing of the work is finished. If it is determined that the polishing is finished, the process proceeds to step S107 to monitor the number of batches and the polishing state of the work. Then, based on this monitoring result, in step S108, it is determined whether or not the polishing pads 11a and 12a can be maintained by auto-dressing.

If it is determined that the maintenance of the polishing pads 11a and 12a can be handled by performing auto-dressing, the process proceeds to step S109 to set an execution recipe for auto-dressing, and auto-dressing is performed in step S110. Then, in step S111, it is determined whether or not the auto-dressing has been completed. If it is determined that the auto-dressing has been completed, the polishing of the workpiece is repeated.

On the other hand, if it is determined that the polishing pads 11a and 12a cannot be maintained by auto-dressing, the process proceeds from step S108 to step S112, and the maintenance of the polishing pads 11a and 12a is handled by the second basic facing. is possible, that is, whether or not the second basic pad shape can be created on the pad surfaces of the polishing pads 11a and 12a by performing the second basic facing.

If it is determined that the maintenance of the polishing pads 11a and 12a can be handled by performing the second basic facing, the process proceeds to step S113 to set an execution recipe for the second basic facing. Perform facing. Then, in step S115, it is determined whether or not the second basic facing has been completed, and if it is determined that the second basic facing has been completed, the polishing of the workpiece is repeated.

On the other hand, if it is determined that maintenance of the polishing pads 11a and 12a is not possible with the second basic facing, the process proceeds from step S112 to step S116, and the service life (pad life) of the polishing pads 11a and 12a is reached. judge that it did. Then, in step S117, the pad life is confirmed, and in step S118, it is determined whether or not there is an abnormality in the pad life. If there is no abnormality in the pad life, the process proceeds to END, and if it is determined that there is an abnormality in the pad life, the process proceeds to step S119 to estimate the cause of the pad life abnormality, take appropriate measures, and then proceed to END. move on.

As described above, in the dressing process in the dressing apparatus of the comparative example, auto-dressing is performed at a predetermined interval (for example, each time polishing is performed or every predetermined number of batches) after the start of polishing of the workpiece by the double-sided polishing machine 10. to run. This auto-dressing is a dressing that uniformly dresses the entire surfaces of the polishing pads 11a and 12a without creating the shape of the pads. Therefore, during the period from the start of the polishing process of the workpiece until the surface plate temperature stabilizes, the appropriate pad shape and state are adjusted each time to follow the subtle shape changes that occur in the upper and lower surface plates 11 and 12 due to changes due to heat. difficult to create. Therefore, as indicated by the dashed line in FIG. 5, the ideal constant temperature through the pad for high-precision polishing occurs from the time t0 when the polishing process is started until the surface plate temperature stabilizes at time t1. It was difficult to suppress deviation from the plate pressure distribution (optimal value (0)). The "ideal surface plate pressure distribution via the pad for high-precision polishing" means that the contact degree of the upper surface plate 12 against the lower surface plate 11 is desirable, and the polishing pad 11a, The pressure distribution produced comprehensively by the interposition of 12a is in an optimum state in view of the movement of the wafer. When this ideal surface plate pressure distribution is close to the optimum value (close to "0") and the pressure distribution control can be maintained, the yield of high-precision polishing of workpieces can be improved.

The operation of the facing device 1 of Example 1 will be described below with reference to FIGS. 3A, 3B, and 5. FIG.

In the facing process of the polishing pads 11a and 12a of the double-sided polishing machine 10 by the facing apparatus 1 of the first embodiment, first, steps S1, S2, and S3 shown in the flowchart of FIG. 3A are performed. That is, the polishing pad 11 a is attached to the lower surface plate 11 and the polishing pad 12 a is attached to the upper surface plate 12 . Based on the state of the polishing pads 11a and 12a before the basic facing, an execution recipe for the basic facing is set, and the basic facing is performed according to this execution recipe. When the basic facing is completed and the basic pad shapes are created on the surfaces of the polishing pads 11a and 12a, YES is determined in step S4.

Subsequently, the processes of steps S5 and S6 are executed, the workpiece is polished by the double-side polishing machine 10, and it is determined whether or not the polishing process is completed. Then, when it is determined that the polishing of the workpiece has been completed, the process of step S7 is performed, and the recipe setting unit 5 sets the execution recipe for the first autofacing.

Here, the execution recipe for the first autofacing is set based on changes in the pad surface shape obtained by analyzing the surface shapes of the upper and lower surface plates 11 and 12 . That is, in the facing apparatus 1, as a first step, the execution recipe for the first autofacing is set based on changes in the surface shapes of the upper and lower surface plates 11 and 12. FIG.

The execution recipe of the first autofacing specifically corrects the difference between the transitional target pad shape and the actual pad shape when the polishing pads 11a and 12a are transformed from the basic pad shape to the required pad shape. It is an execution recipe that Therefore, by proceeding to the process of step S8 and executing the first autofacing according to the execution recipe of the first autofacing, it is possible to obtain a transitional target pad shape during the transformation from the basic pad shape to the required pad shape. The shape of the polishing pads 11a and 12a can be corrected. That is, in the facing apparatus 1, as the second step, the first autofacing is performed based on the execution recipe of the first autofacing from the start of polishing of the workpiece until the surface plate temperature stabilizes.

Then, when the processing of steps S9 and S10 is executed and it is determined that the first autofacing has ended, it is determined whether or not the temperatures of the upper and lower surface plates 11 and 12 have stabilized. If it is determined that the surface plate temperature is not stable, the process returns to step S5, and the polishing of the workpiece and the execution of the first autofacing are repeated until the surface plate temperature is stabilized.

As described above, in the facing apparatus 1 of the first embodiment, the recipe setting unit 5 sets the execution recipe for the first autofacing based on the change in the surface shape of the upper and lower surface plates 11 and 12 (first step). Then, from the start of polishing of the workpiece until the temperatures of the upper and lower surface plates 11 and 12 are stabilized, the controller 4 controls the drive mechanism 3 based on the execution recipe of the first autofacing to perform the first autofacing. Perform autofacing.

Therefore, from the start of the polishing process of the workpiece until the surface plate temperature stabilizes, the surface shapes of the polishing pads 11a and 12a are appropriately adjusted to follow the shape changes of the upper and lower surface plates 11 and 12 caused by the influence of changes due to heat. It is possible to correct the shape. As a result, as shown by the solid line in FIG. 5, an ideal polishing pad for high-precision polishing occurs from the start of polishing at time t0 until the surface plate temperature stabilizes at time t1. Deviation from the optimal value of the surface plate pressure distribution can be corrected early and suppressed. As a result, it is possible to improve the yield of high-precision polishing of the work performed from the start of polishing of the work until the temperature of the platen stabilizes.

Furthermore, in the facing process of the polishing pads 11a and 12a of the double-sided polishing machine 10 by the facing apparatus 1 of the first embodiment, when it is determined that the temperatures of the upper and lower surface plates 11 and 12 have stabilized, the flow chart shown in FIG. The processes of steps S11 and S12 are executed, the workpiece is polished by the double-side polishing machine 10, and it is determined whether or not the polishing process is finished. When it is determined that the polishing of the workpiece has been completed, the processing of step S13 is performed, and the transition of the number of batches and the polishing state of the workpiece is monitored.

Then, the process proceeds to step S14, and it is determined whether the maintenance of the polishing pads 11a and 12a can be handled by auto-dressing based on the number of batches and the transition of the polishing state of the work. If pad maintenance can be performed by auto-dressing, the processes of steps S15, S16, and S17 are executed, and an auto-dressing execution recipe is set based on the states of the polishing pads 11a and 12a when the surface plate temperature is stable, Autodressing is executed according to this execution recipe. When the auto-dressing is finished and the entire surfaces of the polishing pads 11a and 12a are uniformly dressed, the process returns to step S11, and the polishing of the workpiece, the number of batches, and the monitoring of the polishing state of the workpiece are repeated.

On the other hand, if the pad maintenance by auto-dressing is not possible, the process proceeds to step S18, and whether or not the polishing pads 11a and 12a can be maintained by the second auto-facing is determined based on the number of batches and the transition of the polishing state of the workpiece. is judged. If the pad maintenance can be performed by the second autofacing, the process of step S19 is performed, and the recipe setting unit 5 sets the execution recipe for the second autofacing.

Here, the execution recipe for the second autofacing is set based on changes in the work polishing environment after the temperatures of the upper and lower surface plates 11 and 12 are stabilized. Specifically, the effects of changes in the work polishing environment are suppressed. and corrects the difference between the target pad shape/state and the actual pad shape/state. That is, in the facing apparatus 1, as the third step, the execution recipe for the second autofacing is set based on changes in the workpiece polishing environment after the temperatures of the upper and lower surface plates 11 and 12 are stabilized.

Then, in step S20, the second autofacing is executed according to the second autofacing execution recipe. In other words, in the facing apparatus 1, as the fourth step, based on the execution recipe of the second autofacing, after the temperatures of the upper and lower surface plates 11 and 12 are stabilized, the condition that the pad maintenance can be performed by the second autofacing is established. When determined, the second autofacing is performed.

As a result, the shape and state of the polishing pads 11a and 12a are corrected so as to achieve a target pad shape and state that suppresses or mitigates changes in the polishing environment of the work, and the influence of changes in the polishing environment of the work can be controlled. .

Then, the process of step S21 is executed, and when it is determined that the second autofacing is completed, the process returns to step S11, and the polishing of the workpiece and the monitoring of the number of batches and the transition of the polished state of the workpiece are repeated. .

On the other hand, if it is determined in step S18 that the pad maintenance by the second autofacing is also impossible, the process proceeds to step S22, and the maintenance of the polishing pads 11a and 12a is performed based on the number of batches and the transition of the polishing state of the workpiece. can be handled by the second basic facing. If the pad maintenance can be performed by the second basic facing, the processes of steps S23 and S24 are executed to set the execution recipe of the second basic facing based on the state of the polishing pads 11a and 12a before the second basic facing. Perform the second basic facing according to the execution recipe. Then, when the second basic facing is completed and the shape of the second basic pad is created, the process returns to step S5, and the polishing of the workpiece is repeated. Note that the surface plate temperature is lowered when the second basic facing is performed. Therefore, after the execution of the second basic facing, the first autofacing is executed at predetermined intervals until the surface plate temperature is stabilized.

Further, when it is determined in step S22 that maintenance of the polishing pads 11a and 12a cannot be handled even if the second basic facing is performed, the processing of steps S26, S27 and S28 is executed in order. That is, after determining that the service life (pad life) of the polishing pads 11a and 12a has been reached, it is determined whether there is an abnormality in the pad life. When it is determined that there is an abnormality in the pad life, the process of step S29 is executed, the cause of the pad life abnormality is estimated, and appropriate measures are taken so as not to cause an abnormality in the pad life.

As described above, in the facing apparatus 1 of Example 1, after the temperatures of the upper and lower surface plates 11 and 12 are stabilized, when it is determined that the pad maintenance cannot be performed by auto-dressing, that is, it is determined that the predetermined condition is established. Sometimes, the execution recipe of the second autofacing is set based on the change in the polishing environment of the workpiece after the surface plate temperature is stabilized, and the second autofacing is performed. Further, when it is determined that the pad maintenance cannot be performed by the second autofacing, the execution recipe of the second basic facing is set and the second basic facing is performed. That is, in the facing apparatus 1 of the first embodiment, the pad maintenance is performed by the second auto-facing before performing the pad maintenance by the second basic facing.

On the other hand, in the dressing apparatus of the comparative example, as shown in the flowchart of FIG. 4, when it is determined that the pad maintenance cannot be performed by performing the auto-dressing, the pad maintenance is performed by the second basic facing. , the second autofacing is not performed. Therefore, as shown in FIG. 6A, in the dressing apparatus of the comparative example, the pad shape is created by performing the second basic facing at time t12, time t14, and time t16, and the state of the polishing pad is recovered. However, at time t18, the pad state cannot be recovered, and the degree of deviation from the ideal pad state increases, reaching a level at which it is determined that the pad life has been reached.

On the other hand, the facing apparatus 1 of the first embodiment performs the second autofacing before performing the second basic facing. That is, as shown in FIG. 6B, the second basal facing is performed at times t15 and t20, while the second autofacing is performed at times t11, t12, t13, t16, t17, and t19. Execute. As a result, in the facing apparatus 1 of Example 1, the degree of deviation from the ideal pad state can be suppressed within the allowable range over a long period of time, and the service life of the polishing pads 11a and 12a can be extended to time t21. . Furthermore, the extension of the life of the polishing pads 11a and 12a makes it possible to reduce downtime associated with pad replacement. Therefore, the facing device 1 of the first embodiment can not only improve the yield of high-precision machining of workpieces, but also improve the productivity of high-precision machining of workpieces.

Moreover, by prolonging the life of the polishing pads 11a and 12a, the number of times of basic facing can be reduced as compared with the dressing device of the comparative example. In the basic facing, it is necessary to attach and detach a facing member such as a ring. As a result, the time required for attaching and detaching the facing member can be shortened, and the productivity of the work can be further improved.

In the first embodiment, the judgment by the control unit 4 that the pad maintenance can be performed by the second autofacing, that is, the judgment that the predetermined condition is established after the surface plate temperature is stabilized is based on the transition of the polishing state of the workpiece. It is based on As a result, when determining how to perform pad maintenance (whether it is performed by auto dressing, whether to be performed by the second auto facing, or whether to be performed by the second basic facing), the judgment is made according to the accuracy of polishing the workpiece. be able to. Therefore, it becomes possible to perform appropriate pad maintenance, and it is possible to further improve the yield of high-precision polishing of the workpiece. Further, the control unit 4 automatically determines whether a predetermined condition is established after the surface plate temperature is stabilized, based on the transition of the polishing state of the workpiece. For this reason, the greater the number of judgment experiences, the more accurate judgment can be made, and the more appropriate pad maintenance can be executed. The determination of the establishment of the predetermined condition may be made by the operator, in which case the operator inputs whether the condition is established through the information input means 18.

In the facing apparatus 1 of the first embodiment, the driving mechanism 3 for moving the facing head 2 is composed of the first arm 31 having the facing head 2 fixed to the distal end portion 31a and the proximal end portion 31b supported so as to swing. , a second arm 32 whose distal end portion 32a is rotatably connected to the facing head 2 and whose proximal end portion 32b is rotatably supported by a shaft member 35 capable of advancing and retreating along a predetermined direction; and a rotary motor 33 for swinging.

Therefore, the facing head 2 provided with the facing member 22 is supported by the first arm 31 and the second arm 32 . As a result, the facing head 2 can be stably held between the upper and lower surface plates 11 and 12, and the required portions of the polishing pads 11a and 12a can be appropriately faced according to the facing execution recipe.

In order to shorten the facing time, it is desirable that the facing head 2 move while being in contact with both the polishing pad 11a attached to the lower surface plate 11 and the polishing pad 12a attached to the upper surface plate 12. . In this case, the amount of pressing of the facing member 22 against the lower surface plate 11 and the amount of pressing of the facing member 22 against the upper surface plate 12 are individually adjusted, and the number of revolutions of the upper and lower surface plates 11 and 12 are adjusted according to the facing. Must be controlled separately based on the run recipe. However, it is not always necessary to face the upper and lower polishing pads 11a and 12a at the same time, and the polishing pads 11a and 12a may be faced one by one, or only one of them may be faced.

The facing apparatus and facing method of the present invention have been described above based on the first embodiment, but the specific configuration is not limited to this embodiment, and the invention according to each claim of the scope of claims. Design changes and additions are permitted as long as they do not deviate from the gist of

The facing device 1 of Example 1 shows an example in which the drive mechanism 3 includes the first arm 31 , the second arm 32 and the rotary motor 33 . However, the present invention is not limited to this as long as the facing head 2 can be stably held. For example, like the drive mechanism 6 shown in FIG. 7, it may be one that includes a linear guide 61 and a direct-acting actuator 62 .

Here, the linear guide 61 and the direct acting actuator 62 are placed on a strip-shaped mechanism support plate 63 . One longitudinal end of the mechanism support plate 63 is supported by a cylinder 64 installed outside the lower surface plate 11 . The cylinder 64 is vertically movable and rotatable, and the vertical movement of the cylinder 64 moves the mechanism support plate 63 vertically to be arranged between the lower surface plate 11 and the upper surface plate 12 . Further, by rotating the cylinder 64 , the other longitudinal end of the mechanism support plate 63 moves in an arc shape and is inserted between the lower surface plate 11 and the upper surface plate 12 . A fixing portion 63a is formed at the other end portion of the mechanism support plate 63 in the longitudinal direction. The fixing portion 63a is fixed to an annular sun gear portion 11b provided at the center of the lower surface plate 11 when the mechanism support plate 63 is inserted between the upper and lower surface plates 11 and 12. As shown in FIG.

The linear guide 61 has a pair of linear rail members 61a and a support member 61b that supports the facing head 2 and slides along the linear rail members 61a. Further, the linear motion actuator 62 is an actuator that applies a driving force to the support member 61b. Here, a ball screw 62a extending in the same direction as the pair of linear rail members 61a; have. The support member 61b is screwed onto the ball screw 62a.

By rotating the ball screw 62a by the motor 62b, the support member 61b moves along the pair of linear rail members 61a, and the facing head 2 supported by the support member 61b moves the diameters of the upper and lower surface plates 11 and 12. move in the direction Even with this drive mechanism 6, the facing head 2 can be stably held between the upper and lower surface plates 11 and 12, and the required portions of the polishing pads 11a and 12a can be appropriately adjusted according to the recipe for executing the facing. Can be faced.

Furthermore, the drive mechanism is not limited to the first embodiment or the above modifications, as long as it can stably support the facing head 2 having the facing member 22 . For example, the facing head 2 can be fixed to the distal end portion 31a of the first arm 31 and supported in a so-called cantilevered state. Also, high-pressure fluid such as high-pressure cleaning water or compressed air may be jetted from the facing head 2 toward the upper and lower surface plates 11 and 12 at the same time, or the jetted high-pressure fluid may stabilize the facing head 2 .

Also, in the facing apparatus 1 of the first embodiment, an example of performing facing and dressing using a common facing head 2 was shown, but the present invention is not limited to this. For example, the arm of the drive mechanism may be shared, and a dedicated head used for facing and a dedicated head used for dressing may be interchanged. In addition, one or more dedicated devices for facing and one or more dedicated devices for dressing may be provided and used separately as necessary.

Also, in the facing device 1 of the first embodiment, an example in which the facing head 2 is supported by the first arm 31 and the second arm 32 is shown, but the present invention is not limited to this. The head may be supported on both sides by a plurality of arms, or may be supported by a single arm.

Further, the facing apparatus 1 of the first embodiment has the recipe setting section 5 for setting execution recipes for various facings and dressings such as the first autofacing and the second autofacing. However, the present invention is not limited to this. For example, changes in the surface shape and state of the polishing pads 11a and 12a are displayed to the operator of the double-sided polishing machine 10, and the operator who confirms this display sends the execution recipe of the first autofacing to the control unit 4. may be entered. Also, the change in the polishing environment of the workpiece after the surface plate temperature is stabilized may be displayed to the operator of the double-sided polishing machine 10, and the operator who confirms this display may input the execution recipe of the second autofacing to the control unit 4. . In other words, it is not always necessary to automatically set the execution recipe. Alternatively, the recipe setting unit 5 may recommend an execution recipe, and the operator may manually set various execution recipes for facing and dressing with reference to the recommended execution recipe.

Further, in Example 1, the distance between the surfaces of the lower surface plate 11 and the upper surface plate 12 in the double-sided polishing machine 10 is measured, and the "predetermined condition" is established based on the correlation between the polishing state of the workpiece and the distance between the surface plates. can be judged. However, the grinder that grinds the work may be a single-sided grinder that grinds only one side of the work.

Furthermore, auto-dressing and second auto-facing may not be performed depending on the number of batches and the polishing state of the workpiece. For example, when the conditions for polishing by the double-sided polishing machine 10 and the conditions for secondary materials such as slurry are standardized, it is possible to perform auto-dressing and secondary auto-facing according to a predetermined frequency and order. be.

In addition, in the facing apparatus 1 of the first embodiment, when the surface plate temperature does not stabilize during the first batch of work polishing, the first auto mode is maintained for several batches from the first batch until the surface plate temperature stabilizes. Perform facing. That is, regardless of the number of batches, the first autofacing is performed from the start of work polishing until the surface plate temperature stabilizes.

1 facing device 2 facing head 22 facing member 3 drive mechanism 31 first arm 32 second arm 33 rotary motor (swing actuator)
34 Rotating shaft 35 Shaft member 4 Control unit 5 Recipe setting unit 10 Double-sided polishing machine 11 Lower surface plate 11a Polishing pad 12 Upper surface plate 12a Polishing pad

Claims (8)

A facing member that is pressed against a polishing pad provided on a platen of a polishing machine that polishes a substrate material, a drive mechanism that moves the facing member, and a controller that controls the drive mechanism to face the polishing pad. in a facing device comprising
a recipe setting unit for setting an execution recipe for first autofacing, which is facing performed from the start of polishing of the substrate material until the temperature of the platen stabilizes, based on changes in the shape of the platen; ,
The control unit controls the drive mechanism based on an execution recipe for the first autofacing, and performs the first autofacing from the start of polishing until the temperature of the surface plate stabilizes. facing device. The facing device according to claim 1,
The recipe setting unit sets an execution recipe for a second autofacing, which is facing to be executed when a predetermined condition is satisfied after the temperature of the surface plate is stabilized, to a polishing environment for the substrate material after the temperature of the surface plate is stabilized. Set based on change,
The control unit, when determining that the predetermined condition is established after the temperature of the surface plate is stabilized, controls the drive mechanism based on the execution recipe of the second autofacing to perform the second autofacing. facing device. In the facing device according to claim 2,
The facing apparatus, wherein the control section determines whether or not the predetermined condition is satisfied based on the transition of the polishing state of the substrate material. In the facing device according to claim 2,
The facing apparatus according to claim 1, wherein the control unit determines whether or not the predetermined condition is satisfied based on a correlation between a polishing state of the substrate material and a polishing environment of the substrate material. In the facing device according to any one of claims 1 to 4,
The driving mechanism includes a first arm having a distal end to which the facing member is fixed and a proximal end to which the first arm is pivotally supported; a distal end to which the facing member is rotatably connected; A facing device, comprising: a second arm rotatably connected to a shaft member capable of advancing and retreating along a path; and a swing actuator for swinging a base end of the first arm. In the facing device according to any one of claims 1 to 4,
The facing device, wherein the drive mechanism includes a linear guide that spans across a portion of the surface plate and supports the facing member, and a linear actuator that is attached to the facing member. . A facing method for facing a polishing pad by moving the facing member while pressing the facing member against a polishing pad provided on a surface plate of a polishing machine for polishing a substrate material,
a first step of setting an execution recipe of a first autofacing, which is a facing performed from the start of polishing of the substrate material until the temperature of the platen stabilizes, based on a change in the shape of the platen;
a second step of performing the first autofacing from the start of polishing until the temperature of the platen stabilizes based on the execution recipe of the first autofacing set in the first step;
A facing method comprising: In the facing method according to claim 7,
After the temperature of the surface plate is stabilized, an execution recipe for second autofacing, which is facing to be executed when a predetermined condition is satisfied, is set based on a change in the polishing environment of the substrate material after the temperature of the surface plate is stabilized. a third step;
a fourth step of performing the second autofacing when it is determined that the predetermined condition is satisfied after the temperature of the surface plate is stabilized based on the execution recipe of the second autofacing set in the third step;
A facing method comprising:

Images