CN114247680A - Quick washing unit of upper and lower fixed plate of grinder - Google Patents

Quick washing unit of upper and lower fixed plate of grinder Download PDF

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Publication number
CN114247680A
CN114247680A CN202111363815.2A CN202111363815A CN114247680A CN 114247680 A CN114247680 A CN 114247680A CN 202111363815 A CN202111363815 A CN 202111363815A CN 114247680 A CN114247680 A CN 114247680A
Authority
CN
China
Prior art keywords
connecting pipe
shower head
water tank
water
fixed plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN202111363815.2A
Other languages
Chinese (zh)
Inventor
冯炜
蒋晓庚
黄盛军
菅明辉
孙晨光
王彦君
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhonghuan Advanced Semiconductor Materials Co Ltd
Original Assignee
Zhonghuan Advanced Semiconductor Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhonghuan Advanced Semiconductor Materials Co Ltd filed Critical Zhonghuan Advanced Semiconductor Materials Co Ltd
Priority to CN202111363815.2A priority Critical patent/CN114247680A/en
Publication of CN114247680A publication Critical patent/CN114247680A/en
Withdrawn legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/022Cleaning travelling work

Abstract

The invention relates to a quick washing device for an upper fixed disc and a lower fixed disc of a grinding machine, which comprises a water tank, a spraying assembly connected with the water tank, and a high-pressure water pump arranged on the water tank and used for communicating the water tank with the spraying assembly; spray assembly includes the shower head, and the shower head is including the shower head connecting pipe that is used for rotatable coupling shower, arranges the shower head in between solid fixed plate and the solid fixed plate down, and the water pump of high pressure is carried the water in the water tank to the shower head, and the last solid fixed plate of abrasive disc machine rotates with solid fixed plate down, goes out water through the shower head high pressure and carries out the high-pressure type and wash fast, forms constant flow and the high-efficient structure that washs of invariable water pressure formula.

Description

Quick washing unit of upper and lower fixed plate of grinder
Technical Field
The invention relates to a semiconductor preparation technology and preparation equipment, in particular to a quick washing device for an upper fixed plate and a lower fixed plate of a grinding machine.
Background
The preparation process at the silicon chip, including the grinding of silicon chip, the grinding of silicon chip is generally gone on through the lapping machine, the silicon chip passes through the last price fixing and the lower price fixing location of lapping machine and fixes the back, accomplish the abrasive disc through grinding assembly and do the trade, the mill lasts carries out the silicon chip and grinds doing the trade, the last price fixing and the lower price fixing of lapping machine carry out long-time silicon chip abrasive disc processing back, can pile up a large amount of mortar in flowing sand disc inslot, the clearance of mortar is carried out to present stage adoption manual work mode, personnel occupy time when clearing up the mortar of these disc inslots in the manual work clearance mode is longer, and the effect of clearance is not good.
The device capable of quickly cleaning the mortar is designed to quickly clean the mortar in the disc groove, so that occupation of manpower resources can be reduced, and a cleaning effect is guaranteed.
Therefore, there is a need for a quick washing device for the upper and lower surface plates of a grinding machine to achieve the above objects.
Disclosure of Invention
The invention aims to provide a quick washing device for an upper fixed disc and a lower fixed disc of a grinding machine.
The technical scheme is as follows:
a quick washing device for an upper fixed disc and a lower fixed disc of a grinding machine comprises a water tank, a spraying assembly connected with the water tank, and a high-pressure water pump arranged on the water tank and used for communicating the water tank with the spraying assembly;
spray assembly includes the shower head, and the shower head is including the shower head connecting pipe that is used for rotatable coupling shower, arranges the shower head in between solid fixed plate and the solid fixed plate down, and the water pump of high pressure is carried the water in the water tank to the shower head, and the last solid fixed plate of abrasive disc machine rotates with solid fixed plate down, goes out water through the shower head high pressure and carries out the high-pressure type and wash fast, forms constant flow and the high-efficient structure that washs of invariable water pressure formula.
Furthermore, the spray header also comprises a spray header main body used for arranging a spray header connecting pipe, and spray water outlets are arranged on the upper end surface and the lower end surface of the spray header main body.
Furthermore, the shower includes connecting pipe A that is used for connecting the shower head connecting pipe, and connecting pipe A is scalable to be connected in connecting pipe B, and connecting pipe B connects in connecting pipe C, and connecting pipe C is scalable to be connected in connecting pipe D.
Furthermore, a fixing piece A is arranged on the connecting pipe B corresponding to the connecting pipe A.
Furthermore, a fixing piece C is arranged on the connecting pipe D corresponding to the connecting pipe A.
Further, the connecting pipe B comprises a transverse pipe for connecting the connecting pipe A and a vertical pipe for connecting the connecting pipe C.
Further, the horizontal pipe is vertically connected with the vertical pipe, and a reinforcing plate is arranged at the joint.
Further, the water tank includes the box, and the box downside is provided with the truckle, and still is provided with on the box and promotes the handle.
Furthermore, a reinforced angle plate is arranged at the joint of the spraying assembly and the water tank.
Compared with the prior art, the invention can rapidly wash the mortar in the disc groove, reduce the occupation of human resources, improve the cleaning efficiency and ensure the cleaning quality.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
Example (b):
referring to fig. 1, the embodiment shows a quick washing device for an upper fixed plate and a lower fixed plate of a grinding machine, which comprises a water tank 1, a spraying assembly connected with the water tank 1, and a high-pressure water pump arranged on the water tank 1 and used for communicating the water tank with the spraying assembly;
spray set 1 includes shower head 7, and shower head 7 is including the shower head connecting pipe 72 that is used for rotatable coupling shower, arranges shower head 7 in between solid fixed plate and the solid fixed plate down, and the high pressure water pump carries the water in the water tank 1 to shower head 7, and the last solid fixed plate and the solid fixed plate rotation down of abrasive disc machine carry out the high pressure formula and wash fast through shower head 7 high pressure water, form the high-efficient structure of wasing of constant flow and invariable water pressure formula.
The shower head 7 further comprises a shower head main body 71 for arranging a shower head connecting pipe 72, and shower water outlets 73 are arranged on the upper end face and the lower end face of the shower head main body 71.
The shower pipe includes a connection pipe a6 for connecting a shower head connection pipe, a connection pipe a6 is telescopically connected to a connection pipe B4, a connection pipe B4 is connected to a connection pipe C3, and a connection pipe C3 is telescopically connected to a connection pipe D2.
The connection tube B4 is provided with a fastener a43 corresponding to the connection tube a 6.
The connector D2 has a fastener C21 corresponding to the connector A3.
The connection tube B4 includes a cross tube 42 for connecting the connection tube a6, and a stand tube 41 for connecting the connection tube C3.
The cross pipe 42 and the stand pipe 41 are vertically connected, and a reinforcing plate 5 is arranged at the connection position.
The water tank 1 comprises a tank body 11, casters 12 are arranged on the lower side of the tank body 11, and a pushing handle 13 is further arranged on the tank body 11.
A reinforced angle plate is arranged at the joint of the spraying assembly and the water tank 1.
Compared with the prior art, the invention can rapidly wash the mortar in the disc groove, reduce the occupation of human resources, improve the cleaning efficiency and ensure the cleaning quality.
Without departing from the inventive concept, several variations and modifications may be made without departing from the scope of the invention.

Claims (9)

1. The utility model provides a quick washing unit of quick machine upper and lower price fixing which characterized in that: comprises a water tank, a spraying component connected with the water tank and a high-pressure water pump which is arranged on the water tank and is used for communicating the water tank with the spraying component;
spray assembly includes the shower head, and the shower head is including the shower head connecting pipe that is used for rotatable coupling shower, arranges the shower head in between solid fixed plate and the solid fixed plate down, and the water pump of high pressure is carried the water in the water tank to the shower head, and the last solid fixed plate of abrasive disc machine rotates with solid fixed plate down, goes out water through the shower head high pressure and carries out the high-pressure type and wash fast, forms constant flow and the high-efficient structure that washs of invariable water pressure formula.
2. The quick washing device for the upper and lower fixed plates of the grinding machine according to claim 1, wherein: the spray header also comprises a spray header main body used for arranging a spray header connecting pipe, and spray water outlets are arranged on the upper end surface and the lower end surface of the spray header main body.
3. The quick washing device for the upper and lower fixed plates of the grinding machine as claimed in claim 2, wherein: the shower is including the connecting pipe A who is used for connecting the shower head connecting pipe, and connecting pipe A is scalable to be connected in connecting pipe B, and connecting pipe B connects in connecting pipe C, and connecting pipe C is scalable to be connected in connecting pipe D.
4. A quick washing device for upper and lower surface plates of a grinding machine according to claim 3, wherein: the connecting pipe B is provided with a fixing piece A corresponding to the connecting pipe A.
5. The quick washing device for the upper and lower fixed plates of the grinding machine as claimed in claim 4, wherein: the connecting pipe D is provided with a fixing piece C corresponding to the connecting pipe A.
6. The quick washing device for the upper and lower fixed plates of the grinding machine as claimed in claim 5, wherein: the connecting pipe B comprises a transverse pipe used for connecting the connecting pipe A and a vertical pipe used for connecting the connecting pipe C.
7. The quick washing device for the upper and lower fixed plates of the grinding machine as claimed in claim 6, wherein: the horizontal pipe is vertically connected with the vertical pipe, and a reinforcing plate is arranged at the joint.
8. The quick washing device for the upper and lower fixed plates of the grinding machine as claimed in claim 7, wherein: the water tank includes the box, and the box downside is provided with the truckle, and still is provided with on the box and promotes the handle.
9. The quick washing device for the upper and lower fixed plates of the grinding machine as claimed in claim 8, wherein: and a reinforced angle plate is arranged at the joint of the spraying assembly and the water tank.
CN202111363815.2A 2021-11-17 2021-11-17 Quick washing unit of upper and lower fixed plate of grinder Withdrawn CN114247680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111363815.2A CN114247680A (en) 2021-11-17 2021-11-17 Quick washing unit of upper and lower fixed plate of grinder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111363815.2A CN114247680A (en) 2021-11-17 2021-11-17 Quick washing unit of upper and lower fixed plate of grinder

Publications (1)

Publication Number Publication Date
CN114247680A true CN114247680A (en) 2022-03-29

Family

ID=80792700

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111363815.2A Withdrawn CN114247680A (en) 2021-11-17 2021-11-17 Quick washing unit of upper and lower fixed plate of grinder

Country Status (1)

Country Link
CN (1) CN114247680A (en)

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079342A (en) * 1993-06-30 1995-01-13 Sumio Tanaka Washing device for surface plate of double polishing machine
JPH09309063A (en) * 1996-05-24 1997-12-02 Nippon Steel Corp Method and device for washing polishing surface plate
JP2000176826A (en) * 1998-12-17 2000-06-27 Mitsubishi Materials Silicon Corp Cleaning method and device thereof for lapping surface plate
EP1222245A1 (en) * 1999-10-19 2002-07-17 Chim 92 Cleaning composition, method for cleaning a silk screen and cleaning device
JP2002205257A (en) * 2000-11-09 2002-07-23 Fujikoshi Mach Corp Method and device for cleaning polishing surface plate
US20110065365A1 (en) * 2009-09-15 2011-03-17 Sumco Corporation Grinding method and grinding apparatus for polishing pad for use in double-side polishing device
CN209465440U (en) * 2019-02-02 2019-10-08 江苏盛勤环境工程有限公司 A kind of portable tank cleaning device
CN110340798A (en) * 2019-08-02 2019-10-18 西安奕斯伟硅片技术有限公司 A kind of grinding pad cleaning device and twin grinder
CN110842783A (en) * 2019-11-19 2020-02-28 天津中环领先材料技术有限公司 Silicon wafer polishing pad cleaning device and cleaning method
CN111515854A (en) * 2019-02-01 2020-08-11 创技股份有限公司 Finishing device for double-sided grinding machine
CN212681814U (en) * 2020-05-12 2021-03-12 天津中环领先材料技术有限公司 Semiconductor silicon wafer washs spray set
CN113539904A (en) * 2021-07-19 2021-10-22 西安奕斯伟硅片技术有限公司 Cleaning device, system and method for grooves of lower fixed disc in double-sided grinding

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079342A (en) * 1993-06-30 1995-01-13 Sumio Tanaka Washing device for surface plate of double polishing machine
JPH09309063A (en) * 1996-05-24 1997-12-02 Nippon Steel Corp Method and device for washing polishing surface plate
JP2000176826A (en) * 1998-12-17 2000-06-27 Mitsubishi Materials Silicon Corp Cleaning method and device thereof for lapping surface plate
EP1222245A1 (en) * 1999-10-19 2002-07-17 Chim 92 Cleaning composition, method for cleaning a silk screen and cleaning device
JP2002205257A (en) * 2000-11-09 2002-07-23 Fujikoshi Mach Corp Method and device for cleaning polishing surface plate
US20110065365A1 (en) * 2009-09-15 2011-03-17 Sumco Corporation Grinding method and grinding apparatus for polishing pad for use in double-side polishing device
CN111515854A (en) * 2019-02-01 2020-08-11 创技股份有限公司 Finishing device for double-sided grinding machine
CN209465440U (en) * 2019-02-02 2019-10-08 江苏盛勤环境工程有限公司 A kind of portable tank cleaning device
CN110340798A (en) * 2019-08-02 2019-10-18 西安奕斯伟硅片技术有限公司 A kind of grinding pad cleaning device and twin grinder
CN110842783A (en) * 2019-11-19 2020-02-28 天津中环领先材料技术有限公司 Silicon wafer polishing pad cleaning device and cleaning method
CN212681814U (en) * 2020-05-12 2021-03-12 天津中环领先材料技术有限公司 Semiconductor silicon wafer washs spray set
CN113539904A (en) * 2021-07-19 2021-10-22 西安奕斯伟硅片技术有限公司 Cleaning device, system and method for grooves of lower fixed disc in double-sided grinding

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Application publication date: 20220329