KR102690513B1 - 기판의 접합 방법, 투명기판 적층체 및 기판 적층체를 구비하는 디바이스 - Google Patents

기판의 접합 방법, 투명기판 적층체 및 기판 적층체를 구비하는 디바이스 Download PDF

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KR102690513B1
KR102690513B1 KR1020207021853A KR20207021853A KR102690513B1 KR 102690513 B1 KR102690513 B1 KR 102690513B1 KR 1020207021853 A KR1020207021853 A KR 1020207021853A KR 20207021853 A KR20207021853 A KR 20207021853A KR 102690513 B1 KR102690513 B1 KR 102690513B1
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substrate
bonding
substrates
metal oxide
thin film
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KR20200105868A (ko
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타다또모 수가
요시이에 마츠모토
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아이세이버즈 재팬 가부시키가이샤
타다또모 수가
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    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/26—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer which influences the bonding during the lamination process, e.g. release layers or pressure equalising layers
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    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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    • C03C27/04—Joining glass to metal by means of an interlayer
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    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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    • C—CHEMISTRY; METALLURGY
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    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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    • C03C27/06—Joining glass to glass by processes other than fusing
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    • H01L2224/83909—Post-treatment of the layer connector or bonding area
    • H01L2224/83948—Thermal treatments, e.g. annealing, controlled cooling
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