KR102621695B1 - Vacuum curtain and its system - Google Patents

Abstract

The present invention relates to a vacuum curtain used in roll-to-roll equipment. More specifically, the process gas generated when performing a deposition or surface modification process in a roll-to-roll process diffuses to other chambers or process electrodes in the roll-to-roll equipment. It relates to a vacuum curtain and its system that can separate and exhaust the process gas performing the process and the inert gas filled in the other process electrodes by providing a vacuum curtain around the process electrode to block the process electrode.

Description

Vacuum curtain and its system {Vacuum curtain and its system}

The present invention relates to a vacuum curtain and its system for preventing process gases generated when performing a deposition or surface modification process in a roll-to-roll process from spreading to other chambers in a roll-to-roll facility or to other process electrodes in the same chamber. .

Roll-to-roll equipment is a device configured to perform a plurality of processes while moving an object such as a film or an object, and is characterized by moving the object by rotating a plurality of rollers. In roll-to-roll equipment, process electrodes that can perform different processes are placed around the roller, and as the object is moved in one direction by the rotation of the roller, the process electrodes placed at each position are used to process the object. It is configured to perform.

Each process electrode can perform different types of processes on the object. For example, each process electrode is configured to perform a coating process and a treatment process, or sputtering to deposit the surface of the object, or It may be configured to include a process electrode for performing a CVD process.

When attempting to proceed with a deposition or surface modification process in conventional equipment, the process electrode may have different pressure conditions depending on the process, and if a process electrode is a process electrode that performs a sputtering or CVD process, The electrode for the process is sputtering or CVD processes use process gas to process the surface of the object. At this time, due to the environment of the process electrodes having different pressures, the process gas used in the process electrode may diffuse to other process electrodes, which creates particles and causes contamination in other process electrodes. there is. Additionally, due to the diffusion of the process gas, unnecessary deposition of the process gas occurs at the location of an unstable object, causing product defects such as pinholes.

In addition, roll-to-roll equipment performs continuous continuous processes, but there is a problem of incurring maintenance costs for cleaning or roll replacement due to unnecessary deposition contamination inside the equipment, and the generation of fine particles makes cleaning more difficult. Because it has to be performed, a lot of extra time is needed for cleaning time other than the process. In the case of the vacuum cleaning process performed to remove these particles, the vacuum causes extensive deposition residues, so there is a problem in that the equipment structure is exposed to a large amount of etching gas for a long time, which adversely affects the lifespan of the product.

The present invention was devised to solve the above problems. The purpose of the present invention is to provide a device for blocking the diffusion of process gases generated in the deposition or surface modification process of roll-to-roll equipment, and has a simple structure. It is easy to manufacture and install, and improves the effect of blocking the diffusion of process gases to prevent unnecessary or unsafe deposition, suppressing the generation of particles, reducing the defect rate of products, and vacuum curtains and their products that can reduce the time required for cleaning. To provide a system.

In the vacuum curtain disposed around a process electrode for spraying a process gas toward one side of the present invention, the vacuum curtain includes a body portion including an opening provided on one side; a vacuum pump connected to the body and sucking air through the opening; and a separation plate, which is a plate that separates the opening into the first and second inflow passages, wherein the separation plate prevents the process gas from flowing in through the first inflow passage but not immediately flowing out of the second inflow passage. , has a predetermined height in a direction parallel to the outer peripheral surface of the process electrode, and the first inflow passage is formed closer to the process electrode than the second inflow passage.

delete

In addition, the height of the separation plate is characterized in that it is lower than the height of the body portion.

At this time, according to claim 3, one end of the separation plate is disposed at a position that is the same as that of one end of the body or protrudes outward from one end of the body.

In addition, the separation plate is characterized in that it is disposed at a position where the cross-sectional area of the first inflow passage is greater than or equal to the cross-sectional area of the second inflow passage, based on the midpoint of the opening.

In addition, the body portion is characterized in that it further includes a heating means for heating the opening side.

In addition, the body portion is characterized in that it is disposed along the outer peripheral surface of the process electrode.

The vacuum curtain system of the present invention includes a transport means for moving an object in one direction; At least one process electrode for spraying process gas toward the object and a vacuum curtain disposed around the process electrode, wherein the vacuum curtain includes a body portion including an opening provided in the direction in which the object is located. ; a vacuum pump connected to the body and sucking process gas through the opening; and a separation plate, which is a plate that separates the opening into the first and second inflow passages, wherein the separation plate prevents the process gas from flowing in through the first inflow passage but not immediately flowing out of the second inflow passage. , has a predetermined height in a direction parallel to the outer peripheral surface of the process electrode, and the first inflow passage is formed closer to the process electrode than the second inflow passage.

At this time, the separator plate is disposed parallel to the outer peripheral surface of the process electrode.

Additionally, at least a portion of the separation plate is disposed perpendicular to the moving direction.

In addition, the transfer means is characterized in that it is a process roll that rotates the object.

The vacuum curtain and its system of the present invention with the above configuration can suppress the generation of particles due to unnecessary or unsafe deposition by blocking the diffusion of process gas to other chambers or process electrodes by the vacuum curtain. The defect rate of produced products is reduced and productivity is improved. The internal cleaning area is reduced, which reduces the etching time for cleaning and the amount of etching gas used, which reduces process costs and reduces particles. As a result, the lifespan of internal parts is extended, which has the effect of reducing maintenance costs for consumables, and the simple structure makes it easy to manufacture and install.

Figure 1 is a cross-sectional view of the process chamber and vacuum curtain.
Figure 2 is a perspective view of an embodiment of a process chamber and a vacuum curtain.
Figure 3 is a perspective view of another embodiment of the process chamber and vacuum curtain.
Figure 4 is a cross-sectional view of another embodiment of the process chamber and vacuum curtain.
Figure 5 is a cross-sectional view of the process roll system

Hereinafter, the technical idea of the present invention will be described in more detail using the attached drawings. Prior to this, the terms or words used in this specification and claims should not be construed as limited to their usual or dictionary meanings, and the inventor should appropriately define the concept of terms in order to explain his or her invention in the best way. It must be interpreted as meaning and concept consistent with the technical idea of the present invention based on the principle of definability.

Accordingly, the embodiments described in this specification and the configurations shown in the drawings are only one of the most preferred embodiments of the present invention and do not represent the entire technical idea of the present invention, so at the time of filing this application, various alternatives are available to replace them. It should be understood that variations may exist.

Hereinafter, the technical idea of the present invention will be described in more detail using the attached drawings. The attached drawings are merely examples to illustrate the technical idea of the present invention in more detail, so the technical idea of the present invention is not limited to the form of the attached drawings.

Referring to FIG. 1, the present invention is a vacuum curtain 100 disposed around a process electrode 20 that sprays a process gas toward one side, and includes a body including an opening 111 provided on one side. A vacuum pump 120 connected to the body 110 and the body 110 and sucking the process gas through the opening 110, and the opening 110 are connected to the first and second inflow passages 110a, It may include a separation plate 130 that is separated by 110b). In more detail, in the vacuum curtain 100, which has an object 10 on one side and is disposed around a process electrode 20 that sprays process gas toward the object 10, the injection direction of the process gas and A body portion 110 with an opening portion 111 formed in the same direction, a vacuum pump 120 that suctions process gas inside the body portion 110, and a space between the opening portion 111 of the body portion 110 are separated. It is characterized in that it includes a separation plate 130.

When explained with reference to FIG. 1, the vacuum curtain 100 is disposed near the process electrode 20, and the process electrode 20 is directed toward the object 10 located in one direction. It is desirable to include a hole on one side to spray gas. The process electrode 20 may include an injection device capable of spraying the process gas toward the object 10, and the injection device may be linear if it is formed to spray the process gas in one direction. It can be provided in any shape, such as round or point type. The process electrode 20 may be configured as a process electrode capable of performing a deposition or surface modification process on the object 10 using a process gas such as CVD or plasma. At this time, depending on the user's needs, the body portion 110 may be formed in a shape corresponding to the injection device and may be formed to surround the injection device at a location that does not cause electrical or mechanical interference from the outside of the injection device. , It can be arranged with a distance (t1) from the object 10.

When explained with reference to FIG. 1, the body portion 110 is a housing with a space formed on the inside to accommodate the process gas, and can be positioned along at least one side of the circumference of the process electrode 20. there is. The body portion 110 is provided to block the diffusion of the process gas generated from the process electrode 20 as the process gas moves in one direction along the body portion 110. Depending on the position of , the direction in which the process electrode 20 wants to block can be determined. At this time, the process electrode 20 and the body portion 110 may be arranged at a predetermined distance (t2) from the object 10 located on one side, and the object 10 and the process chamber 20 And the respective separation distances of the vacuum curtains 100 may be formed so that the size of t1 is greater than or equal to the size of t2, and the vacuum curtain 100 is disposed closer to the object 10 than the process electrode 20, It can be arranged to more easily absorb the process gas.

The body portion 110 of the present invention is characterized in that an opening 111 is formed in the same direction as the process gas injection direction of the process electrode 20, and thus the opening 111 and the process gas are sprayed. The spraying direction of the electrode 20 may be formed at the same position. In one embodiment of the present invention, when the through-hole portion of the process electrode 20 is formed on the lower surface, the open portion 111 of the body portion 110 may also be formed on the lower surface. The body portion 110 may be positioned at a predetermined gap (G) from the process electrode 20, but the gap (G) between the body portion 110 and the process electrode 20 may be separated by a separate pipe or shield. It is preferable that the process electrodes 20 are formed to be connected to each other. The gap (G) may be selected as needed depending on the process gas or pressure situation in the roll-to-roll equipment accommodating the vacuum curtain 100. For example, when the diffusion of the process gas is rapid, the The gap (G) is formed narrow, and when the diffusion of the process gas is slower, the gap (G) can be formed a little wider, and the gap (G) is formed to prevent gas from escaping through the gap (G) regardless of the gap. The body portion 110 and the process electrode 20 must be connected to each other in a closed state with the external space.

The body portion 110 is preferably disposed along at least one side of the circumference of the process electrode 20, and the length of the through portion of the body portion 110 extends from one side of the process electrode 20. It can be formed to be equal to or larger than the length of . In more detail, the height H of the body 110 may be similar to the height of the process electrode 20, or may be smaller or larger, and the width of the bottom of the body 110 ( D) (width of the through hole) may be formed regardless of size, but the length of the bottom of the body portion 110 (length of the through hole) is determined by It is preferable that the length is equal to or greater than the length of the bottom of the process electrode 20, so as to block the process gas escaping from the process electrode 20. At this time, in the case of a plurality of holes in the through-hole portion of the process electrode 20, the length of the through-hole portion may be formed to be longer than the length including the entire length of the plurality of holes. That is, the body portion 110 may be formed to have a length longer than the length of the process electrode 20 to be blocked.

If the shape of the body portion 110 of the present invention is described as an example with reference to FIG. 2, the body portion 110 is formed in a straight line and placed on one side of the process electrode 20. However, the body portion 110 may be formed in a straight line and placed on both sides of the process electrode 20. At this time, both sides arranged are on both sides of the process electrode 20 located in the same direction as the moving direction when the object 10 is moved, and the length of the body portion 110 is arranged perpendicular to the moving direction. You can. Accordingly, there is an effect of blocking the diffusion of the process gas generated from the process electrode 20 so that it does not move along the path along which the object 10 is moved, thereby preventing unsafe conditions due to the diffusion of the process gas. It is possible to block particles that may occur at the location of the object 10.

In addition, if the shape of the body portion 110 of the present invention is described as another example with reference to FIGS. 3 and 4, the body portion 110 is formed along the outer peripheral surface of the process electrode 20. It can be formed in the form of At this time, the body portion 110 may be formed in a shape corresponding to the shape of the process electrode 20. Accordingly, the vacuum curtain 100 can more fundamentally block the process gas discharged to the outside through the aperture portion of the process electrode 20, thereby effectively suppressing the generation of particles.

The vacuum pump 120 is for sucking the internal process gas of the body unit 110. It creates a vacuum inside the body unit 110 and removes the process gas flowing into the body unit 110. It can be moved in either direction. The vacuum pump 120 may be formed outside the body 110, or may be formed near the discharge passage 112 when the body 110 includes the discharge passage 112. It may be configured so that air introduced into the body portion 110 can be moved to the discharge passage 112.

When described with reference to FIGS. 1 and 5 , the vacuum curtain 100 of the present invention is characterized by including the separation plate 130 inside the body portion 110. The separation plate 130 has a length extending in one direction, is formed at a predetermined height (h), and is located on the side of the opening 111 of the body 110, thereby dividing the space inside the body 110. It can be configured to split. The separation plate 130 may be formed to a length corresponding to the length of the body portion 110, and the body portion 110 is separated on both sides based on the longitudinal direction by the separation plate 130. It can be positioned to form a space.

The height (h) of the separator plate 130 is preferably formed lower than the height (H) of the body portion 110, and the body portion 110 varies depending on the height (h) of the separator plate 130. The size of the spaces connected to each other by not being separated by the separation plate 130 on the other side (upper side) of the can be determined. This means that, in the case where the internal space of the body portion 110 is entirely separated, the discharge path 112 must be arranged in each space, but the height h of the separation plate 130 is smaller than that of the body portion 110. In the lower case, there is an advantage that a plurality of air can be discharged to the outside by disposing only one discharge passage 112 in the space connecting the inside of the body portion 110 formed into one. That is, a plurality of air is separated from each other for a certain distance by the separation plate 130 and moves along the body 110, and then flows through one discharge passage 112 formed on the other side of the body 110. There is an advantage in that it can be configured to discharge a plurality of air to the outside.

As the space of the opening 111 is separated by the separation plate 130, different air can be guided and introduced into the body portion 110 along the height h of the separation plate 130. It is structured so that At this time, one end of the separation plate 130 is positioned at one end of the body 110 where the opening 111 is formed so that the air flowing into the separated spaces can move without mixing with each other. It may be the same as, or may be formed at a position that protrudes outward (lower) than the position of one end of the body portion 110. Accordingly, when different air flows into the body portion 110, they can be separated and moved for a certain distance by the separation plate 130, so particles may be formed due to mixing of different gases. It has the effect of suppressing.

If explained in more detail with reference to FIGS. 2 to 5, the separation plate 130 can separate the internal space of the body portion 110 by being located on the side of the opening portion 111, and at this time, the first inflow The furnace 110a may be located closer to the process electrode 20 than the second inflow passage 110b. That is, the open portion 111 may be divided into a space on the side of the process electrode 20 and an outer space (away from the process electrode 20). Hereafter, when explaining that the process electrode 20 is located in the center and the body portion 110 is disposed on both sides, the space formed toward the process electrode 20 is referred to as the inside, and the process electrode ( The space formed outside of 20) is called the outside. At this time, the space on the side of the process electrode 20 formed inside the body 110 includes the first inlet 110a and the space outside the opening 111 formed on the outside of the body 110. It can be called 2 inflow passages 110b, where the first inflow passage 110a is through which the process gas generated from the process electrode 20 flows, and the second inflow passage 110b is through the process electrode 20. ) or when an external process gas adjacent to the process gas flows in or the process gas used in the process electrode fails to escape through the first inflow passage 110a and leaks through the gap with the object, it may be configured to be additionally exhausted. . In addition, when the body portion 110 is formed to surround the outer peripheral surface of the process roll of the process electrode 20, the inflow passage formed on the inner peripheral surface is the first inflow passage 110a, and the inflow passage formed on the outer peripheral surface is the first inflow passage 110a. It may be the second inflow passage 110b.

Referring to FIG. 1, the separation plate 130 has a cross-sectional area d1 of the first inflow passage 110a relative to the midpoint of the opening 111 that is that of the second inflow passage 110b. It can be placed in a location that is larger than the cross-sectional area (d2). That is, the separator plate 130 is installed to be biased outward so that the area of the first inflow passage 110a is larger than the area of the second inflow passage 110b, thereby preventing the diffusion from the process electrode 20. The process gas that causes particles may be configured to move more smoothly along the main body. Accordingly, the process gas does not spread outside the restricted area, which reduces the area for particle cleaning, which reduces the cost and time for cleaning. Residual deposits are also reduced, which has the effect of improving productivity by reducing product defects caused by particles. .

The body portion 110 may further include a heating means. The heating means may be arranged to heat the body 110, may be arranged to heat the opening 111 side, or may be arranged to heat the air inside the body 110. This means that when the body 110 of the process electrode 20 or the surrounding air is cold during the process, the particles may easily attach to the body 110 due to the particle's tendency to go in a direction with low energy. , This is to prevent problems caused by these particles.

2, 3, and 5, in the vacuum curtain system 200 including the vacuum curtain 100 of the present invention, a transport means for moving the object 10 in one direction (X-axis direction) , including at least one process electrode 20 that sprays a process gas toward the object 10 (Z-axis direction) and a vacuum curtain 100 disposed around the process electrode 20, The vacuum curtain 100 includes a body portion 110 including the opening portion 111 provided in the direction (Z-axis direction) in which the object 10 is located, and is connected to the body portion 110, and the opening portion Characterized by comprising a vacuum pump 120 that sucks the process gas through (111) and a separation plate 130 that separates the opening 111 into first and second inflow passages 110a and 110b. do.

The vacuum curtain 100 system includes a plurality of process electrodes 20 arranged adjacent to each other and the vacuum curtain 100 arranged around at least one process electrode 20. In this case, the object 10 is formed to move in one direction (X-axis direction) by the moving means, and the process electrode 20 is moved in the moving direction (X-axis direction) of the object 10. It is characterized by being arranged along. That is, the vacuum curtain 100 system is configured to move the object 10 in one direction by the moving means, and a plurality of process electrodes 20 along the moving direction of the object 10. In the system in which is disposed, the vacuum curtain 100 is disposed around the process electrode 20.

In more detail, the vacuum curtain 100 system includes the moving means for moving the object 10 in one direction, at least one process electrode 20, and the vacuum curtain 100. In a system in which the process electrodes 20 performing each process arranged along the moving direction of (10) are arranged adjacent to each other, the process gas generated from the process electrode 20 is directed to the adjacent process. The system is characterized in that it is provided to block the diffusion of process gas by providing the vacuum curtain 100 in the moving direction of the object 10 to prevent it from diffusing to the electrode 20. At this time, it is preferable that at least a portion of the separation plate 130 is arranged perpendicular to the moving direction, that is, the vacuum so that the longitudinal direction of the body portion 110 is perpendicular to the moving direction of the object 10. It is characterized in that a curtain 100 is disposed.

In the vacuum curtain 100 system, the body portion 110 may be installed around the process electrode 20 selected from the plurality of process electrodes 20, and the separation plate 130 may be at least A portion may be arranged along the longitudinal direction of the body portion 110 perpendicular to the moving direction (X-axis direction). More specifically, when the vacuum curtain 100 is formed in a straight line, the process to be blocked is to place the straight vacuum curtain 100 at a position in the moving direction among both sides of the process electrode 20. The vacuum curtains 100 can be placed on both sides of the electrode 20, respectively, and at this time, the separation plate 130 has a length in a direction parallel to the body portion 110, that is, in the Y-axis direction. It may be arranged along the longitudinal direction of the vacuum curtain 100. In addition, when the vacuum curtain 100 is formed according to the shape of the outer peripheral surface of the process electrode 20, the body portion 110 is formed to surround the outer peripheral surface of the selected process electrode 20, At this time, the separator plate 130 may be formed inside the body portion 110 in a shape corresponding to the shape of the body portion 110 and parallel to the outer peripheral surface of the process electrode 20.

5, the moving means may be a process roll 210 that rotates the object, a plurality of chambers including at least one process electrode 20 and disposed adjacent to each other, the process It includes the vacuum curtain 100 disposed around the electrode 20, and the plurality of chambers may be disposed along the outer peripheral surface of the process roll 210. That is, a plurality of process electrodes including the process electrode 20 are disposed on the outer peripheral surface of the process roll 210 along the rotation direction of the process roll 210, and the object 10 is used in the process. It is characterized in that it is configured to move along the plurality of chambers by rotation of the roll 210.

Describing an embodiment of the present invention, the main body housing may be configured to include a plurality of chambers, a vacuum curtain, and a process roll 210, and in addition to the process roll 210, the object 10 It may be configured to further include at least one moving roll that can be wound around the roller, unrolled, and moved in one direction. At this time, the inside of the main body housing of the system including the process roll 210 may be filled with an inert gas, and each process electrode may be configured to spray different process gases. When the vacuum curtain 100 is formed in a straight line, the electrode that sprays the process gas that causes particles among the chambers is called the process electrode 20, and the chambers disposed on both sides of the process electrode 20 are called If the first process electrode 21 and the second process electrode 22 are formed along the rotation direction, the first vacuum curtain 101 is positioned between the first process electrode 21 and the process electrode 20. ) can be placed, and the second vacuum curtain 102 can be placed between the second process electrode 22 and the process electrode 20. In this case, the first and second vacuum curtains 101, 102) may be arranged so that the longitudinal direction of the body portion 110 is perpendicular to the direction in which the process roll 210 rotates, that is, the separation plate 130 is perpendicular to the rotation direction.

In more detail, when the body portion 110 of the first and second vacuum curtains 101 and 102 is separated into the first inflow passage and the second inflow passage by the separation plate 130, the first The vacuum curtain 101 has a space on the side of the first chamber 21 as a second inlet, a space on the process electrode 20 side as a first inflow, and the first process through the second inflow. The gas of the process electrode 21 may be sucked in, and the gas of the process electrode 20 may be sucked in through the first inlet passage. In addition, the second vacuum curtain 102 has a space on the second process electrode 22 side as a second inflow path and a space on the process electrode 20 side as a first inflow path. The gas of the second process electrode 22 may be sucked in through the furnace, and the gas of the process electrode 20 may be sucked in through the first inflow passage. At this time, the height of each of the separation plates 130 is formed to be smaller than the height (H) of the body portion 110 and communicates with the other side (opposite of the opening 111) of the first and second vacuum curtains. A space may be formed, and an discharge passage 112 may be formed in this space so that a plurality of gases can be smoothly discharged to the outside through a small number of discharge passages.

Through the vacuum curtain 100 and the vacuum curtain system 200, the process area and the non-process area can be separated within the main housing in the case of a system including the process roll 210, thereby reducing the amount of process gas usage. This has the effect of providing a system that reduces product defects caused by particles by reducing the area for cleaning and reducing residual deposits because the process gas does not spread other than the limited area within the housing. In addition, since it is possible to prevent the gases inside the main housing from mixing with each other as much as possible, in the case of chemical vapor deposition, diffusion of plasma or thermally decomposed gas within the chamber can be prevented, thereby preventing deposition in unnecessary areas and on the object 10. It has the effect of suppressing particles that may be generated due to unsafe deposition. In addition, by preventing unnecessary gas diffusion as much as possible, equipment that continuously processes multi-layer thin films and surface treatments by entering a large number of objects (10) into a large chamber at once, such as a roll-to-roll system, reduces the amount of gas generated in the chamber through the vacuum curtain (100). By minimizing particles, productivity can be improved by reducing the production of defective products, shortening the time required for internal cleaning, preventing environmental pollution by reducing the gas used for cleaning, and improving the operation and maintenance of equipment. It is possible to provide a roll-to-roll system that has the effect of reducing costs.

As described above, the present invention has been described with reference to specific details such as specific components and drawings of limited embodiments, but this is only provided to facilitate a more general understanding of the present invention, and the present invention is not limited to the above-mentioned embodiment. No, those skilled in the art can make various modifications and variations from this description.

Accordingly, the spirit of the present invention should not be limited to the described embodiments, and all matters that are equivalent or equivalent to the claims of this patent as well as the claims described below shall fall within the scope of the spirit of the present invention. .

10: object
20: Process electrode
21: electrode for first process 22: electrode for second process
100: Vacuum curtain
110: body portion 111: opening portion
110a: first inflow passage 110b: second inflow passage
120: vacuum pump 130: separation plate
101: 1st vacuum curtain 102 2nd vacuum curtain
200: Vacuum curtain system 210: Process roll

Claims (11)

In the vacuum curtain disposed around the process electrode that sprays process gas toward one side,
A body portion including an opening provided on one side;
a vacuum pump connected to the body and sucking air through the opening; and
It includes a separation plate, which is a plate that separates the opening into first and second inflow passages,
The separation plate is,
Having a predetermined height in a direction parallel to the outer peripheral surface of the process electrode so that the process gas flows in through the first inlet but does not immediately flow out of the second inlet,
A vacuum curtain, characterized in that the first inflow passage is formed closer to the process electrode than the second inflow passage.
delete According to clause 1,
The height of the separation plate is lower than the height of the body portion.
Vacuum curtain featuring.
According to clause 3,
One end of the separator plate is,
The same as the position of one end of the body part, or disposed in a position that protrudes outward from one end of the body part.
Vacuum curtain featuring.
According to clause 1,
The separation plate is,
It is disposed at a position where the cross-sectional area of the first inflow passage is greater than or equal to the cross-sectional area of the second inflow passage, based on the midpoint of the opening.
Vacuum curtain featuring.
According to clause 1,
The body portion further includes a heating means for heating the opening side.
Vacuum curtain featuring.
According to clause 1,
The body part,
Arranged along the outer peripheral surface of the process electrode
Vacuum curtain featuring.
A transport means for moving an object in one direction;
At least one process electrode that sprays process gas toward the object and
It includes a vacuum curtain disposed around the process electrode,
The vacuum curtain is,
a body portion including an opening provided in the direction in which the object is located;
a vacuum pump connected to the body and sucking process gas through the opening; and
It includes a separation plate, which is a plate that separates the opening into first and second inflow passages,
The separation plate is,
Having a predetermined height in a direction parallel to the outer peripheral surface of the process electrode so that the process gas flows in through the first inlet but does not immediately flow out of the second inlet,
The first inflow passage is formed closer to the process electrode than the second inflow passage,
A vacuum curtain system characterized by .
According to clause 8,
The separator plate is arranged parallel to the outer peripheral surface of the process electrode.
A vacuum curtain system characterized by .
According to clause 8,
At least a portion of the separator plate,
disposed perpendicular to the direction of movement
A vacuum curtain system characterized by .
According to clause 8,
The transport means is a process roll that rotates the object.
A vacuum curtain system characterized by .