KR102588236B1 - 재료 내부의 레이저 가공방법 - Google Patents

재료 내부의 레이저 가공방법 Download PDF

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Publication number
KR102588236B1
KR102588236B1 KR1020207006800A KR20207006800A KR102588236B1 KR 102588236 B1 KR102588236 B1 KR 102588236B1 KR 1020207006800 A KR1020207006800 A KR 1020207006800A KR 20207006800 A KR20207006800 A KR 20207006800A KR 102588236 B1 KR102588236 B1 KR 102588236B1
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South Korea
Prior art keywords
laser
sample
correction
delete delete
focus
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Korean (ko)
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KR20200038977A (ko
Inventor
마틴 제임스 부스
패트릭 살터
Original Assignee
옥스포드 유니버시티 이노베이션 리미티드
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/705—Beam measuring devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Microscoopes, Condenser (AREA)
  • Laser Beam Processing (AREA)
KR1020207006800A 2017-08-07 2018-08-07 재료 내부의 레이저 가공방법 Active KR102588236B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB1712639.2A GB201712639D0 (en) 2017-08-07 2017-08-07 Method for laser machining inside materials
GB1712639.2 2017-08-07
PCT/GB2018/052256 WO2019030520A1 (en) 2017-08-07 2018-08-07 METHOD FOR LASER MACHINING INSIDE MATERIALS

Publications (2)

Publication Number Publication Date
KR20200038977A KR20200038977A (ko) 2020-04-14
KR102588236B1 true KR102588236B1 (ko) 2023-10-11

Family

ID=59894878

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020207006800A Active KR102588236B1 (ko) 2017-08-07 2018-08-07 재료 내부의 레이저 가공방법

Country Status (7)

Country Link
US (2) US11685003B2 (https=)
EP (2) EP4534229A3 (https=)
JP (2) JP7262124B2 (https=)
KR (1) KR102588236B1 (https=)
ES (1) ES3013117T3 (https=)
GB (1) GB201712639D0 (https=)
WO (1) WO2019030520A1 (https=)

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GB201712640D0 (en) 2017-08-07 2017-09-20 Univ Oxford Innovation Ltd Method of laser modification of an optical fibre
DE102017007586A1 (de) * 2017-08-11 2019-02-14 Siltectra Gmbh Fertigungsanlage zum Abtrennen von Wafern von Spendersubstraten
US12370622B2 (en) 2018-06-02 2025-07-29 Bruno Scarselli Asset identification, registration, tracking and commercialization apparatuses and methods
GB2581172B (en) * 2019-02-06 2022-01-05 Opsydia Ltd Laser machining inside materials
CN110133845A (zh) * 2019-04-26 2019-08-16 中国科学院上海光学精密机械研究所 一种用于激光系统的自由曲面波前补偿元件的设计方法
CN110788500B (zh) * 2019-10-28 2022-02-01 北京航天控制仪器研究所 一种硬脆材料复杂构件飞秒激光精密成型加工系统
JP7460274B2 (ja) * 2020-02-21 2024-04-02 株式会社ディスコ ウエーハの加工方法
GB202002558D0 (en) 2020-02-24 2020-04-08 Ucl Business Ltd Electronic device
JP7487039B2 (ja) * 2020-08-04 2024-05-20 株式会社ディスコ レーザー加工装置
DE102020121283A1 (de) * 2020-08-13 2022-02-17 Trumpf Laser- Und Systemtechnik Gmbh Laserbearbeitung eines werkstücks mit einer gekrümmten oberfläche
JP7608257B2 (ja) 2021-04-23 2025-01-06 株式会社ディスコ レーザー加工装置の調整方法、及びレーザー加工装置
KR102547513B1 (ko) * 2022-01-25 2023-06-26 (주)오로스 테크놀로지 광학 검사 장치
CN116689995A (zh) * 2023-06-26 2023-09-05 浙江大学 一种金刚石内部的三维微区热操控方法
WO2025074213A1 (en) 2023-10-03 2025-04-10 Opsydia Limited Gemstone inscription viewing system and applications thereof
GB2642091A (en) 2024-06-24 2025-12-31 Opsydia Ltd Laser system and method for modifying a sample
WO2026079004A1 (ja) * 2024-10-07 2026-04-16 住友電気工業株式会社 光接続部品の製造装置および光接続部品の製造方法

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JP2010125507A (ja) * 2008-11-28 2010-06-10 Hamamatsu Photonics Kk レーザ加工装置
JP2013027930A (ja) * 2012-09-28 2013-02-07 Hamamatsu Photonics Kk レーザ加工装置及びその製造方法
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EP0545133A2 (en) * 1991-11-20 1993-06-09 Sony Corporation Optical pickup device and focusing servo device employed therein
JP2008531143A (ja) * 2005-03-01 2008-08-14 インターナショナル ジェムストーン レジストリー インコーポレイテッド ダイアモンドのような宝石用原石の体積内にレーザマーキングするための方法及びシステム
JP2010125507A (ja) * 2008-11-28 2010-06-10 Hamamatsu Photonics Kk レーザ加工装置
JP2014503359A (ja) * 2010-12-16 2014-02-13 バイストロニック レーザー アクチェンゲゼルシャフト 光合焦用レンズが単一のレーザビームマシニング装置及びレーザマシニング方法
JP2013027930A (ja) * 2012-09-28 2013-02-07 Hamamatsu Photonics Kk レーザ加工装置及びその製造方法

Also Published As

Publication number Publication date
US11685003B2 (en) 2023-06-27
JP2020529925A (ja) 2020-10-15
KR20200038977A (ko) 2020-04-14
JP7603333B2 (ja) 2024-12-20
EP4534229A2 (en) 2025-04-09
JP7262124B2 (ja) 2023-04-21
EP3664955A1 (en) 2020-06-17
GB201712639D0 (en) 2017-09-20
EP3664955C0 (en) 2025-02-26
WO2019030520A1 (en) 2019-02-14
EP3664955B1 (en) 2025-02-26
US20230398639A1 (en) 2023-12-14
EP4534229A3 (en) 2025-07-09
US20200164470A1 (en) 2020-05-28
ES3013117T3 (en) 2025-04-11
JP2023093522A (ja) 2023-07-04

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