KR102579400B1 - Heat treatment oven heater power connector - Google Patents

Abstract

Disclosed is a heater power connection device for a heat treatment oven. The present invention relates to a heater power connection device for a heat treatment oven, which includes a busbar that is mounted in the chamber of the heat treatment oven and connects electrodes to supply low voltage and high current to heat or dry the substrate through heat, and the busbar is supplied with electricity. A heater unit including a heating plate provided with a heating element having electrodes; and a power supply terminal unit that is mounted on the heating plate and connects the power supply line to energize the heating element through a power supply line that induces power supply from the busbar of the heater unit.

Description

Heat treatment oven heater power connector {Heat treatment oven heater power connector}

The present invention relates to a heater power connection device for a heat treatment oven that improves the power supply performance for a heater unit mounted in the chamber of the heat treatment oven.

Recently, the display market has been applied to various types of imaging devices such as TVs, mobile phones, and monitors, and due to the rapid development of technology, efforts to improve product performance are continuing. Organic light emitting display devices and LCD substrates (hereinafter referred to as 'substrates' or 'glass substrates') are one of the next-generation display devices and are applied to various product fields. The glass substrate that makes up the display device is manufactured through heat treatment. In order to satisfy the conditions required for each process during heat treatment, the influence of external air must be prevented and heat emission outside the chamber must be kept to a minimum to prevent performance degradation. The product defect rate can be reduced. In addition, in order to improve the yield of finished products, the smaller the in-plane deviation of the substrate during heat treatment, the better, so more high-performance heat treatment ovens are required, and continuous research is being conducted.

In manufacturing substrates, temperature management and temperature uniformity are essential to maintain good substrate quality and yield. For example, in the substrate manufacturing process using a heat treatment oven, an organic layer is formed on the surface of the substrate, which may contain a certain amount of moisture, so a drying process to evaporate the moisture is required. In the glass substrate manufacturing process, a photosensitive film is coated on the substrate surface. Before processing, a cleaning process is performed, and after the cleaning process, a heating and drying process is performed to remove moisture. In most of the substrate manufacturing processes, the substrate is manufactured by performing a heating and drying process. Moisture generated during the substrate manufacturing process is removed by using infrared rays or by heating and drying it in a chamber of a heat treatment oven containing a heating element such as a sheath heater.

In this regard, an 'LCD glass oven chamber' is proposed in KR Registered Patent Publication 10-1238560 and KR Published Patent Publication 10-2013-0028322.

Meanwhile, the heater unit mounted in the chamber of the heat treatment oven is composed of a conductive part connected to a plurality of bus bars that connect heating wires to conduct current. It varies depending on the specification, but in general, the heater unit of the heat treatment oven uses electricity. It has a built-in heating wire (heating coil) that generates heat through resistance, and plate-shaped heating plates are installed on the top and bottom of it to perform the substrate heating and drying process within the heat treatment oven chamber.

However, since the existing heater unit mounted in the chamber of the heat treatment oven is applied by directly connecting the power source to the plate-shaped heating plate, the terminal part is exposed to electrical characteristics, which directly affects the durability according to the structure and shape of the terminal part. In normal cases, the durability of the terminal part rapidly deteriorates, causing problems such as short circuits and short circuits, which reduces product reliability. For example, the existing power supply terminal changes contact resistance due to its electrical characteristics, is exposed to the risk of arcing due to imbalance in contact resistance, and has large variations in insulation performance depending on the assembly shape. Thermal deformation caused by high heat may weaken the contact force, and changes in resistance may occur due to oxidation of materials at high temperatures.

Accordingly, while providing sufficient electrical capacity corresponding to the electrical capacity applied to the heater unit, the flow of current from the busbar to the heater unit is interrupted or interference is minimized to maintain a stable current flow, and electrical contact is maintained. There is a need for a new structural design for the terminal section that can solve problems caused by contact resistance by minimizing contact resistance.

Patent Document 1. KR Registered Patent Publication No. 10-1238560 (announcement date: February 28, 2013) Patent Document 2. KR Registered Patent Publication No. 10-0722154 (announcement date: May 28, 2007) Patent Document 3. KR Patent Publication No. 10-2013-0028322 (publication date March 19, 2013)

One of the technical problems to be solved by the present invention is to improve the current conduction performance of a heater unit mounted in the chamber of a heat treatment oven.

One of the technical problems to be solved by the present invention is to solve problems such as short circuits and short circuits, including reduced durability, occurring in the terminal portion of a heater unit mounted in the chamber of a heat treatment oven.

One of the technical problems to be solved by the present invention is to maintain a stable flow of current by minimizing disruption and interference in the flow of current from the busbar of the heater unit mounted in the chamber of the heat treatment oven to the heating plate, and to maintain the electric current flow stably. The purpose is to provide a power connection terminal to minimize contact.

According to the present invention, the heater power connection device for a heat treatment oven includes a busbar that is mounted in the chamber of the heat treatment oven and connects electrodes to supply low voltage and high current to heat or dry the substrate through heat. , a heater unit including a heating plate provided with a heating element having an electrode energized to the busbar; And in order to energize the heating element through a power supply line that induces power supply from the busbar of the heater unit, the terminal of the power supply line is mounted on the heating plate through a fixing means by centering a hole drilled in the heating plate. It can be achieved from a heater power connection device for a heat treatment oven, characterized in that it includes a power supply terminal for connecting a power supply line.

According to an embodiment of the present invention, the heating plate includes an upper insulating layer at the top of the heating element, a lower insulating layer at the lower portion, and a substrate layer made of stainless steel, and the upper portion is centered around the heating element. It may be configured in a stacked manner by sequentially stacking an insulating layer, a lower insulating layer, and a substrate layer made of stainless steel.

According to an embodiment of the present invention, the power supply terminal unit includes a hole drilled in the heating plate; a power supply bushing that has a hole centered with the hole of the heating plate and is mounted on the upper surface of the heating plate to conduct electricity and maintain parallel contact with power induced through a power supply line; an insulating bushing that has a hole centered with the terminal side hole of the power supply bushing and the power supply line to suppress the external flow of current; and a fixing means that continuously passes through the heating plate, the insulating bushing, the terminal of the power supply line, and each hole drilled in the power supply bushings and secures the heating plate to the heating plate.

According to an embodiment of the present invention, the insulating bushing mounted on the upper surface of the heating plate has a large upper diameter and a smaller step than the upper diameter, and the lower part passes through a hole formed in the terminal of the power supply line. It may be configured as a protruding shape.

According to an embodiment of the present invention, the insulating bushing mounted on the upper surface of the heating plate can be manufactured by selecting from ceramic materials that suppress the external flow of current at the terminal side of the power supply line and enhance durability.

According to an embodiment of the present invention, the fixing means continuously passes through the terminals of the insulating bushing and the power supply line and each hole drilled in the power supply bushing and the heating plate to attach the insulating bushing and the power supply line to the upper surface of the heating plate. It may be configured to include a fixing bolt that sequentially fixes the terminal and the power supply bushing and is fastened with a nut on the lower surface of the heating plate.

According to an embodiment of the present invention, a washer is placed between the lower surface of the heating plate and the nut, and may be configured to include a double stacked structure with a flat washer at the top and a spring washer at the bottom.

The present invention has the effect of improving the current conduction performance of a heater unit mounted in the chamber of a heat treatment oven.

In addition, the present invention has the effect of solving problems such as short circuits and short circuits, including reduced durability that occurs in the terminal portion of a heater unit mounted in the chamber of a heat treatment oven.

In addition, the present invention maintains a stable flow of current by minimizing disruption and interference in the current flow from the busbar of the heater unit mounted in the chamber of the heat treatment oven to the heating plate, and minimizes electrical contact to provide high reliability. It has the effect of producing a heat treatment oven.

Figure 1 is an example showing a heat treatment oven.
Figure 2 is an example showing the front of a heat treatment oven.
Figure 3 is an example showing a plan view of a heat treatment oven.
Figure 4 is an example showing one side of a heat treatment oven.
Figure 5 is an example of a heater unit placed in a heat treatment oven.
Figure 6 is an example of a heater unit disposed in a heat treatment oven in a planar structure.
Figure 7 is an excerpt from part A of Figure 6 and is an example of a heater power connection device for a heat treatment oven according to an embodiment of the present invention.
Figure 8 is a schematic example of a heating plate constituting a heater power connection device for a heat treatment oven according to an embodiment of the present invention.
Figure 9 is an example of a heating plate constituting a heater power connection device for a heat treatment oven according to an embodiment of the present invention.
Figure 10 is an example showing the heater power connection device of a heat treatment oven according to an embodiment of the present invention in an exploded state.

Hereinafter, a 'heater power connection device for a heat treatment oven' according to a preferred embodiment of the present invention will be described.

Figure 1 is an example showing a heat treatment oven. Figure 2 is an example showing the front of a heat treatment oven. Figure 3 is an example showing a plan view of a heat treatment oven. Figure 4 is an example showing the side of a heat treatment oven.

The drawings shown in FIGS. 1 to 4 show the overall structure of the heat treatment oven 100 and are examples of the heat treatment oven 100 including the chamber 200.

As shown in FIGS. 1 to 4, the heat treatment oven 100 places the substrate to be heat treated in each stage provided in the chamber 200 in order to heat treat the substrate, or has a rear portion for removing the substrate for which the heat treatment process has been completed from the chamber 200. A door part 110 may be provided in the front part, and a shutter part 120 may be provided in the front part.

In addition, the heat treatment oven 100 is provided with a chamber 200 to accommodate a substrate requiring heating or drying, and a plurality of heater units 300 made of heating elements are mounted in the chamber 200 to heat the heater unit ( 300) is configured to heat the substrate with heat generated from the substrate or evaporate and dry the moisture.

In addition, the heat treatment oven 100 is provided with a supply port that introduces a fluid containing a process gas into one side of the chamber 200 and an exhaust port that exhausts the fluid in the chamber 200, and supports and supports the chamber 200. It is composed of a frame including lugs and a conductive portion to which a plurality of busbars 301 are connected to which the heating wire of the heater unit 300 is connected to conduct current.

In addition, although it varies depending on the specification, in normal cases, heating plates 311 are installed in close contact with the upper and lower parts of the heating element 310 constituting the heater unit 300 to effectively perform the substrate heating process within the chamber.

Meanwhile, in FIGS. 1 and 4, unexplained symbols '210' and '220' refer to the 'inner and outer casing' of the chamber 200. And, the unexplained symbol '230' is a 'cooling jacket' that forms a cooling airflow in the chamber 200 and cools the chamber to a uniform temperature distribution through a cooling airflow induction path formed inside the chamber 200. The unexplained symbol '240' is a 'power supply unit' that protrudes feed throughs and supplies power to the chamber 200 through them.

For reference, the basic components constituting the heat treatment oven as shown in FIGS. 1 and 4, including the structure of the chamber, the supply and exhaust systems of the process gas, and the busbar that supplies power to the heater unit. The configuration of the conductive part and the power supply part is not directly related to the present invention. Additionally, since the basic configurations of the heat treatment oven are known and unrelated to the gist of the present invention, they will be omitted from the description of the configuration and operation of the present invention.

As shown in Figures 1 to 4, the heat treatment oven generally has a door at the rear and a door at the front to place the substrate to be heat treated in each stage provided in a chamber where a heater is installed in order to heat treat the substrate, or to take out the substrate for which the heat treatment process has been completed from the chamber. Each unit may be provided with a shutter.

In addition, the heat treatment oven is equipped with a chamber to accommodate a substrate that requires heating or drying, and a heater unit made of a heating element is mounted in the chamber to heat the substrate or evaporate and dry the moisture through the heat generated from the heater unit. It can be configured.

In addition, although it varies depending on the specification, in most cases, heating plates are installed in close contact with the upper and lower parts of the heating element constituting the heater to effectively perform the substrate heating process.

In addition, one side of the chamber of the heat treatment oven is provided with a supply port for introducing a fluid containing a process gas and an exhaust port for exhausting the fluid in the chamber, and a frame including lugs that support and support the chamber and a heating wire of the heater are connected. It is composed of a conductive part to which a plurality of bus bars are connected to conduct current.

Meanwhile, the heat treatment oven contains a heater inside the chamber to remove moisture remaining on the substrate during the heat treatment process, and requires more efficient and high-performance processing capabilities to improve product quality.

In addition, in order to mass-produce a larger amount of products by shortening the heat treatment process time, heater units installed inside the chamber are required to have high performance and structurally strengthened durability.

However, since the existing heater unit mounted in the chamber of the heat treatment oven is applied by directly connecting the power source to the plate-shaped heating plate, the durability according to the structure and shape of the terminal part is directly affected by the electrical characteristics of the terminal part. In normal cases, the durability of the terminal part rapidly deteriorates, causing problems such as short circuits and short circuits, which reduces product reliability.

For example, the existing power supply terminal changes contact resistance due to its electrical characteristics, is exposed to the risk of arcing due to imbalance in contact resistance, and has large variations in insulation performance depending on the assembly shape. Thermal deformation caused by high heat may weaken the contact force, and changes in resistance value may occur due to oxidation of materials at high temperatures.

Accordingly, the present invention provides sufficient electrical capacity corresponding to the electrical capacity applied to the heater unit, while maintaining the stable flow of current by preventing or minimizing interference with the flow of current from the busbar to the heater unit. We present a heater power connection device for a heat treatment oven that includes a new terminal structural design that minimizes electrical contact and solves problems caused by contact resistance.

In addition, the present invention provides a heater power connection device for a heat treatment oven that improves the power supply performance to the heater unit mounted in the chamber of the heat treatment oven.

In addition, the present invention provides a heater power connection device for a heat treatment oven that solves problems such as short circuits and short circuits, including reduced durability occurring in the terminal portion of the heater unit mounted in the chamber of the heat treatment oven.

In addition, the present invention maintains a stable flow of current by minimizing disruption and interference in the current flow from the busbar of the heater unit mounted in the chamber of the heat treatment oven to the heating plate, and minimizes electrical contact to provide high reliability. We present a heater power connection device for a heat treatment oven that allows the manufacture of a heat treatment oven.

The main components of the heater power connection device of the heat treatment oven according to the present invention will be described in detail with reference to FIGS. 5 to 10.

Figure 5 is an example of a heater unit placed in a heat treatment oven. Figure 6 is an example of a heater unit disposed in a heat treatment oven in a planar structure.

The heater power connection device of the heat treatment oven according to an embodiment of the present invention connects the current of the busbar 301 constituting the heater unit 300 to the heating plate 311, as shown in FIGS. 7 and 10. It can be configured to connect effectively.

Figure 7 is an excerpt from part A of Figure 6 and is an example of a heater power connection device for a heat treatment oven according to an embodiment of the present invention.

Figure 8 is a schematic example of a heating plate constituting a heater power connection device for a heat treatment oven according to an embodiment of the present invention.

Figure 9 is an example of a heating plate constituting a heater power connection device for a heat treatment oven according to an embodiment of the present invention.

Figure 10 is an example showing the heater power connection device of a heat treatment oven according to an embodiment of the present invention in an exploded state.

In the heater power connection device for a heat treatment oven according to an embodiment of the present invention, as shown in FIGS. 7 to 10, the heater unit 300 is mounted in the chamber 200 of the heat treatment oven 100 and transmits heat through heat. A heating plate 311 includes a busbar 301 that connects electrodes to supply low voltage and high current in order to heat or dry the substrate, and is equipped with a heating element 310 having an electrode that conducts electricity to the busbar 301. It can be provided.

In order to stably supply current to the heating element 310 through the power supply line 330 that induces power supply from the busbar 301 of the heater unit 300, the terminal of the power supply line is perforated in the heating plate 311. It may be configured to include a power supply terminal portion 320 that is mounted on the heating plate 311 through a fixing means by centering the hole 311a and connects the power supply line 330.

In addition, as shown in FIG. 8, the heating plate 311 may be formed of an upper insulating layer 313 at its upper part and a lower insulating layer 314 at its lower part with the heating element 310 as the center.

Additionally, the lower portion of the insulating layer 314 may include a substrate layer 315 made of stainless steel.

In this way, when the heating plate 311 is formed by stacking the upper insulating layer 313, the lower insulating layer 314, and the substrate layer 315 made of stainless steel (SUS403) around the heating element 310, excellent electrical properties are achieved. It has excellent properties, insulation, and durability with little deformation.

In addition, the power supply terminal unit 320 is constructed by drilling a hole 311a in the heating plate 311, as shown in FIGS. 7 to 10, and the hole 311a drilled in the heating plate 311 is It can be configured by installing an electrode plating layer 342 at the center and around the periphery.

In addition, it is equipped with a hole 321a centered with the hole 311a of the heating plate 311 and is mounted on the upper surface of the heating plate 311 to be energized with power induced through the power supply line 330 and maintain parallel contact. It may be configured to include a power supply bushing 321.

In addition, it includes a power supply bushing 321 and an insulating bushing 340 that has a hole 341a centered with a hole 331a on the terminal 331 side of the power supply line 330 to suppress the external flow of current. It can be.

And, the heating plate 311, the insulating bushing 340, the terminal 331 of the power supply line 330, and each hole 311a, 321a, 331a, and 341a drilled in the power supply bushings 321. It may be configured to include fixing means for fixing each part to the heating plate 311 by continuously passing through it.

In addition, the insulating bushing 340 mounted on the upper surface of the heating plate 311 has a large upper diameter and a smaller step than the upper diameter, and the lower part is formed at the terminal 331 of the power supply line 330. It may be configured to have a protruding shape with a protrusion 341 passing through the hole 331a.

Through this, the protrusion 341 can enter the hole 331a formed in the terminal 331 of the power supply line 330 to block loosening due to shaking and vibration of the terminal 331 of the power supply line 330, Arc generation due to clearance between gaps can be minimized.

In addition, the insulating bushing 340 mounted on the upper surface of the heating plate 311 is preferably manufactured from ceramic materials that suppress the external flow of current on the terminal 331 side of the power supply line 330 and enhance durability. can do.

In addition, the heating plate 311, the insulating bushing 340, the terminal 331 of the power supply line 330, and each hole 311a, 321a, 331a, and 341a drilled in the power supply bushings 321. The fixing means that continuously passes and fixes each part to the heating plate 311 may be configured as shown in FIG. 10.

As shown in Figure 10, the fixing means are the terminal 331 of the insulating bushing 340 and the power supply line 330, and each hole 341a and 331a drilled in the power supply bushing 321 and the heating plate 311. ) The insulating bushing 340, the terminal 331 of the power supply line 330, and the power supply bushing 321 are sequentially fixed to the upper surface of the heating plate 311 by passing through (331a) (311a), It may be composed of a fixing bolt 350 fastened with a nut 351 on the lower surface of the heating plate 311.

Here, the fixing bolt 350 can be replaced with another fastening element, but each part can be fastened with a tightening torque, and bolt and nut fastening elements can be selected as preferred fastening elements for post-service inspection, etc.

In addition, it is desirable to place a washer between the lower surface of the heating plate 311 and the nut 351 to induce tight coupling between each part and prevent deformation and loosening between each part.

Preferably, the flat washer 352 is fastened at a position close to the heating plate 311, and the spring washer 353 is double-stacked on the lower part thereof, and through this, each part is tightly held by the tightening force of the fixing bolt 350. It is possible to fasten and bind as is, and by reducing the gap between each part, arc generation when energized can be minimized.

In this way, the heater power supply device for a heat treatment oven according to the present invention has the advantage of effectively improving the conduction performance of the heater unit mounted in the chamber of the heat treatment oven.

In addition, there is an advantage in solving problems such as short circuits and short circuits, including reduced durability, that occur in the terminal portion of the heater unit mounted in the chamber of the heat treatment oven.

In addition, it minimizes disruption and interference in the current flow from the busbar of the heater unit mounted in the chamber of the heat treatment oven to the heating plate to maintain a stable current flow, and minimizes electrical contact to provide a high-quality, high-reliability heat treatment oven. There is an advantage in being able to produce .

The present invention has been described with reference to an embodiment shown in the drawings, but is not limited to the embodiment and can be implemented with modifications and variations without departing from the gist of the present invention, and the modifications and variations are within the technical spirit of the present invention. Included.

100: heat treatment oven 200: chamber
300: heater unit 301: busbar
310: heating element
311: Heating plate (Thick Flim Heater)
311a: hole 313: upper insulating layer
314: lower insulating layer 315: substrate layer
320: Power supply terminal 321: Power supply bushing
321a: Hall 330: Power supply line
331: terminal 331a: hole
340: insulating bushing 341: protrusion
341a: Hole 350: Fixing bolt
351: nut 352: flat washer
353: spring washer

Claims (5)

A heater power connection device for a heat treatment oven includes a busbar mounted in a chamber of the heat treatment oven to connect electrodes to supply low voltage and high current to heat or dry a substrate through heat, and an electrode energized to the busbar. A heater unit including a heating plate provided with a heating element; And in order to energize the heating element through a power supply line that induces power supply from the busbar of the heater unit, the terminal of the power supply line is mounted on the heating plate through a fixing means by centering a hole drilled in the heating plate. It consists of a power supply terminal for connecting a power supply line, wherein the heating plate is centered around the heating element and is composed of an upper insulating layer and a lower insulating layer, and the lower part of the lower insulating layer is stainless steel. A heater power connection device for a heat treatment oven, characterized in that it is composed of a substrate layer made of a stacked type by sequentially stacking an upper insulating layer, a lower insulating layer, and a substrate layer made of stainless steel around the heating element. According to claim 1,
The power supply terminal unit includes a power supply bushing that has a hole centered with the hole of the heating plate and is mounted on the upper surface of the heating plate to conduct electricity and maintain parallel contact with power induced through a power supply line; an insulating bushing that has a hole centered with the terminal side hole of the power supply bushing and the power supply line to suppress the external flow of current; and the fixing means for fixing the heater to the heating plate by continuously passing through the heating plate, the terminal of the insulating bushing and the power supply line, and each hole drilled in the power supply bushings. Device. According to claim 2,
The insulating bushing mounted on the upper surface of the heating plate has a large upper diameter and a lower diameter with a smaller step than the upper part, and its lower part is formed in a protruding shape that passes through a hole formed in the terminal of the power supply line. Features a heater power connection for a heat treatment oven. According to claim 2,
The fixing means successively passes through the insulating bushing, the terminal of the power supply line, and each hole drilled in the power supply bushing and the heating plate, and sequentially attaches the insulating bushing, the terminal of the power supply line, and the power supply bushing to the upper surface of the heating plate. A heater power connection device for a heat treatment oven, characterized in that it consists of a fixing bolt that is fixed and fastened with a nut on the lower surface of the heating plate. According to claim 4,
A washer is placed between the lower surface of the heating plate and the nut, and a heater power connection device for a heat treatment oven, characterized in that a flat washer is inserted at the top and a spring washer is inserted in a double layer at the bottom.