JP7237112B2 - Exhaust duct integrated heater unit for heat treatment oven - Google Patents

Description

TECHNICAL FIELD The present invention relates to an exhaust duct-integrated heater unit for a heat treatment oven, in which an exhaust duct for discharging the airflow in the heat treatment oven to the outside is integrated with a frame for fixing a heater in the heat treatment oven.

Recently, displays have been applied to various kinds of image devices such as TVs, mobile phones, monitors, etc. With rapid technological development, efforts are being made to improve the performance of the products. Organic light emitting display devices and LCD substrates are one of next-generation display devices and are applied to various product fields. The glass substrates that make up the display device are manufactured by heat treatment.In order to meet the conditions required for each process during the heat treatment, it is necessary to prevent the influence of the outside air and minimize the heat emitted outside the chamber. must be kept to As a result, deterioration in performance can be prevented, and the defective rate of products can be reduced. In addition, in order to improve the yield of finished products, it is better to have less in-plane variations in the substrate during heat treatment.

When manufacturing substrates for organic light-emitting display devices and LCD glass substrates (hereinafter referred to as "substrates" or "glass substrates"), which are representative of flat displays, temperature control and temperature uniformity are important factors in maintaining the quality and yield of non-defective substrates. absolutely necessary for For example, in the substrate manufacturing process using a heat treatment oven, an organic layer is formed on the surface of the substrate, which can contain a certain amount of moisture, so a drying process is required to evaporate the moisture. In the process, a cleaning process is performed before coating the surface of the substrate with a photosensitive film, and after the cleaning process, a heating and drying process is performed to remove moisture. Many substrate manufacturing processes include heating and drying processes. manufactures the substrates. Moisture generated in the substrate manufacturing process is removed by heating and drying by using infrared rays or placing the substrate in a heat treatment oven chamber including a heating element such as a sheath heater. In this regard, Korean Patent No. 10-1238560 and Korean Patent Publication No. 10-2013-0028322 propose an “LCD glass oven chamber”.

On the other hand, in order to heat-treat the glass substrate of the display device, there are required conditions for each process. To this end, there is a demand for a proposal that simplifies the structure inside the chamber and that can properly control the exhaust. There is also a need for a heat treatment oven design that can be more easily installed and maintained in a limited factory space by reducing the space required for maintenance.

Korean Patent No. 10-1238560 (publication date February 28, 2013) Korean Patent No. 10-0722154 (Publication date May 28, 2007) Korean Patent No. 10-2013-0028322 (Published on March 19, 2013)

SUMMARY OF THE INVENTION It is an object of the present invention to simplify the structure of a heat treatment oven and improve its exhaust capacity by integrating the heater and the exhaust duct of the heat treatment oven.

Another object of the present invention is to reduce the space required for maintenance of the heat treatment oven through integration of the heater and exhaust duct of the heat treatment oven.

Another object of the present invention is to improve the maintenance workability of the heat treatment oven by integrating the heater of the heat treatment oven and the exhaust duct.

According to the present invention, the substrate is heated by the heat generated from the heater unit by providing a chamber for housing the substrate for heating and drying the substrate, and mounting a plurality of heater units in the chamber. Alternatively, in a heat treatment oven for drying, a heater frame disposed on the front, back, and both side surfaces of the heater unit and forming an outer frame of the heater unit, and a chamber furnace of the heat treatment oven for discharging air flow to the outside and an exhaust duct integrated into the heater frame.

According to an embodiment of the present invention, a lower portion of the exhaust duct may be formed with a plurality of exhaust holes for exhausting an airflow in the chamber furnace of the heat treatment oven through an exhaust passage.

According to an embodiment of the present invention, a reinforcing base is installed under the heater frame to connect and reinforce the heater frame and has a hollow exhaust passage, and the reinforcing base includes a chamber of the heat treatment oven. A number of exhaust holes may be formed to exhaust the airflow in the furnace through the exhaust channel.

According to an embodiment of the present invention, both sides of the heater frame may be assembled with joint brackets that assemble the heater frame and the exhaust duct so as to be divided into at least two.

According to an embodiment of the present invention, both side surfaces of the heater frame may be mounted with rolling bearings that move along slide tracks installed on the inner wall of the heat treatment oven.

According to an embodiment of the present invention, exhaust pipes for exhausting the exhaust airflow in the chamber furnace of the heat treatment oven to the outside are provided at both ends of the exhaust duct located at the front part and the rear part in the chamber furnace of the heat treatment oven. can be worn.

The present invention has the effects of simplifying the structure, reducing the manufacturing cost of the equipment, and improving the exhaust capacity by integrating the heater frame in the chamber of the heat treatment oven with the exhaust duct. .

In addition, the present invention reduces the number of parts by integrating the heater frame in the chamber of the heat treatment oven with the exhaust duct to shorten the heating time, and installs the exhaust hole in the center of the chamber. Therefore, there is an effect that it is possible to directly exhaust a portion having a relatively weak cooling performance.

In addition, the present invention enables sequential docking/undocking in the furnace of the heat treatment oven by configuring the heater frame integrated with the exhaust duct of the heat treatment oven into a plurality of divided structures. As a result, it is possible to reduce the space required for maintenance on the back side of the heat treatment oven on the side of the door, thereby facilitating the arrangement of the heat treatment oven equipment in the factory and improving workability.

In addition, according to the present invention, bearings are installed on the left/right sides of the split heater frame integrated with the exhaust duct of the heat treatment oven to perform docking/undocking in a sliding manner along the guide rail of the chamber. As a result, there is an effect that the installation workability of the heater unit is improved and the work time is shortened.

1 is an exemplary diagram showing a heat treatment oven; FIG. It is an exemplary view showing the front of a heat treatment oven. It is an exemplary view showing a plane of a heat treatment oven. 1 is an exemplary view showing one side of a heat treatment oven; FIG. BRIEF DESCRIPTION OF THE DRAWINGS It is an illustration figure of the heater unit integrated with an exhaust duct which concerns on one Embodiment of this invention, (a) is a perspective view, (b) is a one side view. BRIEF DESCRIPTION OF THE DRAWINGS It is an illustration figure of the heater unit integrated with an exhaust duct which concerns on one Embodiment of this invention, (a) is a top view, (b) is a front view. FIG. 4 is an exemplary diagram illustrating how the heater frame is divided in the exhaust duct-integrated heater unit according to the embodiment of the present invention; FIG. 4 is an exemplary view showing the bottom structure of the exhaust duct-integrated heater unit according to the embodiment of the present invention; FIG. 9 is a detailed view of the A part of FIG. 8 and is an exemplary view showing the exhaust state by the exhaust duct of the exhaust duct-integrated heater unit according to the embodiment of the present invention;

Hereinafter, the "exhaust duct-integrated heater unit for heat treatment oven" according to a preferred embodiment of the present invention will be described.

The heat treatment oven for heat-treating substrates has a rear panel for loading substrates to be heat-treated into stages provided in a chamber in which heaters are installed, and taking out heat-treated substrates from the chamber. The door and the front part can be provided with shutters respectively.

In addition, the heat treatment oven includes a chamber for accommodating substrates that need to be heated or dried, and by mounting a heater unit comprising a heating element in the chamber, the substrate is heated by the heat generated from the heater unit or moisture is removed. is configured to evaporate to dryness. Although it differs depending on the specifications, in general, an upper heat transfer plate and a lower heat transfer plate are installed in close contact with the upper and lower parts of the heating element that constitutes the heater so that the substrate heating process can be performed effectively. It is configured.

One side of the chamber of the heat treatment oven is equipped with an air supply port for inflowing fluid including process gas and an exhaust port for exhausting fluid in the chamber, a frame with lugs supporting and supporting the chamber, and a heating wire of the heater. and a conductive portion to which a large number of bus bars are connected to conduct current.

On the other hand, the heat treatment oven includes a heater unit inside the chamber to remove moisture remaining on the substrate during the heat treatment process of the substrate. demanding ability.

FIG. 1 is an exemplary diagram showing a heat treatment oven. FIG. 2 is an exemplary view showing the front of the heat treatment oven. FIG. 3 is an exemplary view showing the plane of the heat treatment oven. FIG. 4 is an exemplary view showing a side view of the heat treatment oven.

1 to 4 show the overall structure of the heat treatment oven 100, and are exemplary views of the heat treatment oven 100 including the chamber 200. FIG.

As shown in FIGS. 1 to 4, the heat treatment oven 100 is used to load the substrates to be heat treated into the stages provided in the chamber 200 and to take out the heat treated substrates from the chamber 200. , a door portion 110 on the rear portion, and a shutter portion 120 on the front portion.

In addition, the heat treatment oven 100 includes a chamber 200 containing substrates that need to be heated or dried. It is configured to heat the substrate by heat or evaporate moisture to dryness.

In addition, the heat treatment oven 100 has an air supply port for inflowing fluid including process gas and an exhaust port for exhausting the fluid in the chamber 200 on one side of the chamber 200 , and a frame with lugs supporting the chamber 200 . , and a conductive portion to which a large number of bus bars are connected for connecting the heating wires of the heater unit 300 and passing current.

In addition, although it depends on the specifications, in general, an upper heat transfer plate and a lower heat transfer plate are installed in close contact with the upper and lower parts of the pipe, which is the heating element that constitutes the heater unit 300, and the heating is performed in the chamber 200. It is configured to effectively perform the substrate heating process described above.

On the other hand, in FIGS. 1 and 4, unexplained reference numerals “210” and “220” indicate “inner and outer casings” of the chamber 200. As shown in FIG. An unexplained reference numeral '230' denotes a 'cooling jacket' that forms a cooling airflow in the chamber 200 and cools the chamber 200 with a uniform temperature distribution through a cooling airflow guideway formed inside the chamber 200. FIG. An unexplained reference numeral “240” indicates a “power supply unit” that protrudes a feedthrough and supplies power into the chamber 200 through this.

Incidentally, as shown in FIGS. 1 and 4, the basic structure constituting the heat treatment oven includes, for example, the structure of the chamber, the process gas supply and exhaust system, and the bus bar that supplies power to the heater unit. The configuration of the conductive portion and power supply portion is not directly relevant to the present invention. Further, since the basic configuration of the heat treatment oven is a well-known configuration that is irrelevant to the subject matter of the present invention, the description of the configuration and operation of the present invention will be omitted.

On the other hand, the heater unit 300, which functions as a heating element of the heat treatment oven, has a heating wire (heating coil) that generates heat by electric resistance built into a pipe (metal protective tube), and is filled with insulating powder of magnesium oxide (MgO). It can be a plate type heater packed together to insulate the hot wire and pipes.

As shown in FIGS. 1 to 4, the heater unit applied to the conventional heat treatment oven has a separate structure separated from the exhaust duct. ) has a structure in which an exhaust duct is installed only in the part.

However, as the size of the heat treatment oven equipment tends to increase and there is a tendency to require specifications that provide high-temperature performance, when exhaust ducts are installed only on the front and rear sides, that is, the shutter part 120 and the door part 110 side, the chamber Since the central part of the furnace cannot be cooled by the exhaust, a structural change is required to solve this problem.

In addition, when performing maintenance on the heater, the heater frame is pulled out to the back of the heat treatment oven, i.e., to the door side. Due to the need for space, it is difficult to make full use of the limited space provided by the factory.

In addition, conventional heaters and exhaust ducts that constitute a heat treatment oven are difficult to work with and take a long time to work because the size of the heater frame is large when the heater frame is structurally pulled out of the chamber. .

Accordingly, the present invention provides a heater frame integrated with an exhaust duct for a heat treatment oven, which simplifies the structure of the heat treatment oven and improves the exhaust capacity by integrating the heater frame and the exhaust duct.

In addition, the present invention provides a heater frame integrated with an exhaust duct in order to improve the equipment performance of a heat treatment oven, improve maintenance work efficiency, and shorten maintenance work time.

In addition, the present invention provides a heater frame integrated with an exhaust duct for a heat treatment oven, which can reduce the space required for maintenance by integrating the heater frame and the exhaust duct of the heat treatment oven.

In addition, the present invention provides a heater frame integrated with an exhaust duct for a heat treatment oven, which can improve maintenance workability by integrating the heater frame and the exhaust duct of the heat treatment oven.

Principal components of the heater unit of the heat treatment oven according to the present invention will be specifically described with reference to FIGS. 5 to 9. FIG.

The heat treatment oven 100 includes a chamber 200 that houses a substrate for heating and drying the substrate. A plurality of heater units 300 are mounted in the furnace of the chamber 200 to heat the substrate by heat generated from the heater unit 300. Or it can be configured so that it can be dried.

FIG. 5 is an exemplary view of a heater unit including an exhaust duct-integrated heater frame according to an embodiment of the present invention, where (a) is a perspective view and (b) is a side view. FIG. 6 is an exemplary view of a heater unit including an exhaust duct-integrated heater frame according to an embodiment of the present invention, where (a) is a plan view and (b) is a front view. FIG. 7 is an exemplary diagram illustrating the divided state of the heater frame in the heater unit including the exhaust duct-integrated heater frame according to one embodiment of the present invention. FIG. 8 is an exemplary view showing a bottom structure of a heater unit including an exhaust duct-integrated heater frame according to an embodiment of the present invention. FIG. 9 is a detailed view of part A in FIG. 8, and is an exemplary view showing the exhaust state by the exhaust duct of the exhaust duct-integrated heater unit according to the embodiment of the present invention.

The heater unit 300 according to the present invention, as shown in FIGS. 5 to 9, can be composed of heater frames 310 on the front, rear and both sides to form an outer frame.

In addition, exhaust ducts 311a, 311b, 312a, and 312b integrated with the heater frame 310 may be configured to exhaust the airflow in the chamber 200 of the heat treatment oven 100 to the outside.

For this reason, below the exhaust ducts 311a, 311b, 312a, and 312b, as shown in FIG. A drain hole 316 may be formed.

On the other hand, in FIGS. 5 to 9, the unexplained reference numeral "320" indicates a "heat transfer plate" which is heated by conduction of heat generated from an internal heating element (pipe).

In addition, as shown in FIG. 9, the lower portion of the heater frame 310 may be provided with a reinforcing base 310a that connects and reinforces the heater frame 310 and has a hollow exhaust passage 310b. Here, the reinforcing base 310a may be formed with a plurality of exhaust holes 310c for exhausting the airflow in the chamber 200 of the heat treatment oven 100 through the exhaust passage 310b.

As described above, when the integrated heater unit 300 in which the exhaust ducts 311a, 311b, 312a, and 312b are integrated with the heater frame 310, there is no need to install a separate exhaust duct in the heat treatment oven 100. , the number of parts is reduced accordingly, and the reduced number of parts requires less time for heating or cooling, which may be advantageous for manufacturing a high-performance heat treatment oven 100 .

In addition, by using the hollow exhaust flow path 310b formed in the reinforcing base 310a of the heater frame 310 as an exhaust duct, the exhaust air flow in the central part of the chamber 200 of the heat treatment oven 100, which is relatively vulnerable to cooling, can be quickly removed. can be exhausted directly to

7 and 8, the heater unit 300 including the exhaust duct-integrated heater frame according to the present invention has both sides of the heater frame 310 with the heater frame 310 and the exhaust ducts 312a and 312b. can be constructed by assembling with a joint bracket 313 assembled so as to be divided into at least two. Referring to FIG. 7, the heater frame 310 and the exhaust ducts 312a and 312b are assembled via four joint brackets 313 and divided into three.

As shown in FIG. 7, the joint bracket 313 can be assembled by bringing the corresponding surfaces of the heater frames 310 on both sides facing each other into close contact and then tightening them with separate fastening means (not shown). It can be easily disassembled by releasing the fastening means for fastening the joint bracket 313 at the time of disassembly.

Accordingly, the integral structure of the heater frame 310 and the exhaust ducts 311a, 311b, 312a, and 312b is divided (for example, into three sections), and the heater units 300 are sequentially docked/undocked to the chamber 200 of the heat treatment oven 100. Because it can be assembled and installed, the size of the maintenance space defined by the size of the heater frame 310 can be reduced.

5 and 6, the heater unit 300 including the heater frame integrated with the exhaust duct according to the present invention is installed on both sides of the heater frame 310 on the inner wall of the heat treatment oven 100. A rolling bearing 314 can be mounted that moves along the slide track.

As described above, the heater frame 310 is slid inside the chamber 200 along a guide track (not shown) installed inside the chamber 200 of the heat treatment oven 100 via the rolling bearings 314 mounted on both sides of the heater frame 310 . Since the heater unit 300 can be easily attached to the inside or conversely, it can be easily carried out, maintenance workability such as installation and maintenance of the heater unit 300 can be improved.

In addition, the heater unit 300 including the exhaust duct-integrated heater frame according to the present invention has exhaust ducts 311a and 311b positioned at the front and rear portions of the chamber 200 of the heat treatment oven 100. By installing an exhaust pipe 317 for exhausting the airflow in the furnace to the outside, the airflow in the chamber 200 is exhausted to the outside through the exhaust ducts 311a and 311b integrated with the heater frame 310 of the heater unit 300. can.

As described above, the exhaust duct-integrated heater unit 300 for a heat treatment oven according to the present invention integrates the heater frame 310 in the chamber 200 furnace of the heat treatment oven 100 with the exhaust ducts 311a, 311b, 312a, and 312b to form an integrated structure. By doing so, there is an advantage that the structure is simplified compared with the conventional one, and the manufacturing cost of the equipment is reduced and the exhaust capacity is improved.

Further, the exhaust duct-integrated heater unit 300 of the heat treatment oven according to the present invention is configured by integrating the heater frame 310 in the chamber 200 furnace of the heat treatment oven 100 with the exhaust ducts 311a, 311b, 312a, and 312b. Therefore, there is an advantage that the number of parts can be reduced to shorten the heating time, and the exhaust passage can be positioned in the center of the chamber 200 to enable direct exhaust to the part with relatively weak cooling performance. .

In addition, the exhaust duct-integrated heater unit 300 for a heat treatment oven according to the present invention integrates the heater frame 310 in the chamber 200 furnace of the heat treatment oven 100 with the exhaust ducts 311a, 311b, 312a, and 312b to form an integral structure, The heater frame 310 is divided into a plurality of divided structures to enable sequential docking/undocking in the furnace of the heat treatment oven 100, thereby creating a space required for maintenance on the rear door side of the heat treatment oven 100. can be reduced, which has the advantage of facilitating the arrangement of the heat treatment oven equipment in the factory and improving the installation and maintenance workability.

In addition, the exhaust duct-integrated heater unit 300 for a heat treatment oven according to the present invention integrates the heater frame 310 in the chamber 200 furnace of the heat treatment oven 100 with the exhaust ducts 311a, 311b, 312a, and 312b to form an integral structure, The heater frame 310 integrated with the exhaust ducts 311a, 311b, 312a, and 312b has bearings installed on both sides of the divided heater frame 310 so that the heater frame 310 can be docked/undocked along the guide rail of the chamber 200 in a sliding manner. Therefore, there is an advantage that the installation workability of the heater unit 300 is improved and the work time is shortened.

Although the present invention has been described with reference to an illustrated embodiment, it is not limited to this embodiment and can be practiced with modifications and changes without departing from the spirit of the invention. It should be understood that modifications are also included in the technical concept of the present invention.

REFERENCE SIGNS LIST 100 Heat treatment oven 200 Chamber 300 Heater unit 310 Heater frame 310a Reinforcement table 310b Exhaust channel 310c Exhaust hole 311a, 311b Exhaust duct (front/rear position of chamber)
312a, 312b Exhaust duct (located on side of chamber)
313 joint bracket 314 rolling bearing 315 exhaust flow path 316 exhaust hole 317 exhaust pipe

Claims (5)

A heat treatment oven comprising a chamber for housing a substrate for heating and drying the substrate, and mounting a plurality of heater units in the chamber to heat or dry the substrate by heat generated from the heater unit,
a heater frame disposed on the front surface, the rear surface, and both side surfaces of the heater unit and forming an outer frame of the heater unit;
an exhaust duct integrated with the heater frame to exhaust the airflow in the chamber furnace of the heat treatment oven to the outside ;
The heater frame can be divided into at least two parts ,
The heater frame is assembled with a joint bracket that assembles the heater frame and the exhaust duct so that the heater frame and the exhaust duct can be divided into at least two parts, and the joint brackets are provided on both side surfaces of the heater frame. An exhaust duct-integrated heater unit for a heat treatment oven, characterized by: 2. The exhaust of the heat treatment oven according to claim 1, wherein a plurality of exhaust holes are formed in the lower portion of the exhaust duct for exhausting the airflow in the chamber furnace of the heat treatment oven through the exhaust passage. Duct-integrated heater unit. A reinforcing base is attached to the lower part of the heater frame to connect and reinforce the heater frame, and has a hollow exhaust passage. 2. A heater unit integrated with an exhaust duct for a heat treatment oven as set forth in claim 1, wherein a plurality of exhaust holes are formed to exhaust air through. 2. The exhaust duct integrated type of heat treatment oven according to claim 1, wherein rolling bearings are mounted on both sides of the heater frame to move along a slide track installed on the inner wall of the heat treatment oven. heater unit. Exhaust pipes are installed at both ends of the exhaust duct positioned at the front and rear parts in the chamber furnace of the heat treatment oven for exhausting the exhaust airflow in the chamber furnace of the heat treatment oven to the outside. A heater unit integrated with an exhaust duct for a heat treatment oven according to claim 1.

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