KR101380138B1 - Chamber type drying apparatus for glass using ir steel heater - Google Patents

Abstract

The present invention relates to a chamber type glass drying apparatus using a steel heater, and in particular, a frame for forming a drying work space for LCD glass drying; A transfer unit for transferring the LCD glass into and out of the drying work space; A heater for heating the LCD glass; And a control unit for driving the transfer unit and the heater according to a set input dry condition, wherein the heater includes a metal plate and a resistor provided on one side of the metal plate to generate electric resistance heat. It characterized in that it is provided with a steel heater on the plate to irradiate the LCD.
As a result, work reliability can be improved by uniformly heating the heated object with high efficiency, and work efficiency can be improved by reducing the inconvenience of the operator due to light.

Description

CHAMBER TYPE DRYING APPARATUS FOR GLASS USING IR STEEL HEATER}

The present invention relates to a chamber-type glass drying apparatus using a steel heater, not only to implement a quick temperature response by the steel heater, but also to improve work efficiency as well as work reliability by heating the heating area uniformly. It relates to a chamber type glass drying apparatus using a heater.

In general, LCD glass corresponds to a substrate that is the base of a liquid crystal display device, and includes an initial cleaning process for removing foreign substances on the substrate, a PR coating process for applying a photosensitive material, an exposure process for transmitting light through a mask, and the like. Developing process to remove decomposed PR-Etching process to etch deposited film into PR shape-PR peeling process to remove PR with STRIP chemical solution-Inspection process to check for abnormality after completion of process-Deposition process to deposit thin film on substrate Processed through.

The cleaning step of removing impurities on the surface of the process is further included. After the cleaning step, a drying step is required to dry and remove the cleaning liquid.

This drying process is typically performed by drying a glass surface using a heating plate, that is, a heater that is a heating element, or by placing the heater in a chamber of high temperature and high pressure to inject and discharge hot air.

Conventionally, a halogen heater, a nichrome heater, etc. were used as a heater of such a drying apparatus. By the way, in the case of halogen heaters because a large amount of light is irradiated with heat, there is a problem to give a worker a sense of disgust or threat to reduce the work efficiency. Meanwhile, in the case of the nichrome heater, since the temperature resistance coefficient is relatively low, there is a problem in that it takes a lot of time to the ambient temperature for smooth operation.

In addition, both of them have a problem that it is difficult to heat a uniform temperature in the entire area of the LCD glass to be heated because it is a point or line irradiation method, not a surface irradiation method.

Accordingly, an object of the present invention is to improve the work reliability by heating the heated object uniformly with high efficiency, as well as to dry the LCD glass using a steel heater that can improve the work efficiency by reducing the inconvenience of the operator by the light To provide a device.

In addition, an object of the present invention, by providing a plate-shaped steel heater to be moved up and down or left and right with respect to the LCD glass not only can be quickly responded to the wrong atmosphere temperature, but also capable of selectively performing front heating as well as local heating. It is to provide an LCD glass drying apparatus using a steel heater.

The object is, according to one embodiment of the invention, the chamber to form a drying work space for drying the LCD glass therein; A transfer unit for transferring the LCD glass in the chamber; A heater for heating the LCD glass; And a control unit for driving the transfer unit and the heater according to a set input dry condition, wherein the heater includes a metal plate and a resistor provided on one side of the metal plate to generate electric resistance heat. It is achieved by a chamber-type glass drying apparatus using a steel heater provided with a steel heater on the plate to irradiate the LCD.

The steel heater may be provided in plural to be heated by dividing the heating area in the drying work space into two or more.

The apparatus may further include a temperature sensor provided adjacent to the LCD glass, and the controller may drive the steel heater to maintain a heating temperature at which the sensing temperature of the LCD glass is set based on a sensing result of the temperature sensor. have.

The heater may further include a vertical heater for moving the steel heater up and down in the plate direction of the LCD glass so as to adjust the gap between the steel heater and the LCD glass.

The heater may further include a horizontal heater for driving the horizontal heater in the horizontal direction of the plate glass of the LCD glass.

When the plurality of steel heaters are provided, the horizontal driving unit may drive the steel heaters to be independently movable in the front, rear, left, and right directions.

A heater accommodating part provided on one side of the chamber may be further provided to accommodate the steel heaters to be transferred to the outside of the transfer part.

The horizontal guide may further include a horizontal guide to guide the horizontal driving of the steel heater to have a straightness.

The steel heater may be provided at one or more of the top or bottom of the LCD glass.

It is provided on one side of the frame, it may further include a blower for generating dry air toward the LCD.

According to the LCD glass drying apparatus using the steel heater according to the present invention having the above-described structure, it is possible to improve the work reliability by heating the heated object uniformly with high efficiency, as well as to reduce the inconvenience of the operator by the light work efficiency Can improve.

In addition, by providing the plate-shaped steel heater to be moved up and down or left and right with respect to the LCD glass, not only can be quickly responded to the wrong atmosphere temperature, but also the front heating as well as local heating can be selectively performed.

1 is a block diagram of a chamber type glass drying apparatus using a steel heater according to an embodiment of the present invention;
2 is a front view and a side view of a chamber type glass drying apparatus using a steel heater according to an embodiment of the present invention;
3 and 4 are a plan view of the main portion of the steel heater side included in the chamber-type glass drying apparatus using a steel heater according to the present invention shown in FIG.
5 is shown in FIG.
A perspective view of an LCD glass drying apparatus using a steel heater according to an embodiment of the present invention,
6 is an enlarged view of a transfer part side of an LCD glass drying apparatus using the steel heater shown in FIG.
7 is a bottom side perspective view of the LCD glass drying apparatus using the steel heater shown in FIG.
8 and 9 are cross-sectional views showing the operating state of the steel heater according to the heater horizontal drive unit of the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Prior to the description, the present invention will be described for the drying object as an example of the LCD glass 100, but the application of the present invention is not limited to this, of course, can be applied to a wide range of applicable objects, such as a semiconductor substrate, of course, washing It is noted that it can be applied without limitation to various processes such as a deposition process and an etching process including a post drying process.

First, referring to Figures 1 and 2, the chamber type glass drying apparatus 1 using a steel heater according to an embodiment of the present invention, a chamber for forming a drying work space for drying the LCD glass 100 therein (5), a transfer unit 20 for transferring the LCD glass 100 in the chamber 5, a steel heater 30, and a control unit 40.

The chamber 5 has a separate drying work space of a predetermined size therein by the frame 10, as shown in FIG. 2.

Here, the chamber 5 may further include a loader 13 for loading the LCD glass 100 into the chamber 5, as shown in FIG. 3.

The transfer unit 20 transfers the LCD glass 100 into and out of the drying work space.

The transfer unit 20 is controlled by the control unit 40 according to the set drying conditions. That is, the transfer speed may be increased or decreased depending on the type and process of the LCD glass 100 to be dried.

Alternatively, the transfer unit 20 may continuously transfer the LCD glass 100 at a set speed, or stop the transfer for the drying operation when the LCD glass 100 is located at a predetermined position of the drying work space, When the drying operation time passes, the transfer may be started to discharge the dried LCD glass 100 to the outside of the drying working space.

The transfer unit 20 may be provided in various types. For example, as illustrated in FIG. 6, a plurality of transfer rollers 21 and a frame 10 which rotate and are located under the LCD glass 100 may be provided. It may be supported by a) and may include a transfer motor 23 for generating and transmitting a rotational force to the feed roller (21).

Here, the transfer structure of the transfer unit 20 may be provided in various kinds such as a belt type in addition to the above-described roller type.

The steel heater 30 is supported by the frame 10 to generate far-infrared rays and heat to heat and dry the LCD glass 100.

Steel heater 30 may be provided in a variety of types, for example, may be composed of stainless steel (metal) and glass and precious metal materials. That is, an insulating glass layer may be formed on a stainless substrate, and a resistor having a high resistance temperature coefficient and a terminal of a precious metal may be formed on the insulating glass layer. Finally, the resistor and the upper portion of the terminal may be sealed with a protective glass. In addition, the cleanliness can be further improved by finishing all of the above components with an overcoat glass.

Unlike the conventional halogen heater, the steel heater 30 has the advantage that it is possible to quickly and uniformly heat the heated object even in a vacuum or poor gas environment.

That is, as described above, the steel heater 30 has a higher resistance temperature coefficient than the conventional nichrome heater, so that the steel heater 30 can reach a desired set temperature (atmosphere temperature) within a short time.

In addition, the steel heater 30 is irradiated with far-infrared rays of high efficiency, because the surface irradiated rather than point or line has the advantage that the plate-shaped LCD glass 100 can be uniformly heated. That is, since the base (the stainless substrate in the above example) is a metal, the thermal conductivity is high, so that the temperature of the entire heater is uniform.

On the other hand, since the steel heater 30 does not generate light unlike conventional halogen heaters or nichrome heaters, the working environment is improved because it does not inconvenience the worker.

The steel heater 30 may be provided in various sizes and shapes, for example, may be provided corresponding to the size and shape of the LCD glass 100 to be transferred, or as shown in FIG. It may be divided and provided above.

The steel heater 30 may be provided corresponding to the size and shape of the LCD glass 100 to be heated, or may be provided corresponding to a predetermined portion to be heated.

In the latter case, as shown in Figure 3, the steel heater 30 is provided in a predetermined size is driven by the heater horizontal drive unit 35 to be described later moved to the front, rear, left and right to heat only a predetermined portion of the LCD glass 100 or The entire area may be heated sequentially.

In addition, the steel heater 30 may be provided in one module as a whole, but may be divided into two or more as shown in FIG. 4 or 5.

In the latter case, the steel heater 30 may be provided to be able to heat-dry only the entire surface or a predetermined portion of the LCD glass 100 in a state where all the divided portions are combined or individually.

That is, as shown in FIG. 5, the two steel heaters 30 may be combined to dry the front of the LCD glass 100, and as shown in FIG. 4, the LCD glass 100 may be separated from each other. Only a portion (eg, gap drying) may be heated.

In this case, each of the steel heaters 301 and 302 may be provided in various shapes or arrangements, and the horizontal moving direction may be provided independently.

Meanwhile, as shown in FIG. 2, two steel heaters 30 may be provided corresponding to the up and down centering around the transfer unit 20.

In addition, a reflection plate reflecting infrared rays and heat generated from the steel heater 30 may be further provided on the opposite side of the LCD glass 100 with respect to the steel heater 30.

The control unit 40 drives the transfer unit 20 and the heater according to the setting input dry conditions.

In this case, as illustrated in FIGS. 7 to 9, the temperature sensor 50 may be further provided adjacent to the LCD glass 100. The temperature sensor 50 may be provided in various ways as needed.

In this case, the controller 40 drives the steel heater 30 to maintain the heating temperature at which the sensing temperature of the LCD glass 100 is set based on the sensing result of the temperature detecting sensor 50.

The heater vertical driving unit 31 is provided in the frame 10 to move the steel heater 30 up and down in the plate surface direction of the LCD glass 100 so as to adjust the gap between the steel heater 30 and the LCD glass 100. Prepared. (Here, the plate direction means the normal direction of the plate surface in the plate-shaped LCD glass 100.)

The heater vertical driving unit 31 is a steel heater 30 and the object to be heated when the distance between the steel heater 30 and the object to be heated is too close or too far to influence the set heating temperature (atmosphere temperature). It can be driven for the purpose of spacing or approaching the spacing between water.

As a method of properly maintaining the heating temperature of the LCD glass 100, as described above, both methods of driving control of the steel heater 30 and interval control by the heater vertical driver 31 may be used.

In particular, the control by the heater vertical drive unit 31 is, for example, when the LCD glass 100 is overheated, the steel heater 30 can be quickly spaced apart from the LCD glass 100 to lower the temperature, so that the steel heater 30 ) It has the advantage that the response can be faster than the former method by driving.

On the other hand, the heater vertical drive unit 31 is the LCD glass by moving the steel heater 30 up and down in accordance with the thickness of the LCD glass 100 when the thickness of the LCD glass 100 introduced into the drying working space is varied The space | interval with 100 can be kept constant.

Here, the heater vertical driving unit 31 may be provided to be driven differently for each part when the steel heater 30 is provided in plurality of two or more.

The heater horizontal driving unit 35 is provided in the frame 10 so that the steel heater 30 moves horizontally in the horizontal direction of the plate surface of the LCD glass 100.

The heater vertical driver 31 and the heater horizontal driver 35 described above may be provided in two, if necessary, only one of them.

In this case, the heater horizontal driver 35 may drive the respective steel heaters 301 and 302 to be independently movable in the front, rear, and left and right directions.

As shown in FIG. 4 or FIG. 5, when the steel heaters 30 are provided in two to allow mutual access and separation in the transverse direction of the LCD glass 100, the heater horizontal driving part 35 is Corresponding to each steel heater 30 may be provided on both sides of the frame 10, respectively.

The horizontal guide 36 guides the steel heater 30 to move with straightness when the steel heater 30 is horizontally driven.

As shown in FIG. 5, since the steel heater 30 is driven left and right along the horizontal guide 36 disposed in parallel with the heater horizontal driving part 35, the linearity of movement is improved.

Meanwhile, as shown in FIGS. 8 and 9, the heater accommodating part 37 may be further provided at both sides of the frame 10 to accommodate the two steel heaters 30 moved in the spaced apart direction.

That is, when the steel heater 30 is used by the heater horizontal driving unit 35, as shown in FIG. 8, the heater horizontal driving unit 35 is withdrawn from the heater receiving unit 37 and positioned above the LCD glass 100. When not using 30, as shown in FIG. 9, it may be accommodated in the heater accommodating portion 37.

As described above, when the steel heater 30 is accommodated in the heater accommodating portion 37, the steel heater 30 can be protected from external shocks, thereby prolonging the life of the product and preventing failure due to external force. can do.

Here, the steel heater 30 is not provided only in any of the fully accommodated or withdrawn state in the heater accommodating portion 37, in the case of drying a part of the LCD glass 100, such as gap drying, the steel heater ( Of course, only a part of the operation 30 may be operated in the state accommodated in the heater accommodating portion 37.

The blower 60 is provided at one side of the frame 10 and generates dry air toward the LCD glass 100.

This, in order to be able to dry the LCD glass 100 in a breeze method, in addition to the steel heater 30 of the heat drying method by the above-described radiant heat.

The blower 60 may be fixed at various positions of the frame 10 and may be provided in two or more as necessary.

1: Chamber type glass drying device using steel heater
10 frame 20 transfer part
21: feed roller 23: feed motor
30: steel heater 31: heater vertical drive unit
35: heater horizontal drive unit 36: horizontal guide
37: heater accommodating part 38: heater cover
40: control unit 50: temperature sensor
60: blower 100: LCD glass

Claims (10)

A chamber forming a drying work space for drying the LCD glass therein by the frame;
A transfer unit for transferring the LCD glass in the chamber;
A steel heater on a plate for heating the LCD glass;
A heater vertical driving part for moving the steel heater up and down in the plate surface direction of the LCD glass;
A heater horizontal driving part for moving the steel heater in a horizontal direction of the plate surface direction;
A heater accommodating part provided at one side of the chamber and receiving the steel heater partially or entirely outside the transfer part;
A temperature sensor provided adjacent to the LCD glass;
And a controller configured to drive the heater vertical driving unit to approach and space the steel heater to the LCD glass so that the sensing temperature of the LCD glass maintains a set heating temperature. The method of claim 1,
The steel heater is a chamber type glass drying apparatus using a steel heater, characterized in that a plurality of heaters are provided to be divided into two or more heating area in the drying work space to be heated. delete delete delete 3. The method of claim 2,
When the steel heater is provided in plural, the heater horizontal drive unit chamber type glass drying apparatus using a steel heater, characterized in that for driving each of the steel heater to move independently in the front and rear or left and right directions. delete The method of claim 1,
Chamber-type glass drying apparatus using a steel heater, characterized in that it further comprises a horizontal guide to guide the horizontal drive of the steel heater to have a straightness. The method of claim 1,
The steel heater is a chamber type glass drying apparatus using a steel heater, characterized in that provided in one or more of the upper or lower portion of the LCD. The method of claim 1,
The chamber-type glass drying apparatus using a steel heater is provided on one side of the frame, further comprising a blower for generating dry air toward the LCD.

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