JP2012245669A - Laminating apparatus, and laminating method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laminating apparatus and a laminating method for preventing warpage of a workpiece due to preheat of a preheating part.SOLUTION: The laminating apparatus includes: a preheating part that preheats a workpiece; and a lamination part that laminates the workpiece preheated by the preheating part. The preheating part includes: a preheater; a plurality of support members that support the workpiece so that the workpiece is positioned above the preheater; and a support controller that moves the support members up and down so as to form a uniform temperature distribution in the workpiece.

Description

  The present invention relates to a laminating apparatus and a laminating method.

  In a conventional laminating apparatus, a conveying conveyor is provided at the front of the laminating apparatus main body, and a workpiece on the conveying conveyor is carried into the laminating apparatus main body. The laminating apparatus main body is divided into an upper chamber portion and a lower chamber portion, and a workpiece is placed on a heater plate of the lower chamber with the upper chamber opened. In the workpiece, a sheet-shaped resin sealing material, a solar battery cell, and a sheet-shaped resin material are laminated on the lowermost glass substrate, and a protective sheet material is disposed on the uppermost layer.

  In the laminating apparatus main body, the upper chamber and the lower chamber are overlapped, and the workpiece is heated while reducing the pressure inside. Thereafter, the inside of the upper chamber is opened to the atmosphere, whereby the diaphragm provided in the upper chamber expands, and the solar cell module as a workpiece is clamped on the heater plate. By depressurizing while melting the resin on the heater plate, the laminating process is completed by hermetically sealing with the resin material while removing the air bubbles inside the workpiece.

  Patent Document 1 describes that in a laminating apparatus, a loaded solar cell panel is placed on the upper ends of a plurality of support pins that protrude upward from the upper surface of the heater panel. Thereby, according to patent document 1, since it is possible to heat gradually in the state which lifted the solar cell panel above the heater panel, the glass generated when only the lower surface side of the solar cell panel is heated suddenly. It is said that warpage can be reduced.

  In Patent Document 2, in a laminating apparatus, before carrying a solar cell panel into a laminating unit that performs a laminating process, the supplying unit preheats the solar cell panel by irradiating infrared rays from above the solar cell panel with an infrared heater. Is described. Thereby, according to patent document 2, since the solar cell panel is preheated before carrying in to a laminate part, the temperature gradient inside the solar cell panel which generate | occur | produces when it mounts on the heater panel of a laminate part is small. Thus, the occurrence of warpage of the solar cell panel due to the temperature difference between the upper surface and the lower surface of the solar cell panel can be reduced.

  Patent Document 3 describes that in a laminating apparatus, a workpiece to be waited before being carried into a laminating section is preheated by a plurality of preheating heaters arranged on a carry-in conveyor. Specifically, the temperature of the preheating heater at both ends is set high with respect to the width direction of the carry-in conveyor, and the temperature of the preheat heater at the center is set low, and the temperature of the feed preheat heater is set high with respect to the transfer direction of the carry-in conveyor. It is supposed that the temperature of the preheating heater on the laminate side is set low. Thereby, according to patent document 3, it is supposed that generation | occurrence | production of the curvature of the to-be-processed object at the time of the heating in a lamination part can be suppressed markedly compared with the former.

Registered Utility Model No. 3037201 JP-A-10-95089 JP 2008-72056 A

  On the other hand, in a laminating apparatus that seals a solar cell module with a resin, when the solar cell module as a workpiece is rapidly heated by a heater of the laminating portion, an upward warp occurs in the glass substrate in the solar cell module. In order to suppress this warpage, a preheating part is provided in the previous stage of the laminating part, and the workpiece is preheated in advance by the preheating part and then carried into the laminating part.

  At this time, when the set temperature of the plurality of heating units in the preheating heater arranged on the transport conveyor in the preheating unit is uniform as the size of the solar cell module as the workpiece increases, the glass substrate in the solar cell module A temperature difference may occur between the central portion and the outer peripheral portion of the solar cell module, and the outer peripheral portion of the solar cell module may be lifted from the conveyor. That is, the workpiece (solar cell module) may already be warped even by preheating by the preheating unit.

  If the workpiece (solar cell module) is heated and narrowed in the laminate while warping remains, the glass substrate will be subjected to a force to correct the warp, and the solar cell module will be damaged such as glass substrate breakage. There is a tendency for damage to occur. Moreover, the partial heating temperature shortage of the edge part of a solar cell module may generate | occur | produce, and the non-adhesion etc. between glass and resin and a protective film may arise.

  This invention is made | formed in view of the above, Comprising: It aims at obtaining the laminating apparatus and the laminating method which can suppress the curvature of the workpiece resulting from the preheating by a preheating part.

  In order to solve the above-described problems and achieve the object, a laminating apparatus according to one aspect of the present invention provides a preheating unit for preheating a workpiece and the workpiece preheated by the preheating unit. A pre-heater, a plurality of support members for supporting the work piece so that the work piece is positioned above the pre-heat heater, and the work piece. It has a support control part which raises and lowers each of these support members so that temperature distribution in a thing may become uniform.

  According to the present invention, since the contact / contact between the workpiece and the preheating heater is controlled by a plurality of support members, it is possible to reduce the workpiece being rapidly heated in the preheating portion, and the workpiece due to the rapid heating can be reduced. Can reduce the non-uniformity of the temperature distribution and suppress the warpage of the workpiece. That is, it is possible to suppress warpage of the workpiece due to preheating by the preheating unit.

FIG. 1 is a diagram showing a configuration of a workpiece in the first embodiment. FIG. 2 is a diagram illustrating a configuration of the laminating apparatus according to the first embodiment. FIG. 3 is a diagram showing a configuration of the preheating unit in the first embodiment. FIG. 4 is a diagram showing the configuration of the preheating unit in the first embodiment. FIG. 5 is a diagram showing a configuration of the preheating unit in the first embodiment. FIG. 6 is a diagram showing the configuration of the laminate section in the first embodiment. FIG. 7 is a diagram showing a configuration of a laminate unit in the second embodiment.

  Embodiments of a laminating apparatus according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments. The present invention is not limited to the following description, and can be appropriately changed without departing from the gist of the present invention. In the drawings shown below, the scale of each member is different from the actual scale for easy understanding.

Embodiment 1 FIG.
A laminating apparatus 100 according to the first embodiment will be described.

  The laminating apparatus 100 preheats the workpiece 10 before laminating the workpiece 10, and has a function of making the in-plane temperature distribution of the workpiece 10 uniform during the preheating. The workpiece 10 handled by the laminating apparatus 100 is a solar cell module, for example, and has a configuration as shown in FIG.

  In the workpiece 10 (for example, a solar cell module), the glass substrate 11, the resin sealing material 12, the solar cell array 15, the resin sealing material 16, and the protective sheet material 17 are laminated | stacked in order. The resin sealing material 12 has a sheet shape, and is formed of a material that can be laminated, such as ethylene vinyl acetate (EVA). In the solar cell array 15, solar cell strings in which a plurality of solar cells 13 are connected in series via a plurality of lead wires 14 are arranged in the depth direction in FIG. 1, for example. The resin sealing material 16 has a sheet shape and is formed of a material that can be laminated, such as ethylene vinyl acetate (EVA). The protective sheet material 17 is made of, for example, polyethylene resin. In the workpiece 10, for example, the glass substrate 11 is the lowermost layer, and the protective sheet material 17 is the uppermost layer.

  As shown in FIG. 2, the laminating apparatus 100 includes a carry-in unit (preheating unit) 120, a laminate unit 130, and a carry-out unit 140. FIG. 2 is a front view of the laminating apparatus 100. The carry-in unit 120 is arranged on the left side of the laminate unit 130 in FIG. 2 and carries the workpiece 10 to be laminated into the laminate unit 130. The unloading unit 140 is arranged on the right side of the laminating unit 130 in FIG. 2 and unloads the laminated workpiece 10 from the laminating unit 130.

  Specifically, the carry-in unit 120 rotates the driving rollers 122 and 123 of the carry-in conveyor CV1 to carry the workpiece 10 before processing onto the carry belt 131 of the conveyer CV2 in the laminate unit 130 by the carry belt 121. . The unloading unit 140 rotates the driving rollers 142 and 143 of the unloading conveyor CV3 and unloads the processed workpiece 10 from the laminating unit 130 via the conveying belt 141. In the carry-in unit 120, a plurality of carry-in conveyors CV1 may be arranged according to the number of workpieces 10 to be laminated at a time, and the workpieces 10 are supplied to the respective carry-in conveyors CV1 before being supplied to the laminate unit 130. The preheater 126 capable of preheating is disposed, and the temperature of the preheater 126 can be set individually for each conveyor.

  FIG. 3 is a front view of one unit of the carry-in conveyor CV1. The workpiece 10 is preheated before being carried into the laminating unit 130 by the preheating heater 126 provided at the lower portion of the carry-in conveyor CV1. That is, the warp of the glass substrate 11 of the workpiece 10 in the rapid heat treatment by the heater plate 136 of the laminate 130 is alleviated, and the damage of the glass substrate 11 and the solar cell 13 in the workpiece 10 is suppressed. For this purpose, the preheater 126 preheats the workpiece 10 before laminating. The preheating heater 126 includes a plurality of heating units 1261-1 to 1261-p (see FIG. 4).

  Also in this preheating step, when heating is performed at a uniform temperature setting on the plurality of heating units 1261-1 to 1261-p in the preheating heater 126, the central portion and the outer peripheral portion of the glass substrate 11 of the workpiece 10 are obtained. There is a tendency for a temperature difference to occur and an upward warping to occur. Further, among the plurality of carry-in conveyors CV1, there is a tendency that a temperature difference occurs between the workpiece 10 on the leading carry-in conveyor CV1 and the workpieces 10 on the intermediate and final carry-in conveyors CV1a and CV1b. .

  Therefore, in the present embodiment, a plurality of support members 127-1 to 127-k (see FIG. 4) are provided as a mechanism for lifting the workpiece 10 from the preheater 126. The plurality of support members 127-1 to 127-k are arranged, for example, two-dimensionally so that the workpiece 10 can be stably supported. Each support member 127 has, for example, a pin shape, and can move up and down in a hole provided in the preheater 126. That is, the carry-in part (preheating part) 120 includes the carry-in conveyor CV1, the preheat heater 126, and the plurality of support members 127-1 to 127-k, and drives the plurality of support members 127-1 to 127-k. It also has a support control unit 125 for controlling.

  The support control unit 125 can adjust the contact / non-contact between the workpiece 10 and the preheater 126 so that the temperature of the workpiece 10 does not rise above a predetermined temperature. This predetermined temperature is experimentally acquired in advance, for example, assuming that the non-uniformity of the temperature distribution in the workpiece 10 falls within an allowable range. 3A shows a state in which the support control unit 125 lowers all of the plurality of support members 127, and FIG. 3B shows a state in which the support control unit 125 raises all of the plurality of support members 127. Show. By controlling the contact / non-contact state between the workpiece 10 and the preheater 126 by the support control unit 125, the uneven temperature distribution of the workpiece 10 on the glass substrate 11 can be alleviated, and the laminate unit 130 can be moved at once. A temperature difference between a plurality of workpieces 10 to be carried in can also be reduced.

  Specifically, as shown in FIG. 4, the plurality of support members 127-1 to 127-k are arranged in a plurality of holes formed at appropriate intervals on the entire surface of the preheating heater 126. In addition, temperature sensors 129-1 to 129-k (see FIG. 5) are provided at the tips of the support members 127-1 to 127-k. When the temperature of the workpiece 10 rises above a predetermined temperature, the support control unit 125 raises the support members 127-1 to 127-k and lifts the workpiece 10 from the preheating heater 126 so as to be non-contact. When the temperature of the workpiece 10 falls below a predetermined temperature, the support members 127-1 to 127-k are lowered to bring the workpiece 10 into contact with the upper surface of the preheater 126. Thereby, it can adjust so that the nonuniformity of the temperature distribution in the to-be-processed object 10 may be reduced. Note that the support control unit 125 may use an average value of the temperature measured by the plurality of temperature sensors 129-1 to 129-k as the temperature of the workpiece 10, or a plurality of temperature sensors 129-1 to 129-. The measurement temperature of one temperature sensor selected from k may be used.

  Further, the support control unit 125 grasps the correspondence relationship between the plurality of temperature sensors 129-1 to 129-k and the plurality of support members 127-1 to 127-k, and the plurality of temperature sensors 129-1 to 129. The plurality of support members 127-1 to 127-k can be individually moved up and down according to the measured temperature by −k. As a result, the support control unit 125 can bring the low temperature portion of the workpiece 10 into contact with the preheater 126 and allow the high temperature portion of the workpiece 10 to be in contact with the preheater 126. The temperature distribution in the workpiece 10 can be adjusted to be reduced.

  As shown in FIG. 4, the preheating heater 126 is divided into a plurality of heating units 1261-1 to 1261-p. The plurality of heating units 1261-1 to 1261-p are divided (for example, two-dimensionally) so as to correspond to the plurality of temperature sensors 129-1 to 129-k, for example. The carry-in unit (preheating unit) 120 includes a temperature control unit 128 illustrated in FIG. 5 as a mechanism that can individually set the preheating heater temperatures by the plurality of heating units 1261-1 to 1261-p. The temperature control unit 128 determines the temperature distribution unevenness of the glass substrate 11 based on the measurement results obtained by the plurality of temperature sensors 129-1 to 129-k before the temperature distribution of the glass substrate 11 becomes uneven and the warpage increases. It is possible to individually control the preheating heater temperature by the plurality of heating units 1261-1 to 1261-p so as to correct. For example, the temperature control unit 128 can set the outer peripheral portion of the glass substrate 11 to a high temperature and the central portion of the glass substrate 11 to a low temperature setting.

  Specifically, as shown in FIG. 5, since the support member 127 is in contact with the workpiece 10 lifted from the preheating heater 126, the tip portions of the plurality of support members 127-1 to 127-k Are embedded with temperature sensors 129-1 to 129-k, respectively. The temperature sensors 129-1 to 129-k are, for example, thermocouples or resistance thermometers.

  The temperature control unit 128 includes a plurality of temperature control devices 1282-1 to 1282-k corresponding to the plurality of temperature sensors 129-1 to 129-k, and supervises the plurality of temperature control devices 1282-1 to 1282-k. A main controller 1281 for controlling the system. The plurality of temperature control devices 1282-1 to 1282-k obtain measurement temperatures from the measurement results obtained by the plurality of temperature sensors 129-1 to 129-k and supply them to the main control device 1281. The main controller 1281 grasps the correspondence between the plurality of temperature sensors 129-1 to 129-k and the plurality of heating units 1261-1 to 1261-p, and the plurality of temperature sensors 129-1 to 129-k. The preheating heater temperature by the plurality of heating units 1261-1 to 1261-p can be individually set according to the measured temperature.

  Thereby, the temperature control unit 128 sets the preheating heater temperature by the heating unit corresponding to the low temperature portion in the workpiece 10 to be high, and sets the preheating heater temperature by the heating unit corresponding to the high temperature portion in the workpiece 10. It can also be set low, and can be adjusted so that non-uniformity of the temperature distribution in the workpiece 10 is reduced. That is, different temperatures for each location of the workpiece 10 measured by the plurality of temperature sensors 129-1 to 129-k are used as information for determining the set temperatures of the plurality of heating units 1261-1 to 1261-p. Feedback is provided to the main controller 1281 via the temperature controller 1282. This makes it possible to set the preheating temperature by the main controller 1281 that cancels and corrects the warpage of the glass substrate 11 of the workpiece 10 and corrects the warpage of the workpiece 10 in the preheating process.

  Next, laminating processing in the laminating unit 130 will be described with reference to FIG.

  The laminating unit 130 performs laminating of the workpiece 10. The laminating unit 130 is divided into an upper chamber unit 132 and a lower chamber unit 133. With the upper chamber unit 132 opened as shown in FIG. 6A, the laminating unit 130 is placed on the heater plate 136 of the lower chamber unit 133. The workpiece 10 is carried in by the conveyor belt 131.

  Next, the upper chamber portion 132 and the lower chamber portion 133 are overlapped, and the workpiece 10 is heated while the inside is decompressed via the intake / exhaust port 1321 and the intake / exhaust port 1335. Thereafter, the upper chamber portion 132 is opened to the atmosphere, whereby the diaphragm sheet 1323 provided in the upper chamber portion 132 is expanded as shown in FIG. 6B, and the workpiece 10 (solar cell module) is the heater plate 136. It is clamped via the upper sheet 1324 above. At this time, if the above-mentioned preheating is applied, the warpage of the workpiece 10 can be sufficiently relaxed before the laminating process, so that the glass substrate 11 of the workpiece 10 is damaged, the sun inside the workpiece 10 is sunken. Damage to the battery cell 13 can be suppressed. Further, it is possible to prevent unbonding between the glass substrate 11, the resin sealing material 12, and the protective sheet material 17 due to a partial heating temperature shortage at the end of the glass substrate 11 of the workpiece 10. Thereby, since the state of the workpiece 10 before laminating can be kept constant, for example, the quality after laminating can be stabilized.

  By depressurizing while melting the resin sealing material 12 on the heater plate 136, the resin sealing material 12 is hermetically sealed while removing bubbles inside the workpiece 10, and the laminating process is completed.

  As described above, in the first embodiment, a plurality of support members (for example, a plurality of support pins) 127 that can move the workpiece 10 in the preheating position up and down are provided, and the workpieces are processed by the plurality of support members 127. The contact / contact of the object 10 and the preheater 126 is controlled. Thereby, it can reduce that the workpiece 10 is rapidly heated in the carrying-in part (preheating part) 120, can reduce the nonuniformity of the temperature distribution in the workpiece 10 due to rapid heating, and can warp the workpiece 10. Can be suppressed. That is, warpage of the workpiece 10 due to preheating by the carry-in unit (preheating unit) 120 can be suppressed.

  In the first embodiment, the temperature sensor 129 is provided at the tip of each support member 127, the temperature of the workpiece 10 is measured at a plurality of locations, and the workpiece 10 is measured according to the measured temperatures at the plurality of locations. The set temperature of the plurality of heating units 1261-1 to 1261-p divided from each other in the preheating heater 126 is controlled for each place so as to correct the in-plane temperature non-uniformity. Thereby, the uneven temperature distribution in the workpiece 10 can be reduced, and the warpage of the workpiece 10 can be suppressed. That is, warpage of the workpiece 10 due to preheating by the carry-in unit (preheating unit) 120 can be suppressed.

  In addition, the preheating heater used for preheating is not limited to what is heated from the lower side of a workpiece, For example, what is heated from the upper side of a workpiece (for example, a lamp heater etc.), You may heat from the upper and lower sides of a to-be-processed object.

Embodiment 2. FIG.
Next, a laminating apparatus according to the second embodiment will be described. Below, it demonstrates focusing on a different part from Embodiment 1. FIG.

  In the laminating apparatus according to the second embodiment, a method is provided in which a support member is provided inside the heater, a temperature sensor is provided at the tip of the support member, the temperature of the workpiece 10 is measured, and the heater set temperature near the measurement location is controlled. The mechanism is also applied to the heater plate 136i of the laminate part 130i.

  Specifically, the heater plate 136i is divided into a plurality of heating units 1361i-1 to 1361i-p. The laminating unit 130i includes a temperature control unit 138i illustrated in FIG. 7 as a mechanism that can individually set the heater temperatures by the plurality of heating units 1361i-1 to 1361i-p. The temperature control unit 138i determines the temperature distribution unevenness of the glass substrate 11 based on the measurement results of the plurality of temperature sensors 139i-1 to 139i-k before the temperature distribution of the glass substrate 11 becomes uneven and the warpage increases. The heater temperatures by the plurality of heating units 1361i-1 to 1361i-p can be individually controlled so as to be corrected.

  Specifically, as illustrated in FIG. 7, since the support member 137 i is in contact with the workpiece 10, the temperature sensors 139 i are respectively provided at the tip portions of the plurality of support members 137 i-1 to 137 i -k. -1 to 139i-k are embedded. The temperature sensors 139i-1 to 139i-k are, for example, thermocouples or resistance thermometers.

  The temperature control unit 138i has a plurality of temperature control devices 1382i-1 to 1382i-k corresponding to the plurality of temperature sensors 139i-1 to 139i-k, and supervises the plurality of temperature control devices 1382i-1 to 1382i-k. The main controller 1381i is controlled in an automatic manner. The plurality of temperature control devices 1382i-1 to 1382i-k obtain measurement temperatures from the measurement results obtained by the plurality of temperature sensors 139i-1 to 139i-k and supply them to the main control device 1381i. The main controller 1381i grasps the correspondence between the plurality of temperature sensors 139i-1 to 139i-k and the plurality of heating units 1361i-1 to 1361i-p, and the plurality of temperature sensors 139i-1 to 139i-k. The preheating heater temperature by the plurality of heating units 1361i-1 to 1361i-p can be individually set according to the measured temperature.

  Thereby, the temperature control unit 138i sets the heater temperature by the heating unit corresponding to the low temperature part in the workpiece 10 and sets the heater temperature by the heating unit corresponding to the high temperature part in the workpiece 10 low. It is also possible to adjust the temperature distribution so that the non-uniformity of the temperature distribution in the workpiece 10 is reduced. That is, different temperatures for each location of the workpiece 10 measured by the plurality of temperature sensors 139i-1 to 139i-k are used as information for determining the set temperatures of the plurality of heating units 1361i-1 to 1361i-p. Feedback is made to the main controller 1381i via the temperature controller 1382i. This makes it possible to set the heating temperature by the main controller 1381i so as to cancel and correct the warpage of the glass substrate 11 of the workpiece 10 and to reduce the warpage of the workpiece 10 even in the laminating process. .

  As described above, the laminating apparatus according to the present invention is useful for laminating a solar cell module.

DESCRIPTION OF SYMBOLS 10 Workpiece 11 Glass substrate 12 Resin sealing material 13 Solar cell 14 Lead wire 15 Solar cell array 16 Resin sealing material 17 Protection sheet material 100 Laminating apparatus 120 Carry-in part 121 Conveying belt 122, 123 Drive roller 125 Support control part 126 Preheating heater 127-1 to 127 -k Support member 128 Temperature control unit 129-1 to 129-k Temperature sensor 130 Laminating unit 131 Conveying belt 132 Upper chamber unit 133 Lower chamber unit 136 Heater plate 140 Unloading unit 141 Conveying belt 142, 143 Driving roller 1261-1 to 1261-p Heating unit 1282-1 to 1282-k Temperature controller CV1, CV1a, CV1b Carry-in conveyor CV2 Carry conveyor CV3 Carry-out conveyor

Claims (6)

A preheating part for preheating the workpiece;
A laminating unit for laminating the workpiece preheated by the preheating unit;
With
The preheating part is
A preheater,
A plurality of support members for supporting the workpiece so that the workpiece is positioned above the preheating heater;
A support control unit configured to raise and lower each of the plurality of support members so that non-uniformity of temperature distribution in the workpiece is reduced;
A laminating apparatus comprising: A preheating part for preheating the workpiece;
A laminating unit for laminating the workpiece preheated by the preheating unit;
With
The preheating part is
A preheating heater having a plurality of heating sections;
A plurality of support members for supporting the workpiece so that the workpiece is positioned above the preheating heater;
A plurality of temperature sensors for measuring the temperatures of the tips of the plurality of support members;
Based on the measurement results by the plurality of temperature sensors, a temperature control unit that controls the plurality of heating units so that non-uniformity of the temperature distribution in the workpiece is reduced;
A laminating apparatus comprising: A preheating part for preheating the workpiece;
A laminating unit for laminating the workpiece preheated by the preheating unit;
With
The laminate part is
A heater having a plurality of heating units;
A plurality of support members for supporting the workpiece such that the workpiece is positioned above the heater;
A plurality of temperature sensors for measuring the temperatures of the tips of the plurality of support members;
Based on the measurement results by the plurality of temperature sensors, a temperature control unit that controls the plurality of heating units so that non-uniformity of the temperature distribution in the workpiece is reduced;
A laminating apparatus comprising: A preheating process for preheating the workpiece;
A laminating step for laminating the workpiece preheated in the preheating step;
With
The preheating step
Supporting the workpiece with a plurality of support members such that the workpiece is positioned above a preheating heater;
Measuring the temperatures of the tips of the plurality of support members;
Based on the measured result, the step of raising and lowering each of the plurality of support members so that the non-uniformity of the temperature distribution in the workpiece is reduced,
A laminating method characterized by comprising: A preheating process for preheating the workpiece;
A laminating step for laminating the workpiece preheated in the preheating step;
With
The preheating step
Supporting the workpiece with a plurality of support members such that the workpiece is positioned above a preheating heater having a plurality of heating units;
Measuring the temperatures of the tips of the plurality of support members;
Controlling the plurality of heating units based on the measured result so that non-uniformity of temperature distribution in the workpiece is reduced; and
A laminating method characterized by comprising: A preheating process for preheating the workpiece;
A laminating step for laminating the workpiece preheated in the preheating step;
With
The laminating step includes
Supporting the workpiece with a plurality of support members such that the workpiece is positioned above a heater having a plurality of heating units;
Measuring the temperatures of the tips of the plurality of support members;
Controlling the plurality of heating units based on the measured result so that non-uniformity of temperature distribution in the workpiece is reduced; and
A laminating method characterized by comprising:

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