KR102081801B1 - Sheath heater sealing device of heat treatment oven chamber - Google Patents

Abstract

Disclosed is a sheath heater sealing device of a heat treatment oven. The sheath heater sealing device may comprise: a heating wire built in a hollow of an external pipe and generating heat by electric resistance; and a sheath heater installed in a chamber of a heat treatment oven having a sealing unit filled with an insulating material on the hollow of the external pipe and sealing both ends of the external pipe to insulate the heating wire and external pipe. The sealing unit includes a terminal block connected along the end of the external pipe and a ceramic insulation plug connected and installed along the terminal block.

Description

Sheath heater sealing device of heat treatment oven chamber

The present invention relates to a sealing apparatus disposed in a chamber of a heat treatment oven to seal a sheath heater of a heat treatment oven for heating and drying a substrate.

BACKGROUND ART Flat panel displays classified into organic light emitting display devices and LCD glass substrates are used in various types of image devices such as TVs, mobile phones, and monitors. The organic light emitting diode display and the LCD glass substrate are one of the next generation display devices, and are being applied to various fields. In recent years, flat panel display manufacturing technology in this field continues to develop technologies for improving performance and yield. In manufacturing a typical organic light emitting display device or LCD glass substrate of a flat panel display (hereinafter, referred to as a 'substrate to be dried' or 'substrate'), temperature management and temperature uniformity are necessary for maintaining a good substrate quality and yield. It is becoming. For example, in the organic light emitting display device manufacturing process, since an organic material layer is formed on the surface of a substrate to contain a predetermined amount of water, a drying process for evaporating water is required. In the LCD glass substrate manufacturing process, a cleaning process is performed before the photosensitive film is coated on the substrate surface, but after the cleaning process, a heat drying process for removing moisture is required. After the photoresist is coated on the LCD glass substrate, it is subjected to an exposure and development process. Before this exposure and development process, a pre-baking process and a post-baking process are required after the exposure and development process. have. In the substrate manufacturing process, most of them go through a heating and drying process. Moisture generated in the manufacturing process of the substrate is removed by heat drying by using an infrared ray or put into a chamber of a heat treatment oven including a heater having a heating element such as a sheath heater. In this regard, the 'LCD glass oven chamber' is proposed in Korean Patent Publication No. 10-1238560 and Korean Patent Publication No. 10-2013-0028322.

The conventional sheath heater, which is placed in a heat treatment oven chamber and functions as a heating element, has a heating wire (heating coil) that generates heat with electric resistance in an external pipe (metal protective tube) in a coil shape, and filled with magnesium oxide (MgO), which is an insulating powder. Insulate the heating wire and the outer pipe and treat both ends with sealing to maintain the performance of insulation and heater, and manage the temperature below a predetermined temperature to expose the sealing part to the outside of the chamber to prepare for breakdown. Although supply terminals are connected to each other, capa is reduced, space is secured, the number of facilities and parts are increased, and the size of the substrate to be dried increases the limit of expanding the thermal region of the heating element. Accordingly, there is a demand for a sheath heater that can be used in a chamber of a heat treatment oven and that can be sealed without breakdown even at a high temperature.

Patent Literature 1. Domestic Registered Patent Publication 10-1238560 (Publication date February 28, 2013)

Patent Document 2. Domestic Registered Patent Publication 10-0722154 (Notice date May 28, 2007)

Patent Document 3. Domestic Patent Publication 10-2013-0028322 (published March 19, 2013)

One of the technical problems to be solved by the present invention is to provide a sheath heater disposed in a chamber of a heat treatment oven to maintain a sealing even at a high temperature.

According to the present invention, the heating wire is built into the hollow of the outer pipe is heat generated by the electrical resistance, the insulating material is filled in the hollow of the outer pipe to insulate the heating wire and the outer pipe and both ends of the outer pipe Sheath heater which is provided in the chamber of the heat processing oven with a sealing part which seals; And the sealing portion comprises a terminal block connected along the end of the outer pipe and a ceramic insulating plug connected along the terminal block.

According to an embodiment of the present invention, the terminal block may be provided with a heating line exposed.

According to an embodiment of the present invention, a ceramic insulating plug may include: a plug housing assembled and connected along the terminal block; A plug terminal block connected to the plug housing to conduct current through a heating line; And an insulating ring disposed between and bonded to the plug housing and the plug terminal block.

According to an embodiment of the present invention, the plug housing and the plug terminal block is a kovar metal, and the insulating ring may be configured by selecting from a ceramic material.

According to an embodiment of the present invention, the sealing portion of the sheath heater may be configured to be positioned within a range not departing from the area range of the chamber when the sealing portion of the sheath heater is disposed as a heating element in the chamber of the heat treatment oven.

The present invention has the effect of providing a sheath heater in which the sealing is maintained even at a high temperature when disposed as a heating element in the chamber of the heat treatment oven.

The present invention has the effect of expanding the heat drying temperature band region of the substrate when it is disposed as a heating element in the chamber of the heat treatment oven, and enhancing insulation performance and durability.

The present invention can be arranged without exposing the terminal block of the sheath heater to the outside of the chamber when it is disposed as a heating element in the chamber of the heat treatment oven, thereby increasing the capa, reducing the space for maintenance, and increasing the substrate size In response to this, the heating area of the heating element can be easily extended and adjusted.

According to the present invention, since the terminal block of the sheath heater and the ceramic insulating plug are installed inside the chamber when the heating element is disposed in the chamber of the heat treatment oven, the sealing effect of the chamber is increased, and the effect of maintaining the oxygen concentration inside the chamber and maintaining the temperature atmosphere is stable. There is.

1 is an illustration of a heat treatment oven to which the sheath heater sealing apparatus is applied according to an embodiment of the present invention.
2 is an illustration showing the plane of FIG.
Figure 3 is an illustration of a planar structure of the sheath heater shown by extracting the sheath heater in the heat treatment oven according to an embodiment of the present invention.
Figure 4 is an illustration of the main heating element applied to the heat treatment oven according to an embodiment of the present invention.
5 is an illustration of a side heating element applied to the heat treatment oven according to an embodiment of the present invention.
Figure 6 is an illustration showing an exploded view of the insulating plug of the sheath heater sealing apparatus applied to the heat treatment oven according to an embodiment of the present invention.
7 (a), (b), (c) and (d) are exploded views illustrating various insulating plugs constituting the sheath heater sealing apparatus applied to the heat treatment oven according to an embodiment of the present invention.
8 is an illustration showing a state in which the sheath heater according to an embodiment of the present invention is configured as a main heating element and connected to a conductive part of a heat treatment oven through a ceramic insulating plug.
FIG. 9 is an illustration showing a state in which a sheath heater according to an embodiment of the present invention is configured as a side heating element connected to a conductive part of a heat treatment oven through a ceramic insulating plug.

Hereinafter, with reference to the accompanying drawings will be described in detail the 'siege heater sealing apparatus of the heat treatment oven' according to a preferred embodiment of the present invention.

The sheath heater, which functions as a heating element of the heat treatment oven chamber, incorporates a heating wire (heating coil) that generates heat with an electrical resistance into an outer pipe (metal protective tube) in a coil shape, and fills it together with magnesium oxide (MgO), an insulating powder, to be filled together. As a tubular heater insulated pipes, it is robust against external physical shocks and improves the efficiency of electric thermal energy, and can be processed in various shapes and shapes to suit the purpose and shape. Insulation resistance is excellent and it can be used at low cost. However, since it absorbs moisture, both ends of the external pipe must be sealed to maintain insulation and heater performance.

For example, the sealing of the conventional sheath heater is to be exposed to the outside of the chamber in order to prevent the high temperature of the sealing part and to manage the temperature below a predetermined temperature in order to prevent insulation breakdown, and to connect the power supply terminal to it. It is made to endure in the following temperature ranges.

As such, exposing the power terminal block to the outside for the temperature management of the sheath heater sealing part reduces the capa, secures space for maintenance, increases the number of facilities and parts, and increases the size of the substrate to be dried. In this case, there is a technical limitation in expanding the thermal region of the heating element.

Accordingly, the present invention is proposed to provide a sheath heater that can be installed inside a chamber of a heat treatment oven and can be used without breakdown even at high temperatures.

1 is an illustration of a heat treatment oven to which the sheath heater sealing apparatus according to an embodiment of the present invention is applied. 2 is an illustration showing the plane of FIG. Figure 3 is an illustration of a planar structure of the sheath heater shown by extracting the sheath heater in the heat treatment oven according to an embodiment of the present invention.

As illustrated in FIGS. 1 to 3, the heat treatment oven 100 may include an inlet through which a substrate such as a glass light emitting display device or an LCD glass substrate (hereinafter referred to as a substrate) that requires heating or drying may be passed. 111 is provided with a chamber 110, the chamber 110 is mounted to the sheath heater 200 is configured to heat the substrate by the heat of the sheath heater 200 or to evaporate and dry the moisture. The chamber 110 includes an upper and lower heat transfer plates 201 and 202 that are generated by receiving heat from the sheath heater 200 and are formed in a layered stack in a layered structure. It can be configured to be mounted inside.

In addition, one side of the chamber 110 of the heat treatment oven 100 may exhaust the fluid in the chamber 110 and the air inlet 112 for introducing a fluid including a process gas in order to increase the heat-drying efficiency of the substrate M. A plurality of busbars 131 having an exhaust port 113 and connecting a heating line of the sheath heater 200 and the frame 120 including the lugs 121 supporting and supporting the chamber 110 to conduct current. It may be configured to include a conductive portion 130 is connected.

Figure 4 is an illustration of the main heating element applied to the heat treatment oven according to an embodiment of the present invention. 5 is an illustration of a side heating element applied to the heat treatment oven according to an embodiment of the present invention.

As shown in FIGS. 4 and 5, the sheath heater 200 mounted in the chamber 110 may be divided into a main heating element Ms_h and a side heating element Ss_h in the chamber 110. have.

Figure 6 is an illustration showing an exploded view of the insulating plug of the sheath heater sealing apparatus applied to the heat treatment oven according to an embodiment of the present invention.

As shown in FIG. 6, the sheath heater 200 is a heating pipe that functions as a metal protective tube and at the same time is formed in the hollow of the outer pipe 210 and the outer pipe 210 that conducts heat to the outside and generates heat with electric resistance ( 220, the sealing member 230 is filled with an insulating material in the hollow of the outer pipe 210 to seal the heating wire 220 and the outer pipe 210 and seals both ends of the outer pipe 210. Can be.

The sealing unit 230 may be configured by connecting the terminal block 240 along the end of the outer pipe 210 and may be configured by connecting the ceramic insulating plug 250 along the terminal block 240.

In addition, the insulating material filled in the hollow of the outer pipe 210 may include magnesia (magnesia, magnesium oxide).

The sheath heat 200 configured as described above may be installed to function as a surface heating element in the chamber 110 of the heat treatment oven 100. As illustrated in FIG. 6, upper and lower heat transfer plates may be disposed on upper and lower parts of the sheath heater 200. When the 201 and 202 are stacked in a layer structure and disposed in the chamber 110, the 201 and 202 may be configured to function as planar heating elements.

When the planar heating element is disposed in the chamber 110, the planar heating element may be divided into a main heating element Ms_h in the horizontal direction and a side heating element Ss_h in the vertical direction as shown in FIGS. 1 and 2. When the planar heating element disposed in the chamber 110 is divided into the main heating element Ms_h and the side heating element Ss_h, it may be advantageous to maintain uniform temperature distribution required for heat drying of the substrate M. FIG.

The surface heating element may be simply configured by assembling the sheath heater 200 and the upper and lower heat transfer plates 201 and 202. Heat generated in the sheath heater 200 may be transferred to the upper and lower heat transfer plates 201 and 202, and radiant heat radiated from the heat transfer plate or radiation from the surface coating material may be transferred to the substrate M. Here, the material of the upper and lower heat transfer plates and the surface coating material may be selected from materials usable in a clean room, and ceramics may be selected as the preferred coating material as the surface coating material.

The surface of the sheath heater 200 and the surfaces of the upper and lower heat transfer plates 201 and 202 may form an oxide film and polish the surface to increase the thermal conductivity of the upper and lower heat transfer plates 201 and 202. . Preferably, the surface polishing may be treated by electrolytic polishing (EP).

The shape of the sheath heater 200 may transfer heat to the upper and lower heat transfer plates 201 and 202, and may be configured to be selected from a circle, an ellipse, or a rectangle because the heat transfer rate increases as the contact area increases.

In addition, as shown in FIG. 6, the sealing part 230 which seals both ends of the outer pipe 210 connects the terminal block 240 along the end of the outer pipe 210, and connects the terminal block 240. Accordingly, the ceramic insulating plug 250 may be connected to each other. The terminal block 240 may be configured to include a heating line 220 exposed.

The ceramic insulated plug 250 is connected to the plug housing 251 which is assembled and connected along the sheath heater 200 side terminal block 240, and the plug terminal block 252 which is connected to the plug housing 251 to energize the heating wire 220. And an insulating ring 253 disposed between the plug housing 251 and the plug terminal block 252 to electrically insulate the plug housing 251 from the plug terminal block 252.

The terminal block 240 of the sheath heater 200 may be inductively connected sequentially through the plug housing 251 on the ceramic insulating plug 250 and the openings of the insulating ring 253 and the plug terminal block 252. The heating line 220 protruding from the terminal block 252 may enter and be connected to an opening hole (not shown) formed in the plug terminal block 252.

Accordingly, the terminal block 240 of the sheath heater 200 may be configured as an integral type that can be assembled, welded or bonded to the ceramic insulating plug 250. Through this, the terminal block 240 may be positioned inside the chamber 110 without being exposed to the outside, and the sealing performance of sealing the outer pipe 210 may be maintained even at a high temperature of about 500 ° C.

For example, when the external pipe 210 is sealed by sealing it with the terminal block 240, the terminal block 240 is protected from high heat by the ceramic insulating plug 250 connected thereto, and thus the sealing is made around the terminal block 240. It solves the problem that the processed part is deformed or destroyed by high heat.

Thereby, it is possible to expand the heat drying temperature band region of the substrate. In addition, since the terminal block 240 can be placed in the chamber 110 without exposing it to the outside, the capa can be increased, the space for maintenance can be reduced, and the heating area of the heating element is expanded in response to the increase in the substrate size. It may be advantageous to do so.

Conventionally, in order to protect the terminal block from the high temperature conducted by the terminal block, the terminal block is exposed to the outside of the chamber and managed below the prescribed temperature to prepare for breakdown due to high temperature, but the sealing of the sheath heater is about 350 ℃ or less It is made to endure in a range.

On the other hand, the plug housing 251 constituting the ceramic insulating plug 250 inductively connects the sheath heater 200 side terminal block 240, and the plug terminal block 252 inductively connects the heating wire 220. An insulating ring 253 located between the 251 and the plug terminal block 252 electrically insulates the plug housing 251 and the plug terminal block 252.

The plug housing 251 and the plug terminal block 252 may be selected from a material such as a kovar metal. The insulating ring 253 may be selected from alumina (Al 2 O 3), which is a ceramic material. Here, the cobar metal may be composed of Fe 54%, Fe 29%, Ni 29%, and Co 17%. In this case, it can be usefully used as a sealing (bonding) alloy of ceramic and metal and can exhibit a stable coefficient of thermal expansion similar to that of glass.

When connecting the terminal block 240 and the ceramic insulating plug 250 by a bonding process, it is preferable to carry out the bonding process by vacuum brazing through a vacuum oven apparatus as a bonding method. At this time, the air pressure of the vacuum oven apparatus is preferably set to 10-3torr ~ 10-8torr, the temperature is 600 ℃ ~ 900 ℃ to control the bonding process atmosphere. As the filler solvent used herein, it may be preferable to select and use at least one of alloy materials including silver and copper.

7A, 7B, and 7C are exploded views illustrating various ceramic insulating plugs constituting the sheath heater sealing apparatus applied to the heat treatment oven according to an embodiment of the present invention.

FIG. 7A and 7B show an example in which a housing 252a through which the sheath heater 200 side terminal block 240 can enter the plug terminal block 252 constituting the ceramic insulating plug 250 is formed. In this case, it may be advantageous to stably support and secure the sheath heater side terminal block 240.

FIG. 7C is an example in which the thickness that is the axial volume of the insulating ring 253 constituting the ceramic insulating plug 250 is increased. In this case, it may be advantageous to increase the insulation performance between the plug housing 251 and the plug terminal block 252.

FIG. 7D illustrates an example in which bellows of SUS material is formed in the plug housing 251 constituting the ceramic insulating plug 250. In this case, the plug housing 251 may be advantageous in reducing shrinkage expansion deformation due to high temperature and cooling and enhancing durability through expansion and contraction of the bellows 251a. The bellows 251a is not specifically illustrated in the drawings besides the plug housing 251, but may also be configured in the plug terminal block 252.

8 is an illustration showing a state in which a sheath heater according to an embodiment of the present invention is configured as a main heating element and connected to a conductive part of a heat treatment oven through a ceramic insulating plug.

As shown in FIG. 8, when the sheath heater 200 is configured as the main heating element Ms-h and disposed in the horizontal direction in the chamber 110 of the heat treatment oven 100, the plug of the ceramic insulating plug 250 may be used. The terminal block 252 is inserted along the guide groove 132 of the bus bar 131 that is energized with the conductive part 130 and is simply connected without a separate component, and thus, the terminal block has a concise structure of the current of the conductive part 130. Energize (240). Referring to FIG. 8, the sealing part 230 of the ceramic insulating plug 250 connected to the terminal block 240 is positioned in a range not to deviate from the horizontal region of the chamber 110.

9 is an illustration showing a state in which the sheath heater according to an embodiment of the present invention is configured as a side heating element and connected to a conductive part of the heat treatment oven through a ceramic insulating plug.

As shown in FIG. 9, when the sheath heater 200 is configured as the side heating element Ss-h and disposed in the longitudinal direction in the chamber 110 of the heat treatment oven 100, the plug of the ceramic insulating plug 250 may be used. The terminal block 252 is inserted along the guide groove 132 of the bus bar 131 that is energized with the conductive part 130 and is simply connected without a separate component, and thus, the terminal block has a concise structure of the current of the conductive part 130. Energize (240). Referring to FIG. 9, the sealing part 230 of the ceramic insulating plug 250 connected to the terminal block 240 may be positioned in a range not to deviate from the vertical region of the chamber 110.

Although the present invention has been described with reference to the embodiments illustrated in the drawings, the present invention is not limited to the embodiments and may be modified and modified within the scope not departing from the gist of the present invention. Included.

100: heat treatment oven 110: chamber
111: substrate inlet 112: inlet port
113: exhaust port 120: frame
130: conductive unit 131: busbar
132: guide groove 200: sheath heater
201: upper heat transfer plate 202: lower heat transfer plate
210: outer pipe 220: heating wire
230: sealing unit 240: terminal block
250: ceramic insulated plug 251: plug housing
252: plug terminal block 253: insulated ring

Claims (5)

The heat treatment oven includes a heating wire which is embedded in the hollow of the outer pipe and generates heat by electric resistance, and a sealing part is filled in the hollow of the outer pipe to insulate the heating wire and the outer pipe, and seals both ends of the outer pipe. Sheath heater installed in the chamber; And the sealing part includes a terminal block connected along an end of an outer pipe and a ceramic insulating plug connected along the terminal block.
The ceramic insulating plug may include: a plug housing assembled and connected along the terminal block; A plug terminal block connected to the plug housing to conduct current through a heating line; And an insulating ring disposed between the plug housing and the plug terminal block and bonded to each other. The method of claim 1,
The terminal block is a sheath heater sealing apparatus of a heat treatment oven having a heating wire exposed. delete The method of claim 1,
And the plug housing and the plug terminal block are a kovar metal, and the insulating ring is selected from ceramic materials. The method of claim 1,
The sealing unit of the sheath heater, the sieve heater sealing apparatus of the heat treatment oven is set so as to be located within the range of the range of the chamber when the heating element is disposed in the chamber of the heat treatment oven.

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