JP5041900B2 - Plate cooling device, heat treatment system - Google Patents

Description

  The present invention relates to an apparatus for performing cooling after heat-treating a plate-like body such as a substrate, and a heat treatment system using the apparatus.

  Conventionally, an apparatus for heat treating a plate-like body such as a glass substrate has been used. Such an apparatus uses a transfer device such as a robot hand to apply a specific solution to a substrate (plate-like body) such as a glass plate and heat and dry it at intervals of the loading stage. It is a device that heats (fires) by putting it in and out and exposed to hot air of a predetermined temperature introduced into the heat treatment chamber, such as a liquid crystal display (LCD), plasma display (PDP), organic EL display, etc. It is used to manufacture such flat panel displays (FPD).

  Thus, it is necessary to cool the plate-like body after the heat treatment, but since it takes time to cool down, forcibly cool it by applying wind or the like and cool it in a short time. Yes.

Further, for example, the plate-like body is cooled using the apparatus described in Patent Document 1. As described above, the heat treatment tank for heating the plate-like body to perform heat treatment and the cooling tank for cooling are separated, and the plate-like body after the heat treatment is transferred from the heat treatment tank to the cooling tank for cooling. When heat treatment is continuously performed with such an apparatus, cooling can be performed without substantially reducing the temperature of the heat treatment tank, so that the energy used in the heat treatment tank can be reduced.
JP 2002-71936 A

  In the case of an apparatus in which a heat treatment tank and a cooling tank are separately provided, if the processing capacity of the process in each tank is not made approximately the same, one of the capacity cannot be performed efficiently. And, if the cooling time in the cooling tank is long, the number of plate-like bodies that can be cooled per unit time is reduced and the capacity of the cooling tank is reduced, so it is necessary to process many plate-like bodies. The cooling tank becomes a large tank.

  In addition, as shown in Patent Document 1, the cooling of the plate-like bodies is generally performed by arranging the plate-like bodies at intervals and supplying cooling air between the plate-like bodies from one side. Supply and flow to the other side. For this reason, the flow on the other side is weak, the temperature of the air on the other side is high, and it takes time to cool the other side, so it takes a long time to complete the cooling.

  In particular, in the case where the plate-like body is a precision electronic component such as a substrate, if the plate-like body is contaminated by cooling with air containing impurities, the plate-like body is soiled. For cooling using a fan with a HEPA filter, etc. The air is flowing. For this reason, the flow rate of the supplied air also becomes slow and the amount of supply decreases, so that the cooling time becomes longer than that of a general air.

Moreover, it is necessary to carry in the apparatus the high-temperature plate-shaped body heat-processed, and to carry out the plate-shaped body after cooling. And in the case of the apparatus which can cool with the carrying-in part and carrying-out part of this cooling tank opened, the structure of this part can be simplified.
However, in such a structure, since the cooling air flows from the open part to the outside, the flow of air on the other side becomes slow, and this part tends to be insufficiently cooled. It becomes necessary.

  Then, this invention makes it a subject to provide the plate-shaped body cooling device which can cool the heat-processed plate-shaped body and can cool efficiently, reducing an apparatus.

And invention of Claim 1 for achieving an above-mentioned objective is a plate-shaped body arrangement | positioning part by which the plate-shaped object which is cooling object is arrange | positioned, and the cooling member which cools the arrange | positioned plate-shaped object. The plate-like body arrangement portion has an open surface for carrying in and carrying out the plate-like body on at least one of both sides sandwiching the plate-like body in a direction along the plate surface of the plate-like body to be arranged. The cooling member has a blow-out member that blows air from the outside toward the plate-like body arrangement portion, and a suction member that sucks from the plate-like body arrangement portion and discharges it to the outside. direction in which the member opposed, carried in the open face of the plate-like body disposed portion, up direction der intersecting the direction for performing unloading, the outlet member and the suction member, the cross flow fan of elongated shape are used The blowout member and the suction member have a horizontally long blowout port and a suction port. A belt-like wind can be generated, and a plurality of support pins are provided, and the plate-like body is placed on the support pins while the plate surface of the plate-like body is placed up and down. It has a temperature sensor that can check the temperature of the arranged plate-like body, and it is possible to adjust the cooling time of the plate-like body by extending and contracting the support pin according to the detection result of the temperature sensor. This is a plate-like body cooling device.

  According to invention of Claim 1, a cooling member has a blowing member which blows off air toward the plate-shaped body arrangement | positioning part from the outside, and a suction member which sucks in and discharges outside from a plate-shaped body arrangement | positioning part. The direction in which the blowout member and the suction member face each other is a direction that intersects with the direction of carrying in and carrying out on the open surface of the plate-like body arrangement portion, and therefore, when cooling by the cooling member, The plate-like body as a whole can have a substantially uniform speed, and efficient cooling can be performed.

Further, according to the first aspect of the present invention, the plate-like body is placed on the plurality of support pins and the plate-like body is arranged to cool the plate-like body. It is difficult to arrange the plate-like body easily.

According to the first aspect of the present invention, since the temperature sensor that can check the temperature of the arranged plate-like body is provided and the support pin is expanded and contracted according to the detection result of the temperature sensor, The cooling time can be adjusted.

  The invention according to claim 2 is the plate-like body cooling device according to claim 1, wherein the blowing direction of the blowing member and the suction direction of the suction member are the same direction.

  According to the invention described in claim 2, since the blowing direction of the blowing member and the suction direction of the suction member are the same direction, the air flow is stabilized and the air flow is made stronger. Can do.

According to a third aspect of the invention, the support pin is extendable, the plate-like member according to claim 1 or 2, characterized in that it is possible to vary the width of the gap formed by the plate surface of the plate-like body It is a cooling device.

According to the third aspect of the present invention, the support pin is extendable and can change the width of the gap formed by the plate surface of the plate-like body. It becomes possible to change the speed and improve the workability of loading and unloading the plate-like body.

Moreover, the heat processing apparatus which heat-processes a plate-shaped body, the plate-shaped body cooling device in any one of Claims 1-3 , and carrying-in which takes out the heat-treated plate-shaped body and carries it in the said plate-shaped body cooling device A heat treatment system can be provided depending on the apparatus (claim 4 ).

  According to the plate-like body cooling device of the present invention, the plate-like body can be efficiently cooled while reducing the size of the device.

Hereinafter, specific examples of the present invention will be described.
As shown in FIGS. 1 and 2, the plate-like body cooling device 1 according to the first embodiment of the present invention includes a cooling member 10 including a blowing member 20 and a suction member 30, and a plate-like body arranging portion 11. Have.
Then, it is arranged that the plate-like body 90 which is to be cooled to the plate-like member disposed portion 11, by operating the cooling member 10, it is possible to cool the plate-like body 90. The plate-like body 90 is rectangular and has a shape having sides 90a, 90b, 90c, and 90d.

  The blowing member 20 and the suction member 30 of the cooling member 10 are specifically cross flow fans. This cross flow fan has an elongated shape and can generate a belt-like wind. As shown in FIGS. 1 to 3, the blowing member 20 and the suction member 30 have a structure in which the rotating bodies 26 and 36 are disposed inside the main body portions 25 and 35. Further, the blowout member 20 and the suction member 30 have horizontally long blowout ports 21 and 31 and suction ports 22 and 32.

The air outlet 21 of the blowout member 20 and the suction port 32 of the suction member 30 are arranged so as to face the plate-like body arrangement portion 11 side, while the suction port 22 of the blowout member 20 and the blowout of the suction member 30 are arranged. The outlet 31 is disposed outside.
Therefore, when the blowout member 20 is operated, the air sucked from the outside through the suction port 22 can be blown out from the blowout port 21 toward the plate-like body arrangement portion 11, and when the suction member 30 is operated, the plate shape Air sucked from the body placement unit 11 through the suction port 32 can be discharged to the outside from the blowout port 31. And the airflow as shown below can be generated by operating the blowing member 20 and the suction member 30 simultaneously.

  The blowing member 20 and the suction member 30 are located on both sides of the plate-like body 90, and are arranged to face each other. Moreover, the blower outlet 21 of the blowing member 20 and the suction port 32 of the suction member 30 are arrange | positioned along the edge | side 90a, 90c of the plate-shaped body 90, and are the direction which goes to the plate-shaped body 90 side.

  Therefore, the blowing direction which is the direction blown from the blower outlet 21 of the blowing member 20 and the suction direction which is the direction sucked from the suction port 32 of the suction member 30 are the same direction, and the cooling member 10 is operated. Then, as shown by the arrows in FIGS. 2 and 3, the belt-like flow blown out from the blowout port 21 of the blowout member 20 passes through the surface of the plate-like body 90 and is directly sucked into the suction port 32 of the suction member 30. Sucked from.

The outlet 21 of the blowing member 20 and the inlet 32 of the suction member 30 have a certain length in the vertical direction. As shown in FIG. 3, the position of the plate-like body 90 is located near the middle in the vertical direction of the air outlet 21 and the suction port 32, and the flow generated by the cooling member 10 is the plate-like body 90. The flow is divided into an upper surface side and a lower surface side, and cooling is performed on both surfaces of the plate-like body 90.
In addition, the flow for this cooling may be only one of the upper surface or the lower surface, or may be cooled from one surface.

  Further, as shown in FIGS. 1 and 3, the number of cooling members 10 including the blowing members 20 and the suction members 30 and the number of plate-like body arranging portions 11 correspond to the number of plate-like bodies 90 arranged. is doing. In the present embodiment, there are two sets of the cooling member 10 and the plate-like body arranging portion 11, and the two plate-like bodies 90 can be cooled simultaneously.

The plate-like body arrangement portion 11 is partitioned by the plate members 40 arranged above and below, and is formed by being sandwiched between the plate members 40. In the plate-like body cooling device 1 of the present embodiment, the three plate members 40 are arranged side by side so as to be spaced apart from each other, and the plate-like body arrangement portion 11 is disposed between the plate members 40 adjacent to each other in the vertical direction. Two places are formed. Among the plate members 40, those arranged between them are those arranged below the upper plate-like body arrangement part 11 and those arranged above the lower plate-like body arrangement part 11. It also serves as.
Further, the plate member 40 has a rectangular shape and is larger than the plate-like body 90, and the plate-like body 90 can be arranged in the plate-like body arrangement portion 11.

  And the plate member 40 is arrange | positioned at the upper and lower sides of the plate-shaped-body arrangement | positioning part 11, and the blowing member 20 and the suction member 30 are arrange | positioned at a pair of opposing side surface among four side surfaces, and other A pair of opposing side surfaces are in an open state, and open surfaces 11a and 11b are formed. On the open surfaces 11a and 11b, the plate-like body 90 is carried in and out.

Accordingly, the open surfaces 11a and 11b are arranged to face each other on both sides of the plate-like body 90 in a direction along the plate surface of the plate-like body 90 to be arranged.
Further, the blowing member 20 and the suction member 30 are also arranged to face each other across the plate-like body 90 in the direction along the plate surface of the plate-like body 90 to be arranged.
And the direction where the blowing member 20 and the suction member 30 oppose is a direction which cross | intersects with respect to the direction where the open surfaces 11a and 11b of the plate-shaped object arrangement | positioning part 11 oppose, In this embodiment, these are these. The directions are orthogonal.

A support pin 43 is disposed on the upper side of the lower plate member 40 among the plate members 40 forming each plate-like body arrangement portion 11. The support pins 43 are used for placing the plate-like body 90 and are fixed to the plate member 40.
A plurality of support pins 43 are formed on the plate member 40, are arranged in the entire region where the plate-like body 90 is arranged, and all have the same length.
Then, when the plate-like body 90 is placed on the support pins 43, the plate surface of the plate-like body 90 is in a state where it becomes the upper and lower surfaces.

  The tip portion of the support pin 43 is sharp. Therefore, the support pin 43 and the plate-like body 90 are in a state close to a point contact, and the contact portion with the plate-like body 90 is reduced. Can be improved.

When the plate-like body 90 is disposed, the plate-like body 90 is located between the plate members 40. And by operating the cooling member 10 which consists of the blowing member 20 and the suction member 30, an airflow generate | occur | produces in the plate-shaped body arrangement | positioning part 11 between the plate-shaped body 90 and the plate member 40, and the plate-shaped body 90 Is cooled.
Then, the air whose temperature has risen due to the heat of the plate-like body 90 is exhausted to the outside by the suction member 30.

Next, the usage method of the plate-shaped body cooling device 1 is demonstrated.
The plate-like body cooling device 1 according to the present embodiment is used together with a heat treatment device, a carry-in device, and a carry-out device (not shown). And these apparatuses become the heat treatment system 5.

  Then, the plate-like body 90 cooled by the plate-like body cooling device 1 is heat-treated at a high temperature by the heat treatment device, and moved from the heat treatment device to the plate-like body arranging portion 11 of the plate-like body cooling device 1 by the carry-in device. After cooling, the plate-like body cooling device 1 is carried out by the carry-out device.

  As the heat treatment apparatus, the carry-in apparatus, and the carry-out apparatus, those having a conventionally used structure can be used. An oven using an electric heater or the like can be used as the heat treatment apparatus, and a robotic arm can be used as the carry-in apparatus or the carry-out apparatus.

Carrying in by the carrying-in device is performed from the open surface 11a and is performed in the direction as indicated by the arrow in FIG. Then, the loaded plate-like body 90 immediately after the heat treatment is placed on the support pins 43 as shown in FIG. And the blowing member 20 and the suction member 30 are operated, and the plate-shaped body 90 is cooled by supplying the outside air outside.
Since this air flow is due to the cross flow fan used for the blowout member 20 and the suction member 30, it is difficult for the flow to diffuse on the downstream side (suction member 30), and the air flow is a plate-like body. The overall speed can be almost uniform throughout 90, and efficient cooling is possible.

And the plate-shaped body 90 cooled below to predetermined temperature is carried out from the open surface 11b by the carrying-out apparatus, and is carried out in the direction as shown by the arrow of FIG. Thereafter, another plate-like body 90 is carried in and cooled one after another. Accordingly, the direction in which the blowout member 20 and the suction member 30 face each other is a direction that intersects the direction in which the opening surfaces 11a and 11b carry in and carry out, and the blowout member 20 and the suction member 30 at the time of carrying in and out. Does not get in the way.
Thus, since the plate-like body cooling device 1 can efficiently cool in a short time, the number of cooling plates 90 per unit time can be ensured even if the number of sheets to be simultaneously cooled is small. Therefore, the apparatus can be made small.
The operation of the blowing member 20 and the suction member 30 may be operated only when cooling is performed, or may be always operated.

  In the plate-like body cooling device 1 of the present embodiment, the plate-like body 90 is carried in and out on the open surfaces 11a and 11b provided at positions facing each other. Therefore, the arrangement of the steps before and after the plate-like body cooling device 1 in the heat treatment system 5 can be made linear, and the entire arrangement can be easily made linear.

  Note that the number of cooling members 10 and the number of plate-like body arranging portions 11 are provided according to the number of plate-like bodies 90 that can be cooled at the same time. And the number of plate-like bodies 90 to be cooled per unit time can be determined.

  Next, the plate-like body cooling device 2 according to the second embodiment of the present invention will be described. The plate-like body cooling device 2 is shown in FIG. 4, and has a cooling member 10 and a plate-like body arrangement portion 11 as in the above-described plate-like body cooling device 1. And in the plate-shaped body cooling device 2, the cooling member 10 and the plate-shaped body arrangement | positioning part 11 have only one set, and can cool only one plate-shaped body 90. FIG.

Further, as shown in FIG. 4, also in the plate-like body cooling device 2, the cooling member 10 is used to generate an air current between the plate-like body 90 and the plate member 40 to cool the plate-like body 90. To do. And in the plate-shaped body cooling device 2 of this embodiment, the blower outlet 21 of the blowing member 20 and the inlet (not shown) of the suction member are located above the plate-shaped body 90.
Therefore, the air flow for cooling described above mainly flows between the upper side of the plate-like body 90 and the plate member 40 arranged on the upper side of the plate-like body arrangement portion 11. Of the upper and lower plate surfaces, the upper upper surface side is mainly cooled.

  The plate-like body cooling device 2 is provided with a plurality of support pins 53 on which the plate-like body 90 is placed, and the support pins 53 can be expanded and contracted. Then, the distance between the plate member 40 and the plate-like body 90 can be changed by expanding and contracting the support pins 53.

  When the support pin 53 is extended, the distance between the upper plate member 40 and the plate-like body 90 approaches, and the flow of air supplied from the outside and used for cooling can be accelerated. In addition, since the gap on the lower side of the plate-like body 90 can be increased, the work of carrying the plate-like body 90 can be facilitated.

  The plate-like body cooling device 2 is provided with a temperature sensor (not shown) that can check the temperature of the arranged plate-like body 90. Then, the support pin 53 can be expanded and contracted according to the detection result of the temperature sensor, so that the cooling time of the plate-like body 90 can be easily adjusted.

  Further, the degree of expansion / contraction of the plurality of support pins 53 may be changed, and the plate-like body 90 on the support pins 53 may be inclined.

The plate-like body cooling device 2 is provided with a conveyor roller 50. The conveyor roller 50 can carry out the cooled plate-like body 90.
The conveyor roller 50 has a shaft portion 51 and a roller portion 52. Then, when the shaft portion 51 is rotated and the roller portion 52 is rotated, the plate-like body 90 on the roller portion 52 is moved, and the plate-like body 90 is carried out.

  And since the support pin 53 of the plate-shaped body cooling device 2 of this embodiment can be expanded and contracted, by cooling the support pin 53 to such an extent that the plate-shaped body 90 contacts the roller portion 52 after cooling, The roller part 52 and the plate-like body 90 do not contact each other, and the plate-like body 90 can be reliably brought into contact with the roller part 52 during conveyance.

  In the plate-like body cooling devices 1 and 2, cooling air flows from the outside into the plate-like body arrangement portion 11, but this air enters from the suction port 22 of the blowing member 20. Cooling with air with few impurities is possible by disposing a filter and allowing air flowing in from the outside to flow through the filter.

Moreover, in the plate-shaped body cooling devices 1 and 2, the open surfaces 11 a and 11 b are provided, one of which is used for loading the plate-shaped body 90 and the other is used for unloading the plate-shaped body 90. Either one of 11b may be closed and the plate-like body 90 may be carried in and out by the other.
That is, the open surfaces 11a and 11b for carrying in and out the plate-like body 90 only need to be formed on at least one of both sides of the plate-like body 90 in the direction along the plate surface of the plate-like body 90. .

It is the perspective view which showed the plate-shaped object cooling device in the 1st Embodiment of this invention. It is the figure which looked at the plate-shaped body cooling device shown in FIG. 1 from the top, Comprising: It is explanatory drawing which showed the airflow in the use condition. It is the figure which looked at the plate-shaped body cooling device shown in FIG. 1 from the side surface, Comprising: It is explanatory drawing which showed the airflow in the use condition. It is the figure which looked at the plate-shaped object cooling device in the 2nd Embodiment of this invention from the side surface, Comprising: It is explanatory drawing which showed the airflow in use condition.

DESCRIPTION OF SYMBOLS 1, 2 Plate body cooling device 10 Cooling part 11 Plate body arrangement | positioning part 11a, 11b Open surface 20 Blowing member 30 Suction member 43, 53 Support pin 90 Plate-like body

Claims (4)

It has a plate-like body arrangement part where a plate-like body to be cooled is arranged, and a cooling member that cools the arranged plate-like body,
In the plate-like body arrangement portion, an open surface for carrying in and out of the plate-like body is formed on at least one of both sides sandwiching the plate-like body in the direction along the plate surface of the plate-like body to be arranged. ,
The cooling member has a blowing member that blows air from the outside toward the plate-like body arranging portion, and a suction member that sucks in the plate-like body arranging portion and discharges it outside.
Direction in which the outlet member and the suction member facing the up direction der intersecting the direction for performing carrying-in opening surface of the plate-like body disposed portion, the carry-out,
An elongated cross flow fan is used for the blowing member and the suction member,
The blowout member and the suction member have a horizontally long blowout port and a suction port, and can generate a belt-like wind.
A plurality of support pins are provided, the plate-like body is placed on the support pins while the plate surface of the plate-like body is up and down, and the plate-like body is disposed.
A plate having a temperature sensor capable of confirming the temperature of the arranged plate-like body, and the cooling time of the plate-like body can be adjusted by extending and contracting the support pin according to the detection result of the temperature sensor. Body cooling device.   The plate-like body cooling device according to claim 1, wherein the blowing direction of the blowing member and the suction direction of the suction member are the same direction. The plate-like body cooling device according to claim 1 or 2 , wherein the support pin is extendable and can change a width of a gap formed by a plate surface of the plate-like body. The heat processing apparatus which heat-processes a plate-shaped body, The plate-shaped body cooling device in any one of Claims 1-3 , The carrying-in apparatus which takes out the heat-treated plate-shaped body and carries it in the said plate-shaped body cooling device; A heat treatment system characterized by comprising:

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