JP2022176040A - Heater power source connection device for heat treatment oven - Google Patents

Abstract

To provide a heater power source connection device for a heat treatment oven, the heater power source connection device improving current-carrying performance for a heater unit, solving the problem such as short and short circuit and the problem of reduction in durability caused from a terminal part of the heater unit, minimizing disturbance and interference on current flow to keep the current flow stable, and minimizing electrical contact.SOLUTION: A heater power source connection device for a heat treatment oven can be configured to include: a heater unit including a bus bar that is mounted in a chamber of the heat treatment oven and supplies low voltage and large current through an electrode connected for heating or drying a board via heat and including a heating plate comprising a heating element having the electrode electrified by the bus bar; and a power source supply terminal unit that is attached to the heating plate for electrifying the heating element from the bus bar of the heater unit via a power source supply line for inducing power source supply and is connected to the power source supply line.SELECTED DRAWING: Figure 7

Description

TECHNICAL FIELD The present invention relates to a heater power connection device for a heat treatment oven, which improves the power supply performance of a heater unit mounted in the chamber of the heat treatment oven.

Recently, displays have been applied to various kinds of image devices such as TVs, mobile phones, monitors, etc. With rapid technological development, efforts are being made to improve the performance of the products. Organic light emitting display devices and LCD substrates (hereinafter referred to as 'substrates' or 'glass substrates') are one of next-generation display devices and have been applied to various product fields. The glass substrates that make up the display device are manufactured by heat treatment.In order to meet the conditions required for each process during the heat treatment, it is necessary to prevent the influence of the outside air and minimize the heat emitted outside the chamber. must be kept to As a result, deterioration in performance can be prevented, and the defective rate of products can be reduced. In addition, in order to improve the yield of finished products, it is better to have less in-plane variations in the substrate during heat treatment.

In manufacturing substrates, temperature control and temperature uniformity are essential to maintain good substrate quality and yield. For example, in a substrate manufacturing process using a heat treatment oven, since an organic layer is formed on the surface of the substrate and can contain a certain amount of water, a drying process is required to evaporate the water. , a cleaning process is performed before coating the surface of the substrate with a photosensitive film, and after the cleaning process, a heating and drying process is performed to remove moisture. Most of the substrate manufacturing processes include heating and drying processes. manufactures the substrates. Moisture generated from the substrate manufacturing process is removed by using infrared rays or by heating and drying in a heat treatment oven chamber containing a heating element such as a sheath heater. is doing.

In this regard, Korean Patent No. 10-1238560 and Korean Patent Publication No. 10-2013-0028322 propose an “LCD glass oven chamber”.

On the other hand, the heater unit mounted in the chamber of the heat treatment oven includes a conductive part to which a number of bus bars that connect the heating wire and pass the current are connected. The heater unit of the heat treatment oven incorporates a heating wire (heating coil) that generates heat by electrical resistance, and plate-shaped heating plates are installed on the top and bottom of the heater unit to heat and dry the substrate in the chamber of the heat treatment oven. configured to perform a process.

However, the conventional heater unit mounted in the chamber of the heat treatment oven employs a method of energizing by directly connecting the power supply to the plate-shaped heating plate, so the terminals are exposed to the electrical characteristics and the terminals are damaged. The structure and shape of the part directly affect the durability, but in general, the durability of the terminal part is suddenly reduced, which causes problems such as short circuits and short circuits, which reduces the reliability of the product. be. For example, in the conventional power supply terminal, contact resistance changes due to electrical characteristics, and there is a risk of arcing due to contact resistance imbalance. is large, the contact force can be weakened by thermal deformation due to high heat, and the resistance value can change due to oxidation of the material at high temperature.

This provides sufficient electrical capacity commensurate with the electrical capacity applied to the heater unit, while preventing or minimizing interference with the flow of current conducted from the busbar to the heater unit. There is a need for a new structural design for the terminals that can maintain a stable electrical contact and minimize the electrical contact to solve the problems caused by contact resistance.

Korean Patent No. 10-1238560 (publication date: February 28, 2013) Korean Patent No. 10-0722154 (publication date: May 28, 2007) Korean Patent Publication No. 10-2013-0028322 (Published date: March 19, 2013)

One of the technical problems to be solved by the present invention is to improve the energization performance for the heater unit mounted in the chamber of the heat treatment oven.

One of the technical problems to be solved by the present invention is to solve the problem of deterioration in durability and problems such as shorts and short circuits that occur from the terminals of the heater unit mounted in the chamber of the heat treatment oven. be.

One of the technical problems to be solved by the present invention is to minimize obstruction and interference of the flow of electric current supplied to the heating plate from the busbar of the heater unit mounted in the chamber of the heat treatment oven. To provide a power connection terminal part for stably maintaining a flow and minimizing electrical contact.

To achieve the above object, according to the present invention, there is provided a heater power supply connection device for a heat treatment oven, which is mounted in the chamber of the heat treatment oven to connect electrodes to heat or dry a substrate via heat, and a low voltage power supply. , a heater unit including a bus bar that supplies a large current and a heating plate provided with a heating element having electrodes that are energized to the bus bar; and a power supply line that guides the supply of power from the bus bar of the heater unit. a power supply terminal portion attached to the heating plate for energizing the heating element through the power supply terminal portion for connecting the power supply line.

According to an embodiment of the present invention, the heating plate may include a heating element, an upper insulating layer on its upper portion, a lower insulating layer on its lower portion, and a substrate layer made of stainless steel.

According to an embodiment of the present invention, the power supply terminal unit is for connecting a power supply line having a terminal with a hole, the hole formed in the heating plate; a power supply bush having a hole centered with respect to the plate hole, mounted on the upper surface of the heating plate and energized with a power source induced through a power supply line to maintain parallel contact; said power supply bush; and an insulating bushing with a hole centered with respect to the hole on the terminal side of the power supply line to restrain the external flow of current; fixing means for continuously passing through the provided holes to fix the insulating bush, the terminal of the power supply line, and the power supply bush to the heating plate.

According to an embodiment of the present invention, the insulating bush mounted on the upper surface of the heating plate has a step with a larger diameter at the top and a smaller diameter at the bottom than the diameter of the top. It can be constructed in a protruding shape as a protruding part that passes through a hole provided in the terminal of the power supply line.

According to an embodiment of the present invention, the insulating bush mounted on the upper surface of the heating plate is selected from ceramic materials that suppress the external flow of the current on the terminal side of the power supply line and enhance the durability. can be manufactured.

According to an embodiment of the present invention, the fixing means continuously passes through the insulating bush, the terminal of the power supply line, the power supply bush, and the holes drilled in the heating plate to The insulating bush, the terminal of the power supply line, and the power supply bush are sequentially fixed on the upper surface, and a fixing bolt fastened with a nut on the lower surface of the heating plate.

According to an embodiment of the present invention, a washer is interposed between the lower surface of the heating plate and the nut, and a flat washer and a spring washer are inserted in the upper and lower portions so as to be double stacked. .

Effect of the Invention The present invention has the effect of improving the energization performance of the heater unit mounted in the chamber of the heat treatment oven.

In addition, the present invention has the effect of solving the problem of deterioration of durability and the problems of short circuit and the like, which occur from the terminal portion of the heater unit mounted in the chamber of the heat treatment oven.

In addition, the present invention can stably maintain the current flow by minimizing the disturbance and interference of the current flow from the bus bar of the heater unit mounted in the chamber of the heat treatment oven to the heating plate. There is an effect that a highly reliable heat treatment oven can be manufactured by minimizing physical contact.

1 is an exemplary diagram showing a heat treatment oven; FIG. It is an exemplary view showing the front of a heat treatment oven. It is an exemplary view showing a plane of a heat treatment oven. 1 is an exemplary view showing one side of a heat treatment oven; FIG. FIG. 4 is an exemplary view of a heater unit arranged in a heat treatment oven; FIG. 2 is an exemplary view showing a planar structure of a heater unit arranged in a heat treatment oven; FIG. 7 is an exemplary view of a heater power supply connection device of a heat treatment oven according to an embodiment of the present invention, which is an excerpt from part A of FIG. 6 . FIG. 2 is an exemplary view schematically showing a heating plate that constitutes the heater power connection device of the heat treatment oven according to one embodiment of the present invention; FIG. 2 is an exemplary view schematically showing a heating plate that constitutes the heater power connection device of the heat treatment oven according to one embodiment of the present invention; 1 is an exemplary exploded view of a heater power connection device of a heat treatment oven according to an embodiment of the present invention; FIG.

Hereinafter, a "heater power supply connection device for a heat treatment oven" according to a preferred embodiment of the present invention will be described.
FIG. 1 is an exemplary diagram showing a heat treatment oven. FIG. 2 is an exemplary view showing the front of the heat treatment oven. FIG. 3 is an exemplary view showing the plane of the heat treatment oven. FIG. 4 is an exemplary view showing a side view of the heat treatment oven.

1 to 4 show the overall structure of the heat treatment oven 100, and are exemplary views of the heat treatment oven 100 including a chamber 200. FIG.

As shown in FIGS. 1 to 4, the heat treatment oven 100 takes a substrate to be heat-treated into each stage provided in the chamber 200 and heats the substrate after the heat treatment process. A door portion 110 and a shutter portion 120 may be provided on the rear and front portions, respectively, for taking out the substrate from the chamber 200 .

In addition, the heat treatment oven 100 includes a chamber 200 that accommodates substrates that need to be heated or dried. The heat generated from the heater unit 300 heats the substrate or evaporates and dries the moisture.

In addition, the heat treatment oven 100 has an air supply port for inflowing fluid including process gas and an exhaust port for exhausting the fluid in the chamber 200 on one side of the chamber 200 , and a frame with lugs supporting the chamber 200 . , and a conductive portion to which a large number of bus bars 301 are connected to which the heating wires of the heater unit 300 are connected so as to pass current.

Although it depends on the specifications, in the normal case, as shown in FIG. It is configured to effectively perform the substrate heating process described above.

On the other hand, in FIGS. 1 and 4, unexplained reference numerals “210” and “220” indicate “inner and outer casings” of the chamber 200. As shown in FIG. An unexplained reference numeral '230' denotes a 'cooling jacket' that forms a cooling airflow in the chamber 200 and cools the chamber 200 with a uniform temperature distribution through a cooling airflow guideway formed inside the chamber 200. FIG. An unexplained reference numeral “240” indicates a “power supply unit” that protrudes a feedthrough and supplies power into the chamber 200 through this.

By the way, as shown in FIGS. 1 and 4, the basic configuration constituting the heat treatment oven 100, for example, the structure of the chamber 200, the process gas supply and exhaust system, and the power supply to the heater unit 300 The configuration of the power supply unit 240 is not directly related to the present invention. Also, since the basic configuration of the heat treatment oven 100 is a well-known configuration that is irrelevant to the subject matter of the present invention, the description of the configuration and operation of the present invention will be omitted.

As shown in FIGS. 1 to 4, a heat treatment oven generally takes a substrate to be heat-treated into stages provided in a chamber in which a heater unit is installed, in order to heat-treat the substrate. In order to take out the heat-treated substrate from the chamber, a door portion can be provided in the rear portion, and a shutter portion can be provided in the front portion.

In addition, the heat treatment oven includes a chamber containing a substrate that needs to be heated or dried, and a heater unit comprising a heating element is mounted in the chamber to heat the substrate with heat generated from the heater unit. Alternatively, it can be configured to evaporate and dry moisture.

Also, although it depends on the specifications, in general, a heating plate is installed in close contact with the upper and lower portions of the heating element that constitutes the heater unit so that the substrate heating process can be performed effectively.

In addition, on one side of the chamber of the heat treatment oven, an air supply port for inflowing fluid including process gas and an exhaust port for exhausting fluid in the chamber are provided, and a frame with lugs for supporting and supporting the chamber, and a heater unit. and a conductive portion to which a large number of bus bars are connected for connecting the heating wires of the heating wire and passing the electric current.

On the other hand, the heat treatment oven includes a heater unit inside the chamber to remove the moisture remaining on the substrate during the heat treatment process of the substrate, and has a more efficient and high performance process capability for improving product quality. is demanding.

In addition, in order to mass-produce more products by shortening the time of the heat treatment process, the heater unit installed inside the chamber requires high performance and structurally reinforced durability. is doing.

However, the conventional heater unit mounted in the chamber of the heat treatment oven employs a method of energizing by directly connecting the power supply to the plate-shaped heating plate, so the structure of the terminal part depends on the electrical characteristics of the terminal part. And the shape directly affects the durability, but in general, the durability of the terminal portion is abruptly degraded, resulting in problems such as short circuit and short circuit, which lowers the reliability of the product.

For example, in the conventional power supply terminal, contact resistance changes due to electrical characteristics, and there is a risk of arcing due to contact resistance imbalance. The fluctuation is large, the contact force can be weakened by thermal deformation due to high heat, and the resistance value changes due to oxidation of the material at high temperature.

Thus, the present invention provides sufficient electrical capacity commensurate with the electrical capacity applied to the heater unit, while minimizing obstruction or interference with the flow of current conducted from the busbar to the heater unit. The heater power supply connection device of the heat treatment oven, including a new terminal structure design that can maintain a stable current flow, minimize electrical contact, and solve the problem caused by contact resistance. Present.

In addition, the present invention provides a heater power connection device for a heat treatment oven, which improves power supply performance to a heater unit mounted in a chamber of the heat treatment oven.

In addition, the present invention provides a heater power supply connection device for a heat treatment oven that solves the problem of deterioration in durability and the short circuit caused by the terminals of the heater unit mounted in the chamber of the heat treatment oven. .

In addition, the present invention can stably maintain the current flow by minimizing the disturbance and interference of the current flow from the bus bar of the heater unit mounted in the chamber of the heat treatment oven to the heating plate. Disclosed is a heater power connection device for a heat treatment oven that minimizes physical contact and allows a highly reliable heat treatment oven to be manufactured.

5 to 10, the main components of the heater power connection device for the heat treatment oven according to the present invention will now be described in detail.

FIG. 5 is an exemplary view of a heater unit arranged in a heat treatment oven. FIG. 6 is an exemplary view showing a planar structure of a heater unit arranged in a heat treatment oven.

As shown in FIGS. 7 to 10, the heater power connection device for a heat treatment oven according to an embodiment of the present invention is configured to effectively connect the current of the bus bar 301 constituting the heater unit 300 to the heating plate 311. can.

FIG. 7 shows part A of FIG. 6, and is an exemplary diagram of a heater power connection device for a heat treatment oven according to an embodiment of the present invention.

FIG. 8 is an exemplary view schematically showing a heating plate that constitutes a heater power connection device for a heat treatment oven according to one embodiment of the present invention.

FIG. 9 is an exemplary view schematically showing a heating plate constituting a heater power connection device for a heat treatment oven according to one embodiment of the present invention.

FIG. 10 is an exemplary exploded view of a heater power connection device for a heat treatment oven according to an embodiment of the present invention.

A heater power connection apparatus for a heat treatment oven according to one embodiment of the present invention includes a heater unit 300, which is mounted in a chamber 200 of a heat treatment oven 100, as shown in FIGS. , a heating plate including a bus bar 301 that connects electrodes to supply low voltage and high current to heat or dry the substrate through heat, and a heating element 310 having an electrode that is energized to the bus bar 301. 311 can be provided.

In addition, the heater power connection device is mounted on the heating plate 311 to stably supply current to the heating element 310 through the power supply line 330 that guides power supply from the bus bar 301 of the heater unit 300. It may include a power supply terminal portion 320 to which a supply line 330 is connected. The power supply line 330 may have a terminal 331 with a hole 331a.

In addition, as shown in FIG. 8, the heating plate 311 may include an upper insulating layer 313 and a lower insulating layer 314 around the heating element 310 .

Also, the lower portion of the insulating layer 314 may include a substrate layer 315 made of stainless steel.

As described above, when the heating plate 311 is formed by laminating the upper insulating layer 313, the lower insulating layer 314, and the substrate layer 315 made of stainless steel SUS403 around the heating element 310, excellent electrical characteristics are obtained. It also has insulating properties, and has firm durability with little deformation.

Also, as shown in FIGS. 7 to 10, the power supply terminal portion 320 is formed by drilling a hole 311a in the heating plate 311, and the hole 311a drilled in the heating plate 311 is the center. In addition, an electrode plated layer 342 can be installed on the periphery.

In addition, the power supply terminal part 320 has a hole 321a centered with respect to the hole 311a of the heating plate 311, and is mounted on the upper surface of the heating plate 311 to supply power and electricity induced through the power supply line 330. and a power supply bush 321 for maintaining parallel contact.

In addition, the power supply terminal part 320 includes the power supply bush 321 and a hole 341a centered with respect to the hole 331a on the terminal 331 side of the power supply line 330, and includes an insulating bush 340 for suppressing the external flow of current. can.

In addition, the power supply terminal portion 320 continuously passes through the heating plate 311, the insulating bush 340, the terminal 331 of the power supply line 330, and the holes 311a, 321a, 331a, and 341a formed in the power supply bush 321. The heating plate 311 may include fixing means for fixing each part (the insulating bush 340 , the terminal 331 of the power supply line 330 , and the power supply bush 321 ) to the heating plate 311 .

In addition, the insulating bush 340 mounted on the upper surface of the heating plate 311 has a stepped portion having a large upper diameter and a lower diameter smaller than the upper diameter. The protrusion 341 that passes through the hole 331a provided in the .

As a result, the protruding portion 341 enters the hole 331a provided in the terminal 331 of the power supply line 330, thereby blocking loosening due to shaking and vibration of the terminal 331 of the power supply line 330. can minimize arcing due to

In addition, the insulating bush 340 mounted on the upper surface of the heating plate 311 can be manufactured by selecting a ceramic material that suppresses the external flow of the current on the terminal 331 side of the power supply line 330 and enhances durability. can be preferred.

Also, the heating plate 311 continuously passes through holes 311a, 321a, 331a, and 341a drilled in the heating plate 311, the insulating bushing 340, the terminal 331 of the power supply line 330, and the power supply bushing 321. The fixing means for fixing each part can be constructed as shown in FIG.

As shown in FIG. 10, the fixing means includes holes 341a, 331a, 321a, and 311a formed in the insulating bush 340, the terminal 331 of the power supply line 330, the power supply bush 321, and the heating plate 311. , the insulating bush 340, the terminal 331 of the power supply line 330, and the power supply bush 321 are sequentially fixed to the upper surface of the heating plate 311, and fixed by the nut 351 on the lower surface of the heating plate 311. It can be configured with a bolt 350 .

Here, although the fixing bolt 350 can be replaced with another fastening element, each part can be bound with a tightening torque, and a bolt and nut fastening element can be selected as a preferable fastening element for AS inspection.

Also, it is preferable to interpose a washer between the lower surface of the heating plate 311 and the nut 351 to induce tight coupling between the parts and prevent deformation and loosening of the parts.

Preferably, a flat washer 352 is fastened at a position close to the heating plate 311, and a spring washer 353 is double layered under it, so that each part is tightly attached by the tightening force of the fixing bolt 350. Fastening and bundling can be performed in a stable state, and the gap between each part can be reduced to minimize the occurrence of arcing when energized.

As described above, the heater power supply device for a heat treatment oven according to the present invention has the advantage of being able to effectively improve the power supply performance to the heater unit mounted in the chamber of the heat treatment oven.

In addition, there is an advantage that it is possible to solve the problems of deterioration of durability and problems of shorts and shorts caused by the terminals of the heater unit mounted in the chamber of the heat treatment oven.

In addition, by minimizing the obstruction and interference of the current flowing from the bus bar of the heater unit mounted in the chamber of the heat treatment oven to the heating plate, the current flow is stably maintained and the electrical contact is minimized. There is an advantage that a high-quality, highly-reliable heat-treating oven can be produced within a limited period of time.

Although the present invention has been described with reference to an illustrated embodiment, it is not limited to this embodiment and can be practiced with modifications and changes without departing from the spirit of the invention. It should be understood that modifications are also included in the technical concept of the present invention.

100 heat treatment oven 200 chamber 300 heater unit 301 busbar
310 heating element 311 heating plate (Thick Flim Heater)
311a hole 313 upper insulating layer 314 lower insulating layer 315 substrate layer 320 power supply terminal portion 321 power supply bush 321a hole 330 power supply line 331 terminal 331a hole 340 insulation bush 341 projecting portion 341a hole 350 fixing bolt 351 nut 352 flat washer 353 spring washer

Claims (5)

A heater power connection device for a heat treatment oven, comprising:
A heating element mounted in the chamber of the heat treatment oven, including a bus bar connected to an electrode for heating or drying the substrate through heat and supplying a low voltage and a large current, and having an electrode energized to the bus bar. and a power supply mounted on the heating plate for energizing the heating element through a power supply line that guides the power supply from the busbar of the heater unit. A heater power supply connection device for a heat treatment oven, comprising: a power supply terminal for connecting wires. The power supply terminal portion connects a power supply line having a terminal with a hole,
holes drilled in the heating plate;
a power supply bush having a hole centered with respect to the hole of the heating plate, mounted on the upper surface of the heating plate and energized with a power source induced through a power supply line to maintain parallel contact;
an insulating bushing with a hole centered with respect to the power supply bushing and the hole on the terminal side of the power supply line to suppress the external flow of current;
The heating plate, the insulation bushing, the power supply line terminal, and the power supply bushing are continuously passed through respective holes drilled in the heating plate, the insulation bushing, the power supply line terminal, and the power supply bushing to the heating plate. 2. The heater power connection device for a heat treatment oven according to claim 1, comprising: a fixing means for fixing the . The insulating bushing mounted on the upper surface of the heating plate has a stepped portion with a large diameter at the top and a smaller diameter at the bottom than the diameter of the top, and the bottom thereof is provided with the terminal of the power supply line. 3. The heater power supply connection device for a heat treatment oven according to claim 2, wherein the protrusion passing through the hole has a protruding shape. The fixing means continuously passes through the insulating bush, the terminal of the power supply line, the power supply bush, and each hole drilled in the heating plate, and the insulating bush and the power supply line on the upper surface of the heating plate. 3. The heater power connection device for a heat treatment oven according to claim 2, comprising: a fixing bolt that sequentially fixes the terminal and the power supply bush and is fastened by a nut on the lower surface of the heating plate. 5. The heat treatment oven according to claim 4, wherein a washer is interposed between the lower surface of the heating plate and the nut, and a flat washer is inserted in the upper portion and a spring washer is inserted in the lower portion in a double layered manner. Heater power connection device.

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