JP2010017635A - Silicon heating furnace and silicon crushing machine using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a silicon heating furnace that can prevent heating balance in a furnace from largely collapsing at the time of heater disconnection and easily performs maintenance such as heater replacement. <P>SOLUTION: The silicon furnace 10 is configured by cylindrically combining two cylindrical furnace halves 24a, 24b and heats a raw material, a silicon ingot 12 that is an object to be heated in its inside, wherein a plurality of linear heaters H that are formed substantially in the same length as in the bodies of the halves 24a, 24b inwardly of the two halves 24a, 24b and are covered with a quartz tube 64 are mutually spaced out in the direction of the internal circumference of the halves 24a, 24b and are disposed along the directions of the bodies of the halves 24a, 24b, and the heaters H is electrically connected to each other in parallel. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a silicon crushing apparatus that rapidly cools and crushes raw silicon, and particularly relates to a silicon heating furnace used for heating raw silicon.

  A silicon wafer used as a semiconductor material is manufactured by cutting and polishing a single crystal silicon ingot formed in a substantially cylindrical shape at a predetermined thickness in the diameter direction. This single crystal silicon ingot is manufactured by melting and dipping a single crystal silicon piece to be a seed crystal into molten raw material silicon, and then growing the crystal while slowly rotating and pulling up. Note that, as a raw material silicon of the single crystal silicon ingot, a silicon lump obtained by cutting an impurity-concentrated portion at the end portion generated during the manufacture of the single crystal silicon ingot or a grain manufactured by the Siemens method or the monosilane method is used.

  The raw material silicon is melted by filling the raw material silicon into a quartz crucible and heating it, but in order to efficiently melt the raw material silicon, if the raw material silicon is a lump, there is no gap in the crucible. It must be crushed to a size that is easy to fill. Conventionally, such crushing of raw material silicon lumps has been performed manually using a tungsten hammer or the like, but it is heavy labor to crush extremely hard raw material silicon lumps manually, and a hammer is used during crushing. There is a problem that tungsten forming the silicon adheres to the surface of the raw silicon fragment and lowers the purity of the raw silicon.

  Therefore, in order to solve such problems, various silicon crushing apparatuses for efficiently crushing the raw silicon lump have been developed in recent years, and an example thereof is described in Patent Document 1. As shown in FIG. 8, the silicon crushing device 1 described in Patent Document 1 includes a transport device 4 that transports the raw silicon lump 3 placed on the basket 2, a silicon heating furnace 5 that heats the raw silicon lump 3, and It is comprised with the cooling water tank 6 which submerged the heated raw material silicon lump 3 and quenches rapidly. Among these, the silicon heating furnace 5 is configured by combining two cylindrical furnace halves 5a and 5b on the fixed side (5a) and the movable side (5b) in a cylindrical shape, and is a heating target inside thereof. The raw material silicon lump 3 is heated.

According to the silicon crushing apparatus 1, cracks are generated in the entire raw material silicon lump 3 by the heating and quenching process, and these can be easily crushed only by hitting the raw silicon lump 3 after the heat treatment. Therefore, it is not necessary to crush the raw material silicon lump 3 with a hammer or the like, and the labor can be greatly reduced, and contamination of the raw material silicon lump 3 with a hammer or the like can be prevented.
JP 2005-288332 A

  By the way, in the above-described conventional silicon heating furnace 5, as shown in FIG. 8, each of the fixed-side and movable-side cylindrical furnace halves 5a and 5b has a plurality of zones (in the example shown in FIG. 8). In this case, it is divided into four zones Z1 to Z4), and the heater 7 meanders and is built in each of the zones Z1 to Z4 (in other words, the heater 7 is arranged in a plane with respect to each zone). The heaters 7 built in the zones Z1 to Z4 are electrically connected in parallel.

  For this reason, only the same number of heaters 7 as the number of each zone can be provided. For example, when the heater 7 in a certain zone of the movable-side cylindrical furnace half 5b is disconnected, The heating balance is greatly broken, and the heating of the raw material silicon lump 3 becomes uneven. If it does so, it will become impossible to produce a uniform crack with respect to the whole raw material silicon lump 3, and when the raw material silicon lump 3 is crushed in a post process, the size of the crushed raw silicon lump 3 will be varied. . As a result, there is a problem that it is difficult to efficiently put the crushed raw material silicon mass 3 into the crucible and melt it. In addition, when such a disconnection occurs, an overload is applied to the heater 7 of the fixed-side cylindrical furnace half 5a facing the heater 7 which is mainly disconnected in order to obtain a heating balance in the silicon heating furnace 5. There is also a problem that the heater 7 of the cylindrical furnace half 5a on the fixed side also breaks.

  Further, since the heaters 7 are arranged in a plane with respect to each zone, when replacing the disconnected heater 7, the silicon heating furnace 5 is removed from the silicon crushing apparatus 1 and the cylindrical furnace halves 5a and 5b are attached. All had to be disassembled, and there was a problem that it took a lot of time and cost to repair and repair.

  Therefore, the main problem of the present invention is that it is possible to prevent the heating balance in the furnace from being greatly broken when the heater is disconnected, and a silicon heating furnace that is easy to perform maintenance such as heater replacement, and a silicon crusher using the silicon heating furnace. Is to provide.

The invention described in claim 1
(a) A silicon heating furnace 10 configured by combining two cylindrical furnace halves 24a and 24b in a cylindrical shape, and heating the raw material silicon lump 12 to be heated therein,
(b) a plurality of linear heaters H formed to have a length substantially equal to the length of the cylindrical furnace halves 24a and 24b and covered with a quartz tube 64;
(c) Bus bars 44 disposed on both ends of the cylindrical furnace halves 24a and 24b in the body length direction and connected to the both ends in the longitudinal direction of the heaters H so as to be detachably connected. And
(d) Inside the two cylindrical furnace halves 24a and 24b, the plurality of linear heaters H are separated from each other in the inner circumferential direction of the cylindrical furnace halves 24a and 24b and the cylindrical furnace halves 24a and 24b are arranged along the trunk length direction,
(e) Each of the heaters H is electrically connected in parallel via the bus bar 44 at both longitudinal ends thereof.
This is a silicon heating furnace 10.

  In the silicon heating furnace 10 of the present invention, a plurality of linear heaters H built in the cylindrical furnace halves 24a and 24b are formed to have a length substantially equal to the body length of the cylindrical furnace halves 24a and 24b. The cylindrical furnace halves 24a and 24b are spaced apart from each other in the inner circumferential direction and are disposed along the barrel length direction of the cylindrical furnace halves 24a and 24b. Independent heaters H can be provided. As a result, even if a certain heater H is disconnected, the amount of heat generated by the disconnected heater H can be supplemented by a pair of heaters H adjacent to the disconnected heater H, and the heating balance in the furnace is prevented from being greatly disrupted. can do.

  In addition, in the silicon heating furnace 10 of the present invention, since the heater H is covered with the quartz tube 64, even if a cooled substance is put in the heating furnace 10 due to an increase in the heat capacity of the heating element, the temperature drop in the furnace is reduced. The temperature inside the furnace can be quickly restored to the set temperature, and metal impurities released from the heater H during heat generation can be prevented from scattering into the furnace.

  In addition, both longitudinal ends of the heaters H arranged as described above in the cylindrical furnace halves 24a and 24b are disposed at both ends of the cylindrical furnace halves 24a and 24b in the body length direction. become. Each heater H is detachably connected to the bus bars 44 disposed on both ends of the cylindrical furnace halves 24a and 24b via the lead wires 68 connected to both ends in the longitudinal direction. And electrically connected in parallel via the bus bar 44.

  For this reason, when replacing the disconnected heater H, first, the lead wire 68 of the disconnected heater H is removed from the bus bar 44, and then the heater H disconnected from the side surfaces of the cylindrical furnace halves 24a and 24b is quartz. The replacement of the heater H is completed simply by removing it together with the pipe 64 and then fixing the new heater H to the location of the heater H and connecting the lead wires 68 at both ends to the bus bar 44. Thus, in the silicon heating furnace 10 of the present invention, it is not necessary to disassemble all the cylindrical furnace halves 24a and 24b when replacing the heater H, and the time and cost required for replacing the heater can be greatly reduced.

  The invention described in claim 2 is the silicon heating furnace 10 according to claim 1, wherein “on the inner peripheral surface of the semi-cylindrical heat insulating material 34 attached to the inside of the cylindrical furnace halves 24a, 24b, The accommodation groove 34a that extends in the body length direction of the heat insulating material 34 and that slidably accommodates the heater H is dug at a predetermined interval in the circumferential direction. With 34a, the extraction and insertion of the heater H can be performed more easily and quickly.

  According to a third aspect of the present invention, in the silicon heating furnace 10 according to the first or second aspect, "the cylindrical furnace halves 24a and 24b are divided into a plurality of zones in the circumferential direction, and the heater H is divided. The temperature in the silicon heating furnace 10 is controlled even when a large number of independent heaters H are arranged in the cylindrical furnace halves 24a and 24b. Can be managed finely for each zone.

The invention described in claim 4 is a silicon crushing apparatus A using the silicon heating furnace 10,
(1) a transfer device C for transferring the raw silicon chunk 12;
(2) The silicon heating furnace 10 according to any one of claims 1 to 3, wherein the raw material silicon mass 12 is heated;
(3) It is characterized by comprising a cooling water tank W in which the raw material silicon mass 12 heated in the silicon heating furnace is submerged and rapidly cooled.

  In the present invention, since the silicon silicon mass 12 can be uniformly heated by using the silicon heating furnace 10 according to the first and second aspects, uniform cracks are generated in the entire silicon raw material mass 12. be able to. For this reason, the raw material silicon lump 12 can be crushed into a substantially uniform size, and the crushed raw material silicon lump 12 can be efficiently put into a crucible and melted.

  According to the present invention, it is possible to provide a silicon heating furnace that can prevent the heating balance in the furnace from being greatly broken when the heater is disconnected and that is easy to perform maintenance such as heater replacement, and a silicon crushing apparatus using the silicon heating furnace. Can do.

  Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a configuration diagram showing a silicon crushing apparatus A according to an embodiment to which the present invention is applied. As shown in this figure, the silicon crushing apparatus A of this embodiment is generally composed of a transfer apparatus C, a silicon heating furnace 10 and a cooling water tank W.

  The transfer device C includes a basket 14 on which the raw material silicon lump 12 is placed, a wire 16 that suspends the basket 14, a winch 18 that “winds” and “feeds” the wire 16, and the winch 18 in the horizontal direction. When the raw silicon lump 12 is crushed, the basket 14 on which the raw silicon lump 12 is placed is first moved into the silicon heating furnace 10 together with the raw silicon lump 12. After carrying in and heating the raw material silicon lump 12 together with the basket 14 in the heating furnace 10, the basket 14 together with the raw material silicon lump 12 is submerged in the cooling water tank W filled with pure water.

  The basket 14 (FIG. 1) of the transfer device C includes two side plates 14a disposed opposite to each other, and a plurality of pipes that are spanned between the side plates 14a and on which the raw silicon block 12 is placed. 14b, and a wire connecting portion 14c is attached to the top of each side plate 14a, and a wire 16 is connected to the wire connecting portion 14c. Therefore, in the silicon heating furnace 10 to be described later, the size of the heating chamber S1, the opening / closing mechanism of the entrance / exit 22 and the like are designed in consideration of the relationship between the basket 14 and the wire 16.

  The silicon heating furnace 10 (FIGS. 1 to 5) is a cylindrical furnace having a heating chamber S1 (FIG. 1) in which a basket 14 is accommodated, and two cylindrical furnace halves 24a and 24b (specifically, fixed side cylinders). The furnace half 24a and the movable cylindrical furnace half 24b) are combined through a hinge 26 (FIG. 3). When the silicon heating furnace 10 is used, as shown in FIGS. 1 and 3, the fixed-side cylindrical furnace half 24a is attached to the support base 28, and the movable-side cylindrical furnace half 24b is hydraulically operated. The cylinder device 30 is attached, and the openings of the cylindrical furnace halves 24a and 24b, that is, the entrance / exit 22 are opened and closed by the hydraulic cylinder device 30.

  Each of the cylindrical furnace halves 24a and 24b includes a semi-cylindrical housing 32 as shown in FIGS. 2, 5 and 6, and inside the housing 32, as shown in FIG. A material 34, a heater H covered with a quartz tube 64, and a heat equalizing material 36 are incorporated in this order, and the cross section of the inner surface of both ends in the circumferential direction of the housing 32 to prevent the heat insulating material 34 from coming off in the radial direction. An L-shaped radial direction separation preventing member 38 is provided. Further, a circumferential end face covering member 40 that covers the circumferential end face of the heat insulating material 34 is attached to the radial direction separation preventing member 38, and between the circumferential end face of the heat insulating material 34 and the circumferential end face covering member 40. Is provided with a circumferential end face cooling pipe 42.

  On the other hand, as shown in FIG. 7, at both ends in the axial direction of the housing 32, the bus bar 44 for electrically connecting a plurality of heaters H in parallel and the axial detachment preventing member 46 for preventing the thermal insulation material 34 from detaching in the axial direction. Are installed in this order. A mounting plate 48 and two types of support members 50a and 50b are attached to the surface of the axial separation preventing member 46, and a side cooling pipe 52 is disposed in contact with each of the support members 50a and 50b. Has been. Further, a side wall constituting member 54 constituting an inner side wall of the heating chamber S <b> 1 is attached to the surface of the attachment plate 48 by a plurality of attachments 58 together with the cover member 56.

  Further, as shown in FIG. 5, a pipe member 60 having a substantially square cross section is attached to the outer surface of one end portion in the circumferential direction of the housing 32 along the circumferential edge of the housing 32. The pipe member 60 of the body 24a and the pipe member 60 of the movable cylindrical furnace half 24b are connected via a hinge 26 (see FIG. 3). Further, a reinforcing member 62 having a substantially L-shaped cross section or a substantially U-shaped cross section for preventing deformation of the housing 32 is attached to each pipe member 60.

  Below, each structural member of the silicon heating furnace 10 is demonstrated in detail, referring drawings.

  The housing 32 constitutes the outer peripheral wall of the cylindrical furnace halves 24a and 24b, and is formed by bending a plate material made of metal such as stainless steel (SUS) into a semicylindrical shape as shown in FIG. ing. As shown in FIG. 7, notches 63 for leading both ends 42a and 42b of the circumferential end surface cooling pipe 42 to the outside are formed at both circumferential edges at one axial end of the housing 32. As shown in FIGS. 4 and 7, a piece of the radial separation preventing member 38 having a substantially L-shaped cross section is welded or screwed at a position avoiding the notch 63 on the inner surface of both ends in the circumferential direction of the housing 34. It is attached by etc.

  Further, as shown in FIG. 6, at predetermined positions on both ends in the axial direction of the housing 32, there are electrode extraction holes 32a for extracting electrode pieces 44b of the bus bar 44 described later (in the case of the present embodiment, each in the circumferential direction). There are two locations, a total of four locations for the housing 32 as a whole), and a thermocouple mounting hole 32b for mounting a thermocouple T (see FIG. 5) is provided at a predetermined position in the central portion of the housing 32 in the axial direction. Yes. Further, as shown in FIG. 2, an electrode protective cover C1 for protecting an electrode piece 44b (described later) taken out from the electrode take-out hole 32a is attached to the outer surface of the housing 32, and attached to the thermocouple attachment hole 32b. A thermocouple protective cover C2 for protecting the thermocouple T is attached.

  The heat insulating material 34 prevents the heat of the heater H from being directly transmitted to the housing 32. As shown in FIG. 6, a material having excellent heat insulating properties and heat resistance such as ceramic is processed into a semi-cylindrical shape. It is configured by A plurality of grooves 34a extending in the body length direction are formed at predetermined intervals in the circumferential direction on the inner peripheral surface of the heat insulating material 34, and the heater H is accommodated in these grooves 34a.

  The heater H (see FIG. 4) is a rod-shaped or linear (that is, linear) resistance heater, and is composed of a quartz tube 64 formed to a length substantially equal to the body length of the housing 32, and a Kanthal wire. The heating element 66 is inserted into the quartz tube 64.

  Here, the quartz tube 64 covering the heater H (more specifically, the heating element 66) can use either a transparent material or an opaque material, but when an opaque material is used, it is compared with a transparent material. Thus, the heat capacity of the heater H can be further increased.

  As shown in FIGS. 4 and 5, lead wires 68 are connected to both ends in the longitudinal direction of the heater H, and the leading ends of the lead wires 68 are electrically connected to lead wire connecting portions 44a of the bus bar 44 described later. Connected. For this reason, the independent heaters H are electrically connected in parallel via the bus bar 44.

  The soaking material 36 is uniformly heated by the heat from the heater H and constitutes the inner peripheral wall of the heating chamber S1, and is formed in a semi-cylindrical shape by heat-resistant glass such as quartz glass. The heat-resistant glass constituting the soaking material 36 does not diffuse metal impurities and has excellent heat resistance. Therefore, by arranging the heat equalizing material 36 made of such heat-resistant glass inside the heat insulating material 34 and the heater H to constitute the silicon heating furnace 10, metal impurities diffused from the heat insulating material 34 are heated in the heating chamber S1. While being able to prevent diffusion into the inside, it is possible to increase the heat capacity in the furnace, and heat from the heater H can be evenly radiated into the heating chamber S1 through the soaking material 36.

  In addition, the heat resistant glass which comprises the soaking | uniform-heating material 36 can use both a transparent thing and an opaque thing like the quartz tube 64 mentioned above.

  The circumferential end surface covering member 40 prevents the metal impurities diffused from the heat insulating material 34 from diffusing into the heating chamber S1 by covering the circumferential end surface of the heat insulating material 34. FIG. 4 and FIG. As shown, it is formed in a strip shape from a material having excellent heat resistance, such as titanium, which hardly causes thermal diffusion. The circumferential end face covering member 40 is screwed to the radial direction separation preventing member 38.

  The circumferential end surface cooling pipe 42 is a “water pipe” formed by bending a pipe material made of a material having excellent heat resistance such as titanium or the like and hardly causing thermal diffusion into a substantially U shape. As shown in FIG. 6, between the circumferential end face of the heat insulating material 34 and the circumferential end face covering member 40, it is disposed over the entire length of the circumferential end face. Further, both end portions 42 a and 42 b serving as the refrigerant inlet and outlet in the circumferential end surface cooling pipe 42 are led out from the notch 63 of the housing 32 to the outside of the silicon heating furnace 10.

  Here, the circumferential end face covering member 40 and the circumferential end face cooling pipe 42 may be disposed independently of each other, but in this embodiment, the circumferential end face cooling pipe is provided on the back surface of the circumferential end face covering member 40. 42 is welded. Therefore, in the present embodiment, the circumferential end surface cooling pipe 42 can be positioned at the same time as the circumferential end surface covering member 40 is attached to the radial direction separation preventing member 38, and the positioning effort of the circumferential end surface cooling pipe 42 can be reduced. Further, the circumferential end face covering member 40 can be efficiently cooled by the circumferential end face cooling pipe 42.

  The bus bar 44 is an electrode member made of a metal material excellent in heat resistance and conductivity, and is disposed on the outer edge portion of the end surface in the axial direction of the heat insulating material 34 as shown in FIGS. 4, 5, and 7. An arc-shaped plate-like lead wire connecting piece 44a1 to which the lead wire 68 is connected, and an outer peripheral abutting piece 44a2 which is bent substantially perpendicularly from the outer peripheral edge of the lead wire connecting piece 44a1 and comes into contact with the outer peripheral surface of the heat insulating material And an electrode piece 44b protruding from the tip of the outer peripheral contact piece 44a2.

  Among them, a plurality of lead wire mounting holes 45 are formed on the same arc on the inner peripheral edge side of the lead wire connecting piece 44a1 constituting the lead wire connecting portion 44a. The tip of the lead wire 68 of each heater H is removably attached.

  In addition, a plurality of screw holes 47 through which the fixing screw n is inserted when the bus bar 44 is screwed to the end surface in the axial direction of the heat insulating material 34 are formed on the outer peripheral edge side of the lead wire connecting piece 44a1.

  Here, in the silicon heating furnace 10 of the present embodiment, two bus bars 44 are attached to both ends of the cylindrical furnace halves 24a and 24b in the body length direction. For this reason, the cylindrical furnace halves 24a and 24b are divided into two zones in the circumferential direction, and the temperature of the heater H can be controlled separately for each zone.

  The axial detachment preventing member 46 is disposed on the axial end face side of the heat insulating material 34 to prevent the heat insulating material 34 from detaching in the axial direction. As shown in FIGS. It is a substantially semicircular arc-shaped member that is fitted into the space at both ends in the axial direction of the housing 32 surrounded by the end surface in the axial direction, the soaking material 36 and the housing 32.

  As shown in FIG. 7, the mounting plate 48 is a member formed by providing a semicircular cutout portion 48 a in a part of a plate material, and a plurality of screw holes 48 b are formed at predetermined positions on the surface of the mounting plate 48. It is provided and fixed to the surface of the axial detachment preventing member 46 via a mounting screw 70.

  2 and 3, the shape of the mounting plate 48 is different in each of the cylindrical furnace halves 24a and 24b, and the shape of the mounting plate 48 in the fixed-side cylindrical furnace half 24a is It is set according to the shape of the support base 28 to be attached, and the shape of the attachment plate 48 in the movable cylindrical furnace half 24b is set so as to secure the attachment portion 72 for attaching the hydraulic cylinder device 30. Yes.

  The support members 50 a and 50 b are screwed to the soaking material 36 and the axial detachment preventing member 46, thereby supporting the axial end of the soaking material 36. It is used properly according to the part. Specifically, the support member 50a supports the axial end portion of the heat equalizing material 36 at its circumferential end portion, and the support member 50b supports the axial end portion of the heat equalizing material 36 in its circumferential direction. It is supported by a part other than the end part.

  The material of the support members 50a and 50b is not particularly limited. However, in order to prevent metal contamination of the raw material silicon lump 12, a material that has excellent heat resistance such as titanium or the like and hardly causes thermal diffusion. It is desirable to use

  The side cooling pipe 52 is a “water pipe” made of a material having excellent heat resistance such as titanium and hardly causing thermal diffusion, and as shown in FIG. 7, it is in contact with all the supporting members 50a and 50b. Arranged. That is, the side surface cooling pipe 52 is disposed along the outer peripheral edge and the circumferential edge of the heat insulating material 34 and the inner peripheral edge of the heat equalizing material 36, and both end portions of the side surface cooling pipe 52 are substantially at the center of the housing 32. It arrange | positions so that it may guide | emit to the outer side of the housing 32 in a part.

  The support members 50a and 50b and the side surface cooling pipe 52 may be disposed independently of each other, but in this embodiment, the side surface cooling pipe 52 is welded to each of the support members 50a and 50b. Therefore, in the present embodiment, the side cooling pipe 52 can be positioned at the same time that the support members 50a and 50b are attached to the axial direction separation preventing member 46, and the labor for positioning the side cooling pipe 52 can be reduced. In addition, the support members 50 a and 50 b can be efficiently cooled by the side cooling pipe 52.

  As shown in FIGS. 4 and 7, the side wall constituting member 54 covers the axial end surface of the heat insulating material 34 from the surface side of the axial detachment preventing member 46 and the mounting plate 48 and constitutes the inner side wall of the heating chamber S <b> 1. It is formed in a semi-disc shape from heat-resistant glass such as quartz glass. The side wall constituting member 54 is formed with a substantially circular window 74 through which the wire connecting portion 14c of the basket 14 accommodated in the heating chamber S1 is led out.

  As shown in FIGS. 4 and 7, the cover member 56 covers the side wall constituting member 54, and includes a semi-disc-shaped cover plate portion 56 a disposed to face the side wall constituting member 54, and a cover plate. And a peripheral wall portion 56b that forms a space for accommodating the side wall constituting member 54. The cover plate portion 56a corresponds to the window 74 of the side wall constituting member 54. A substantially circular window 76 is formed.

  A heat insulating material 78 made of a ceramic sheet or the like is disposed between the cover plate portion 56a and the side wall constituting member 54. As shown in FIGS. 2 and 3, the window 76 of the cover member 56 is provided with a lid body 80 that can be opened and closed.

  As shown in FIGS. 3 and 7, the attachment 58 is for attaching the cover member 56 to which the side wall constituting member 54 is attached to the attachment plate 48, and a pair of attachment plate portions 58a and 58b parallel to each other. , A substantially “Z” -shaped member composed of a connecting plate portion 58c for connecting them. The attachment 58 is configured such that the attachment plate portion 58 a is screwed to the outer edge of the cover plate material 56 and the attachment plate portion 58 b is screwed to the attachment plate 48, so that the cover member 56 is detachably fixed to the attachment plate 48. .

  According to the present embodiment, the plurality of heaters H built in the cylindrical furnace halves 24a and 24b are formed to have a length substantially equal to the barrel length of the cylindrical furnace halves 24a and 24b, and the cylindrical furnace halves. Since they are spaced apart from each other in the inner circumferential direction of 24a and 24b and along the trunk length direction of the cylindrical furnace halves 24a and 24b, as shown in FIG. A book independent heater H can be provided. As a result, even if a certain heater H is disconnected, the amount of heat generated by the disconnected heater H can be compensated by a pair of heaters H adjacent to the disconnected heater H, and the heating balance in the furnace is greatly disrupted. Can be prevented.

  Also, the longitudinal ends of the heater H arranged as described above inside the cylindrical furnace halves 24a and 24b are arranged on the side surfaces of the cylindrical furnace halves 24a and 24b as shown in FIG. Become so. For this reason, the end portion of the heater H is exposed to the outside only by removing the screw-fastened attachment 58 and removing the cover member 56 and the side wall constituting member 54 from the attachment plate 48. That is, it is not necessary to disassemble all the cylindrical furnace halves 24a and 24b when replacing the heater H, the disconnected heater H can be replaced from the side of the cylindrical furnace halves 24a and 24b, and the time and cost required for heater replacement Can be greatly reduced.

It is a block diagram which shows the silicon | silicone crushing apparatus of one Example of this invention. It is a perspective view which shows the silicon heating furnace of one Example of this invention. FIG. 3 is an X arrow view in FIG. 2. FIG. 4 is a sectional view taken along line I-I ′ in FIG. 3. It is the II-II 'sectional view taken on the line in FIG. It is a disassembled perspective view of the radial direction which shows a cylindrical furnace half body. It is a disassembled perspective view of the axial direction which shows a cylindrical furnace half body. It is (a) front view and (b) right view which show the outline of the conventional silicon crushing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Silicon heating furnace 12 ... Raw material silicon | silicone 24a, 24b ... Cylindrical furnace half body 26 ... Hinge 28 ... Support stand 30 ... Hydraulic cylinder apparatus 32 ... Housing 34 ... Heat insulating material 36 ... Heat equalizing material 38 ... Radial direction separation prevention member 40 ... Circumferential end face covering member 42 ... circumferential end face cooling pipe 44 ... bus bar 46 ... axial detachment preventing member 48 ... mounting plate 50a, 50b ... support member 52 ... side cooling pipe 54 ... side wall constituent member 56 ... cover member 58 ... fixture 64 ... quartz tube 66 ... heating element 68 ... lead wire A ... silicon crushing device H ... heater C ... transport device W ... cooling water tank T ... thermocouple

Claims (4)

A silicon heating furnace that is configured by combining two cylindrical furnace halves in a cylindrical shape and heats a raw material silicon lump to be heated inside,
A plurality of linear heaters formed in a length substantially equal to the length of the cylindrical furnace half and covered with a quartz tube;
A bus bar which is disposed on both ends of the cylindrical furnace half in the body length direction, and which is connected to the both ends in the longitudinal direction of the heaters so as to be detachable;
Inside the two cylindrical furnace halves, the plurality of linear heaters are spaced apart from each other in the inner circumferential direction of the cylindrical furnace halves and arranged along the trunk length direction of the cylindrical furnace halves. In addition, each of the heaters is electrically connected in parallel via the bus bars at both ends in the longitudinal direction.   On the inner peripheral surface of the semi-cylindrical heat insulating material attached to the inside of the cylindrical furnace half, an accommodation groove that extends in the body length direction of the heat insulating material and slidably accommodates the heater is predetermined in the circumferential direction. The silicon heating furnace according to claim 1, wherein the silicon heating furnace is dug at intervals.   3. The silicon heating furnace according to claim 1, wherein the cylindrical furnace half is divided into a plurality of zones in the circumferential direction, and the heater is controlled for each divided zone. A transfer device for transferring raw material silicon;
The silicon heating furnace according to any one of claims 1 to 3, wherein the raw silicon is heated;
A silicon crushing apparatus comprising: a cooling water tank that submerged and rapidly cools raw silicon heated in the silicon heating furnace.

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