JPH07253276A - Heat treating furnace, and manufacture thereof - Google Patents

Abstract

PURPOSE:To provide a heat treating furnace and a method for manufacturing the same in which operability is improved, a manufacturing time is shortened, and an accuracy of an arranging pitch of heat generating resistors is improved. CONSTITUTION:A heat treating furnace 1 comprises spiral heat generating resistors 9 along an inner wall surface of a cylindrical heat insulator 10, and a support 18 divided into a plurality in an axial direction of the insulator 10 to support the resistors 9. The supports 18 have a plurality of support pieces extended radially outward via pitches of the resistors 9 at a base disposed inside the resistors 9, wherein the ends of the pieces are buried in the insulator 10. Thus, since its structure is simplified, its manufacture is facilitated, operability is improved, its manufacturing time is shortened, and an accuracy of arranging pitch of the resistors 9 is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment furnace and its manufacturing method.

[0002]

2. Description of the Related Art In manufacturing a semiconductor wafer, which is an object to be processed, oxidation, diffusion, CVD (Chemical Vapor D
Various heat treatment apparatuses are used to perform processing such as eposition). In addition, the general heat treatment apparatus includes a process tube that forms a processing chamber for accommodating and processing a semiconductor wafer, a heater that is provided around the process tube and that includes a heating resistor, and the periphery of the heater. A heat treatment furnace is constituted by the heat insulating material provided in the heat insulating material, and the heat generating resistor is installed on the inner wall surface of the heat insulating material.

As the heating resistor, for example, in the case of a heat treatment apparatus capable of batch processing, a heater wire spirally provided along the inner wall surface of a cylindrical heat insulating material is used, for example, in a furnace chamber. It is designed to be heated to a high temperature of about 1200 ° C. Further, as the heat insulating material, for example, a ceramic fiber or the like is used, and the amount of heat taken as radiant heat and conductive heat can be reduced to promote efficient heating.

By the way, as a method for installing a heating resistor on the heat insulating material, for example, Japanese Patent Laid-Open No. 60-2465 is used.
There is a method described in Japanese Patent Publication No. 82. In this method, a coil-shaped heater wire is used as a heating resistor, and the heater wire is covered with a heat-shrinkable tube to be heat-shrinked to fix the array pitch of the heater wires, and then a window-shaped center type is used. Is spirally wound and the heater wire is wound along the window mold.

Next, a mold for arranging the bottom mold and the outer mold in the central mold is assembled, and the mold is filled with a mortar-shaped heat insulating material. Then, after the heat insulating material is cured, release, drying, and firing are sequentially performed, so that the heater wire in which the heat-shrinkable tube is melted is embedded in a state that the heater wire faces the heat dissipation window on the inner wall surface of the heat insulating material. To get

[0006]

However, in the method described above, the coating of the heat shrinkable tube on the heater wire,
There is a problem that many work steps are required such as winding of the window type and the heater wire with respect to the center type, assembling and releasing of the form, curing of the heat insulating material, drying and baking, and the workability is poor and the manufacturing time is long. is there. Further, when forming the heater wires in a spiral shape at a predetermined arrangement pitch, it is difficult to obtain high accuracy because the operator's experience is often used.

Therefore, an object of the present invention is to provide a heat treatment furnace and a manufacturing method thereof which can solve the above problems, improve workability and shorten the manufacturing time, and improve the accuracy of the arrangement pitch of the heating resistors. To provide.

[0008]

In order to achieve the above object, the invention according to claim 1 is a heat treatment furnace provided with a spiral heating resistor along an inner wall surface of a cylindrical heat insulating material, There is a support body that is divided into a plurality of in the axial direction of the heat insulating material and supports the heating resistor, and each support passes through the pitch of the heating resistor on the base located inside the heating resistor. It is characterized in that a plurality of support pieces extending outward in the radial direction are formed, and the tips of these support pieces are embedded in the heat insulating material.

According to a second aspect of the present invention, the heat generating resistor according to the first aspect has terminal plates extending through the heat insulating material to the outside at appropriate intervals in the axial direction of the heat insulating material. In addition, the plate surfaces of these terminal boards are arranged along the axial direction of the heat insulating material.

Further, a third aspect of the present invention is a method for manufacturing a heat treatment furnace in which a spiral heating resistor is provided on the inner wall surface of a cylindrical heat insulating material, and the plates are arranged outside at appropriate intervals in the axial direction. A spiral heating resistor having a terminal plate whose surface is arranged along the axial direction, and a base located inside the heating resistor that extends radially outward through the pitch of the heating resistor. Prepare a support formed by forming a plurality of support pieces and a jig for positioning the support at a predetermined position in the circumferential direction of the heating resistor and aligning it in the axial direction, while rotating the jig. A step of mounting the heating resistor on the jig via the support, and a filter medium is disposed on the outer periphery of the heat resistor avoiding the terminal plate and the supporting piece of the support, and the filter medium is placed on the filter. A step of arranging thin rods along the axial direction of the heating resistor at appropriate intervals in the circumferential direction; A step of immersing the heating resistor in a suspension containing inorganic fibers forming a heat insulating material and depositing the heat insulating material on the filter medium by suction from the inside of the heat generating resistor; and A step of drying, a step of extracting the rod material from between the heat insulating material and the filter material after drying, and a step of extracting the filter material from between the heat insulating material and the heat generating resistor; And a step of removing the same from the above.

[0011]

According to the invention as set forth in claim 1, a support having a plurality of support pieces extending radially outward on the inner wall surface of the cylindrical heat insulating material through the pitches of the spiral heating resistors. The body has a simple structure that supports the heat generating resistor by arranging the body in the axial direction of the heat insulating material in a state where the tip of the support piece is embedded in the heat insulating material. Set the pitch. Therefore, the manufacturing is easy, the workability is improved, the manufacturing time is shortened, and the accuracy of the arrangement pitch of the heating resistors is improved. In addition, since the support pieces are not independent, but are formed in plurality at the base of the support body, the strength can be improved and the shape can be maintained, so that the heating resistor can be stabilized. It is possible to support, and it is possible to allow the thermal expansion and contraction of the heating resistor in the radial direction in the gap between the adjacent support pieces.

According to the second aspect of the present invention, since the plate surface of the terminal plate provided on the heat generating resistor is arranged along the axial direction of the heat insulating material, the heat generating resistor and the heat insulating material are formed in the manufacturing process. When the filter material provided between the two is removed, the filter material does not get caught on the terminal plate, and the filter material can be easily removed, further improving workability.

According to the third aspect of the present invention, the heating resistor is preliminarily formed in a spiral shape, and the base portion located inside the heating resistor passes through the pitch of the heating resistor and is radially outside. Rotate this jig by using a support formed of a plurality of support pieces extending in one direction and a jig that positions this support at a predetermined position in the circumferential direction of the heating resistor and aligns it axially. Since the heating resistors are mounted on this jig via the support while being done, the labor of winding the heating resistors in a spiral shape is saved, and the array pitch of the heating resistors is automatically set by the support piece. Since it is done, the labor of arrangement can be saved.

When the heat insulating material is provided on the outside of the heat generating resistor, the heat insulating material is deposited on the outer side of the heat generating resistor simply by suction from the inside of the heat generating resistor immersed in the suspension. Since it is possible to form the heat insulating material, it is not necessary to assemble and release the mold, and the heat insulating material only needs to be dried and the firing process is not necessary. Is possible. Furthermore, when removing the filter material interposed between the heating resistor and the heat insulating material,
There is a gap between the filter material and the heat insulating material due to the removal of the bar material interposed between the filter material and the heat insulating material, and the plate surface of the terminal board is arranged in the axial direction of the heat insulating material. Since it is difficult for the filter material to be caught on the terminal plate, the filter material can be easily removed. As described above, it is possible to improve the workability in manufacturing the heat treatment furnace, shorten the manufacturing time, and improve the accuracy of the arrangement pitch of the heating resistors.

[0015]

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is a vertical sectional view showing the overall construction of a heat treatment furnace which is an embodiment of the present invention. The heat treatment furnace 1 is a vertical furnace configured to be suitable for performing a film forming process by a low pressure CVD on a semiconductor wafer W which is an object to be processed, and has a circular opening 2a in a central portion thereof, for example, stainless steel. The base plate 2 made of is horizontally provided.

A short cylindrical manifold 3 made of a heat-resistant metal, such as stainless steel, is detachably attached to the lower portion of the base plate 2 by bolting with the shaft center aligned with the opening 2a. Is provided with a cylindrical process tube 4 made of a heat-resistant material such as quartz for forming the processing chamber. In the case of this embodiment, the process tube 4 has a double pipe structure in which an inner pipe 5 whose upper and lower ends are open and an outer pipe 6 whose upper end is closed are concentrically arranged. It may consist of the outer tube only.

An inlet port 7 for introducing a processing gas from a processing gas supply source (not shown) into the process tube 4 is provided in the manifold 3, and the inside of the process tube 4 is exhausted by a decompressing means (not shown) to, for example, 10 to 10. ^-8 T
An outlet port 8 for vacuuming to about orr is provided. A heating resistor 9 to be described later and a cylindrical heat insulating member 10 surrounding the heat resistor 9 are provided around the process tube 4 as a heater for heating the inside of the process tube 4 to a high temperature, for example, about 800 to 1200 ° C. Is covered with an outer shell (not shown) made of, for example, stainless steel. The heat insulating material 10 and the outer shell are supported on the base plate 2.

Below the manifold 3, a lid 11 made of, for example, stainless steel for opening and closing the lower surface opening (furnace port) is provided so as to be able to move up and down by an elevating mechanism 12, and a large number of sheets, for example 150 A wafer boat 13 that holds a plurality of semiconductor wafers W in a horizontal state in multiple stages at intervals in the vertical direction is mounted via a heat insulating cylinder 14. It should be noted that the lid 11 is provided with a rotation mechanism 15 and the like for rotationally driving the heat retaining cylinder 14.

On the other hand, the heating resistor 9 is made of, for example, iron (F).
e), chrome (Cr) and aluminum (Al) alloy wire made of Kanthal wire, the thickness of which varies depending on the specifications of the heat treatment furnace 1, but in the present embodiment, the diameter is about 3.5 mm. It is used. As shown in FIG. 2, the heat generating resistor 9 is formed in a spiral shape along the inner wall surface of the heat insulating material 10 at a required pitch, and the heat insulating material 10 is attached to the spiral heat generating resistor 9. Terminal plates 16 for electrode connection that penetrate through and extend to the outside are provided at appropriate intervals in the axial direction of the heat insulating material 10 so that the temperature inside the heat treatment furnace 1 can be divided into a plurality of zones in the vertical direction for temperature control. It is configured. The terminal plate 16 is made of the same material as the heat generating resistor 9, and is formed in a plate shape having a required cross-sectional area from the viewpoint of fusing prevention and suppression of heat radiation.

The terminal plate 16 is arranged such that its plate surface is along the axial direction of the heat insulating material 10. This is because the filter material 17 does not get caught on the terminal plate 16 when the filter material 17 (see FIG. 6) interposed between the heating resistor 9 and the heat insulating material 10 is pulled out in the manufacturing process described later, This is because it is possible to easily remove the material 17. In order to have such an arrangement configuration, the heating resistor 9 is cut at the mounting portion of the terminal plate 16 at its intermediate position as shown in FIGS.
9b is bent outward in the radial direction, and both ends 9 are bent.
Both sides of one end of the terminal plate 16 are sandwiched between a and 9b and fixed by welding or the like (Note that at both end positions of the heating resistor, the ends are bent, and one side of the terminal plate is welded thereto. Fix it.).

The heating resistor 9 is shown in FIGS.
As shown in FIG. 5, the heat insulating and electrically insulating material, such as ceramics, is attached to the inner wall surface of the heat insulating material 10 with a required gap G in a state in which the arrangement pitch is set so that a required amount of heat can be secured through the support 18. Has been. This support 1
8 is divided into a plurality of parts in the axial direction of the heat insulating material 10, and each support 18 has a base 19 located inside the heating element resistor 9 and adjacent pitches of the heating resistor 9 as shown in FIG. A plurality of wires (4 in the embodiment) that extend radially outward through the spaces
The supporting piece 20 of (book) is integrally formed, and is formed in a so-called comb shape.

The tip end of the support piece 20 is embedded and supported in the heat insulating material 10, and a long one is appropriately formed to obtain the support strength in that case. In the embodiment, the support piece 2 having a long length is used so that the adjacent pieces have different lengths.
0a and short support pieces 20b are alternately formed, and a slit-shaped gap S for accommodating the heating resistor 9 is provided between the adjacent support pieces 20a and 20b. Also, a long support piece 2
A protrusion 21 for preventing the heat insulating material 10 from coming off is formed at the tip portion of 0a. The protrusion 21 is formed on one surface of the support piece 20a in order to facilitate the die cutting at the time of manufacturing, but it may be formed on both surfaces.

The support 18 formed in this manner has the support piece 20 with the tip end portion thereof embedded in the heat insulation material 10.
They are arranged in series in the axial direction of 0, and are arranged at equal intervals in the circumferential direction, for example, at intervals of a circumferential angle of about 30 degrees. In addition, when the supporting strength of the supporting piece 20 by the heat insulating material 10 is sufficiently obtained, the supporting pieces 20 may have the same length.
The protrusion 21 may not be provided.

According to the heat treatment furnace 1 configured as described above, the spiral heating resistor 9 is provided on the inner wall surface of the cylindrical heat insulating material 10.
Support 18 having a plurality of support pieces 20 extending outward in the radial direction through the pitches of the pitches of the support pieces 20 are arranged in the axial direction of the heat insulation material 10 with the tips of the support pieces 20 embedded in the heat insulation material 10. Then, the heating resistor 9 is supported in a simple structure, and the plurality of support pieces 20 of the support 18 set the arrangement pitch of the heating resistors, so that the manufacturing is easy and the workability is improved and the manufacturing time is shortened. At the same time, the accuracy of the arrangement pitch of the heating resistors 9 can be improved.

Further, since the supporting pieces 20 are not individually independent but are formed in plurals on the base portion 19 of the supporting body 18, the strength is improved and the shape is not lost, and heat is generated. The resistor 9 can be stably supported. Since a slit-shaped gap S is formed between the adjacent support pieces 20 and a gap G is formed between the heat generating resistor 9 and the inner wall surface of the heat insulating material 10, the heat generating resistor 9 has a gap. It is possible to allow thermal expansion and contraction in the radial direction.

Further, the terminal board 1 provided on the heating resistor 9
Since the plate surface of 6 is arranged along the axial direction of the heat insulating material 10, the filter material 17 interposed between the heating resistor 9 and the heat insulating material 10 in the manufacturing process is removed from the axial direction of the heat insulating material 10. When the filter material 17 is pulled out, the filter material 17 is not caught on the terminal plate 16, and the filter material 17 can be easily pulled out, further improving workability.

Next, the heat treatment furnace 1 having the above structure.
The manufacturing method of will be described. This manufacturing method mainly includes (1) a step of mounting a heating resistor on a jig, (2) a step of arranging a filter material and a rod on the heating resistor, and (3) deposition of a heat insulating material on the heating resistor. Steps (4) drying the heat insulating material, (5) extracting the filtering material and the rod, and (6) removing the jig. These steps will be described below.

(1) Step of mounting heat generating resistor on jig First, as shown in FIGS. 7 to 8, the terminal plate 16 is arranged on the outside at appropriate intervals in the axial direction and the plate surfaces are arranged along the axial direction.
The heating resistor 9 having a spiral shape and a base portion 19 located inside the heating resistor 9 as shown in FIG. 6, extend radially outward through the pitch of the heating resistor 9. A support 18 formed by forming a plurality of support pieces 20 (20a, 20b) and a jig 22 for positioning the support 18 at a predetermined position in the circumferential direction of the heating resistor 9 and aligning them in the axial direction are prepared. To do.

This jig 22 is provided with annular bases 25 on a hollow support shaft 23 via radial spokes 24 at appropriate intervals along the axial direction, and is opened outward on the outer periphery of these bases 25. The channel-shaped guide members 26 are formed in a drum shape by spanning the guide members 26 in the axial direction and arranging them at equal intervals in the circumferential direction. The support 18 is mounted in the guide member 26 of the jig 22. A plurality of suction holes 27 are provided on the peripheral surface of the support shaft 23.

While rotating the jig 22 thus constructed, the spiral heating resistor 9 is provided on the jig 22 from one end thereof and the gap S between the support pieces 20 of the support 18 is formed.
Insert it through and screw it in.

(2) Step of disposing the filtering material and the rod material on the heating resistor 9. The terminal board 16 and the support 1 are provided on the outer periphery of the heating resistor 9.
The filter material 17 is arranged avoiding the supporting pieces 20 of No. 8 and the thin rods 28 along the axial direction of the heating resistor 9 are arranged on the filter material 17 at appropriate intervals in the circumferential direction. As the filter material 17, for example, a fine mesh made of aluminum or the like is suitable, and as the rod material 28, for example, a round bar made of stainless steel having a diameter of about 1 to 2 mm is suitable. The filter material 17 is arranged on the entire outer peripheral surface of the heat generating resistor 9 so as to avoid the support piece 20 and the terminal plate 16 and is removable from the axial direction so as to have a predetermined thickness. The rod 28 is arranged and fixed with a thread or the like.

(3) Step of depositing heat insulating material on heat generating resistor The heat generating resistor 9 is dipped in a suspension 29 containing inorganic fibers forming a heat insulating material and sucked from the inside of the heat generating resistor 9. The heat insulating material is deposited on the filter material 17.
In this case, as shown in FIG. 9, the heating resistor 9 together with the jig 22 is immersed in the suspension tank 30 with both ends of the jig 22 in the axial direction of the heating resistor 9 being closed. The suspension 2
As the material 9, there is used a slurry-like material composed of an inorganic fiber containing silica, alumina or alumina silicate, water and a binder.

By connecting a suction pump 31 to the hollow support shaft 23 of the jig 22, a suction hole 27 of the support shaft 23 is formed.
When the pressure inside the heating resistor 9 is reduced via the
Is attracted to the surface of the filter material 17 and a fibrous component that is a heat insulating material that does not pass through the filter material 17 is laminated on the filter material 17. Although the moisture and the fibrous components that have passed through the filter material 17 are recovered via the discharge pipe 32 of the suction pump 31, they may be circulated again in the suspension tank 30.

Further, in this case, the jig 2 is inserted through the support shaft 23.
The suspension 2 in the suspension tank 30 is rotated by rotating the suspension 2.
9 can be agitated and the heat insulating material can be deposited on the filter material 17 with a uniform thickness. By depositing the heat insulating material on the filter material 17 in this manner, the heat insulating material 10 having a desired layer thickness is formed, and the tip end portion of the support piece 20 of the support 18 is embedded in the heat insulating material 10. Become.

In this step, by changing the density of the suspension 29, as shown in FIG. 3, the heat insulating material 10 has a two-layer structure of a high density layer 10A on the inner side and a low density layer 10B on the outer side, or a multi-layer structure. However, a single layer structure is also acceptable. In the case of the embodiment, the high density layer 10A
By this, the support strength of the support 20 can be improved, and the low-density layer 1
With 0B, the heat insulation can be improved and the weight can be reduced.

(4) Drying Step of Heat Insulating Material When the heat insulating material 10 having a desired thickness is formed on the filter material 17 in the above step, the jig 22 and the heat insulating material 10 are pulled out from the suspension tank 30 to remove the filter material 17 The insulating material deposited on it is dried naturally or by force. As a result, the cylindrical heat insulating material 10 is obtained.

(5) Extraction Step of Filter Material and Rod Material After drying, the rod material 28 is extracted axially from between the heat insulating material 10 and the filter material 17, and the heat insulating material 10 and the heat generating resistor 9 are further removed. The filter material 17 is pulled out from between. Since the rod 28 has a small diameter and a small contact area with the heat insulating material 10, it can be easily pulled out, and when the rod 28 is pulled out, a slight gap is generated between the heat insulating material 10 and the filtering material 17. The filter material 17 can be extracted relatively easily. By removing the filter material 17, a gap G is formed between the heat insulating material 10 and the heat generating resistor 9, and the gap G allows the heat generating resistor 9 to be displaced radially outward due to thermal expansion. be able to.

(6) Jig Removal Step In this step, the jig 22 supporting the support 18 is pulled out from the axial direction of the heat insulating material 10 to remove the jig 22 from the support 18. Then, by performing the surface treatment of the heat insulating material 10 or the like, the heat treatment furnace 1 in which the heating resistor 9 is installed on the inner wall surface of the cylindrical heat insulating material 10 via the support 18 is obtained.

According to the method for manufacturing the heat treatment furnace 1 having such steps, the heating resistor 9 is formed in a spiral shape in advance, and the heating resistor 9 is formed on the base portion 19 located inside the heating resistor 9. A support 18 formed by a plurality of support pieces 20 extending outward in the radial direction through the pitches of 9 and the support 18 is positioned at a predetermined position in the circumferential direction of the heating resistor 9 Using a jig 22 that is aligned in the direction, the support 18 is placed on the jig 22 while rotating the jig 22.
Since the heat generating resistors 9 are mounted via the connector, it is not necessary to wind the heat generating resistors 9 in a spiral shape, and moreover, the arrangement pitch of the heat generating resistors 9 is automatically adjusted by the plurality of supporting pieces 20 of the supporting body 18. Since it is set to, the labor of arrangement can be saved.

When the heat insulating material 10 is provided on the outside of the heating resistor 9, the outside of the heating resistor 9 is filtered only by suction from the inside of the heating resistor 9 immersed in the suspension 29. Since the heat insulating material 10 can be formed by depositing the heat insulating material through the material 17, the work of assembling the mold and the mold releasing work are unnecessary, and the heat insulating material 10 only needs to be dried, and the firing process Since it is unnecessary, it can be formed in a short time. Furthermore, the heating resistor 9 and the heat insulating material 1
When removing the filter material 17 interposed between the filter material 17 and the heat insulating material 10, the rod material 28 interposed between the filter material 17 and the heat insulating material 10 is removed. Since there is a gap between them and the plate surface of the terminal plate 16 is arranged in the axial direction of the heat insulating material 10 so that the filter material 17 is not easily caught by the terminal plate 16, the filter material 17 can be easily removed. Becomes As described above, the workability in manufacturing the heat treatment furnace 1 can be improved, the manufacturing time can be shortened, and the accuracy of the arrangement pitch of the heating resistors 9 can be improved.

The present invention is not limited to the above embodiment, but various modifications can be made within the scope of the gist of the present invention. For example, when the heat insulating material is formed in two layers as in the above embodiment, the high density layer 10A and the low density layer 10 are formed.
A mesh material made of, for example, aluminum may be provided between B, whereby the reflection of radiant heat from the heating resistor 9 and the strength of the heat insulating material 10 can be improved. Also, the heating resistor 9
Insulation material 1 to reflect radiant heat from the
A cloth material made of silica, for example, may be stretched on the inner wall surface of No. 0.

Further, the object to be heat-treated in the heat treatment furnace to which the present invention is applied may be at least a planar object to be processed, and other than the semiconductor wafer W, for example, L
A CD substrate or the like can be applied. Further, as the heat treatment furnace to which the present invention is applied, other than the reduced pressure CDV, for example, oxidation,
It may be suitable for treatments such as diffusion and annealing.

[0044]

In summary, according to the present invention, the following excellent effects can be obtained.

(1) According to the invention described in claim 1, a plurality of support pieces extending radially outward through the inner wall surface of the cylindrical heat insulating material through the pitch of the spiral heating resistors. With a simple structure for supporting the heat-generating resistor by arranging the support having the support member in the axial direction of the heat-insulating material in a state where the tip of the support piece is embedded in the heat-insulating material, the plurality of support pieces of the support member have heat-generating resistance. Since the arrangement pitch of the bodies is set, the manufacturing is easy, the workability is improved, the manufacturing time is shortened, and the accuracy of the arrangement pitch of the heating resistors is improved.

(2) According to the second aspect of the invention, since the plate surface of the terminal plate provided on the heating resistor is disposed along the axial direction of the heat insulating material, the heating resistor is not formed in the manufacturing process. When the filter material provided between the heat insulating material and the heat insulating material is removed, the filter material does not get caught on the terminal plate, and the filter material can be easily removed, further improving the workability.

(3) According to the third aspect of the invention, the spiral heating resistor can be attached to the jig via the support simply by rotating the jig in which the support is arranged.
The arrangement pitch of the heating resistors is set by the supporting pieces of the supporting body, and the heat insulating material is deposited on the outside of the heating resistor simply by immersing the heating resistor in the suspension and sucking it from the inside of the heating resistor. Insulation can be formed in a short time,
When removing the filter material that is interposed between the heat generating resistor and the heat insulating material, remove the bar material that is interposed between the filter material and the heat insulating material to remove the filter material between the filter material and the heat insulating material. Since there is a gap and the plate surface of the terminal plate is arranged in the axial direction of the heat insulating material so that the filter material is not easily caught on the terminal plate, the filter material can be easily removed. Therefore, it is possible to improve the workability and shorten the manufacturing time when manufacturing the heat treatment furnace, and to improve the accuracy of the arrangement pitch of the heating resistors.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view showing the overall structure of a heat treatment furnace which is an embodiment of the present invention.

FIG. 2 is a perspective view showing a part of the heat treatment furnace.

FIG. 3 is a partially enlarged plan sectional view of the heat treatment furnace.

FIG. 4 is a partially enlarged side sectional view of the heat treatment furnace.

FIG. 5 is an enlarged perspective view of a support.

FIG. 6 is a perspective view for explaining the configuration of a jig used in the method for manufacturing a heat treatment furnace to which the present invention is applied.

FIG. 7 is a side view showing a heating resistor having a terminal plate.

FIG. 8 is a plan view partially showing a mounting state of a terminal plate in the same heating resistor.

FIG. 9 is a schematic diagram for explaining a step of depositing a heat insulating material on the filter material in the method for manufacturing the heat treatment furnace.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heat treatment furnace 9 Exothermic resistor 10 Thermal insulation 16 Terminal board 17 Filtration material 18 Support 19 Base 20 Support piece 22 Jig 28 Bar

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Office reference number FI Technical indication location H01L 21/22 511 A 21/324 H H05B 3/06 A 7512-3K (72) Inventor Yasuaki Miura Kanagawa Prefecture Tsukui Group Shiroyama Town Machiya 1-24-1 Tokyo Electron Tohoku Co., Ltd. Sagami Business Office (72) Inventor Osamu Yokokawa Kanagawa Prefecture Tsukui Group Shiroyama Machiya 1-241 Tokyo Electron Tohoku Co., Ltd. Sagami Business In-house

Claims (3)

[Claims] 1. A heat treatment furnace provided with a spiral heating resistor along an inner wall surface of a cylindrical heat insulating material, wherein the heat insulating furnace is divided into a plurality of parts in the axial direction of the heat insulating material to support the heat generating resistor. A support member, each support member having a plurality of support pieces extending outward in the radial direction at a base portion located inside the heat generating resistor, passing through the pitch of the heat generating resistor; A heat treatment furnace, wherein the tip ends of these support pieces are embedded in the heat insulating material. 2. The heating resistor has terminal plates that extend through the heat insulating material to the outside at appropriate intervals in the axial direction of the heat insulating material, and the plate surfaces of these terminal plates are the heat insulating material. The heat treatment furnace according to claim 1, wherein the heat treatment furnace is arranged along the axial direction of. 3. A method for manufacturing a heat treatment furnace comprising a spiral heat generating resistor provided on an inner wall surface of a cylindrical heat insulating material, the plate surface being arranged along the axial direction at appropriate intervals on the outside. A spiral heating resistor having a terminal plate formed therein, and a plurality of supporting pieces extending radially outward through the pitch of the heating resistor at a base portion located inside the heating resistor. And a jig for positioning the support at a predetermined position in the circumferential direction of the heating resistor and aligning the support in the axial direction, and rotating the jig to place the support on the jig. Through the step of mounting the heat generating resistor through, and disposing the filter material on the outer periphery of the heat generating resistor while avoiding the supporting pieces of the terminal plate and the support, and on the filter material in the axial direction of the heat generating resistor. A step of arranging thin rods along the circumference at appropriate intervals, and a heat insulating material for the heating resistor. A step of immersing the heat insulating material in a suspension containing the inorganic fiber and depositing the heat insulating material on the filter medium by suction from the inside of the heating resistor, a step of drying the deposited heat insulating material, and a heat insulation after drying. A step of extracting the rod material from between the material and the filter material, further removing the filter material from between the heat insulating material and the heating resistor, and a step of removing the jig from the support. A method for manufacturing a heat treatment furnace characterized by the above.