KR102526570B1 - 음향파 소자들, 안테나 듀플렉서들 및 전자 디바이스들 - Google Patents

음향파 소자들, 안테나 듀플렉서들 및 전자 디바이스들 Download PDF

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KR102526570B1
KR102526570B1 KR1020160029454A KR20160029454A KR102526570B1 KR 102526570 B1 KR102526570 B1 KR 102526570B1 KR 1020160029454 A KR1020160029454 A KR 1020160029454A KR 20160029454 A KR20160029454 A KR 20160029454A KR 102526570 B1 KR102526570 B1 KR 102526570B1
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acoustic wave
electrode
thickness
satisfies
wave device
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KR20160110243A (ko
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도모야 고마쯔
히데히또 시미즈
조지 후지와라
데쯔야 쯔루나리
히로유끼 나까무라
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스카이워크스 필터 솔루션즈 재팬 씨오., 엘티디.
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/20Frequency-selective devices, e.g. filters
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25Constructional features of resonators using surface acoustic waves
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/20Frequency-selective devices, e.g. filters
    • H01P1/201Filters for transverse electromagnetic waves
    • H01P1/205Comb or interdigital filters; Cascaded coaxial cavities
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/20Frequency-selective devices, e.g. filters
    • H01P1/213Frequency-selective devices, e.g. filters combining or separating two or more different frequencies
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/0222Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • H03H9/02559Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • H03H9/02834Means for compensation or elimination of undesirable effects of temperature influence
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538Formation
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6489Compensation of undesirable effects
    • H03H9/6496Reducing ripple in transfer characteristic
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72Networks using surface acoustic waves
    • H03H9/725Duplexers

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Electromagnetism (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
KR1020160029454A 2015-03-12 2016-03-11 음향파 소자들, 안테나 듀플렉서들 및 전자 디바이스들 Active KR102526570B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562132046P 2015-03-12 2015-03-12
US62/132,046 2015-03-12

Publications (2)

Publication Number Publication Date
KR20160110243A KR20160110243A (ko) 2016-09-21
KR102526570B1 true KR102526570B1 (ko) 2023-04-26

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KR1020160029454A Active KR102526570B1 (ko) 2015-03-12 2016-03-11 음향파 소자들, 안테나 듀플렉서들 및 전자 디바이스들

Country Status (6)

Country Link
US (1) US10097159B2 (https=)
EP (1) EP3068049B1 (https=)
JP (2) JP2016171571A (https=)
KR (1) KR102526570B1 (https=)
CN (1) CN105978524A (https=)
SG (1) SG10201601943WA (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10308522B2 (en) 2016-05-31 2019-06-04 Skyworks Solutions, Inc. High Q modified barium magnesium tantalate for high frequency applications
KR102217820B1 (ko) * 2016-11-17 2021-02-18 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
CN116599494A (zh) * 2016-11-18 2023-08-15 株式会社村田制作所 声表面波滤波器以及多工器
US10483942B2 (en) 2017-01-24 2019-11-19 Skyworks Solutions, Inc. Acoustic wave device with acoustically separated multi-channel feedback
JP7068835B2 (ja) 2018-01-26 2022-05-17 太陽誘電株式会社 弾性波デバイス、フィルタおよびマルチプレクサ
CN116671012A (zh) * 2021-01-12 2023-08-29 株式会社村田制作所 弹性波装置
US20230006125A1 (en) 2021-06-30 2023-01-05 Skyworks Solutions, Inc. Acoustic wave device with reduced acoustic coupling
US12500570B2 (en) 2021-09-29 2025-12-16 Skyworks Solutions, Inc. Shear horizontal mode acoustic wave device with multilayer interdigital transducer electrode
US12438519B2 (en) 2021-12-06 2025-10-07 Skyworks Solutions, Inc. Methods of manufacturing multi-band surface acoustic wave filters
US12512819B2 (en) 2022-01-26 2025-12-30 Skyworks Solutions, Inc. Topologies for acoustic-wave receive-side filters
US12587171B2 (en) 2022-03-18 2026-03-24 Skyworks Solutions, Inc. Passband filter combining two sets of components
US20230343659A1 (en) 2022-03-30 2023-10-26 Skyworks Solutions, Inc. Integrated device package with opening in carrier

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090115287A1 (en) * 2005-04-25 2009-05-07 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
US20130026881A1 (en) * 2010-06-17 2013-01-31 Shoji Okamoto Acoustic wave element
US20140225684A1 (en) * 2011-10-24 2014-08-14 Murata Manufacturing Co., Ltd. Surface acoustic wave device

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002176333A (ja) * 2000-12-07 2002-06-21 Fujitsu Media Device Kk 弾性表面波フィルタ
JP4127170B2 (ja) * 2003-01-07 2008-07-30 株式会社村田製作所 表面波装置
JP4297139B2 (ja) * 2003-10-03 2009-07-15 株式会社村田製作所 弾性表面波装置
EP1696562A4 (en) 2003-12-16 2010-07-07 Murata Manufacturing Co ACOUSTIC LIMIT WAVE DEVICE
WO2005069485A1 (ja) * 2004-01-13 2005-07-28 Murata Manufacturing Co., Ltd. 弾性境界波装置
CN101682308B (zh) * 2007-06-06 2013-07-17 株式会社村田制作所 弹性表面波装置
JP5355958B2 (ja) * 2008-07-31 2013-11-27 太陽誘電株式会社 フィルタ、分波器および通信機器
WO2010137279A1 (ja) * 2009-05-27 2010-12-02 パナソニック株式会社 弾性波共振器と、これを用いたアンテナ共用器
JP2011041127A (ja) * 2009-08-17 2011-02-24 Hitachi Media Electoronics Co Ltd 弾性波装置
JP2012060419A (ja) * 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012227626A (ja) * 2011-04-15 2012-11-15 Panasonic Corp 弾性表面波素子
JP5797979B2 (ja) * 2011-08-31 2015-10-21 太陽誘電株式会社 弾性波デバイス
JP5704263B2 (ja) * 2012-02-06 2015-04-22 株式会社村田製作所 フィルタ装置
JP6142924B2 (ja) * 2013-08-21 2017-06-07 株式会社村田製作所 チューナブルフィルタ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090115287A1 (en) * 2005-04-25 2009-05-07 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
US20130026881A1 (en) * 2010-06-17 2013-01-31 Shoji Okamoto Acoustic wave element
US20140225684A1 (en) * 2011-10-24 2014-08-14 Murata Manufacturing Co., Ltd. Surface acoustic wave device

Also Published As

Publication number Publication date
JP2020061742A (ja) 2020-04-16
EP3068049B1 (en) 2018-06-13
EP3068049A2 (en) 2016-09-14
CN105978524A (zh) 2016-09-28
JP7005579B2 (ja) 2022-02-04
KR20160110243A (ko) 2016-09-21
US10097159B2 (en) 2018-10-09
JP2016171571A (ja) 2016-09-23
US20160268997A1 (en) 2016-09-15
SG10201601943WA (en) 2016-10-28
EP3068049A3 (en) 2016-11-30

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