JP2016171571A - 弾性波素子、アンテナデュプレクサ及び電子機器 - Google Patents

弾性波素子、アンテナデュプレクサ及び電子機器 Download PDF

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Publication number
JP2016171571A
JP2016171571A JP2016048065A JP2016048065A JP2016171571A JP 2016171571 A JP2016171571 A JP 2016171571A JP 2016048065 A JP2016048065 A JP 2016048065A JP 2016048065 A JP2016048065 A JP 2016048065A JP 2016171571 A JP2016171571 A JP 2016171571A
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Japan
Prior art keywords
acoustic wave
electrode
thickness
wave device
idt electrode
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Pending
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JP2016048065A
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English (en)
Japanese (ja)
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JP2016171571A5 (https=
Inventor
禎也 小松
Tomoya Komatsu
禎也 小松
英仁 清水
Hideto Shimizu
英仁 清水
城二 藤原
Shiroji Fujiwara
城二 藤原
哲也 鶴成
Tetsuya Tsurunari
哲也 鶴成
中村　弘幸
Hiroyuki Nakamura
弘幸 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Skyworks Filter Solutions Japan Co Ltd
Original Assignee
Skyworks Panasonic Filter Solutions Japan Co Ltd
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Filing date
Publication date
Application filed by Skyworks Panasonic Filter Solutions Japan Co Ltd filed Critical Skyworks Panasonic Filter Solutions Japan Co Ltd
Publication of JP2016171571A publication Critical patent/JP2016171571A/ja
Publication of JP2016171571A5 publication Critical patent/JP2016171571A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H01P1/201—Filters for transverse electromagnetic waves
    • H01P1/205—Comb or interdigital filters; Cascaded coaxial cavities
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H01P1/213—Frequency-selective devices, e.g. filters combining or separating two or more different frequencies
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6489—Compensation of undesirable effects
    • H03H9/6496—Reducing ripple in transfer characteristic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72—Networks using surface acoustic waves
    • H03H9/725—Duplexers

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Electromagnetism (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2016048065A 2015-03-12 2016-03-11 弾性波素子、アンテナデュプレクサ及び電子機器 Pending JP2016171571A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562132046P 2015-03-12 2015-03-12
US62/132,046 2015-03-12

Related Child Applications (1)

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JP2019217819A Division JP7005579B2 (ja) 2015-03-12 2019-12-02 弾性波素子、アンテナデュプレクサ、ダイプレクサ及び通信機器

Publications (2)

Publication Number Publication Date
JP2016171571A true JP2016171571A (ja) 2016-09-23
JP2016171571A5 JP2016171571A5 (https=) 2019-03-28

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JP2016048065A Pending JP2016171571A (ja) 2015-03-12 2016-03-11 弾性波素子、アンテナデュプレクサ及び電子機器
JP2019217819A Active JP7005579B2 (ja) 2015-03-12 2019-12-02 弾性波素子、アンテナデュプレクサ、ダイプレクサ及び通信機器

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Country Status (6)

Country Link
US (1) US10097159B2 (https=)
EP (1) EP3068049B1 (https=)
JP (2) JP2016171571A (https=)
KR (1) KR102526570B1 (https=)
CN (1) CN105978524A (https=)
SG (1) SG10201601943WA (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11451210B2 (en) 2018-01-26 2022-09-20 Taiyo Yuden Co., Ltd. Acoustic wave device, filter, and multiplexer

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10308522B2 (en) 2016-05-31 2019-06-04 Skyworks Solutions, Inc. High Q modified barium magnesium tantalate for high frequency applications
KR102217820B1 (ko) * 2016-11-17 2021-02-18 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
CN116599494A (zh) * 2016-11-18 2023-08-15 株式会社村田制作所 声表面波滤波器以及多工器
US10483942B2 (en) 2017-01-24 2019-11-19 Skyworks Solutions, Inc. Acoustic wave device with acoustically separated multi-channel feedback
CN116671012A (zh) * 2021-01-12 2023-08-29 株式会社村田制作所 弹性波装置
US20230006125A1 (en) 2021-06-30 2023-01-05 Skyworks Solutions, Inc. Acoustic wave device with reduced acoustic coupling
US12500570B2 (en) 2021-09-29 2025-12-16 Skyworks Solutions, Inc. Shear horizontal mode acoustic wave device with multilayer interdigital transducer electrode
US12438519B2 (en) 2021-12-06 2025-10-07 Skyworks Solutions, Inc. Methods of manufacturing multi-band surface acoustic wave filters
US12512819B2 (en) 2022-01-26 2025-12-30 Skyworks Solutions, Inc. Topologies for acoustic-wave receive-side filters
US12587171B2 (en) 2022-03-18 2026-03-24 Skyworks Solutions, Inc. Passband filter combining two sets of components
US20230343659A1 (en) 2022-03-30 2023-10-26 Skyworks Solutions, Inc. Integrated device package with opening in carrier

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006295976A (ja) * 2003-10-03 2006-10-26 Murata Mfg Co Ltd 弾性表面波装置
WO2006114930A1 (ja) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. 弾性境界波装置
WO2015025651A1 (ja) * 2013-08-21 2015-02-26 株式会社村田製作所 チューナブルフィルタ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002176333A (ja) * 2000-12-07 2002-06-21 Fujitsu Media Device Kk 弾性表面波フィルタ
JP4127170B2 (ja) * 2003-01-07 2008-07-30 株式会社村田製作所 表面波装置
EP1696562A4 (en) 2003-12-16 2010-07-07 Murata Manufacturing Co ACOUSTIC LIMIT WAVE DEVICE
WO2005069485A1 (ja) * 2004-01-13 2005-07-28 Murata Manufacturing Co., Ltd. 弾性境界波装置
CN101682308B (zh) * 2007-06-06 2013-07-17 株式会社村田制作所 弹性表面波装置
JP5355958B2 (ja) * 2008-07-31 2013-11-27 太陽誘電株式会社 フィルタ、分波器および通信機器
WO2010137279A1 (ja) * 2009-05-27 2010-12-02 パナソニック株式会社 弾性波共振器と、これを用いたアンテナ共用器
JP2011041127A (ja) * 2009-08-17 2011-02-24 Hitachi Media Electoronics Co Ltd 弾性波装置
WO2011158445A1 (ja) * 2010-06-17 2011-12-22 パナソニック株式会社 弾性波素子
JP2012060419A (ja) * 2010-09-09 2012-03-22 Seiko Epson Corp 弾性表面波デバイス、電子機器及びセンサー装置
JP2012227626A (ja) * 2011-04-15 2012-11-15 Panasonic Corp 弾性表面波素子
JP5797979B2 (ja) * 2011-08-31 2015-10-21 太陽誘電株式会社 弾性波デバイス
JP5720797B2 (ja) * 2011-10-24 2015-05-20 株式会社村田製作所 弾性表面波装置
JP5704263B2 (ja) * 2012-02-06 2015-04-22 株式会社村田製作所 フィルタ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006295976A (ja) * 2003-10-03 2006-10-26 Murata Mfg Co Ltd 弾性表面波装置
WO2006114930A1 (ja) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. 弾性境界波装置
WO2015025651A1 (ja) * 2013-08-21 2015-02-26 株式会社村田製作所 チューナブルフィルタ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11451210B2 (en) 2018-01-26 2022-09-20 Taiyo Yuden Co., Ltd. Acoustic wave device, filter, and multiplexer

Also Published As

Publication number Publication date
JP2020061742A (ja) 2020-04-16
EP3068049B1 (en) 2018-06-13
EP3068049A2 (en) 2016-09-14
CN105978524A (zh) 2016-09-28
KR102526570B1 (ko) 2023-04-26
JP7005579B2 (ja) 2022-02-04
KR20160110243A (ko) 2016-09-21
US10097159B2 (en) 2018-10-09
US20160268997A1 (en) 2016-09-15
SG10201601943WA (en) 2016-10-28
EP3068049A3 (en) 2016-11-30

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