KR102432900B1 - 수직 자화막 및 이를 포함하는 자기 장치 - Google Patents

수직 자화막 및 이를 포함하는 자기 장치 Download PDF

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KR102432900B1
KR102432900B1 KR1020170057524A KR20170057524A KR102432900B1 KR 102432900 B1 KR102432900 B1 KR 102432900B1 KR 1020170057524 A KR1020170057524 A KR 1020170057524A KR 20170057524 A KR20170057524 A KR 20170057524A KR 102432900 B1 KR102432900 B1 KR 102432900B1
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film
perpendicular magnetization
magnetic
substrate
layer
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KR20170126805A (ko
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요시아키 소노베
시게키 타카하시
히로아키 스케가와
이화철
카즈히로 호노
세이지 미타니
준 리우
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삼성전자주식회사
코쿠리츠켄큐카이하츠호징 붓시쯔 자이료 켄큐키코
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/80—Constructional details
    • H10N50/85—Materials of the active region
    • H01L43/02—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/06—Thin magnetic films, e.g. of one-domain structure characterised by the coupling or physical contact with connecting or interacting conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/123—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys having a L10 crystallographic structure, e.g. [Co,Fe][Pt,Pd] thin films
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
    • H01F10/30—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers characterised by the composition of the intermediate layers, e.g. seed, buffer, template, diffusion preventing, cap layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3286—Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
    • H01L43/08—
    • H01L43/10—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Hall/Mr Elements (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Thin Magnetic Films (AREA)
KR1020170057524A 2016-05-10 2017-05-08 수직 자화막 및 이를 포함하는 자기 장치 Active KR102432900B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016094864A JP6713650B2 (ja) 2016-05-10 2016-05-10 垂直磁化膜と垂直磁化膜構造並びに磁気抵抗素子および垂直磁気記録媒体
JPJP-P-2016-094864 2016-05-10

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KR20170126805A KR20170126805A (ko) 2017-11-20
KR102432900B1 true KR102432900B1 (ko) 2022-08-16

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WO2019059679A1 (ko) * 2017-09-20 2019-03-28 주식회사 케이티 비디오 신호 처리 방법 및 장치
US10170696B1 (en) * 2017-10-26 2019-01-01 International Business Machines Corporation MnN and Heusler layers in magnetic tunnel junctions
CN113036032B (zh) * 2019-12-24 2024-08-27 Tdk株式会社 磁阻效应元件
JP7572228B2 (ja) * 2019-12-24 2024-10-23 Tdk株式会社 磁気抵抗効果素子
JP7434962B2 (ja) * 2020-02-05 2024-02-21 Tdk株式会社 磁気抵抗効果素子
US11925124B2 (en) * 2021-01-12 2024-03-05 Samsung Electronics Co., Ltd. Insertion layers for perpendicularly magnetized Heusler layers with reduced magnetic damping

Citations (1)

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JP2015126221A (ja) * 2013-12-27 2015-07-06 株式会社サムスン日本研究所 磁気トンネル接合素子の製造方法および製造装置

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US117201A (en) * 1871-07-18 Improvement in hay-rakes and forks
JPH05109040A (ja) * 1991-10-16 1993-04-30 Sony Corp 垂直磁気記録媒体
JP2009054776A (ja) 2007-08-27 2009-03-12 Institute Of Physical & Chemical Research 磁気冷凍材料およびその製造方法、ならびに、反強磁性材料を強磁性材料に変質させる方法
JP5491757B2 (ja) 2009-03-27 2014-05-14 株式会社東芝 磁気抵抗素子および磁気メモリ
US8686484B2 (en) * 2011-06-10 2014-04-01 Everspin Technologies, Inc. Spin-torque magnetoresistive memory element and method of fabricating same
KR101831931B1 (ko) 2011-08-10 2018-02-26 삼성전자주식회사 외인성 수직 자화 구조를 구비하는 자기 메모리 장치
US8993134B2 (en) 2012-06-29 2015-03-31 Western Digital Technologies, Inc. Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates
KR102017623B1 (ko) 2012-08-30 2019-09-03 삼성전자주식회사 자기 메모리 소자
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JP6647590B2 (ja) * 2015-04-23 2020-02-14 国立研究開発法人物質・材料研究機構 垂直磁化膜と垂直磁化膜構造並びに磁気抵抗素子および垂直磁気記録媒体

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US20170330668A1 (en) 2017-11-16
US10395809B2 (en) 2019-08-27
JP2017204542A (ja) 2017-11-16
KR20170126805A (ko) 2017-11-20

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