KR102397599B1 - Positioning apparatus, positioning method, resin molding system and manufacturing method of resin molding article - Google Patents

Abstract

There is a demand for a technology capable of detecting both the straight part of the workpiece and the notch.
A measuring device for measuring the displacement amount of the periphery of the workpiece at each constant rotation angle of the rotated workpiece, and a control section for controlling the measuring device to detect the central position of the cut-out portion of the workpiece, the control section comprising: a first region in which the measurement result monotonically decreases; A positioning device for controlling to detect the central position of the cut-out portion of the workpiece based on the monotonically increasing number of measurement points of at least a part of the second region.

Description

A positioning device, a positioning method, a resin molding system, and a manufacturing method of a resin molded article TECHNICAL FIELD

The present invention relates to a positioning device, a positioning method, a resin molding system, and a method for manufacturing a resin molded article.

Patent Document 1 discloses a method for detecting the position of an orientation flat (hereinafter, referred to as an "orientation flat") of a semiconductor wafer including a linear portion in plan view. In the detection method described with reference to FIG. 8 of this document, in the trajectory of the orientation flat part shown in FIG. Find the average value of A mode is detected from among these average values, and the position alignment of a semiconductor wafer is performed based on the center position of an orientation flat part.

Japanese Patent Laid-Open No. 4-268746

Although the said patent document 1 describes about the detection of the orientation flat part of a semiconductor wafer, it does not describe about the detection of a notch. On the other hand, there is a demand for a technique capable of detecting both the straight portion of the work and the notch.

In order to solve the above problems, the positioning device of the present invention includes a measuring device for measuring the displacement amount of the periphery of the workpiece at a constant rotation angle of the rotated workpiece, and a control unit for controlling the measuring device to detect the central position of the cutout of the workpiece to provide The control unit is configured to control to detect the central position of the cut-out portion of the workpiece based on the number of measurement points of at least a part of the first region and the second region where the measurement result monotonically decreases.

The positioning method of the present invention includes a measuring step of rotating a work to measure the displacement amount of the periphery of the work at a constant rotation angle, a first region in which the measurement result measured in the measuring step monotonically decreases, and a second monotonically increasing area and a detection step of detecting a central position of the cutout portion of the work based on the number of measurement points of at least a part of the region.

The resin molding system of this invention is equipped with the resin molding apparatus which the said workpiece|work positioned by the said positioning device is arrange|positioned and resin-molding.

In the method for manufacturing a resin molded article of the present invention, the workpiece is resin molded using the resin molding system.

ADVANTAGE OF THE INVENTION According to this invention, the positioning apparatus which can detect the center position of the cut-out part of a workpiece|work including a linear part and a notch in planar view, a positioning method, a resin molding system, and the manufacturing method of a resin molded article can be provided.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows typically the structure of the resin molding system of this embodiment.
2 is a plan view and a side view schematically showing the positioning device of the present embodiment.
It is a flowchart which shows the positioning method of the workpiece|work of this embodiment.
It is a figure which shows the measurement data by the positioning method of the workpiece|work of this embodiment and a comparative example.
It is a flowchart which shows the positioning method of the workpiece|work of the comparative example.
It is a figure which shows the measurement data by the positioning method of the workpiece|work of this embodiment and a comparative example.

<One embodiment of the present invention>

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail, referring drawings. In addition, the same reference numerals are attached to the same or equivalent parts in the drawings, and the description thereof will not be repeated.

<Configuration of resin molding system 10>

Hereinafter, the basic structure of resin molding of the resin molding system 10 of this embodiment is demonstrated.

1 : is a figure which shows typically the structure of the resin molding system 10 which concerns on this embodiment. This resin molding system 10 is comprised so that a resin molded article may be manufactured by using a so-called compression molding method (compression molding method). As shown in FIG. 1 , the resin molding system 10 includes a positioning device 20 , a resin molding device 30 , and a control unit 40 .

The positioning device 20 includes a rotary table 21 and a measuring device 22 . In the positioning device 20, for example, the workpiece|work W is positioned so that it may mention later. Examples of the work W include semiconductor substrates such as silicon wafers, lead frames, printed wiring boards, metal substrates, resin substrates, glass substrates, ceramic substrates, and the like. Moreover, the carrier used for FOWLP(Fan Out Wafer Level Packaging) and FOPLP(Fan Out Panel Level Packaging) may be sufficient as the board|substrate W. More specifically, the wiring may be already provided or may be unwired.

The resin molding apparatus 30 includes a molding die (not shown) and a mold clamping mechanism (not shown) for clamping the molding die. In the resin molding apparatus 30, the workpiece|work W positioned by the positioning apparatus 20 is resin-molded, for example.

The control unit 40 includes a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), and the like, and is configured to control each component according to information processing. The control part 40 is comprised so that it may control the positioning apparatus 20 at least, and it is comprised so that the resin molding apparatus 30 may also be controlled in this embodiment.

<Operation of resin molding system 10>

Hereinafter, the basic operation|movement of resin molding of the resin molding system 10 of this embodiment is demonstrated.

The workpiece W carried into the resin molding system is placed on the rotary table 21 of the positioning device with a robot hand or the like (not shown). The workpiece W positioned by the positioning device is transferred to a conveying mechanism (not shown) by a robot hand or the like, and the workpiece W is conveyed to the molding die of the resin molding apparatus by the conveying mechanism, and the molding die is molded using a clamping mechanism. It is fastened and resin molded to manufacture a resin molded article.

<Configuration of positioning unit 20 of workpiece W>

FIG. 2 : is a figure which shows typically the positioning device 20, (a) is a top view, FIG.2(b) is a side view. As shown in FIG. 2 , the positioning device 20 includes a rotary table 21 and a measuring device 22 .

The rotary table 21 is configured to rotate about a rotary axis P. The work W is arranged on the upper part of the rotating part 21 . The rotary table 21 can be rotated by, for example, a motor. The rotary table 21 can adsorb|suck and fix the workpiece|work W, for example.

The measuring device 22 is configured to measure the amount of displacement of the periphery of the work W disposed on the rotary table 21 . An example of the measuring device 22 is an optical sensor, and more specifically, a laser displacement meter.

<Operation of the positioning device 20 of the workpiece W>

Hereinafter, the basic operation of the positioning device 20 of the present embodiment will be described.

3 : is a flowchart of the positioning operation|movement of the workpiece|work W by the positioning device 20. As shown in FIG. The process shown in this flowchart is performed by the control part 40 included in the resin molding system 10, for example. Moreover, you may comprise so that the control part 40 may be included in the positioning device 20 .

Referring to FIG. 2 , the control unit 40 places the work W on the rotary table 21 by a robot hand or the like, obtains the rotation center position of the work W, and matches the rotation axis P of the rotary table 21 to center alignment. is performed (step S1). A known method can be used for this. For example, the workpiece W is placed on the rotary table 21, rotated at a constant rotation speed in an eccentric state, and from the output of the displacement amount of the measuring instrument 22, the center of the workpiece W and the rotation axis P of the rotary table 21 are Find the eccentricity. The work W is rearranged on the rotary table 21 based on this eccentricity.

The control unit 40 starts rotation of the rotary table 21 at a constant rotation speed (step S2). In addition, the rotation speed here is made slower than the rotation speed of step S1 of centering mentioned above.

The control part 40 acquires the displacement amount of the periphery of the workpiece|work W arrange|positioned on the turn table 21 from the measuring machine 22 at fixed time intervals (step S3). When the amount of displacement is completely acquired, the control unit 40 stops the rotary table 21 (step S4). In addition, the measurement range E in which the displacement amount is acquired from the measuring device 22 of step S3 can be set based on the result in step S1 of the above-mentioned centering.

4(a), (b) is a figure which graphed the output from the measuring device 22 in step S3 of displacement amount acquisition of the positioning operation|movement of the workpiece|work W of the positioning device 20. FIG. In this graph, the vertical axis represents the displacement amount obtained from the measuring device 22 , the horizontal axis represents the rotation angle calculated from the rotation speed of the rotary table 21 , and the units of the vertical axis and the horizontal axis are arbitrary. Here, as the work W, the work W including the linear portion in plan view was used and preset was set so as to include the central position of the linear portion as the measurement range E. FIG. Fig. 4(b) is an enlarged view of the vicinity of the central position of the straight line portion of the work W in Fig. 4(a). The displacement amount of the vertical axis in FIGS. 4A and 4B is a value corresponding to the distance from the rotation center of the workpiece W to the peripheral edge.

In the graph shown in Fig. 4, A represents the average value of the displacement amounts obtained from the measuring device 22, N represents the number of measurement points, and C represents the measurement point located at the center of the measurement points below the average value A of the displacement amount. The central measurement point C is a point in which the number of N1 and N2 is the same.

With reference to FIG. 4, the control part 40 calculates the average value A of all the data of the displacement amount acquired from the measuring device 22 by the process of step S3 of displacement amount acquisition (step S5). The control part 40 extracts the measurement point used as the displacement amount equal to or less than the calculated average value A (step S6). The control part 40 calculates the central measuring point C which becomes the center with respect to a rotation angle from the extracted measuring point (step S7), and detects the central measuring point C as the center position of the cutout part of the workpiece|work W (step S8). If the number of measurement points less than or equal to the average value A is odd, the central measurement point C becomes 1, but when the number of measurement points less than or equal to the average value A is even, the central measurement point C becomes 2, so any one point may be detected as the central position, You may detect between two points as a center position.

In Fig. 4, data in the case of detecting the central position of the linear portion of the workpiece W including the linear portion in plan view is shown, but it is also possible to detect the central position of the notch of the workpiece W in the same processing of steps S1 to S8. Do. In addition, in the example of FIG. 4, the center was obtained from the measurement points below the average value A, but in FIG. You may obtain|require the central measuring point C used as the center in the area|region below from a straight line.

In addition, in the example of FIG. 4 , a third region R exists between the first region in which the output value (measured value) monotonically decreases and the second region in which the output value (measured value) monotonically increases. In such a case, what is necessary is just to calculate|require the central measurement point C from the measurement point below a fixed value, such as the average value A of the 1st area|region and the 2nd area|region, and the measurement point of the 3rd area|region R. Moreover, the area|region shown in FIG.4(b) turns into 3rd area|region R.

After the operation of the positioning device 20 of the workpiece W described above, as described above, the positioned workpiece W is transferred to a transport mechanism with a robot hand or the like, and the workpiece W is transported to the molding die of the resin molding device by the transport mechanism. do. In addition, a resin molded article can be manufactured by using a mold clamping mechanism to mold a molding die and perform resin molding.

<Comparative example>

5 : is a flowchart of the positioning operation|movement of the workpiece|work W of a comparative example, and respond|corresponds to FIG. In addition, the basic configuration of the positioning device is the same as that of the present invention.

In FIG. 5 , steps C1 to C3 are the same as steps S1 to S3 in FIG. 3 , and thus description thereof is omitted. In the comparative example, the output of the displacement amount from the measuring device 22 is sequentially acquired, and the comparison process of the measurement point acquired immediately before and the displacement amount is performed with respect to the measurement point acquired after the 2nd time. In the following description, the expression "this time" is used for the measurement point or displacement amount just acquired, and the expression "last time" is used for the measurement point or displacement amount acquired immediately before that.

The control unit 40 compares the displacement amount of the periphery of the workpiece W acquired from the measuring device 22 with the previous displacement amount for the measurement points acquired the second time and later, and returns to step C3 if the displacement amount acquired this time is smaller than the previous displacement amount Go (step C4).

In step C4, if the displacement amount acquired this time is greater than or equal to the previous displacement amount, the previous displacement amount is regarded as the minimum displacement amount and the rotary table 21 is stopped (step C5). The control part 40 detects the measurement point of the minimum displacement amount as the center position of the cutout part of the workpiece|work W (step C6). Moreover, in steps C2 and C5, it is good also as rotation stop when it rotates only by the preset angle. In addition, you may detect step C6 without waiting for the rotation stop of step C5.

Fig.6 (a), (b) is a figure which corresponds to FIG. 4, and is the figure which graphed the output from the measuring device 22 in step C3 of the positioning operation|movement of the workpiece|work W of a comparative example. Fig. 6(b) is an enlarged view of the vicinity of the center position of the notch of the work W in Fig. 6(a).

In steps C3 to C4 of the positioning operation of the workpiece W of the comparative example, when the central position of the notch is detected, processing is performed as follows. With reference to FIG. 6B , the control unit 40 acquires a measurement point t from the measuring device 22 . When the previous measurement point s and the currently acquired measurement point t are compared, the currently acquired measurement point t is equivalent to the previous measurement point s, so the previous measurement point s is regarded as the minimum amount of displacement, and the measurement point s is detected as the center position of the cutout of the workpiece W.

In the positioning operation of the workpiece W of the comparative example, for example, when three minimum displacement amounts are arranged as shown in Fig. 6(b), the measurement point s measured first is detected as the center position of the cutout of the workpiece W, throw it away Therefore, the position slightly shifted from the measurement point t which is the center position of the original cut-out part of the workpiece|work W will be regarded as the center position of the cut-out part of the workpiece|work W.

Moreover, when detecting the center position of an orientation flat part in the positioning operation|movement of the workpiece|work W of a comparative example, it processes as follows. With reference to FIG. 4B , the control unit 40 acquires a measurement point v from the measuring device 22 . When the control unit 40 compares the previous measurement point u with the currently acquired measurement point v, since the currently acquired measurement point v is larger than the previous measurement point u, the previous measurement point u is regarded as the minimum amount of displacement, and the measurement point u is the center position of the cutout of the workpiece W detected as Therefore, measurement and acquisition of the displacement amount and rotation angle information will be complete|finished before the center measurement point C which is the center position of a true cutout is detected.

Therefore, although the positioning operation|movement of the workpiece|work W of a comparative example is inferior to the precision of this embodiment mentioned above, although the detection of the center position of a notch is possible, the detection of the center position of a linear part is difficult.

On the other hand, if it is processed in the positioning operation|movement of the workpiece|work W of this invention, as mentioned above, the center position of the cutout part of the workpiece|work W including a linear part and a notch in planar view can be detected. If it is the example shown in FIG. 6, when this invention is applied, the measurement point t can be detected as the center position of a notch, and high-precision detection becomes possible compared with a comparative example.

<Other embodiment>

The idea of the said embodiment is not limited to the embodiment demonstrated above. Hereinafter, an example of another embodiment to which the idea of the said embodiment can be applied is demonstrated.

In the resin molding system 10 according to the above embodiment, the control unit 40 controls the positioning device 10 and the resin molding device 20 . However, the control of the positioning device 10 and the resin molding device 20 is not necessarily performed by the common control unit 40 . For example, each of the positioning apparatus 10 and the resin molding apparatus 20 may have a dedicated control part.

Moreover, in the control part 40 which concerns on the said embodiment, the process of steps S6 - S8 was performed, and the center position of the cutout part of the workpiece|work W was detected. However, it is not necessarily necessary to calculate the average value and calculate the median value C of the rotation angle information of the workpiece W to detect the center position of the cutout portion of the workpiece W. For example, you may control so that the center position of the cutout part of the workpiece|work W may be detected based on the number of measurement points of the area|region where the measurement result acquired from the measuring instrument 22 monotonically decreases and the area|region which monotonically increases.

<Effect of this embodiment>

The positioning device of the present embodiment includes a measuring device that measures the displacement amount of the periphery of the work W for each fixed rotation angle of the rotated work W, and a control unit that controls the measuring machine so as to detect the central position of the cutout of the work W, the control unit comprising: , control so as to detect the central position of the cutout of the workpiece W based on the number of measurement points of at least a part of the first region where the measurement result monotonically decreases and the second region where the measurement result monotonically increases. If it is this positioning device, the center position of the cutout part of the workpiece|work W including a straight part and a notch in planar view can be detected.

As a specific configuration of the positioning device, when a third area exists between the first area and the second area, the workpiece is based on at least a part of the first area and the second area and the number of measurement points in the third area. It is preferable to provide a control part which controls so as to detect the center position of the cut-out part of W.

It is preferable to provide the control part which computes the average value of a measurement result as a structure of a specific positioning apparatus, and detects the median value of all the measurement results below the average value as a central position. By setting it below the average value, it can detect with high precision regardless of the size of a workpiece|work.

Moreover, the resin molding system of this embodiment is provided with the resin molding apparatus which the workpiece|work positioned by the said positioning apparatus is arrange|positioned and resin-molding. According to this resin molding system, the center position of the cut-out part of the workpiece|work including a straight part and a notch in planar view can be detected, and resin molding of the workpiece|work positioned with high precision can be performed.

Moreover, if it is the manufacturing method of the resin molded article of this embodiment, the workpiece|work is resin-molded using the said resin molding system. According to the manufacturing method of this resin molded article, since resin molding of the workpiece|work positioned with high precision can be performed, a high quality resin molded article can be manufactured.

In addition, the positioning method of the present embodiment includes a measuring step of rotating a work and measuring the displacement amount of the periphery of the work at each constant rotation angle, and a first region in which the measurement result measured in the measuring step monotonically decreases and a first region which monotonically increases. and a detection step of detecting a central position of the cut-out portion of the work based on the number of measurement points of at least a part of the two regions. According to this positioning method, the center position of the cut-out part of the workpiece|work including a straight part and a notch in planar view can be detected.

In the above, embodiments of the present invention have been exemplarily described. That is, the detailed description and accompanying drawings have been disclosed for illustrative purposes. Therefore, among the components described in the detailed description and the accompanying drawings, components that are not essential for solving the problem may be included. Therefore, just because the non-essential components are described in the detailed description and the accompanying drawings, it should not be immediately admitted that the non-essential components are essential.

In addition, the said embodiment is only an illustration of this invention in all points. Various improvement and change are possible in the said embodiment within the scope of the present invention. That is, in the practice of the present invention, a specific configuration can be appropriately adopted depending on the embodiment.

10: resin molding system
20: positioning device
30: resin molding device
40: control unit
21: turn table
22: meter

Claims (6)

a measuring device for measuring the displacement of the periphery of the rotated workpiece at a constant rotation angle;
and a control unit for controlling the measuring device to detect the central position of the cut-out portion of the work;
The control unit controls so as to detect the central position of the cut-out portion of the workpiece based on the number of measurement points of at least a part of a first region in which the measurement result monotonically decreases and a second region in which the measurement result monotonically increases. According to claim 1,
When a third area exists between the first area and the second area, the control unit is configured to select the workpiece based on at least a portion of the first area and the second area and the number of measurement points in the third area. A positioning device that controls to detect the central position of the cutout. According to claim 1,
The control unit calculates an average value of the measurement results, and detects a median value of all the measurement results below the average value as the central position. The positioning device according to claim 1 or 2;
and a resin molding apparatus in which the workpiece positioned by the positioning apparatus is disposed and resin-molded. A method for producing a resin molded article, wherein the workpiece is resin molded using the resin molding system according to claim 4,
a positioning step of positioning a workpiece using the positioning device;
a resin molding step of performing resin molding using the resin molding apparatus with respect to the workpiece positioned in the positioning step;
The positioning process is
A measuring step of rotating the work and measuring the displacement of the periphery of the work at each constant rotation angle;
A resin molded article comprising a detection step of detecting a central position of a cutout of a workpiece based on the number of measurement points of at least a part of a first region where the measurement result measured in the measurement step monotonically decreases and a second region that monotonically increases manufacturing method. A measuring step of rotating the work and measuring the displacement of the periphery of the work at each constant rotation angle;
a detection step of detecting the central position of the cut-out portion of the work based on the number of measurement points of at least a part of a first region in which the measurement result measured in the measurement step monotonically decreases and a second region that monotonically increases; .

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