KR102375182B1 - Scribe head unit - Google Patents

Abstract

[Problem] To improve the durability of a diamond point of a scribing tool when scribing a brittle material substrate using a scribing tool.
[Solutions] Apply the lubricant to the brittle material substrate by moving the solid lubricant while pressurizing it along the planned scribing line. After lubricating, scribe with a scribing tool with diamond points along the line to be scribed. In this way, the durability of the scribing tool can be significantly improved due to the lubricating effect of the lubricant.

Description

Scribing Head Unit {SCRIBE HEAD UNIT}

The present invention relates to a scribe head unit for scribing a brittle material substrate such as a glass substrate or a silicon wafer by means of a diamond point.

Conventionally, in order to scribing a glass substrate or a silicon wafer, a scribing tool using a scribing wheel or a diamond point using a single crystal diamond is used. For glass substrates, a scribing wheel for rolling against the substrate has been mainly used, but from the advantage of improving the strength of the substrate after scribing, use of a diamond point as a fixed blade is also being considered. Patent Documents 1 and 2 propose a point cutter for scribing a substrate with high hardness, such as a sapphire wafer or an alumina wafer. In these patent documents, a tool provided with a cutting point on the ridgeline of a pyramid, and a tool whose tip is a cone are used.

JP 2003-183040 A JP 2005-079529 A

When scribing a glass substrate using a scribing tool using a diamond point as a tool, there was a problem in that the life of the diamond point is short and damaged at the stage of scribing several tens of meters (m).

The present invention has been made to solve the above problems, and the scribing head unit capable of improving the durability of a scribing tool using a diamond point when dividing a brittle material substrate, thereby extending the life, and reducing the replacement frequency is intended to provide

In order to solve this problem, the scribing head unit of the present invention is a scribing head unit that performs scribing by pressing the point of a scribing tool against a brittle material substrate with a predetermined load and moving it relatively. or a scribing tool having a plurality of points, a tool holder attached to the scribing head unit to fix the scribing tool, a lubricant holder attached to the scribing head unit to move up and down freely, and a solid lubricant. and a lubricant applying member attached to the lower end of the lubricant holder to apply a lubricant on a planned scribing line, and a pressing means for pressing the lubricant holder against the brittle material substrate.

Here, the lubricant applying member may be a cylindrical fixed lubrication wheel having an axial center.

Here, the said scribing head unit may be provided with the foreign material removal means which performs the foreign material removal of a brittle material substrate along a scribing schedule line.

Here, the foreign material removing means may include a foreign material removing holder attached to the scribe head, and a foreign material removing member provided at a lower end of the foreign material removing holder.

Here, the pressing means may be an air pressing unit that presses the lubricant holder against the brittle material substrate.

Here, the pressing means may be a spring pressing unit that presses the lubricant holder against the brittle material substrate.

According to the present invention having these characteristics, first, a lubricant is applied to the scribing line of the brittle material substrate, and scribing is performed with a scribing tool having a diamond point. For this reason, it is hard to generate|occur|produce wear on a diamond point, and the effect that durability can be improved significantly is acquired. In particular, since the solid lubricant is used as the lubricant, it is possible to apply the lubricant with high accuracy only in the vicinity of the planned scribing line. Thereby, while preventing adhesion of the lubricant to unnecessary locations on the substrate, it is possible to easily remove the lubricant in a subsequent step. In addition, when cleaning the line to be scribing before applying the lubricant, foreign substances adhering to the brittle material substrate from the beginning, or foreign substances generated during scribing, are not caught in the brittle material substrate and the scribing tool. There is no such thing, and the effect that the damage of a point can be further reduced is acquired.

1 is a plan view and a side view showing an example of a scribing tool used in a tool holder according to an embodiment of the present invention;
Fig. 2 is a perspective view of a tool holder according to the present embodiment;
3 is a front view and a side view showing an example of the scribing head unit according to the first embodiment of the present invention;
4 is a side view showing only a lubricant holder for applying a lubricant and a peripheral portion thereof among the scribing head unit according to the first embodiment of the present invention;
It is a flowchart which showed the parting method of the glass substrate in embodiment of this invention;
It is a top view of the glass substrate in embodiment of this invention;
It is an enlarged view of the planned scribing line of the glass substrate in embodiment of this invention;
Fig. 8 is a cross-sectional view of a trench line and a crack line formed in the scribing method according to the embodiment of the present invention;
Fig. 9 is a view showing a trench line and an auxiliary line of the glass substrate according to the present embodiment;
10 is a front view and a side view showing a scribing head unit according to a second embodiment of the present invention;

Next, an embodiment of the present invention will be described. First, FIG. 1 is a plan view and a side view showing an example of a multi-point diamond tool (hereinafter simply referred to as a “diamond tool”) 10, which is a scribing tool held in a tool holder of a scribing head unit of the present embodiment. The diamond tool 10 is based on a polygonal prism having an arbitrary number of sides that are rotationally symmetric with a constant thickness. In this embodiment, the base 11 of a rectangular column of a certain thickness is made of single crystal diamond, and the through hole 12 is provided at the center thereof. In the base 11, ridge lines 13a to 13d parallel to an axis passing through the through hole 12 (an axis perpendicular to the ground in FIG. 1A) are uniformly formed on the outer peripheral surface of the quadrangle.

And, in this embodiment, as shown in FIG. 1 about the base 11, it grind|polishes like a fillet toward the ridgeline where the outer peripheral surface intersects from the both bottom surfaces of the square pillar of all four corners. That is, as shown in FIG. 1(b), the first inclined surfaces 14a to 14d are formed by grinding toward the ridge line of the base 11 rather than the four corners of the lower surface on the right side of the base 11. As shown in FIG. At this time, the base 11 is polished so that the edge formed by the side sandwiching the ridge line between the base 11 and the inclined surface are equal, that is, the inclined surface becomes an isosceles triangle with one end of the ridge line as the vertex. Such an inclined surface can be easily formed by laser processing or machining. Moreover, it is good also as a precision grinding|polishing surface by further mechanically grinding|polishing after laser processing. In this way, with the intersection of each of the ridgelines 13a to 13d and the first inclined surfaces 14a to 14d as the vertex, as shown in FIG. can be formed At this time, the inclined surfaces 14a to 14d of the base 11 become the ceiling surface. Here, the ceiling surface refers to a surface that is in contact with two outer peripheral surfaces forming the ridge line and shares one end of the ridge line.

Next, the second inclined surfaces 15a to 15d are formed by grinding from the other lower surface of the base 11 toward the outer periphery of the base 11 in the same manner. At this time, the polishing is performed so that the sum of the polishing ranges of the first inclined surface and the second inclined surface does not exceed the thickness of the base so that a ridge line remains between the first inclined surface and the second inclined surface. In this way, four points P5 to P8 are formed on the left side when viewed from the side of the base as shown in FIG. can do. By making both ends of the ridgelines 13a to 13d the points P1 to P8 in this way, eight points can be formed on the outer periphery of the square diamond tool 10 .

Next, a tool holder is demonstrated. Figure 2 is a perspective view showing the assembly of the tool holder. As shown in Fig. 2, the tool holder main body 21 constituting the main part of the tool holder 20 includes a rectangular parallelepiped holder holding portion 22a, and a tool attachment portion having a shape in which a rectangular parallelepiped upper half is cut off at its tip. 22b) is established. The holder holding portion 22a is provided with mounting through holes 23a, 23b and 24a, 24b for fixing the tool holder to the scribe head unit as shown in FIG. Moreover, the tool attachment part 22b has the thickness adjustment groove|channel 25 perpendicular|vertical in the longitudinal direction cut out at the position close to the holder holding part 22a. As shown in Fig. 2, the tip portion has inclined surfaces 26a and 26b cut out from the left and right and inclined surfaces 26c cut out from the bottom. In addition, a screw groove 27 is formed in a substantially central portion of the tool attachment portion 22b perpendicular to the central axis. A tool holding groove 28 of a certain depth along the central axis in the longitudinal direction of the tool holder body 21 is formed on the surface of the tool attachment portion 22b through the screw groove 27, and at the tip end, a tool holding groove 28 is formed. ) is open at an angle of about 90° toward the outside. In other words, the width of the tool holding groove 28 increases toward the tip, and the angle at which the extension lines of the inner wall of the groove intersect are set to 90°. It is assumed that the thickness adjustment groove 25 and the tool holding groove 28 have the same depth. Here, the area open at 90 degrees of the tool holding groove 28 becomes a holding area for holding the above-described rectangular diamond tool 10 and protruding its tip to the outside.

And the holder pressing part 30 is attached to the upper part of this tool attachment part 22b. The holder pressing portion 30 has a substantially rectangular parallelepiped shape and is attached to the concave portion of the tool attachment portion 22b to constitute the rectangular parallelepiped tool holder 20 . The inclined surfaces 31a and 31b corresponding to the inclined surfaces 26a and 26b of the tool attachment part 22b are formed on the left and right sides of the tip end of the holder pressing part 30, and inclined surfaces 31c corresponding to the inclined surfaces 26c are formed on the upper surface. ) is formed. Moreover, the through hole 32 is formed in the center part.

When holding the diamond tool 10 in the tool holder 20, first, as a thickness adjustment member, a thickness adjustment pin 33 having the same diameter as the thickness of the diamond tool 10 is inserted into the thickness adjustment groove 25, Then, the diamond tool 10 is inserted into the tool holding groove 28, the pressing part 30 is put in a state in which a part thereof is protruded, and the screw 34 is tightened to fix it. In this way, since the lower surface of the holder pressing portion 30 always comes in parallel to the surface of the tool attachment portion 22b, it is possible to securely fix the diamond tool 10 to the tip.

3 is a front view and a side view showing a state in which the tool holder 20 having the diamond tool 10 is attached to the scribe head unit. The scribing head unit 40A is configured such that the plate-shaped head plate 41 itself moves vertically by a slide mechanism (not shown) as a whole. Then, an air cylinder 42 for scribe load is fixed to the head plate 41 . A rod 42a protrudes from the lower end of the air cylinder 42 so as to be able to expand and contract. And as shown in Fig. 3(b), a guide mechanism 43 and a slide portion 44 are provided below the rod 42a of the head plate 41, and the slide portion 44 is moved downward with a predetermined load. is pressurized with The guide mechanism 43 holds the slide portion 44 so as to be movable up and down. The slide part 44 is provided with an L-shaped plate 45 . The plate 45 moves up and down together with the slide part 44 , but the lower limit is regulated by the stopper 46 . Then, the tool holder 20 is fixed to the plate 45 in the oblique direction by passing the screws 47a and 47b through the through holes 23b and 24b. Then, scribing can be performed by moving the scribing head unit 40A in the direction of the arrow (A).

In addition, a foreign material removal holder 51 is installed on the support plate 50 at the right end of the head plate 41 . As shown in Fig. 3(b), the plate-shaped support plate 50 projects the foreign material removal holder 51 to the left from the head plate 41 so as to be in the same position as the diamond tool when viewed from the side. The foreign material removal holder 51 is fixed in parallel to the head base 41 in a rectangular parallelepiped shape similarly to the tool holder, and a sponge 52 is provided at the distal end. The sponge 52 is a foreign material removing member that, when the scribing head unit 40A is moved in the direction of the arrow A, contacts the substrate immediately before scribing and removes the foreign material adhering to the scribing schedule line. Here, the foreign material removal holder 51 and the sponge 52 which is a flexible foreign material removal member at the front end constitutes the foreign material removal means attached to the scribing head unit 40A.

Next, the lubricant holder adjacent to the foreign material removal holder 51 is demonstrated. 4 is a side view showing only the lubricant holder and its peripheral parts extracted, and the air cylinder 42 , the slide part 44 , the plate 45 or diamond tool 10 , the support plate 50 , and the foreign substance removal holder 51 . ) are omitted. And, as shown in FIG. 4 , the support plate 53 is attached to the head plate 41 so as to protrude similarly to the support plate 50 . A guide mechanism 53a is formed at the left end of the support plate 53, and the slide portion 54 and the L-shaped block 55 attached thereto are configured to move vertically along the guide mechanism 53a. A lubricant holder 56 is attached to the lower side of the L-shaped block 55 by screwing. The lubricant holder 56 has a rectangular parallelepiped shape like the foreign material removal holder 51 and a solid lubrication wheel 57 is attached to the lower end thereof. The solid lubrication wheel 57 has a cylindrical shape, and the shaft center is rotatably held in the lubricant holder 56, rotates by moving it in the scribing direction, and is a lubricant that applies lubricant on the planned scribing line immediately before scribing. It is a dispensing member.

Further, as shown in Fig. 4, a support plate 58 is provided so as to protrude from the side of the head plate 41, and a descending end stopper 59 is provided at its tip. The descending end stopper 59 is to regulate so that the L-shaped block 55 does not go down excessively by contacting one end of the L-shaped block 55 . In addition, the head plate 41 is provided with a support plate 60 above the L-shaped block 55 , and an air pressurization unit 61 is provided on the upper portion of the head plate 41 . The air pressing unit 61 presses the L-shaped block 55 downward at the protrusion at the tip, thereby pressing the solid lubrication wheel 57 below the lubricant holder 56 against the brittle material substrate. The air pressure unit 61 held by the support plate 60 constitutes a pressing means for pressing the lubricant holder 56 .

As the solid lubricant constituting the solid lubrication wheel 57, a lubricant solid at room temperature such as beeswax (wax) or petroleum hydrocarbon is used. Alternatively, a mixture of a solid lubricant and a lubricant that is liquid at room temperature, a solid lubricant in powder form, or other components may be used. As the solid lubricant in powder form, for example, graphite, molybdenum disulfide, tungsten disulfide, and the like are suitably used.

Next, the method of dividing the glass substrate which is a brittle material substrate using 40A of scribe head units of this embodiment is demonstrated using the flowchart of FIG. 5, and the top view of the glass substrate of FIG. First, the glass substrate 70 which has the flat surface SF in step S1 is prepared. When scribing the glass substrate 70, one point P1 of the diamond tool 10 of the tool holder 20 attached at an angle is fixed so as to be in contact with the glass substrate 70, and the scribing head unit (40A) is pushed down to the vicinity of one side 70a of the glass substrate 70, and it is moved in the direction of the arrow A shown, and it is made to slide to the position close to the other side 70b of the dividing line. When the scribing head unit 40A is moved in this way, the foreign material in the planned scribing line is removed by the sponge 52 attached to the foreign material removal holder 51 . That is, as shown in step S2 of FIG. 5, cleaning is performed along the scribing scheduled line. At this time, as shown in an enlarged view of the planned scribing line SIL1 in FIG. By cleaning the planned scribing line in this way, foreign materials are not caught between the glass substrate 70 and the edge of the blade during scribing, and damage to the point of the diamond tool can be reduced.

Next, as shown in Fig. 7(b), in the portion cleaned with respect to the planned scribing line SIL1, the solid lubrication wheel 57 of the lubricant holder 56 is in contact with the glass surface repeatedly, and air from the top The solid lubrication wheel 57 rolls by moving in a state in which a load is applied to the pressing unit 61, and a lubricant is applied thinly (step S3). And by scribing with the diamond tool of the scribing head held in the holder 20, the trench line TL1 is formed along the scribing schedule line SIL1 as shown in FIG. 6 (step S4). At this time, the diamond tool 10 scribes at the same point without rolling. In fact, by moving the scribe head unit 40A, steps S2 to S4 proceed almost simultaneously. In this way, due to the lubricating effect of the lubricant, the wear of the point of the diamond tool can be significantly reduced, and the lifespan can be increased. For example, the point of a diamond tool wears several tens of meters when not lubricated, but when lubricated, durability can be maintained over thousands of meters. In addition, since the lubricant is applied by the transmission of the solid lubrication wheel 57, the lubricant can be applied with high precision only to the scribing scheduled line and its vicinity. Thereby, while suppressing adhesion of the lubricant to locations other than the planned scribing line on the substrate, it is possible to easily remove the lubricant or the like in a subsequent step.

As for the trench line, only a groove by plastic deformation is formed in the surface SF of the glass substrate 70 by scribing, as in FIG. 8(a) showing the cross section of the circular part of FIG. It is a line with no cracks. For this reason, it is possible to scribe for trench line formation under wider scribing conditions, such as using a lower load than when forming a normal scribe line for generating cracks. In addition, in this embodiment, the side 70a becomes a scribe upstream side, and the side 70b becomes a downstream side.

Similarly, the scribing head unit 40A is moved from left to right along the scribing schedule lines SIL2 to SIL6 of the surface SF of the glass substrate 70 . Thereby, the foreign material on the scribing schedule line is removed with the sponge 52 of the foreign material removal holder 51 , the lubricant is applied by the solid lubrication wheel 57 of the lubricant holder 56 , and further, the diamond tool 10 ) is scribed by In this way, five more trench lines TL2 to TL6 are formed parallel to the trench line T1.

Next, as shown in FIG. 9 , an auxiliary line AL1 is formed to intersect each trench line. The auxiliary line AL1 is preferably formed on the downstream side of each trench line, that is, close to the side 70b. As shown in FIG. 1, the auxiliary line AL1 may be formed by using a scribing tool having a diamond edge, or by rolling a scribing wheel. In the present embodiment, the auxiliary line is a crack line in which cracks are formed.

In this way, the auxiliary line AL1 is formed, and the glass substrate 70 is divided along the auxiliary line AL1 along the auxiliary line AL1. At this time, a crack is generated as shown in FIG. 8( b ) from the position where the already formed trench lines TL1 to TL6 and the auxiliary line AL1 intersect, and the cracks move to the upstream side of each of the trench lines TL1 to TL6 . It is extended (step S5). Accordingly, the trench lines TL1 to TL6 are changed to crack lines CL1 to CL6 accompanied by cracks below them.

Thereafter, in step S6 of FIG. 5 , the glass substrate 70 can be divided into a desired shape by dividing the glass substrate 70 along the crack lines CL1 to CL6.

And the solid lubrication wheel 57 is gradually worn when lubricant is applied and its diameter is reduced, but the L-shaped block 55 is movable up and down, and the L-shaped block 55 is formed by the air pressure unit 61 from the top. Since it is being pressed, the solid lubrication wheel 57 is always pressed against the glass surface with a predetermined load, so that the lubricant can be applied.

In this embodiment, although it is said that cracks generate|occur|produce by forming an auxiliary line and isolate|separating along an auxiliary line, it is good also as a process which does not accompany isolation|separation of an auxiliary line. In this case, when the auxiliary line is formed, a crack is formed along the trench line. Also, by performing a step of forming cracks by sliding the diamond tool in the opposite direction at the end of the trench line without forming an auxiliary line, or a step of extending the trench line and passing the diamond tool through the end of the substrate, etc. It can cause cracks along the trench line.

When the point P1 in contact with the substrate is deteriorated by wear, the point P5 can be used by removing the tool holder from the scribe head unit, rotating it by 180°, and replacing the front and rear. Alternatively, the diamond tool 10 is once removed from the tool holder 20 , rotated by 90° and fixed to the tool holder 20 again, and another point, for example, the point P2 is attached to the glass substrate 70 . In the same manner, cleaning, lubricant application, and scribing of the scribing scheduled line are performed by contacting them.

Next, another embodiment of the scribing head unit having a function of removing foreign matter and applying a lubricant will be described. Fig. 10 shows a scribe head unit according to the second embodiment, and parts that are the same as those of the first embodiment are denoted by the same reference numerals. As shown in FIG. 10 , in the scribing head unit 40B of the second embodiment, a spring pressing unit 62 using a spring is provided in the support plate 60 instead of the air pressing unit 61 . The spring pressing unit 62 is a pressing means for pressing the L-shaped block 55 from the top to the bottom. Even in this case, the solid lubrication wheel 57 can be pressed against the glass surface, and even when the solid lubrication wheel 57 has been worn, it is pressed by the spring, so that the wheel can always be pressed with almost the same pressure to apply lubricant to the glass surface. there is. In this case, the same effect can be obtained with a simpler structure than the air pressurization unit.

In each of the above-described embodiments, as shown in Fig. 1, a scribing tool having a plurality of points made of diamond is used. A scribing tool may be used, and the scribing tool of a quadrangular pyramid trapezoid or conical shape may be used.

Here, the auxiliary line is formed after the trench line is formed as shown in FIG. 5. However, after the trench line is formed, the lubricant applied to the planned scribing line is removed by wiping off. do.

Further, the point portion of the diamond tool may be cleaned after scribing for a certain distance is completed. In cleaning, an air blow may be blown into the point part of a blade edge, and air may be sucked in from the point part. Moreover, the point part may be ultrasonically cleaned, and a lubricant or foreign material may be removed with a sponge etc., and it may be made to clean. In the case of removing the lubricant, cleaning may be performed by providing a mat at the end of the substrate and passing it over the mat with a scribing tool.

Although the sponge is used as a foreign material removal member in each embodiment mentioned above, a flexible member which achieves the function similar to this, for example, a felt, etc. can be used.

Further, in the above-described embodiment, a lubricant is applied using a solid lubricant wheel as a lubricant applying member before scribing. However, if the lubricant applying member is a solid lubricant, the shape is not limited to a wheel, and a cylinder or a prism, a cone or a pyramid Any shape may be sufficient. When not in the shape of a wheel, the lubricant applying member slides on the substrate to apply the lubricant.

Further, in each of the above-described embodiments, the substrate is scribed by moving the scribe head unit, however, foreign matter removal, lubricant application and scribing may be performed by fixing the scribe head unit and moving the substrate.

Moreover, although the tool holder, foreign material removal means, and lubricant application means are provided in one scribe head unit 40A in the above-mentioned embodiment, the foreign material removal means or lubricant application means is a scribe different from the scribe head unit in which the tool holder is provided. It may be installed on the head unit. In addition, although steps S2 to S4 are made to proceed substantially simultaneously by moving the scribing head unit 40A in the above-described embodiment, steps S2 to S4 may be performed stepwise with respect to the planned scribing line.

The present invention can minimize wear of diamond points when scribing a brittle material substrate with a scribing tool having diamond points, and can be effectively used in a scribing apparatus using diamond points.

10: multi-point diamond tool 11: base
12: through holes 13a to 13d: ridge line
14a to 14d: first inclined surface 15a to 15d: second inclined surface
20: tool holder 21: tool holder body
22a: holder holding part 22b: tool holding part
23a, 23b, 24a, 24b: through hole 25: thickness adjustment groove
26a, 26b, 26c, 31a, 3lb, 31c: slope
27: thread groove 28: tool retaining groove
30: holder press 33: thickness adjustment pin
34: screw 40A, 40B: scribe head unit
41: head plate 42: air cylinder
43: guide mechanism 44: slide part
45: plate 50, 53: support plate
51: foreign matter removal holder 52: sponge
54: slide part 55: L-shaped block
56: lubricant holder 57: solid lubrication wheel
58, 60: support plate 59: descending end stopper
61: air pressure unit 62: spring pressure unit
70: glass substrates P1 to P8: point
SIL1 to SIL6: Lines to be scribed
TL1 to TL6: trench line AL: auxiliary line
CL1 to CL6: crack line

Claims (6)

A scribing head unit for scribing by pressing and relatively moving a point of a scribing tool against a brittle material substrate with a predetermined load, the scribing head unit comprising:
one or more point scribing tools using diamonds;
a tool holder attached to the scribing head unit to hold the scribing tool;
a lubricant holder attached to the scribe head unit to move up and down;
a lubricant applying member composed of a solid lubricant and attached to a lower end of the lubricant holder to apply a lubricant on a planned scribing line; and
and pressing means for pressing the lubricant holder against the brittle material substrate. The scribing head unit according to claim 1, wherein the lubricant applying member is a cylindrical solid lubrication wheel having an axial center. The scribing head unit according to claim 1, wherein the scribing head unit has a foreign material removing means for removing the foreign material from the brittle material substrate along a scribing scheduled line. The scribe head unit according to claim 3, wherein the foreign material removing means includes a foreign material removing holder attached to the scribe head unit, and a foreign material removing member provided at a lower end of the foreign material removing holder. The scribe head unit according to any one of claims 1 to 3, wherein the pressing means is an air pressing unit for pressing the lubricant holder against the brittle material substrate. The scribe head unit according to any one of claims 1 to 3, wherein the pressing means is a spring pressing unit for pressing the lubricant holder against the brittle material substrate.

Images