JP2008238545A - Fixture for replacing brittle base dividing blades and fitting method of the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable fitting of a brittle base dividing blade (cutter wheel) by efficient replacement labor and in a short time, compared with a conventional fitting method, even with gloves on. <P>SOLUTION: This fixture 20 for replacing a brittle base dividing blade comprises a retainer part for retaining a holder 13 equipped with a support part 13b for supporting a cutter wheel 11 through a cutter pin and a mobile member 27 arranged so as to allow a holder 13 retained by the retaining part to move linearly toward the support part 13b of the holder 13 retained by the retaining part. In addition, a bearing part 28 which can bear the cutter wheel 11 is arranged, to the mobile member 27, in a position where a hole 12 formed in the cutter wheel 11 can meet opposite to a support hole 15 formed in the support part 13b of the holder 13 retained by the retaining part by the transfer of the transfer member 27. Further, this fixture 20 is equipped with a regulating member 37 for regulating the transfer of the transfer member 27 in a position adjustable manner, and also a transfer adjusting part 38 which adjusts the transfer level of the transfer member 27 by changing the position of the regulating member 37. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a tool for replacing a blade for cutting a brittle substrate and a method for attaching the blade for cutting a brittle substrate, and more specifically, a blade for cutting a brittle substrate such as a semiconductor wafer, a glass substrate, or a ceramic substrate via a cutter pin. The present invention relates to a tool for exchanging a blade for cutting a brittle substrate and a method for attaching the blade for cutting a brittle substrate, which are used when performing an operation for mounting the holder rotatably.

  When a brittle substrate such as a semiconductor wafer, a glass substrate, or a ceramic substrate is cut, a scribe line (cut line) is formed on the brittle substrate with a cutter wheel (cutting blade). Next, after turning the front and back of the brittle substrate, the brittle substrate is divided along the scribe line by applying a pressing force to the position along the scribe line on the other surface where the scribe line is not formed. A cutter wheel (cutter chip) that forms a scribe line on a brittle substrate is made of sintered diamond, and is rotatably supported by a holder via a cutter pin (for example, see Patent Document 1).

The cutter wheel has a diameter (outer diameter) of about 2 mm, and the cutter pin has a diameter of about 0.8 mm. And in order to attach a cutter wheel to a holder, a cutter wheel is arrange | positioned between a pair of support parts of a holder, and a cutter pin is inserted in the hole currently formed in the support part and the cutter wheel.
JP 2005-297523 A

  Conventionally, when the cutter wheel is worn and needs to be replaced, the cutter wheel is manually replaced. The cutter wheel has a small diameter of about 2 mm, and it is not easy to manually insert the cutter pin into the hole of about 0.8 mm formed in the cutter wheel and the holder. In particular, when working in a clean room, it is necessary to work in a gloved state, which is difficult. Even when the work is performed in a place other than the clean room, if the work is performed with the gloves removed, the surface of the cutter wheel is contaminated and the quality deteriorates.

  The present invention has been made in view of the above-described conventional problems. The first object of the present invention is to improve the workability of attaching a blade for cutting a brittle substrate (cutter wheel) even when wearing gloves. An object of the present invention is to provide a tool for exchanging a blade for cutting a brittle substrate that can be performed well in a short time. In addition, the second object is to provide a method for attaching a blade for cutting a brittle substrate that can be carried out in a short time with better workability compared to the prior art, even when wearing gloves. There is to do.

  In order to achieve the first object, the invention according to claim 1 includes a holding unit for holding a holder having a support unit for supporting a fragile substrate cutting blade through a cutter pin, and the holding unit. And a moving member provided so as to be linearly movable toward the support portion of the holder held by the holder. Further, the brittle substrate cutting blade can be supported on the moving member, and a hole formed in the brittle substrate cutting blade by movement of the moving member is formed in a support portion of the holder held by the holding portion. A support portion provided at a position where the support member can be opposed to the support hole, and a regulating member that regulates movement of the moving member so that the position of the moving member can be adjusted by changing the position of the regulating member. A movement amount adjusting unit for adjusting the movement amount. Here, the “brittle substrate” means a hard and easily broken substrate such as a semiconductor wafer, a glass substrate, or a ceramic substrate.

  When the brittle substrate cutting blade replacement jig of the present invention is used to attach the brittle substrate cutting blade to the holder, the holder is fixed to the holding portion. Then, the position of the regulating member of the movement amount adjusting unit is set to an appropriate position corresponding to the holder and the brittle substrate cutting blade. Then, when the movable member is moved to a position where the movement is restricted by the regulating member while the brittle substrate cutting blade is supported on the support portion, the hole formed in the brittle substrate cutting blade is held in the holding portion. It will be in the state which opposes the support hole currently formed in the support part of the made holder. When the cutter pin is inserted into the support hole in this state, the cutter pin enters the support hole and the hole, and the brittle substrate cutting blade is supported by the support portion of the holder via the cutter pin. Therefore, the attachment of the brittle substrate cutting blade can be performed in a shorter time with better workability than in the past.

  According to a second aspect of the present invention, in the first aspect of the present invention, the moving member is formed in a V shape in a plan view at the distal end side, and the support portion is a groove formed in the V-shaped surface. It consists of In general, a cutting tool for cutting a brittle substrate has a small disk shape with a diameter of about 2 mm and has a hole through which a cutter pin passes in the center. In this invention, since the support part is comprised by the groove | channel formed in the V-shaped surface, the brittle board | substrate cutting blade can be stably supported in the state where a hole is not hidden.

  The invention according to claim 3 is a method for attaching the blade for cutting a brittle substrate to a holder provided with a support portion that rotatably supports the blade for cutting a brittle substrate via a cutter pin. Then, using the brittle substrate cutting blade replacement jig according to claim 1, the movement amount adjustment is performed so that the movement amount of the moving member becomes an appropriate movement amount in a state where the holder is fixed to the holding portion. Adjust the section. Thereafter, the movable member is moved in a state where the blade for cutting the brittle substrate is supported on the support portion, and the hole formed in the blade for cutting the brittle substrate is opposed to the support hole of the holder held by the holding portion. In this state, the cutter pin is inserted into the support hole and the hole. Here, the “appropriate amount of movement” is formed on the brittle substrate cutting blade at a position where the movement of the moving member is restricted when the moving member is moved with the brittle substrate cutting blade supported by the support portion. This means the amount of movement in which the hole formed faces the support hole formed in the support part of the holder held by the holding part.

In the present invention, the moving amount of the moving member is adjusted to an appropriate moving amount with the holder fixed to the holding portion. Then, when the moving member is moved to a position where the moving part is regulated by the regulating member in a state where the brittle board cutting knife is supported on the support part, a hole formed in the brittle board cutting knife is formed in the holding part. It will be in the state which opposes the support hole currently formed in the support part of the hold | maintained holder. And if a cutter pin is inserted in a support hole in that state, a cutter pin will be in the state which penetrated the support hole and the hole, and the brittle board | substrate cutting blade will be supported by the support part of a holder via a cutter pin. Therefore, the attachment of the brittle substrate cutting blade can be performed in a shorter time with better workability than in the past. If the adjustment of the movement amount adjustment unit has been adjusted last time, the adjustment may be omitted this time.

  ADVANTAGE OF THE INVENTION According to this invention, even with a glove, the attachment of a fragile substrate cutting blade (cutter wheel) can be performed in a short time compared to the prior art with good workability.

Hereinafter, an embodiment embodying the present invention will be described with reference to FIGS. 1 and 2.
As shown in FIGS. 2 (a) and 2 (b), a cutter wheel 11 as a cutting tool for brittle substrate cutting is formed in a disk shape, and has a V-shaped blade 11a along the outer periphery and a center. A hole 12 is formed in the surface. The cutter wheel 11 is formed with, for example, an outer diameter of about 2 mm and a diameter of the hole 12 of about 0.8 mm.

  The holder 13 of the cutter wheel 11 includes a main body portion 13 a formed in a substantially quadrangular prism shape, and a pair of support portions 13 b that support the cutter wheel 11 via a cutter pin 14 on the distal end side. A quadrangular convex portion 13c is formed on the main body portion 13a. The support portion 13b is provided with a gap larger than the thickness of the cutter wheel 11, and includes a support hole 15 for inserting the cutter pin 14 and supporting the inserted cutter pin 14. The support portion 13b is formed in a triangular shape when viewed from the support hole 15 side, and the support hole 15 is formed at the tip. The tip portion of the support portion 13 b is chamfered to be an arc surface having a radius smaller than the radius of the cutter wheel 11 with the center of the support hole 15 as the center. And the cutter wheel 11 is hold | maintained so that the front-end | tip of the blade 11a of the cutter wheel 11 may come out outside the external line of the support part 13b in the state supported by the support part 13b via the cutter pin 14. FIG. As shown in FIG. 2A, the holder 13 is formed with a hole 13d to which the rod is attached.

  Next, a description will be given of a brittle substrate cutting blade replacement jig used when the cutter wheel 11 supported by the holder 13 configured as described above via the cutter pins 14 is replaced. Hereinafter, the cutter for exchanging brittle substrates is simply referred to as a jig.

  As shown in FIGS. 1 (a) and 1 (b), the jig 20 includes a base plate 21 having a planar rectangular shape, and the first end side in the longitudinal direction of the base plate 21 (in FIGS. 1 (a) and 1 (b)). On the left end side), a support plate 22 constituting a holding portion for holding the holder 13 is fixed by two bolts 23. The support plate 22 has a rectangular planar shape and is longer than the width of the base plate 21, and convex portions 22 a that engage with the side surfaces of the base plate 21 are formed at both ends in the longitudinal direction. The support plate 22 is placed on the base plate 21 with its longitudinal direction orthogonal to the longitudinal direction of the base plate 21 and with the convex portions 22 a engaged with the side surfaces of the base plate 21. It is fastened and fixed. A long hole 22 b extending in a direction orthogonal to the longitudinal direction of the support plate 22 is formed in the support plate 22 at a position corresponding to the insertion position of the bolt 23. That is, the support plate 22 is movable in the longitudinal direction of the base plate 21 on the base plate 21 with the projections 22a engaged with the side surfaces of the base plate 21 in a state where the bolts 23 are loosened.

  On the base plate 21, a plurality of guide members 24 having a function of holding the holder 13 in cooperation with the support plate 22 are provided in a state extending along the longitudinal direction of the base plate 21 at a predetermined interval from the support plate 22. It is fixed with bolts 25.

  The guide member 24 is formed so that the upper surface thereof is at the same height as the upper surface of the support plate 22, and a guide groove 26 extending along the longitudinal direction is formed in the central portion over the entire length. A contact surface 24a extending in parallel with the support plate 22 is formed on the first end side (the side facing the support plate 22) of the guide member 24, and the shape (triangular shape) of the support portion 13b of the holder 13 is formed at the center. ) -Shaped concave portion 24b having a shape corresponding to FIG. The holder 13 is held (fixed) in a state in which the tip of the support portion 13b corresponds to the concave portion 24b and the convex portion 13c is sandwiched between the support plate 22 and the contact surface 24a.

  The guide groove 26 is formed such that the distance from the upper surface of the base plate 21 to the bottom surface 26a of the guide groove 26 is equal to the thickness of one support portion 13b. Therefore, when the holder 13 is held by the jig 20, the inner surface of the support portion 13 b that comes into contact with the base plate 21 and the bottom surface 26 a of the guide groove 26 are located on the same plane.

  The jig 20 includes a moving member 27 provided so as to be linearly movable toward the support portion 13b of the holder 13 held by the support plate 22 and the contact surface 24a. The moving member 27 is formed in a substantially L-shaped plane from a straight portion 27a extending along the guide groove 26 and a locking portion 27b extending laterally at right angles to the straight portion 27a at the base end of the straight portion 27a. . The straight portion 27 a is formed to have a width substantially the same as the width of the guide groove 26, and is slidable along the guide groove 26. The moving member 27 is provided with a support portion 28 at the tip of the straight portion 27a. The straight portion 27 a is formed in a V shape in a plan view at the distal end side, and the support portion 28 is configured by a V-shaped surface 29. As shown in FIG. 3, a groove 30 is formed in the V-shaped surface 29. The groove 30 is formed as a V-groove corresponding to the cross-sectional shape of the blade 11 a of the cutter wheel 11. In the state where the cutter wheel 11 is moved to a position corresponding to the support portion 13b by the movement of the moving member 27 and the movement of the moving member 27 is regulated by the regulating member 37, the support portion 28 is held by the holding portion. It is provided at a position where it can face the support hole 15 formed in the support portion 13 b of the holder 13.

  A long hole 31 extending along the longitudinal direction is formed in the straight portion 27a. Near the second end of the guide member 24, an engagement plate 32 is fixed by a bolt 33 so as to straddle the guide groove 26. An engagement pin 34 is fixed to the engagement plate 32 so as to engage with the elongated hole 31 of the linear portion 27a. When the moving member 27 moves away from the support plate 22, the engaging pin 34 engages with the first end portion (end portion on the support portion 28 side) of the long hole 31 and moves the engaging plate 32. In the restricted state, the support portion 28 is fixed at a position not located below the engagement plate 32.

  A block 35 is fixed to the side surface of the second end portion of the base plate 21 with bolts 36. The block 35 is provided with a regulating member 37 that is in contact with the locking portion 27b of the moving member 27 and regulates the movement of the moving member 27 in the direction toward the support plate 22 so that the position thereof can be adjusted. In this embodiment, the restricting member 37 includes a slotted screw 37a that passes through the block 35 in a state of being screwed into a screw hole formed in the block 35, and a nut 37b that is screwed into the screw 37a. . The block 35 and the regulating member 37 are provided with a regulating member 37 that regulates the movement of the moving member 27 so that the position of the moving member 27 can be adjusted, and the moving amount adjusting unit 38 that adjusts the moving amount of the moving member 27 by changing the position of the regulating member 37. Configure.

Next, an attachment method for attaching the cutter wheel 11 to the holder 13 using the jig 20 configured as described above will be described.
First, as shown in FIG.1 (b), the holder 13 is fixed between the support plate 22 which is a holding | maintenance part, and the contact surface 24a. When fixing the holder 13, the bolts 23 are loosened and the support plate 22 is moved away from the guide member 24, and then the holder 13 is placed on the base plate 21 with the support portion 13 b corresponding to the recess 24 b. To do. In this state, the base plate 21 is moved in a direction approaching the guide member 24. Then, the holder 13 is fixed by tightening the bolt 23 in a state where the convex portion 13c of the holder 13 is sandwiched between the support plate 22 and the contact surface 24a.

  Next, the moving amount adjusting unit 38 is adjusted so that the moving amount of the moving member 27 becomes an appropriate moving amount. Specifically, the nut 37b is loosened to adjust the protruding amount of the screw 37a toward the locking portion 27b. The appropriate amount of movement means that when the moving member 27 is moved in a state where the cutter wheel 11 is supported by the support portion 28, the hole 12 formed in the cutter wheel 11 is at a position where the movement of the moving member 27 is restricted. This means the amount of movement that faces the support hole 15 formed in the support portion 13b. The amount of movement is a value determined by the length of the support portion 13b, the size of the cutter wheel 11, and the like, and can be obtained in advance.

  After the adjustment of the movement amount adjustment unit 38 is completed, the cutter wheel 11 is engaged with the groove 30 of the V-shaped surface 29 and supported by the support unit 28. In this state, the moving member 27 is moved toward the support portion 13b manually. When the moving member 27 is moved to a position where the movement is restricted by the restricting member 37, the hole 12 of the cutter wheel 11 faces the support hole 15 of the support portion 13b of the holder 13 held by the holding portion. In this state, when the cutter pin 14 is inserted into the support hole 15, the cutter pin 14 passes through the support hole 15 and the hole 12, and the cutter wheel 11 is supported by the support portion 13 b of the holder 13 via the cutter pin 14. The

  Next, the moving member 27 is moved in a direction away from the support portion 13b. Further, after loosening the bolt 23, the support plate 22 is moved away from the guide member 24. Then, the holder 13 is removed from the jig 20 and fixed to prevent the cutter pin 14 from coming off, and the attachment of the cutter wheel 11 to the holder 13 is completed. When this glove 20 was used to work with gloves, the time conventionally required for about 20 minutes was reduced to about 2 minutes, 1/10.

Therefore, according to this embodiment, the following effects can be obtained.
(1) The jig 20 includes a holding portion (support plate 22 and contact surface 24a) for holding the holder 13 including the support portion 13b that supports the cutter wheel 11 via the cutter pin 14, and a holding portion. And a moving member 27 provided so as to be linearly movable toward the support portion 13b of the holder 13 held by the holder 13. Further, the cutter wheel 11 can be supported with respect to the moving member 27, and the hole 12 formed in the cutter wheel 11 by the movement of the moving member 27 is formed in the support portion 13b of the holder 13 held by the holding portion. A support portion 28 provided at a position where it can face the support hole 15 and a regulating member 37 that regulates the movement of the moving member 27 toward the support portion 13b are provided. Therefore, attachment of the cutter wheel 11 can be performed in a short time with good workability even in a gloved state. As a result, the cutter wheel 11 is not handled with bare hands, and quality defects are suppressed.

  (2) The restricting member 37 includes a position-adjustable screw 37a and a nut 37b that is screwed to the screw 37a, and constitutes a moving amount adjusting unit 38 that adjusts the moving amount of the moving member 27 by changing the position of the screw 37a. To do. Therefore, even when the sizes of the holder 13 and the cutter wheel 11 are different, the position where the moving member 27 is regulated can be easily changed to an appropriate position. Further, the nut 37b serves as a double nut, and the screwing position of the screw 37a is difficult to shift.

  (3) The moving member 27 has a V-shaped front end side, and the support portion 28 includes a V-shaped surface 29. Therefore, even if the moving member 27 is slightly displaced during the movement, the V-shaped surface 29 receives the alignment action, and the hole 12 of the cutter wheel 11 is smoothly arranged at a position corresponding to the support hole 15 of the support portion 13b. .

  (4) A groove 30 is formed in the V-shaped surface 29. Therefore, even if the cutter wheel 11 is a small disk having a diameter of about 2 mm, the cutter wheel 11 can be stably supported in a state where the hole 12 is not hidden.

The embodiment is not limited to the above, and may be embodied as follows, for example.
The shape of the holder 13 is not limited to the shape held by the holding portion in the convex portion 13c. For example, as shown to Fig.4 (a), the convex part 13c does not exist, but the shape seen from the support hole 15 side is good also as a pentagonal shape. In this case, as shown in FIG. 4B, the guide member 24 of the jig 20 is formed so that the V-shaped concave portion 24b continues to the outside of the guide groove 26, and the holder 13 is the tip of the support portion 13b. Is in contact with the recess 24b of the guide member 24, and the support plate 22 is fastened and fixed by the bolt 23 in a state where the base end is in contact with the support plate 22, and is held by the holding portion. That is, the holding part is constituted by the support plate 22 and the recess 24b.

O You may abbreviate | omit the groove | channel 30 formed in the V-shaped surface 29 of the support part 28. FIG.
○ The support portion 28 is not limited to the V-shaped surface 29, and may be formed of, for example, a curved surface having a curvature smaller than the curvature of the blade 11 a of the cutter wheel 11 or a recess having a width slightly larger than the diameter of the cutter wheel 11 Or you may.

O Instead of configuring the restricting member 37 with the screw 37a and the nut 37b, the nut 37b may be omitted or may be configured with a normal bolt.
The moving member 27 may be moved by a machine. For example, the moving member 27 is moved by a linear actuator or an endless belt driven by a motor is engaged, and the moving member 27 is moved by driving the belt in a state where the engaging portion is engaged with the moving member 27. You may let them.

  ○ The cutter pin 14 may be inserted by a machine. For example, a robot arm that inserts the cutter pin 14 into the support hole 15 from above the support hole 15 while holding the cutter pin 14 may be provided.

The following technical idea (invention) can be understood from the embodiment.
(1) In the invention described in claim 2, a groove that can be engaged with a brittle substrate cutting blade is formed on the V-shaped surface.

  (2) In the invention according to any one of claims 1, 2 and the technical idea (1), a pair of the support portions are provided, and the brittle substrate cutting blade replacement jig is A base plate having a surface on which one support portion of the pair of support portions is placed; and the moving member moves along a guide groove having a bottom surface at the same height as the one support portion of the pair of support portions. It is provided as possible.

(A) is a model perspective view of a jig | tool, (b) is a top view of a jig | tool. (A) is a model perspective view in the state where the cutter wheel was attached to the holder, (b) is an exploded front view. The schematic cross section which cut | disconnected the jig | tool between the support plate and the guide member and looked at the guide member side. (A) is a model perspective view of the holder of another embodiment, (b) is the partial top view of the state which fixed the holder to the jig | tool.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11 ... Cutter wheel as a cutter for brittle board | substrate cutting, 12 ... Hole, 13 ... Holder, 13b ... Support part, 14 ... Cutter pin, 15 ... Support hole, 27 ... Moving member, 28 ... Bearing part, 29 ... Surface, 30 ... groove, 37 ... regulating member, 38 ... movement amount adjusting unit.

Claims (3)

A holding part for holding a holder provided with a support part for supporting a brittle substrate cutting blade via a cutter pin;
A moving member provided so as to be linearly movable toward the support portion of the holder held by the holding portion;
The brittle substrate cutting blade can be supported with respect to the moving member, and a hole formed in the brittle substrate cutting blade by movement of the moving member is formed in a support portion of a holder held by the holding portion. A support portion provided at a position where the support hole can be opposed to the support hole;
A brittle substrate cutting blade comprising a regulating member that regulates movement of the moving member so that the position of the regulating member can be adjusted, and a movement amount adjusting unit that adjusts the movement amount of the moving member by changing the position of the regulating member. Replacement jig.   2. The blade replacement tool for cutting a brittle substrate according to claim 1, wherein the moving member has a V-shaped front end side and the support portion is formed by a groove formed in the V-shaped surface. jig.   The method for attaching a cutting tool for brittle substrate cutting according to claim 1, wherein the cutting tool for brittle substrate cutting is attached to a holder having a support portion that rotatably supports the cutting tool for brittle substrate through a cutter pin. After adjusting the moving amount adjusting unit so that the moving amount of the moving member becomes an appropriate moving amount in a state where the holder is fixed to the holding unit using a tool, a brittle substrate cutting blade is attached to the support unit. The moving member is moved in a supported state, and the hole formed in the blade for cutting the brittle substrate is arranged at a position facing the support hole of the holder held by the holding part, and the cutter pin is supported in that state. A method for attaching a cutting tool for cutting a brittle substrate, wherein the tool is inserted into the hole and the hole.

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