KR102221482B1 - 워크피스에 대하여 도구의 위치를 결정하는 장치 - Google Patents

워크피스에 대하여 도구의 위치를 결정하는 장치 Download PDF

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Publication number
KR102221482B1
KR102221482B1 KR1020140130830A KR20140130830A KR102221482B1 KR 102221482 B1 KR102221482 B1 KR 102221482B1 KR 1020140130830 A KR1020140130830 A KR 1020140130830A KR 20140130830 A KR20140130830 A KR 20140130830A KR 102221482 B1 KR102221482 B1 KR 102221482B1
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KR
South Korea
Prior art keywords
plane
measurement
workpiece
axes
tool relative
Prior art date
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KR1020140130830A
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English (en)
Korean (ko)
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KR20150040753A (ko
Inventor
볼프강 닥터. 홀자펠
요르그 닥터. 드레셔
카티 닥터. 도드스-에덴
베른하르트 닥터. 무쉬
Original Assignee
덕터 요한네스 하이덴하인 게엠베하
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Publication of KR20150040753A publication Critical patent/KR20150040753A/ko
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Publication of KR102221482B1 publication Critical patent/KR102221482B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0272—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers for lift-off processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/18—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for positioning only

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
KR1020140130830A 2013-10-07 2014-09-30 워크피스에 대하여 도구의 위치를 결정하는 장치 KR102221482B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201310220214 DE102013220214A1 (de) 2013-10-07 2013-10-07 Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück
DE102013220214.8 2013-10-07

Publications (2)

Publication Number Publication Date
KR20150040753A KR20150040753A (ko) 2015-04-15
KR102221482B1 true KR102221482B1 (ko) 2021-03-03

Family

ID=51263250

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140130830A KR102221482B1 (ko) 2013-10-07 2014-09-30 워크피스에 대하여 도구의 위치를 결정하는 장치

Country Status (7)

Country Link
US (1) US9303980B2 (ja)
EP (1) EP2857901B1 (ja)
JP (1) JP6366452B2 (ja)
KR (1) KR102221482B1 (ja)
CN (1) CN104511794B (ja)
DE (1) DE102013220214A1 (ja)
TW (1) TWI633273B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2702948T3 (es) * 2016-07-27 2019-03-06 Heidenhain Gmbh Dr Johannes Equipo para medir longitudes
CN108581239B (zh) * 2018-04-10 2020-03-20 上海柏楚电子科技股份有限公司 一种用于方管激光切割测定偏移和实时刀路补偿的方法
CN108628112B (zh) * 2018-06-05 2020-07-21 温州杰锐电子科技有限公司 一种半导体芯片生产用浸没式光刻机
CN109507950B (zh) * 2018-11-09 2022-07-26 上海维宏电子科技股份有限公司 基于探针实现平面定位加工控制的装置、方法及其系统
PL243396B1 (pl) * 2020-12-22 2023-08-21 Politechnika Poznanska Sposób ustawiania przedmiotu obrabianego, zwłaszcza o nieregularnych kształtach, w przyrządzie obróbkowym
CN113124781A (zh) * 2021-03-30 2021-07-16 莆田杰木科技有限公司 平行度检测方法及平行度检测装置
CN115993088A (zh) 2021-10-20 2023-04-21 约翰内斯.海德汉博士有限公司 光学位置测量设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001217190A (ja) 1999-12-22 2001-08-10 Asm Lithography Bv リソグラフィ装置において使用するための位置検出システム
JP2002081927A (ja) 2000-09-08 2002-03-22 Kobe Steel Ltd ワークの位置ずれの測定方法
JP2005338075A (ja) 2004-05-21 2005-12-08 Agilent Technol Inc ウェハステージの平行移動を測定するヘテロダインレーザ干渉計
JP2007078687A (ja) 2005-09-12 2007-03-29 Dr Johannes Heidenhain Gmbh 位置測定装置

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US6249626B1 (en) 1998-03-06 2001-06-19 Lucent Technologies, Inc. Multimode fiber optical power monitoring tap for optical transmission systems
JP2005147828A (ja) 2003-11-14 2005-06-09 Mitsutoyo Corp 変位検出装置
US7602489B2 (en) * 2006-02-22 2009-10-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7483120B2 (en) * 2006-05-09 2009-01-27 Asml Netherlands B.V. Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
DE102006042743A1 (de) * 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US20080079920A1 (en) 2006-09-29 2008-04-03 Heiko Hommen Wafer exposure device and method
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
DE102008007319A1 (de) 2008-02-02 2009-08-06 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102009001262A1 (de) * 2009-03-02 2010-09-09 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP5602420B2 (ja) * 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
DE102009054592A1 (de) * 2009-12-14 2011-06-16 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US8829420B2 (en) 2010-06-09 2014-09-09 Nikon Corporation Two dimensional encoder system and method
DE102011007459B4 (de) * 2011-04-15 2023-05-11 Dr. Johannes Heidenhain Gmbh Optische Längenmesseinrichtung
CN103246172B (zh) * 2012-02-10 2016-12-28 约翰内斯﹒海德汉博士有限公司 具有位置测量装置的多个扫描单元的装置
DE102012205380B4 (de) * 2012-04-02 2014-09-25 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Anordnung zum Messen der relativen Ausrichtung von zueinander beweglichen Bauteilen einer Vorrichtung und Sensor für ein Koordinatenmessgerät
DE102013203211A1 (de) 2012-06-15 2013-12-19 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
TWI627379B (zh) 2013-10-07 2018-06-21 德商強那斯海登翰博士有限公司 光學位置測量裝置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001217190A (ja) 1999-12-22 2001-08-10 Asm Lithography Bv リソグラフィ装置において使用するための位置検出システム
JP2002081927A (ja) 2000-09-08 2002-03-22 Kobe Steel Ltd ワークの位置ずれの測定方法
JP2005338075A (ja) 2004-05-21 2005-12-08 Agilent Technol Inc ウェハステージの平行移動を測定するヘテロダインレーザ干渉計
JP2007078687A (ja) 2005-09-12 2007-03-29 Dr Johannes Heidenhain Gmbh 位置測定装置

Also Published As

Publication number Publication date
CN104511794B (zh) 2018-01-05
EP2857901B1 (de) 2016-04-20
JP6366452B2 (ja) 2018-08-01
TWI633273B (zh) 2018-08-21
KR20150040753A (ko) 2015-04-15
TW201527711A (zh) 2015-07-16
EP2857901A1 (de) 2015-04-08
DE102013220214A1 (de) 2015-04-09
JP2015075487A (ja) 2015-04-20
US20150098091A1 (en) 2015-04-09
CN104511794A (zh) 2015-04-15
US9303980B2 (en) 2016-04-05

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