KR102165562B1 - fork apparatus for substrate transferring robot - Google Patents

Abstract

Provided is a fork device for a substrate transfer robot for improving substrate support strength, product productivity and economic feasibility. The fork device for a substrate transfer robot comprises: a plurality of support bars disposed to be spaced at predetermined intervals to load a substrate on upper surfaces thereof and transfer the same, having hollow parts along a longitudinal direction, forming vacuum suction passages communicating with suction holes passing through upper surface parts to provide vacuum pressure along the longitudinal direction on one side of the hollow parts, and pultruded with a fiber-reinforced plastic material; a substrate adsorption pad made of a porous material and provided to cover the suction holes on the upper surfaces of the support bars; and a support bar fixing rod connecting end parts of the plurality of support bars.

Description

Fork apparatus for substrate transferring robot

The present invention relates to a fork apparatus for a substrate transfer robot, and more particularly, to a fork apparatus for a substrate transfer robot with improved substrate support strength and improved product productivity and economy.

In general, the substrate refers to a flat panel display (FPD) such as a liquid crystal display (LCD), a plasma display (PDP), and organic light emitting diodes (OLED), It means a wafer for semiconductors, a glass for a photo mask, and the like.

At this time, the substrate as a flat panel display device and the substrate as a semiconductor wafer differ from each other in terms of material and use, but a series of processing processes for the substrates, such as exposure, development, etching, strip, rinse, cleaning, etc. The process is practically very similar, and the substrates are manufactured by performing these processes sequentially.

Meanwhile, the substrate is manufactured by a substrate manufacturer and then supplied to a substrate processing company. In addition, substrate processing companies insert substrates one by one as a post process through a substrate input system. In this way, when a substrate is supplied from a substrate manufacturer to a substrate processing company, it is loaded in a loading box and transferred by a substrate transfer robot.

At this time, the substrate transfer robot is disposed in various processes for processing a substrate and serves to transfer a substrate, and thus has a structure and shape suitable for the process. In addition, the substrate transfer robot includes a traveling part, an elevating part, an arm part, and a fork part.

In detail, the substrate mounted on the upper surface of the fork portion is moved in the longitudinal direction of the fork portion by the arm portion. In addition, the arm portion is connected to the elevating portion and the driving portion, and is moved vertically by the elevating portion or horizontally along the driving portion, so that the substrate may be transferred to a target position.

In addition, an adsorption part is provided in the fork part to minimize damage to the substrate when transferring/loading the substrate. In addition to the adsorption part, a sensor part for detecting the alignment and position of the substrate for stable transfer/loading of the substrate is installed. do.

In detail, the conventional fork portion includes a holder for fixing one end of the finger portion while a plurality of finger portions extend in one direction on one side of the apparatus for loading/loading the substrate. In addition, at least one of the adsorption units or sensor units are installed along the length direction of the finger unit.

In addition, the finger portion is provided in a hollow shape and is made of a high-strength synthetic resin material such as fiber reinforced plastics (FRP) having sufficient strength to support the substrate.

At this time, the conventional finger portion was manufactured by an autoclave hardening method. In detail, a pre-preg made of fiber-reinforced plastic in the form of a tape by impregnating a fiber-reinforced material with a resin is laminated on the core mold frame to form a thickness. In addition, the outer mold corresponding to the outer shape of the finger portion is heated and pressurized in the autoclave chamber according to a curing cycle, so that the shape of the finger portion is processed.

However, the manufacturing by the autoclave hardening method is complicated in the process, and a vacuum suction process is required so that the laminated surfaces of the prepreg are in close contact with each other, so that the manufacturing time is lengthened, so mass production is difficult and production economy is deteriorated.

In addition, since the prepreg is stacked surrounding the core mold and the finger portions are manufactured to have the same thickness along the rim, it is difficult to form the upper and lower surfaces differently from each other. Accordingly, it is difficult to adjust the thickness or change the shape of the lower surface for reinforcing strength.

Meanwhile, the finger portion is provided with a plurality of adsorption units, the adsorption unit is connected to a vacuum tube, and the tube receives suction power from a vacuum pump. Then, by driving a vacuum pump, the substrate was fixed to the upper surface of the fork portion with the vacuum absorption force generated between the lower side of the substrate and the absorption portion.

However, when the plurality of adsorption units are provided with a vacuum suction input through a vacuum tube, the vacuum tube must be connected to each of the adsorption units, so that the device configuration is complicated and equipment economy is deteriorated.

In addition, when the finger part is replaced due to damage, it is required to disconnect the suction part and the vacuum tube and then connect the suction part and the vacuum tube again to the replaced finger part. Moreover, when the vacuum tube is disconnected from the inside of the finger part, a lot of time was required for maintenance because the suction part fastened to the upper surface of the finger part must be separated and connected for reconnection. Accordingly, there is a problem in that the convenience of maintenance and repair work of the substrate transfer robot is deteriorated.

Korean Patent Application Publication No. 10-2007-0016674

In order to solve the above problems, the present invention has as a solution to provide a fork device for a substrate transfer robot in which substrate support strength is improved and product productivity and economy are improved.

In order to solve the above problems, the present invention is provided in plural and spaced apart at predetermined intervals to load and transport substrates on the upper surface, but a hollow part is formed along the longitudinal direction, and the vacuum pressure is in communication with the suction hole penetrating the upper surface. A support bar in which a vacuum suction passage for providing a section is formed along a length direction on one side of the hollow part and is pultruded from a fiber-reinforced plastic material; A substrate adsorption pad made of a porous material provided to cover the suction hole on the upper surface of the support bar; And it provides a fork device for a substrate transfer robot comprising a support bar fixing unit connecting the ends of the plurality of the support bar.

Here, it is preferable that a separation membrane for partitioning the vacuum suction passage is integrally pultruded at the central portion of the hollow portion, and the vacuum suction passage is formed to have a predetermined vacuum cross-sectional area.

In addition, the hollow portion is formed to have a hollow cross-sectional area excluding a predetermined cross-sectional thickness of the support bar, and the separation membrane is formed along a lengthwise direction toward the central portion of the hollow portion to integrally connect the upper surface portion and the lower surface portion of the hollow portion to support The hollow portion is formed to be divided into both sides, and the vacuum suction passage is formed through the inside of the separation membrane, and the vacuum cross-sectional area is preferably formed to be larger than the cross-sectional area of the suction hole.

At this time, a through hole is formed in an outer rim of the substrate adsorption pad, a fastening hole through which a fastening member passing through the through hole is fastened is formed on an upper surface of the support bar, and the suction hole is covered on the upper surface of the support bar. A sealing member is disposed so that it is preferable that the suction hole is selectively opened and closed by at least one of the substrate suction pad and the sealing member.

On the other hand, a locking step is formed on the outer rim of the substrate adsorption pad, the central part is opened so that the inner circumferential surface covers the outer circumferential surface of the substrate adsorption pad, and the substrate adsorption pad is fixed to the upper surface of the support bar. It is preferable that a locking bracket is provided with a locking protrusion that is clamped and coupled to the locking step.

Through the above solution means, the present invention provides the following effects.

First, the support bar supporting the substrate loaded on the upper surface is molded in a mold provided in a cross-sectional shape corresponding to the cross-section of the support bar and then pulled out, changing the shape of the mold to change the thickness of the upper and lower surfaces of the support bar. Since is adjustable, the substrate support strength of the support bar can be improved by making the lower surface thicker than the upper surface.

Second, the support bar, whose shape is processed by the mold, is pulled by a drawing device while being cooled, and as the support bar is continuously mass-produced, equipment productivity and economics can be remarkably improved.

Third, since the vacuum suction flow path, which is connected to the vacuum pump and acts as a suction line that transmits the substrate adhesion, can be integrally formed at the same time as the support bar is pultruded, additional work for forming the suction line is omitted. Since the suction member of the device is not required, convenience and equipment economy can be improved when the device is provided.

Fourth, as a separation membrane partitioning the vacuum suction passage with the inner space of the support bar is formed on the central side to integrally connect the upper and lower surfaces of the support bar and acts as a support shaft, the pressing force applied to the end of the support bar in the width direction Distributed to this central portion, the substrate support and the stiffness in the width direction can be remarkably improved.

1 is a schematic view of a fork device for a substrate transfer robot according to an embodiment of the present invention.
2 is a cross-sectional view of a support bar provided in a fork device for a substrate transfer robot according to an embodiment of the present invention.
FIG. 3 is a cross-sectional projection view of part A of FIG. 1 viewed from the side.
FIG. 4 is a projection view of part A of FIG. 1 as viewed from an upper surface.
5 is a cross-sectional view illustrating a sealing member coupled to a fork device for a substrate transfer robot according to an embodiment of the present invention.
6A and 6B are schematic views of a substrate transfer robot according to an embodiment of the present invention.
7 is a cross-sectional projection view from the side of a fork device for a substrate transfer robot according to another embodiment of the present invention.
8 is a projection view as viewed from the top of the fork device for a substrate transfer robot according to another embodiment of the present invention.

Hereinafter, a fork device for a substrate transfer robot according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Meanwhile, electronic components such as display devices, solar cells, and semiconductor devices are manufactured through various manufacturing processes, and in the manufacturing process, a substrate is used to manufacture the electronic component. In detail, the manufacturing process may include a deposition process for forming a thin film such as a conductor, a dielectric material, and a semiconductor on a substrate, and an etching process for forming the deposited thin film in a predetermined pattern. These manufacturing processes are performed in a process chamber that performs the process, and a substrate transfer robot is used to transfer the substrate between the process chamber and the cassette on which the substrate is loaded.

1 is a schematic diagram of a fork apparatus for a substrate transfer robot according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view of a support bar provided in a fork apparatus for a substrate transfer robot according to an embodiment of the present invention. 3 is a projection cross-sectional view viewed from the side A part of FIG. 1, FIG. 4 is a projection view viewed from the top of part A of FIG. 1, and FIG. 5 is a sealing member in the fork apparatus for a substrate transfer robot according to an embodiment of the present invention. Is a combined cross-sectional view, and FIGS. 6A and 6B are schematic views of a substrate transfer robot according to an embodiment of the present invention.

As shown in FIGS. 1 to 6B, the fork apparatus 100 for a substrate transfer robot according to an embodiment of the present invention includes a support bar 110, a substrate adsorption pad 130, and a support bar holder 150. Is provided. Here, the substrate transfer robot fork device 100 is provided on one side of the substrate transfer robot for transferring the substrate 1.

In detail, the support bars 110 are provided in plural and are spaced apart at predetermined intervals, and the substrate 1 loaded on the upper surface 110a may be transferred to a desired position. In this case, the length and quantity of each of the support bars 110 and the distance between each support bar 110 may be determined in correspondence with the area of the substrate 1 to be transferred.

On the other hand, the support bar 110 includes a hollow portion 111 formed in the longitudinal direction and a vacuum suction passage 113 and a suction hole 112 formed in the upper surface (110a).

At this time, the support bar 110 is formed with the hollow portion 111 penetrating along the longitudinal direction, and the hollow portion 111 is provided to have a hollow cross-sectional area excluding a predetermined cross-sectional thickness of the support bar 110 It is desirable to be. Here, the predetermined cross-sectional thickness refers to the minimum thickness having a target support strength capable of supporting the substrate 1 without bending when the substrate 1 is loaded on the upper surface 110a of the support bar 110. It is desirable to understand.

That is, the support bar 110 may be formed in a hollow shape having a minimum thickness and may be provided at a light weight, and since the base material used for manufacturing the support bar 110 can be saved, equipment economics can be improved. . Meanwhile, in some cases, the support bar 110 may have a lower surface thickness w1 thicker than that of the upper surface 110a, or a partition wall may be provided inside the hollow part 111 to supplement rigidity.

In addition, at one side of the hollow part 111, the vacuum suction passage 113 is formed to be partitioned from the hollow part 111 along the length direction. In this case, the vacuum suction flow path 113 is preferably understood as a suction line at one end connected to the vacuum pump to transmit the vacuum suction input of the vacuum pump to the suction portion.

In addition, it is preferable that a separator 114 is integrally provided at the central portion of the hollow portion 111 so that the vacuum suction passage 113 is partitioned from the hollow portion 111. That is, the vacuum suction passage 113 may be formed through the inside of the separation membrane 114 and may be surrounded by the separation membrane 114.

Here, the vacuum suction passage 113 is preferably formed to have a preset vacuum cross-sectional area. In this case, it is preferable to understand that the predetermined vacuum cross-sectional area is a minimum cross-sectional area formed to be driven with a minimum capacity within a range in which the vacuum suction power for adsorbing the lower surface of the substrate 1 is not reduced.

For example, when the hollow part 111 itself is used as the vacuum suction passage 113, the vacuum suction volume is very large, so the corresponding power is required, so the capacity and power cost of the vacuum pump increase, so the economical efficiency of the device Is lowered. That is, the vacuum suction passage 113 is preferably formed to have a very small cross-sectional area than the hollow portion 111.

In addition, when applying an existing vacuum pump connected when suction by the vacuum tube is applied, the vacuum suction passage 113 is provided to have a vacuum cross-sectional area of a volume corresponding to the volume of the vacuum tube to change the capacity of the vacuum pump. Without it, it can provide the same vacuum adsorption power.

At this time, since the vacuum suction passage 113 may be integrally formed at the same time as the support bar is pultruded, an additional operation for forming a suction line is omitted, and a separate suction member such as a vacuum tube is not required. And speed can be significantly improved.

In addition, the suction hole 112 is formed in the vertical direction on the upper surface (110a) of the support bar (110). In this case, it is preferable that the suction hole 112 is provided in plural and disposed along the longitudinal direction of the support bar 110. In addition, the lower end of the suction hole 112 is vertically communicated with the vacuum suction passage 113 so that the vacuum suction input of the vacuum pump may be transmitted to the suction hole 112.

In this case, the suction hole 112 may be formed by drilling one side of the upper surface 110a of the support bar 110 whose outer shape is processed. In detail, the suction hole 112 is drilled to a depth in which the upper surface 110a of the support bar 110 communicates with the inner space of the vacuum suction passage 113 so as to be perpendicular to the extending direction of the vacuum suction passage 113. It is desirable to understand as being communicated.

Accordingly, as the number of suction holes 112 increases, as the number of adsorption sites for adsorbing the substrate 1 increases, the substrate adsorption property of the support bar 110 may be improved. That is, without increasing the vacuum pump capacity or changing the size and material of the adsorption surface 131, the substrate adsorption capacity can be increased only by increasing the number of suction holes 112 provided in the support bar 110. Therefore, the convenience of operation can be significantly improved.

On the other hand, the support bar 110 is a fiber-reinforced plastic having durability, corrosion resistance, non-magnetic and non-conductive properties while being lightweight and having strength to support the substrate 1 loaded on the upper surface 110a. , FRP) is preferably pultruded from a material. In addition, more preferably, it may be provided with carbon fiber reinforced plastic (CFRP) having high strength and high elasticity.

At this time, the carbon fiber-reinforced plastic refers to a composite material laminated and cured while impregnating a thermosetting resin such as an unsaturated polyester resin or a phenolic resin with carbon fiber as a reinforcing material.

In addition, the saying that the support bar 110 is pultruded means that it is formed through a pultrusion processing method. Here, the drawing method is a method in which a resin composition is prepared by mixing a large amount of thermosetting resin and thermoplastic resin, and the fiber reinforcement material impregnated in the resin composition and molded according to the cross-sectional shape is cooled and pulled by a drawing device to be continuously manufactured. It is desirable to understand. In addition, the support bar 110 pulled by the pulling device may be cut to a desired length through a cutter and used.

At this time, since the thermosetting resin is accelerated by heat energy supplied to the mold for processing the size and shape of the support bar 110, the fiber reinforcement material impregnated with the resin composition is rapidly manufactured into a desired shape, thereby reducing processing time. I can. In addition, since it is pulled by the drawing device and can be continuously mass-produced, the processing economy can be remarkably improved.

Moreover, since the support bar 110 may have different thicknesses of the upper surface 110a and the lower surface 110b by changing the shape of the mold during pultrusion molding, the lower surface thickness w1 is formed thicker than the upper surface thickness. It is possible to improve the substrate support strength of the support bar 110.

Meanwhile, referring to FIG. 2, the support bar 110 has the hollow part 111 formed therein, and the separation membrane 114 connects the upper surface part 111a and the lower surface part 111b of the hollow part 111 And, it is preferable that the vacuum suction passage 113 is integrally pultruded so as to be provided inside the separation membrane 114. That is, the mold for processing the shape of the support bar 110 in the drawing method is provided in a cross-sectional shape corresponding to the cross-sectional shape of the support bar 110 of FIG. 2. Accordingly, the support bar 110 integrally pultruded includes the hollow part 111, the separation membrane 114, and the vacuum suction passage 113.

In detail, the hollow portion 111 is formed through the inside of the support bar 110 along the length direction, the separation membrane 114 is formed to have a width smaller than the width of the hollow portion 111 to extend along the length direction do. In this case, it is preferable that the upper and lower ends of the separator 114 are respectively connected to the upper surface portion 111a and the lower surface portion 111b of the hollow portion 111. That is, it is preferable to understand that the hollow part 111 may be divided into both sides by the separation membrane 114 and the spaces on both sides are mutually sealed by the separation membrane 114.

In addition, it is preferable that the separation membrane 114 is disposed on the central side of the hollow portion 111 to connect and support the central portion of the upper surface portion 111a and the lower surface portion 111b of the hollow portion 111 . At this time, the hollow part 111 is divided into both sides by the separator 114, and both hollows are formed symmetrically with respect to the separator.

Accordingly, the separation membrane 114 may function as a support shaft supporting the support bar 110 to supplement the support strength of the support bar 110 that may be weakened by the hollow part 111. In detail, since the inner surface of the central portion side of the hollow portion 111 is connected along the longitudinal direction by the separation membrane 114, the pressing force applied to the transverse end of the support bar 110 can be distributed to the central portion. The lateral stiffness of (110) can be remarkably improved.

Moreover, since the upper surface (110a) and the lower surface (110b) of the support bar 110 can be connected to each other by the separation membrane 114, the support bar 110 is drawn out without being completely cooled during pultrusion. In this case, it is possible to prevent a sagging phenomenon in which the lower surface 110b sags in the downward direction. Accordingly, the shape of the support bar 110 can be processed to a more accurate standard.

In addition, the vacuum suction passage 113 is preferably formed through the inside of the separation membrane 114 corresponding to a predetermined vacuum cross-sectional area. Accordingly, the vacuum suction passage 113 is formed to be partitioned with the hollow portions 111 on both sides of the separating plate, and the suction hole 112 is vertically connected to the upper surface 110a. In addition, the vacuum suction passage 113 is formed through the inside of the separation membrane 114, the vacuum cross-sectional area is preferably formed larger than the cross-sectional area of the suction hole 112.

In this case, it is preferable that the vacuum suction passage 113 is formed so that the central axis in the extension direction is positioned above the central axis in the longitudinal direction of the separation membrane 114. That is, it is preferable that the vacuum suction passage 113 is formed through at a position where the height from the lower surface to the lower surface 110b of the support bar 110 is higher than the height from the upper surface to the upper surface 110a of the support bar 110 Do. Here, when the vacuum suction passage 113 penetrates above the center of the separation membrane 114, the height of the suction hole 112 is reduced in response thereto. Accordingly, as the total space through which the vacuum suction input is transmitted is reduced, the capacity of the vacuum pump may be reduced, thereby reducing power costs.

On the other hand, the substrate adsorption pad 130 is provided in at least one or more on the upper surface (110a) of the support bar (110), it is preferable to be disposed to cover the upper end of the suction hole (112).

In detail, it is preferable to understand that the substrate suction pad 130 receives a vacuum suction input from the vacuum pump delivered along the vacuum suction passage 113 and the suction hole 112. Accordingly, the substrate 1 loaded on the upper side by the vacuum adsorption force generated when air between the lower surface of the substrate 1 and the upper surface 130a of the substrate adsorption pad 130 is sucked is the substrate adsorption pad 130 It may be fixed in close contact with the upper surface (130a) of.

Accordingly, since a separate vacuum tube and a connecting member connected to each of the substrate adsorption pads 130 to provide adsorption force inside the support bar 110 are not required, the equipment is simplified and the equipment economy is remarkably improved. The internal structure of the support bar 110 may be simplified.

In addition, the substrate adsorption pad 130 includes an adsorption surface 131 for adsorbing the substrate 1 by a vacuum suction input received from the suction hole 112, and an outer edge through which air does not pass outside the adsorption surface 131. Includes a border.

In addition, when the adsorption surface 131 is spaced apart from the upper surface 110a of the support bar 110 by a predetermined interval, it is preferable that the upper surface 130b is recessed upward. In this case, the predetermined interval is preferably understood as a fine height set so that the vacuum suction input transmitted from the suction hole 112 is transmitted to the entire lower surface 130b of the suction surface 131.

Accordingly, a vacuum suction input is transmitted to the entire suction surface 131 along the fine space formed between the lower surface 130b of the suction surface 131 and the upper surface 110a of the support bar 110, and the substrate suction pad The substrate 1 may be fixed by adsorbing the substrate 1 with a uniform adsorption force in all areas.

In addition, it is preferable that the substrate adsorption pad 130 has a size that does not deviate from the upper surface 110a of the support bar 110, but the adsorption surface 131 is made of a porous ceramic material. The porous ceramic may be formed by ceramic sintering, and a plurality of fine pores are formed, but the pores are provided with a fine size of 1 to 200 μm.

That is, the substrate adsorption pad 130 made of a porous ceramic material can uniformly adsorb the substrate disposed on the upper surface 130a with high performance because the adsorption force is transmitted through the pores of a fine size. That is, when adsorption by aluminum or stainless steel having adsorption holes formed therein, vacuum suction input is transmitted only to the adsorption holes, so that a phenomenon of lowering of adsorption force that may occur in the substrate 1, deformation and distortion may be prevented. In addition, since the substrate adsorption pad 130 may have a surface resistance that is effective in preventing static electricity, static electricity that may occur during the adsorption process of the substrate may be prevented.

In addition, since the substrate adsorption pad 130 is formed by completely sintering the porous ceramic, the possibility of generating particles and dust on its own is small, so that foreign matter adheres to the adsorption surface 131 of the substrate 1 can be prevented. . In addition, since the surface roughness is excellent, scratches that may occur on the substrate 1 to be adsorbed are prevented, and since no adsorption traces are left on the substrate 1, a separate trace removal operation is not required, so that the convenience of operation is improved. I can.

Moreover, since air flows through the fine pores of the substrate adsorption pad 130, even when the substrate 1 and the substrate adsorption pad 130 are not completely in close contact with each other, there is little air loss, and thus the vacuum adsorption passage 110 and The inside of the suction hole 112 may maintain a constant vacuum pressure. Accordingly, an adsorption error that may occur as the vacuum pressure decreases and the suction power decreases may be prevented.

In addition, since the entire area of the adsorption surface 131 may have a uniform adsorption force due to the fine pores formed in the substrate adsorption pad 130, the substrate 1 can be shared regardless of the weight or material of the substrate 1, so that compatibility is improved. It can be significantly improved.

Meanwhile, referring to FIGS. 3 and 4, a through hole 135 is formed in the outer rim 132 of the substrate adsorption pad 130, and it is preferable that the through hole 135 is formed in a pair of opposite positions. In addition, it is preferable that a fastening hole 115 through which the fastening member 70 passing through the through hole 135 is fastened is formed on the upper surface 110a of the support bar 110. At this time, the portion indicated by the dotted line in FIG. 3 indicates that the portion to which the fastening member 70 is coupled is projected, and the portion indicated by the dashed-dotted line is the upper surface portion 111a and the lower surface portion 111b of the hollow portion 111 It is preferable to understand that the boundary between the and the separation membrane 114 is indicated.

In detail, the through hole 135 is formed on one side of the outer rim 132 of the substrate adsorption pad 130, and the through hole 135 is further formed on the other side of the outer rim 132 to face each other in a diagonal direction. This is desirable. In addition, the fastening hole 115 is formed in a position corresponding to the vertical extension direction of the through hole 135 so as to communicate with the through hole 135.

In this case, the through hole 135 and the fastening hole 115 are preferably formed through the separation membrane 114 so as not to communicate with the vacuum suction passage 113. That is, it is preferable to understand that the through-holes 135 and the fastening holes 115 each provided in a pair communicate with the hollow portions 111 partitioned on both sides of the separation membrane 114. Accordingly, the internal space of the vacuum suction passage 113 is vacuum sucked by the vacuum pump while the inner space of the vacuum suction passage 113 is sealed from the outside to provide a vacuum suction input to the substrate suction pad 130.

In addition, the fastening member 70 includes a head portion 71 whose outer diameter expands toward one end and a coupling portion 72 coupled to the fastening hole 115. Here, the coupling portion 72 may be screwed with the fastening hole 115 by forming a thread on the outer circumferential surface.

Further, it is preferable that the head portion 71 is provided with a sealing member 73 such as an O-ring made of silicone or rubber along the outer circumferential surface connected to the coupling portion 72. At this time, when pressing downward for fastening of the fastening member 70, the sealing member 73 acts to buffer the pressing force transmitted to the substrate absorption pad 130 made of the porous ceramic material, so the substrate absorption pad 130 ) Can be prevented from being damaged.

In addition, it is preferable that one end of the through hole 135 is expanded upward so that the inner circumferential surface matches the outer circumferential surface of the head portion 71. In addition, the other end of the through hole 135 is formed larger than the outer diameter of the coupling part 72 so as to prevent interference when the fastening member 70 is inserted, and is formed to be less than the outer diameter of the sealing member 73. desirable.

At this time, when the fastening member 70 is inserted into the fastening hole 115, the O-ring is caught and pressed to the other end of the through hole 135, so that the engagement portion 72 is inserted into the fastening hole 115. It can be firmly coupled to the formed thread. Through this, as both sides of the outer rim 132 are coupled to the support bar 110 by the fastening member 70, the substrate adsorption pad 130 is restrained from moving, so that the upper surface 110a of the support bar 110 ) Is fixedly placed.

Meanwhile, the substrate adsorption pad 130 is disposed at the upper end of the suction hole 112 to cover the suction hole 112, but is not limited to being provided to cover the upper ends of all the suction holes 112, and the substrate ( 1) may be provided in an appropriate number that can be stably fixed to the upper surface (130a).

And, referring to FIG. 5, the suction hole 112 not covered by the substrate suction pad 130 has a sealing member 140 so that the suction space connected to the suction pump does not communicate with the outside and maintains a vacuum state. Can be utilized.

At this time, the sealing member 140 is provided in a pad shape having the same shape and size as the substrate adsorption pad 130, but may be provided with an elastic material such as silicon or rubber so as not to create a scratch on the substrate 1 have. Here, while the sealing member 140 seals the suction hole 112, the frictional area in contact with the substrate 1 is increased, so that the upper surface of the sealing member 140 is formed with fine irregularities to prevent the flow of the substrate 1 Can be redeemed.

In addition, after determining the required quantity of the substrate adsorption pad 130 in consideration of the size and weight of the substrate 1 loaded on the support bar 110, the suction not used when the substrate 1 is adsorbed. The hole 112 may be sealed from an external space by the sealing member 140. That is, the substrate adsorption pad 130 and the sealing member 140 may be selectively applied as necessary to open and close the suction hole 112. Accordingly, since the substrate adsorption portion of the support bar 110 can be fluidly adjusted to load and transport the substrate 1 of various sizes and shapes, the flexibility and utility of the device can be remarkably improved.

Here, when the sealing member 140 is coupled, the through hole 135 and the fastening hole 115 may be used interchangeably, and thus may be fixed by the same fastening member 70. Accordingly, since a separate fastening hole or fastening member 70 for fixing the sealing member 140 to the upper surface 110a of the support bar 110 is not required, the number of parts of the device is reduced and the use of materials is reduced. Productivity and economics can be further improved.

In this case, the sealing member 140 may not be provided in a pad shape, but may be provided in a form that seals the inner space of the suction hole 112. That is, the sealing member 140 is provided with a bolt or a round headed pin corresponding to the inner diameter of the suction hole 112 and is inserted into the suction hole 112 to seal the suction hole 112 from an external space. I can make it.

Meanwhile, the support bar holder 150 is provided at one end of the support bar 110 to connect and support the plurality of support bars 110. That is, the support bar holder 150 is formed to extend in a vertical direction to the longitudinal direction of the support bar 110, and one end of the support bar 110 is connected along the extension direction of the support bar holder 150 It can be spaced apart at predetermined intervals.

In addition, it is preferable that a connection part 151 is formed in the central part of the support bar holder 150 to be connected to the robot arm 30 to be described later. Accordingly, the support bar holder 150 may be moved integrally with the support bar 110 to transfer the substrate 1 loaded on the upper surface 110a of the support bar 110 to a desired position.

On the other hand, referring to Figures 6a and 6b, the substrate transfer robot 300 to which the fork device 100 for a substrate transfer robot according to an embodiment of the present invention is applied is largely a traveling unit 10, an elevating unit 20, and the It includes a robot arm 30, and a fork device. In this case, the fork device is preferably understood as the same configuration as the fork device 100 for the substrate transfer robot described above. In addition, it is preferable to understand that the basic configuration of the substrate transfer robot excluding the fork device 100 is equally applied to other embodiments of the present invention to be described later.

In detail, the driving unit 10 may be installed on the floor and may be installed corresponding to a direction toward a process chamber or a direction toward a cassette in which the substrate 1 is loaded. That is, the driving unit 10 is installed on a movement path for transferring the substrate 1 so that the substrate 1 may be moved along the installation path of the driving unit 10.

In addition, the elevating unit 20 refers to an elevating device that moves up and down along an elevating axis formed in a direction perpendicular to a movement path for transferring the substrate 1, and the robot arm 30 and the fork device 100 are vertically moved. Can be moved.

On the other hand, the robot arm 30 has one side connected to the elevating unit 20, and the other side is coupled with a connection unit 151 provided on the support bar holder 150 of the fork device 100, and the fork device 100 It is desirable to understand it as a device that moves ). In this case, the robot arm 30 is formed to have a plurality of joints, so that each of the joints may extend and contract in different directions based on different rotation axes. Accordingly, the fork device 100 coupled to the robot arm 30 may be moved horizontally along the direction in which the joint is extended and contracted.

7 is a cross-sectional projection view of a fork device for a substrate transfer robot according to another embodiment of the present invention as viewed from a side, and FIG. 8 is a projection view of a fork device for a substrate transfer robot according to another embodiment of the present invention viewed from the top.

As shown in FIGS. 7 and 8, the fork apparatus 200 for a substrate transfer robot according to another embodiment of the present invention includes a support bar 210, a substrate adsorption pad 230, and a locking bracket 240. .

On the other hand, the substrate transfer robot fork device 200 has a basic configuration except that the substrate adsorption pad 230 is clamped and fixed to the upper surface of the support bar 210 by the locking bracket 240. Since they are substantially the same, a detailed description of the same configuration will be omitted.

In this case, the substrate adsorption pad 230 has a size that does not deviate from the upper surface of the support bar 210 and may be provided in various shapes, but in this embodiment, it is described and illustrated as an example.

In detail, the substrate adsorption pad 230 has a locking step 233 in which one surface of the outer edge protrudes stepwise outward in the radial direction. In addition, a locking bracket 240 having a locking protrusion 243 is provided so that a central portion is opened corresponding to the outer shape of the substrate suction pad 230 and the locking step 233 is clamped and fixed.

At this time, the substrate adsorption pad 230 is inserted into the central portion, and the locking protrusion 243 is preferably formed so that the locking step 233 is clamped and coupled to the lower surface of the central portion. .

Accordingly, when the locking bracket 240 is fixed by the fastening member 70, the upper surface of the locking step 233 is in contact with the lower surface of the locking protrusion 243 to be latched and the substrate suction pad 230 ) May be fixed between the lower surface of the locking protrusion 243 and the upper surface of the support bar 210.

Meanwhile, the locking bracket 240 is preferably formed to have a thickness smaller than that of the substrate adsorption pad 230 so that the substrate 1 can be loaded in contact with the upper surface of the substrate adsorption pad 230. Accordingly, the substrate 1 is not in contact with the upper surface of the locking bracket 240, but is in contact with the upper surface of the substrate adsorption pad 230, so that the substrate 1 may be closely fixed by vacuum suction.

In addition, the locking bracket 240 is formed with a through hole 245 through which the fastening member 70 passes so that the fastening member 70 can be fixed to the upper surface of the support bar 210 by the fastening member 70. In addition, it is preferable that the support bar 210 has a fastening hole 215 communicating with the through hole 245 to fasten the coupling part 72 of the fastening member 70.

In this case, as the substrate adsorption pad 230 is clamped and fixed by the locking bracket 240, the problem of cracking or damage that may occur by forming the through hole 245 in the substrate adsorption pad 230 can be prevented. Therefore, the durability and stability of the device may be improved.

In addition, terms such as "include", "comprise", "include" or "have" described above mean that the corresponding component may be present unless otherwise stated, It should be construed as not excluding components, but that other components may be further included. All terms, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the art, unless otherwise defined. Terms generally used, such as terms defined in the dictionary, should be interpreted as being consistent with the meaning of the context of the related technology, and are not interpreted as ideal or excessively formal meanings unless explicitly defined in the present invention.

As described above, the present invention is not limited to each of the above-described embodiments, and it is possible to be modified and implemented by those of ordinary skill in the art without departing from the scope claimed in the claims of the present invention. And, these modifications are within the scope of the present invention.

100,200: fork device for substrate transfer robot 300: substrate transfer robot
110,210: support bar 112: suction hole
113: vacuum suction passage 114: separation membrane
130,230: substrate adsorption pad 135,245: through hole
131: adsorption surface 150: support bar fixture
233: locking step 240: locking bracket

Claims (5)

A plurality of pieces are provided and spaced apart at predetermined intervals to load and transport substrates on the upper surface, but a hollow part is formed along the length direction, and a vacuum suction flow path that communicates with the suction hole penetrating the upper surface to provide vacuum pressure is provided on one side of the hollow part A support bar that is formed in a section along the longitudinal direction and is pultruded from a fiber-reinforced plastic material;
A substrate adsorption pad made of a porous material provided to cover the suction hole on the upper surface of the support bar; And
It includes a support bar fixture for connecting the ends of the plurality of support bars,
In the central part of the hollow part, a separation membrane for partitioning the vacuum suction passage is integrally pultruded,
The vacuum suction passage fork apparatus for a substrate transfer robot, characterized in that formed to have a predetermined vacuum cross-sectional area. delete The method of claim 1,
The hollow portion is formed to have a hollow cross-sectional area excluding a predetermined cross-sectional thickness of the support bar,
The separation membrane is formed in the longitudinal direction toward the central portion of the hollow portion and integrally connects and supports the upper surface portion and the lower surface portion of the hollow portion so that the hollow portion is divided into both sides,
The vacuum suction flow path is formed through the inside of the separation membrane, wherein the vacuum cross-sectional area is formed larger than the cross-sectional area of the suction hole fork device for a substrate transfer robot. The method of claim 1,
A through hole is formed in an outer rim of the substrate adsorption pad, and a fastening hole through which a fastening member passing through the through hole is fastened is formed on an upper surface of the support bar,
A fork device for a substrate transfer robot, wherein a sealing member is disposed on an upper surface of the support bar to cover the suction hole, the suction hole being selectively opened and closed by at least one of the substrate suction pad and the sealing member. The method of claim 1,
A locking step is formed at the outer edge of the substrate adsorption pad,
A locking bracket is provided on the inner circumferential surface of the central portion so that the central portion is opened so that the inner circumferential surface surrounds the outer circumferential surface of the substrate adsorption pad, and a locking protrusion is formed on the inner circumferential surface of the central part so as to be fixed to the upper surface of the support bar. Fork device for substrate transfer robot.

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