KR102128596B1 - Bush assembly for plasma electric plate and electrode assembling structure including the same - Google Patents

Abstract

The present invention relates to a bush assembly for a plasma electrode plate capable of preventing simplification of a structure and loosening of a bolt since rotation is prevented by itself when bush is assembled without using an assembly ring, and an electrode assembling structure including the same. The bush assembly for a plasma electrode plate comprises: a plasma electrode plate with an insertion groove formed with a thread in the center and an oval or angular rotation prevention unit formed on the bottom surface of the insertion groove; a bush inserted into the insertion groove of the plasma electrode plate but not rotated through the rotation prevention unit; and a fastening member inserted into an outer part of the bush and fastened to the insertion groove to fix the bush. In addition, the electrode assembling structure including the bush assembly for the plasma electrode plate according to the present invention includes a bush assembly assembled to the plasma electrode plate and an electrode assembly assembled with the bush assembly through the inside the insertion unit of the electrode plate to fix the electrode plate provided on the plasma electrode plate.

Description

BUSH ASSEMBLY FOR PLASMA ELECTRIC PLATE AND ELECTRODE ASSEMBLING STRUCTURE INCLUDING THE SAME

The present invention relates to a bush assembly for a plasma electrode and an electrode assembly structure including the same, and more specifically, to prevent rotation by itself when assembling a bush without using an assembly ring, thereby simplifying the structure and preventing bolt loosening. The present invention relates to a bush assembly for a plasma electrode plate and an electrode assembly structure including the same.

In general, a plasma device used for etching a semiconductor wafer is installed horizontally with a wafer mainly located on an anode inside a plasma chamber to inject reaction gas through a plurality of holes formed in itself and apply a high-frequency voltage to the wafer. A cathode is provided to generate plasma required for etching.

According to the related art, the above-described cathode is mainly coupled through a bolt on a plate inside the plasma chamber. In this bolting, a cathode and a plurality of bolt inserts each having threads formed inside the plate inside the chamber are formed to form the bolt. It is configured to match the bolt inserts up and down and then insert the bolts to join them.

In this bolt fastening structure, there is a problem in that the thread of the bolt fastener is damaged due to the flow of the bolt generated in a high-pressure plasma environment, which consumes an expensive cathode, and the gap between the cathode and the plate due to the loosening of the screw coupling. This caused a problem that deteriorates the performance of the wafer etching process.

On the other hand, as a method for solving this problem, a circular through hole is formed in the plasma, and the bush is fixedly inserted by a step in the through hole, and the assembly is inserted between the outside of the bush and the inside of the through hole of the plasma. After the ring is provided, the plate of the plasma chamber is inserted to connect the subsequent assembly screws to each other by screwing to the bush, thereby suppressing the occurrence of damage to the threaded joints. This configuration was applied.

However, even in the above configuration, there is a problem in that the bush inserted into the through hole of the cathode flows to contact the side of the through hole, thereby causing damage. As in the general bolting structure, when the bush flows in the wafer etching process, the screw is coupled with the assembly screw. This breaks down and creates a gap between the cathode and the plate, and still has a problem of deteriorating etching performance.

Republic of Korea Registered Patent Publication No. 10-1593920

Therefore, the present invention has been devised to solve the above-mentioned problems, and its purpose is to provide a bush inserted into the plasma electrode plate in an elliptical shape to prevent rotational flow of the bush, thereby eliminating the need for a separate assembly ring to simplify the structure. Plasma electrode bush assembly and electrode that can maximize productivity by resolving torsional stress caused by rotation occurring in the bolt fastening method and increasing the fastening force between the upper electrode and the silicon electrode. An assembly structure can be provided.

In order to achieve the above object, in the bush assembly for a plasma electrode according to an embodiment of the present invention, an insertion groove in which a thread is formed in the central portion is formed, but a plasma electrode plate having an oval or angled rotation preventing portion is formed on the bottom surface of the insertion groove. And, a bush that is inserted into the insertion groove of the plasma electrode plate is not rotated through the rotation preventing portion, and may be inserted into the outside of the bush to be fastened to the insertion groove to include a fastening member for fixing the bush.

The bush is inserted into the insertion groove and is provided with a bush body into which the fastening member is fitted. A bushing is provided at the bottom of the bush body to be in close contact with the bottom surface of the insertion groove, and the bush is inserted into the rotation preventing part under the bushing To prevent the rotation of the anti-rotation piece of the same type as the anti-rotation portion may be provided.

The contact piece may be provided to protrude to the outside wider than the outer periphery of the bush body so as not to be inserted into the rotation preventing portion, but to be in close contact with the bottom surface of the insertion groove.

The anti-rotation piece may be provided with a thickness equal to the depth of the anti-rotation portion so as to reach the bottom of the anti-rotation portion so that the bush can be stably fastened to the insertion groove.

In the fastening member, a fitting groove is formed through the upper and lower parts to be fitted to the outside of the bush, and a fastening groove is formed to turn the fastening member using a fastening tool in the upper insert groove to fasten the insert groove. , A tab may be provided to be screwed into the insertion groove on the outside.

An electrode assembly structure including a bush assembly for a plasma electrode plate according to an embodiment of the present invention includes a bush assembly assembled to a plasma electrode plate, and an insert portion of the electrode plate to fix the electrode plate provided on the top of the plasma electrode plate. Through it may include an electrode assembly that is assembled with the bush assembly.

The bush assembly may include a stick bush inserted into the insertion groove of the plasma electrode plate, a plurality of wave washers fitted outside the stick bush, and a fastening member fitted and fastened to the outside of the stick bush on top of the wave washer. Can.

The stick bush is inserted into the insertion groove and is provided with a fitting part into which a wave washer and a fastening member are fitted, and a support piece that is in close contact with the bottom surface of the insertion groove in the lower part of the fitting part and is provided protruding outward is provided. A connection bar may be provided to connect the assembly and the electrode assembly.

The upper portion of the connection bar may be provided with a spherical head portion protruding to the outside so that the electrode assembly for fixing the electrode plate can be firmly connected.

The electrode assembly is fixed to be inserted into the insertion portion of the electrode plate located on the top of the plasma electrode plate and fitted to the connection bar of the stick bush, and provided on the top of the anti-loosening washer to hold the head of the stick bush. The member may include a support member that is fastened to the outside of the fixing member and holds the fixing member so that it does not fall out of the stick bush.

The fixing member is provided with an elastic fixing portion which is cut so as to be resiliently fitted to the head portion of the stick bush, and a male screw portion may be provided so that the supporting member is screwed to the upper portion of the elastic fixing portion.

The support member is formed with a fixing member inserted therein so that a pressing portion is formed to press the fixing member, and a female screw portion is formed to communicate with the pressing portion on the upper portion so that the fixing member is fitted and fastened, and the supporting member is fixed to the upper outer portion. An assembly unit may be provided to be fastened to the member using a tool.

As described above, according to the bush assembly for a plasma electrode plate according to the present invention and the electrode assembly structure including the same, the lower portion of the bush coupled to the plasma electrode plate is provided in an ellipse or an angled shape without the need to use a separate assembly ring. Self-rotation is prevented, which simplifies the structure and prevents loosening of bolts, maximizing the productivity, and assembling the electrode plate in close contact with the plasma electrode plate is simple and robust without generating gaps. There is an effect of maximizing the robustness of the product by releasing the torsional stress caused by rotation occurring in the current bolting method and increasing the fastening force between the plasma electrode plate and the electrode plate.

1 is an exploded perspective view showing a bush assembly for a plasma electrode plate according to the present invention.
FIG. 2 is a perspective view showing a coupling assembly for a plasma electrode plate according to FIG. 1;
3 is a cross-sectional view illustrating a bush assembly for a plasma electrode plate according to FIG. 1.
4 is an exploded perspective view showing an embodiment of a bush assembly for a plasma electrode plate according to the present invention.
FIG. 5 is a perspective view showing a combination of a bush for a plasma electrode plate according to FIG. 4;
6 is a cross-sectional view illustrating a bush assembly for a plasma electrode plate according to FIG. 4.
7 is an exploded perspective view showing an electrode assembly structure including a bush assembly for a plasma electrode plate according to the present invention.
8 is an exploded perspective view showing a bush assembly for a plasma electrode plate according to FIG. 7.
9 is an exploded perspective view showing the electrode assembly according to FIG. 7;
10 is a cross-sectional view showing an electrode assembly structure including a bush assembly for a plasma electrode plate according to the present invention.

The present invention can be applied to various changes and can have various embodiments, and specific embodiments will be illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, and should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

In the drawings, the embodiments of the present invention are not limited to the specific form shown and are exaggerated for clarity. Although specific terms are used in this specification, they are used for the purpose of describing the present invention, and are not used to limit the scope of the present invention described in the meaning limitation or the claims.

In this specification, the expression'and/or' is used to mean including at least one of the components listed before and after. Also, the expression'connected/combined' is used to mean that it is directly connected to another component or indirectly connected through another component. In the present specification, the singular form also includes the plural form unless otherwise specified in the phrase. Also, components, steps, operations and elements referred to as'comprises' or'comprising' as used in the specification mean the presence or addition of one or more other components, steps, operations and elements.

In the description of the embodiments, each layer (membrane), region, pattern or structure may be "on/on" or "under/under" the substrate, each side (membrane), region, pad or pattern. The term "formed on" includes both those formed directly or via another layer. Standards for the top/bottom/bottom/bottom of each layer are described based on the drawings.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Figure 1 is an exploded perspective view showing a bush assembly for a plasma electrode plate according to the present invention, Figure 2 is a combined perspective view showing a bush assembly for a plasma electrode plate according to Figure 1, Figure 3 is a bush assembly for a plasma electrode plate according to Figure 1 4 is an exploded perspective view showing an embodiment of a bush assembly for a plasma electrode plate according to the present invention, and FIG. 5 is a combined perspective view showing a bush assembly for a plasma electrode plate according to FIG. 4, and FIG. Is a cut-away view showing a bush assembly for a plasma electrode plate according to FIG. 4, and FIG. 7 is an exploded perspective view showing an electrode assembly structure including a bush assembly for a plasma electrode plate according to the present invention, and FIG. 8 is a plasma according to FIG. An exploded perspective view showing an electrode plate bush assembly, FIG. 9 is an exploded perspective view showing an electrode assembly according to FIG. 7, and FIG. 10 is a cross-sectional view showing an electrode assembly structure including a bush assembly for a plasma electrode plate according to the present invention. to be.

1 to 6, the bush assembly 10 for a plasma electrode plate according to the present invention includes a plasma electrode plate 100, a bush 110, and a fastening member 120.

The plasma electrode plate 100 is formed with an insertion groove 101 in which a thread is formed in the center portion.

In addition, a rotation preventing portion 102 is formed on the bottom surface of the insertion groove 101, but the rotation preventing portion 102 is formed in an oval shape.

The anti-rotation unit 102 may be formed in an elliptical shape as in FIG. 1 or may be formed in an hexagonal shape as in FIG. 4.

Then, the plasma electrode plate 100 is made of a ceramic material such as silicon, silicon carbide, alumina, quartz.

The bush 110 is inserted into the insertion groove 101 of the plasma electrode plate 100 but is not inserted by the rotation preventing portion 102 so as not to rotate.

The bush 110 is provided with a bush body 111 that is inserted into the insertion groove 101 of the plasma electrode plate 100 and fastened by a fastening member 120, and is inserted into the lower portion of the bush body 111. It is in close contact with the bottom surface of (101) is provided with a contact piece 112 to support the bush (110).

At this time, when the bushing body 111 is inserted into the insertion groove 101, the contact piece 112 is not inserted into the rotation preventing portion 102 but can be closely adhered to the bottom surface of the insertion groove 101. It is provided wider than the outer periphery of the bush body 111 and is made to protrude to the outside.

In addition, an anti-rotation piece 113 is provided at the lower portion of the contact piece 112 to be inserted into the anti-rotation part 102 to prevent rotation of the bush 110.

The anti-rotation piece 113 is formed in an elliptical shape as in FIG. 1 in the same way as the outer diameter of the anti-rotation part 102 so that the bush 110 is not rotated when inserted into the anti-rotation part 102, or As shown in Figure 4 will be made in an angled form of the hexagon.

That is, the outer diameter of the anti-rotation portion 102 of the plasma electrode plate 100 is formed in an angled form of an ellipse or hexagon instead of a circle, and the anti-rotation piece 113 coupled to the anti-rotation portion 102 is By providing the anti-rotation part 102 in the same form, the anti-rotation piece 113 is not rotated when coupled to the anti-rotation part 102, so that a separate assembly ring is not required.

In addition, the anti-rotation piece 113, when the contact piece 112 is in close contact with the bottom surface of the insertion groove 101, touches the bottom of the anti-rotation part 102 so that the bush 110 is inserted into the groove 101 It is to be provided with the same thickness as the depth of the rotation preventing portion 102 so that it can be stably fastened without shaking.

The fastening member 120 is fitted to the circumference of the bush 110 to be fastened to the insertion groove 101 so that the bush 110 can be fixed.

In addition, the inside of the fastening member 120 is formed through the upper and lower fitting groove 121 is fitted to the outside of the bush body 111, the outside is threaded to be screwed into the insertion groove 101 The tab 122 made of will be provided.

In addition, on the upper part of the fastening member 120, screw the fastening member 120 to the inserting groove 101 by turning the fastening member 120 using a fastening tool (not shown) in the inserting groove 101 to fix the bush 110. In order to do so, a hexagonal fastening groove 123 is formed.

7 to 10, the electrode assembly structure including the bush assembly 10 for a plasma electrode plate according to the present invention includes the bush assembly 10 and the electrode assembly 20.

8, the bush assembly 10 includes a stick bush 130, a wave washer 140, and a fastening member 120.

The stick bush 130 is inserted into the insertion groove 101 of the plasma electrode plate 100 and serves to assemble and connect the plasma electrode plate 100 and the electrode plate 200.

The stick bush 130 is inserted into the insertion groove 101 of the plasma electrode plate 100 and is provided with a fitting portion 131 into which the wave washer 140 and the fastening member 120 are fitted.

In addition, a support piece 132 that is in close contact with the bottom surface of the insertion groove 101 is provided below the fitting portion 131.

In addition, the support piece 132 is provided to protrude outwardly of the fitting portion 131 and the bottom surface is provided flat so that the stick bush 130 can be stably inserted into the insertion groove 101.

A connecting bar 133 is provided on the upper part of the fitting portion 131 to connect the bush assembly 10 and the electrode assembly 20 to connect the plasma electrode plate 100 and the electrode plate 200. do.

In addition, the upper portion of the connection bar 133, the upper electrode assembly 20 for connecting the electrode plate 200 on the plasma electrode plate 100 so as to be firmly assembled with the bush assembly 10, the head portion ( 133a) will be provided.

The head portion 133a is formed in a spherical shape to protrude to the outside.

The wave washer 140 is fitted to the outside of the stick bush 130 and is provided in plural to maintain the fastening height of the stick bush 130.

The fastening member 120 is provided on the top of the wave washer 140 and is fitted to the outside of the stick bush 130 so that the plasma electrode plate 100 and the stick bush 130 can be fixed.

In addition, a tab 122 is formed outside the fastening member 120 to be screwed into the insertion groove 101 of the plasma electrode plate 100.

The electrode assembly 20 is assembled with the bush assembly 10 through the insertion portion 201 of the electrode plate 200 to fix the electrode plate 200 provided on the top of the plasma electrode plate 100. .

9, the electrode assembly 20 includes an anti-loosening washer 210, a fixing member 220, and a supporting member 230.

The anti-loosening washer 210 is inserted into the insertion portion 201 of the electrode plate 200 and is fitted to the connection bar 133 of the stick bush 130.

In addition, the anti-loosening washer 210 is provided in a plurality in close contact with the top and bottom to serve to prevent the loosening of the fixing member 220.

The fixing member 220 is provided on the top of the anti-loosening washer 210 to hold the head portion 133a of the stick bush 130 to assemble the plasma electrode plate 100 and the top electrode plate 200. do.

The fixing member 220 is provided with an elastic fixing portion 221 to be elastically fitted to the head portion 133a of the stick bush 130.

At this time, the elastic fixing portion 221 is cut at regular intervals vertically up and down.

That is, when the elastic fixing portion 221 is cut into a plurality, it is inserted into the insertion portion 201 and connected to the stick bush 130, so that the head portion 133a can be smoothly fitted into the elastic fixing portion 221. There will be.

In addition, a male screw portion 222 is provided on the upper portion of the elastic fixing portion 221 so that the supporting member 230 for pressing the elastic fixing portion 221 may be screwed.

The support member 230 is fastened while being fitted to the outside of the fixing member 220 so that the fixing member 220 can be compressed and held so that the fixing member 220 does not fall out of the stick bush 1310.

In addition, a fixing member 220 is inserted into the support member 230 to form a compression unit 231 to compress the fixing member 220, and the fixing member is communicated with the compression unit 231 on the upper portion. The female screw part 232 is formed so that the 220 is fitted and fastened to the male screw part 222.

In addition, an assembly unit 233 is provided on the upper outer periphery of the support member 230 to be screwed to the fixing member 220 using a tool (not shown) such as a wrench.

Looking at the operating state according to the bush assembly and the electrode assembly structure for a plasma electrode plate of the present invention made of the above structure.

An anti-rotation piece of the bush 110 inserted into the anti-rotation part 102 is formed by forming an oval or hexagonal anti-rotation part 102 on the bottom surface of the insertion groove 101 of the plasma electrode plate 100 ( 113), the bush 110 is not rotated when the bush 110 is inserted into the insertion groove 101 by processing the elliptical or hexagonal shape in the same way as the rotation preventing part 102.

In this way, the bushing 110 is inserted into the insertion groove 101 so that the bushing 110 is smoothly inserted into the insertion groove 101 without the need for an assembly ring to prevent rotation. The fastening member 120 may be smoothly fastened to the insertion groove 101 out of the bush 110.

In addition, the electrode plate 200 is positioned on the upper surface of the plasma electrode plate 100 to which the bush 110 is fastened, and the electrode assembly 20 is inserted into the insertion portion 201 of the electrode plate 200 to insert the bush. It is assembled with 110 to connect the plasma electrode plate 100 and the electrode plate 200.

In addition, the electrode plate 200 is in close contact with the plasma electrode plate 100 in a state where the bush 110 is assembled to the plasma electrode plate 100 and plural into the insertion portion 201 of the electrode plate 200. It is possible to prevent the loosening of the fixing member 220 for holding the stick bush 130 by inserting the dog loose prevention washer 210 into the stick bush 130.

Along with this, when the fixing member 220 is inserted into the insertion portion 201 in the state where the anti-loosening washer 210 is inserted, elastic force is applied to the elastic fixing portion 221 to provide the elastic fixing portion 221. The stick bush 130 is smoothly inserted while surrounding the head portion 133a.

In addition, the support member 230 is fixed to the fixing member 220 by inserting the supporting member 230 into the fixing member 220 and then rotating the support member 230 using a tool such as a wrench. The elastic fixing portion 221 of the stick bush 130 is wrapped around the elastic portion 221 of the stick bush 130 so that the elastic fixing portion 221 of the 220 is not opened outward, so that the bush assembly 10 is not removed. ) And the upper electrode assembly 20 can be firmly assembled.

In addition, the bush assembly 10 assembled to the plasma electrode plate 100 and the electrode assembly 20 assembled to the electrode plate 200 are firmly and stably connected to the plasma electrode plate 100 without loosening. The gap between the electrode plates 200 can be eliminated, thereby maximizing the quality of the product.

As described above, the present invention is not limited to the specific preferred embodiments described above, and any person having ordinary skill in the art to which the present invention pertains without departing from the gist of the present invention as claimed in the claims Of course, modifications are possible, and such changes are within the scope of the claims.

10: bush assembly 20: electrode assembly
100: plasma electrode plate 101: insertion groove
102: rotation preventing portion 110: bush
111: bush body 112: close contact
113: anti-rotation piece 120: fastening member
121: fitting groove 122: tab
123: fastening groove 130: stick bushing
131: fitting portion 132: support piece
133: connecting bar 133a: head
140: wave washer 200: electrode plate
201: inserting portion 210: anti-loosening washer
220: fixing member 221: elastic fixing
222: male thread 230: support member
231: crimping portion 232: female thread portion
233: assembly

Claims (12)

A plasma electrode plate in which an insertion groove having a screw thread is formed in a central portion, but an oval or angled rotation preventing portion is formed on the bottom surface of the insertion groove;
A bush which is inserted into the insertion groove of the plasma electrode plate but is not rotated through a rotation preventing part; And
Includes a; fastening member fitted to the outside of the bush and fastened to the insertion groove to fix the bush;
The bush is inserted into the insertion groove and is provided with a bush body into which the fastening member is fitted. A bushing is provided at the bottom of the bush body to be in close contact with the bottom surface of the insertion groove. In order to prevent the rotation of the anti-rotation piece is provided in the same form as the anti-rotation,
The maximum width of the rotation preventing piece, the bush assembly for a plasma electrode plate, characterized in that less than the maximum width of the contact piece. delete According to claim 1,
The contact piece is a bush assembly for a plasma electrode plate, characterized in that it is provided to protrude to the outside wider than the outer periphery of the bush body so as not to be inserted into the anti-rotation portion, so as to be in close contact with the bottom surface of the insertion groove. According to claim 1,
The anti-rotation piece reaches the bottom of the anti-rotation portion, the bush assembly for a plasma electrode plate, characterized in that provided with a thickness equal to the depth of the anti-rotation portion so that the bush can be stably fastened to the insertion groove. According to claim 1,
In the fastening member, a fitting groove is formed through the upper and lower parts to be fitted to the outside of the bush, and a fastening groove is formed to turn the fastening member using a fastening tool in the upper insert groove to fasten the insert groove. , Bush assembly for a plasma electrode plate, characterized in that the tab is provided to be screwed into the insertion groove on the outside. In the electrode assembly structure comprising a bush assembly for a plasma electrode plate,
The bush assembly according to any one of claims 1, 3, 4 and 5, which is assembled to a plasma electrode plate; And
An electrode assembly structure comprising; an electrode assembly assembled with a bush assembly through the inside of the electrode plate to fix the electrode plate provided on the upper portion of the plasma electrode plate.
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