KR102127688B1 - 교체가능한 램프를 위한 어댑터 - Google Patents

교체가능한 램프를 위한 어댑터 Download PDF

Info

Publication number
KR102127688B1
KR102127688B1 KR1020197036953A KR20197036953A KR102127688B1 KR 102127688 B1 KR102127688 B1 KR 102127688B1 KR 1020197036953 A KR1020197036953 A KR 1020197036953A KR 20197036953 A KR20197036953 A KR 20197036953A KR 102127688 B1 KR102127688 B1 KR 102127688B1
Authority
KR
South Korea
Prior art keywords
adapter
lamp
channel
conductive lead
lamp assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020197036953A
Other languages
English (en)
Korean (ko)
Other versions
KR20190141267A (ko
Inventor
조셉 엠. 라니쉬
올레그 브이. 세레브리아노브
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20190141267A publication Critical patent/KR20190141267A/ko
Application granted granted Critical
Publication of KR102127688B1 publication Critical patent/KR102127688B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01KELECTRIC INCANDESCENT LAMPS
    • H01K1/00Details
    • H01K1/42Means forming part of the lamp for the purpose of providing electrical connection, or support for, the lamp
    • H01K1/46Means forming part of the lamp for the purpose of providing electrical connection, or support for, the lamp supported by a separate part, e.g. base, cap
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01KELECTRIC INCANDESCENT LAMPS
    • H01K1/00Details
    • H01K1/62One or more circuit elements structurally associated with the lamp
    • H01K1/66One or more circuit elements structurally associated with the lamp with built-in fuse
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01KELECTRIC INCANDESCENT LAMPS
    • H01K1/00Details
    • H01K1/36Seals between parts of vessel, e.g. between stem and envelope
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01KELECTRIC INCANDESCENT LAMPS
    • H01K1/00Details
    • H01K1/42Means forming part of the lamp for the purpose of providing electrical connection, or support for, the lamp
    • H01K1/44Means forming part of the lamp for the purpose of providing electrical connection, or support for, the lamp directly applied to, or forming part of, the vessel
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/0033Heating devices using lamps
    • H05B3/0038Heating devices using lamps for industrial applications

Landscapes

  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
KR1020197036953A 2013-12-19 2014-11-18 교체가능한 램프를 위한 어댑터 Active KR102127688B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361918451P 2013-12-19 2013-12-19
US61/918,451 2013-12-19
PCT/US2014/066192 WO2015094542A1 (en) 2013-12-19 2014-11-18 Adapter for replaceable lamp

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020167019604A Division KR102058012B1 (ko) 2013-12-19 2014-11-18 교체가능한 램프를 위한 어댑터

Publications (2)

Publication Number Publication Date
KR20190141267A KR20190141267A (ko) 2019-12-23
KR102127688B1 true KR102127688B1 (ko) 2020-06-29

Family

ID=53400803

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020197036953A Active KR102127688B1 (ko) 2013-12-19 2014-11-18 교체가능한 램프를 위한 어댑터
KR1020167019604A Active KR102058012B1 (ko) 2013-12-19 2014-11-18 교체가능한 램프를 위한 어댑터

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020167019604A Active KR102058012B1 (ko) 2013-12-19 2014-11-18 교체가능한 램프를 위한 어댑터

Country Status (6)

Country Link
US (2) US9922815B2 (https=)
JP (1) JP6431073B2 (https=)
KR (2) KR102127688B1 (https=)
CN (2) CN106133888B (https=)
TW (1) TWI677647B (https=)
WO (1) WO2015094542A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10405375B2 (en) * 2013-03-11 2019-09-03 Applied Materials, Inc. Lamphead PCB with flexible standoffs
US10271383B2 (en) * 2015-10-13 2019-04-23 Applied Materials, Inc. Lamp base adapter design for baseless lamps
US12449327B2 (en) * 2022-07-19 2025-10-21 Applied Materials, Inc. Method and apparatus for lamp housing crack detection

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040156625A1 (en) 2003-02-10 2004-08-12 Axcelis Technologies Radiant heating source
KR200383667Y1 (ko) 2004-01-06 2005-05-09 어플라이드 머티어리얼스, 인코포레이티드 일체형 열 싱크를 구비한 할로겐 램프 어셈블리 및 상기 할로겐 램프 어셈블리를 포함하는 기판 처리 챔버
KR101118154B1 (ko) 2011-07-04 2012-03-12 (주) 예스티 기판의 열처리장치용 램프

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256508A (en) * 1964-05-01 1966-06-14 Gen Electric Base end structure for electric lamps or similar devices
GB1435979A (en) * 1972-09-19 1976-05-19 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Halogen incandescent lamp
JPS52154080U (https=) * 1976-05-19 1977-11-22
US4570104A (en) * 1982-11-02 1986-02-11 U.S. Philips Corporation Electric lamp having a fuse in a feed-through molding
CA1214202A (en) * 1982-11-02 1986-11-18 Victor R. Noteleteirs Electric lamp
DE3600991A1 (de) * 1986-01-15 1987-07-16 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Hochdruckentladungslampe und verfahren zu ihrer herstellung
US5155336A (en) 1990-01-19 1992-10-13 Applied Materials, Inc. Rapid thermal heating apparatus and method
DE19548521A1 (de) * 1995-12-22 1997-06-26 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Lampen-Reflektor-Einheit
DE19709928A1 (de) * 1997-03-11 1998-09-17 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Halogenglühlampe und Fassung
US6582253B1 (en) * 2000-06-01 2003-06-24 Kenneth Lau Lock-in compact fluorescent lamp (CFL) adaptor
US6350964B1 (en) 2000-11-09 2002-02-26 Applied Materials, Inc. Power distribution printed circuit board for a semiconductor processing system
JP4828031B2 (ja) * 2001-03-02 2011-11-30 東京エレクトロン株式会社 ランプ、ランプを用いた熱処理装置
US6720718B2 (en) * 2001-10-23 2004-04-13 Osram Sylvania Inc. Thin walled lamp with tungsten halogen capsule and pyrophoric fuse
US6653782B2 (en) * 2001-12-27 2003-11-25 Koninklijke Philips Electronics N.V. Fuse and safety switch for halogen incandescent lamps
AU2002255256A1 (en) * 2002-04-26 2003-11-10 Phoenix Lamps India Limited Incandescent electric lamp and socket assembly
JP2003331613A (ja) * 2002-05-17 2003-11-21 Yazaki Corp 自動車用電球の接続構造
JP4254296B2 (ja) * 2003-03-25 2009-04-15 ニプロ株式会社 自動車用電球
KR20050067835A (ko) * 2003-12-29 2005-07-05 삼성전자주식회사 프로세스 챔버의 램프 어셈블리
US7522822B2 (en) * 2004-01-06 2009-04-21 Robert Trujillo Halogen lamp assembly with integrated heat sink
DE102004006438A1 (de) * 2004-02-09 2005-08-25 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Fahrzeugscheinwerferlampe
US7147359B2 (en) * 2004-06-25 2006-12-12 Applied Materials, Inc. Lamp assembly having flexibly positioned rigid plug
DE102004037381A1 (de) * 2004-08-02 2006-03-16 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Kittlos gesockelte Lampe
US7509035B2 (en) * 2004-09-27 2009-03-24 Applied Materials, Inc. Lamp array for thermal processing exhibiting improved radial uniformity
WO2007046045A2 (en) * 2005-10-21 2007-04-26 Koninklijke Philips Electronics N.V. A component adapted for being mounted on a substrate and a method of mounting a surface mounted device
JP2007200806A (ja) * 2006-01-30 2007-08-09 Harison Toshiba Lighting Corp ハロゲンランプ、ランプ装置
US7612491B2 (en) * 2007-02-15 2009-11-03 Applied Materials, Inc. Lamp for rapid thermal processing chamber
US9536728B2 (en) * 2007-02-15 2017-01-03 Applied Material, Inc. Lamp for rapid thermal processing chamber
DE202008016865U1 (de) * 2008-12-19 2010-02-11 Osram Gesellschaft mit beschränkter Haftung Elektrische Lampe mit einem Außenkolben und einer Einbaulampe
US8102110B2 (en) * 2009-02-04 2012-01-24 Iwasaki Electric Co., Ltd. Lamp with outer bulb
JP5343949B2 (ja) * 2010-09-15 2013-11-13 ウシオ電機株式会社 ベース付きフィラメントランプ
DE202013007411U1 (de) * 2013-08-16 2013-09-03 Osram Gmbh Elektrische Lampe und zugehöriges Herstellverfahren

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040156625A1 (en) 2003-02-10 2004-08-12 Axcelis Technologies Radiant heating source
KR200383667Y1 (ko) 2004-01-06 2005-05-09 어플라이드 머티어리얼스, 인코포레이티드 일체형 열 싱크를 구비한 할로겐 램프 어셈블리 및 상기 할로겐 램프 어셈블리를 포함하는 기판 처리 챔버
KR101118154B1 (ko) 2011-07-04 2012-03-12 (주) 예스티 기판의 열처리장치용 램프

Also Published As

Publication number Publication date
CN110645553B (zh) 2020-09-29
JP2017511953A (ja) 2017-04-27
US20180204715A1 (en) 2018-07-19
WO2015094542A1 (en) 2015-06-25
KR20190141267A (ko) 2019-12-23
JP6431073B2 (ja) 2018-11-28
WO2015094542A8 (en) 2016-09-09
CN110645553A (zh) 2020-01-03
CN106133888A (zh) 2016-11-16
KR102058012B1 (ko) 2020-01-22
US20150179425A1 (en) 2015-06-25
KR20160102242A (ko) 2016-08-29
US9922815B2 (en) 2018-03-20
US10319579B2 (en) 2019-06-11
TW201530050A (zh) 2015-08-01
TWI677647B (zh) 2019-11-21
CN106133888B (zh) 2019-10-01

Similar Documents

Publication Publication Date Title
KR102474746B1 (ko) 램프를 위한 보유 및 절연 피쳐들
USRE44712E1 (en) Lamp for rapid thermal processing chamber
CN101617191B (zh) 用于快速热处理腔室的灯
US10820379B2 (en) Lamp base adapter design for baseless lamps
US7147359B2 (en) Lamp assembly having flexibly positioned rigid plug
KR102127688B1 (ko) 교체가능한 램프를 위한 어댑터
US20140255013A1 (en) Lamphead pcb with flexible standoffs

Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
A302 Request for accelerated examination
PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A18-div-PA0104

St.27 status event code: A-0-1-A10-A16-div-PA0104

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PA0302 Request for accelerated examination

St.27 status event code: A-1-2-D10-D17-exm-PA0302

St.27 status event code: A-1-2-D10-D16-exm-PA0302

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 6