KR102123826B1 - Aligning module - Google Patents

Abstract

The present invention relates to a substrate processing system, and more particularly, to an alignment module for supplying a substrate to a transport module, a process module, etc. after being aligned with a transport module, a process module, and the like.
The present invention is an alignment module that aligns the horizontal positions of the two rectangular substrates in a horizontally parallel state after two rectangular substrates are introduced from the outside. ; A plurality of substrate support members installed in the alignment chamber to support the two substrates; Disclosed is an alignment module, which is installed in the alignment chamber and includes an alignment unit that aligns horizontal positions of two rectangular substrates supported by the substrate supporting members.

Description

Alignment module and board alignment method {Aligning module}

The present invention relates to a substrate processing system, and more particularly, to an alignment module and a substrate alignment method for supplying a substrate to a transport module, a process module, etc. after being aligned with a transport module or a process module.

The substrate processing system has a cluster type and an inline type according to the combination and arrangement of the load lock module and the process module.

The cluster type refers to a configuration in which a load lock module in which a substrate is introduced from the center of one transfer module and process modules that are coupled to the transfer module to receive the substrate from the transfer module and process the substrate are disposed.

The inline type refers to a configuration in which load lock modules, process modules, and unload lock modules are sequentially arranged.

Here, the load lock module is a module that performs functions required before substrate processing such as alignment and preheating before the substrate introduced from the outside is introduced into the transfer module or process module, and is transferred to the transfer module or process module under vacuum pressure from outside under atmospheric pressure. Various configurations are possible as needed, such as performing a pressure conversion function to deliver

On the other hand, the substrate processing system including the load lock module is increasing in size according to the size of the substrate based on the substrate processing, such as 6th, 7th, 8th generation, size, alignment function, It is common that recipes are optimized.

However, as described above, the substrate processing system optimized for each size cannot be used for processing different sizes, i.e., substrate processing with different sizes, and a substrate processing system optimized for the size must be newly installed to process substrates having different sizes. There is a problem in that investment costs are incurred.

An object of the present invention is to provide an alignment module and a substrate alignment method capable of simultaneously aligning two substrates after two substrates are introduced from the outside in order to solve the above problems.

The present invention was created to achieve the object of the present invention as described above, the present invention, the horizontal position of the two rectangular substrates in a state in which two rectangular substrates are introduced from the outside and placed in parallel in the horizontal direction. An alignment module to align, and an alignment chamber forming a closed inner space; A plurality of substrate support members installed in the alignment chamber to support the two substrates; Disclosed is an alignment module, which is installed in the alignment chamber and includes an alignment unit that aligns horizontal positions of two rectangular substrates supported by the substrate supporting members.

The alignment unit may include first to fourth alignment units for pressing in the horizontal direction by at least one of rotation and linear movement at each vertex of the first rectangle formed by the two rectangular substrates; When pressed by the first to fourth alignment units, the two rectangular substrates may include a central alignment unit including one or more central alignment members that support inner sides facing each other in the horizontal direction.

The center alignment member may be in contact with the inner sides, and a horizontal cross-sectional shape or a vertical cross-sectional shape perpendicular to the inner side may have one of polygonal, circular, and elliptical shapes.

It is preferable that the horizontal width of the center alignment member decreases as it goes from the contact portion contacting the inner sides to the end, based on the arrangement direction of the two rectangular substrates.

The center alignment member is positioned between the inner sides during substrate alignment, and may be retracted from between the inner sides before being taken out after substrate alignment.

The center alignment member is rotated around a rotation axis perpendicular to the placement direction of the two rectangular substrates, and is in close contact with the inner sides when the substrate is aligned, and is in close contact with the inner sides before being rotated and taken out after the substrate is aligned. Can be released.

The alignment unit may include an alignment member moving unit that positions the central alignment member between the inner sides during substrate alignment, and retracts the central alignment member from between the inner sides before being unloaded after substrate alignment.

The alignment unit rotates the central alignment member around a rotation axis perpendicular to the placement direction of the two rectangular substrates, and when the substrate is aligned, is brought into close contact with the inner sides, and after the substrate is aligned, the central alignment is carried out. It may include a rotating member rotating the alignment member to release contact with the inner side by rotating the member.

The center alignment member is provided with 2n pieces (n is a natural number of 1 or more) along the inner sides, and the alignment member rotation moving unit can rotate the 2n center alignment members in n different directions.

The two substrates are parallel to each other and are supported by the substrate support members so as to have a height difference in the vertical direction, and a pair of centers in which the two rectangular substrates respectively contact the inner sides located inside in the arrangement direction. Alignment members; A rotating member in which the pair of central alignment members are coupled and rotatably installed with an axis parallel to the inner side as a rotation axis; When aligning, the pair of central alignment members are in contact with each of the inner sides, and after rotation, the rotation driving unit rotates the rotating member to release the contact state to the substrate by the pair of central alignment members when the substrate is taken out. Wow; And a linear moving part for retracting the pair of central alignment members from the movable region of the substrate to prevent interference with the pair of central alignment members due to the movement of the substrate during introduction and discharge of the substrate. Can be.

The present invention also includes a substrate introduction step in which two rectangular substrates are introduced from the outside and the two rectangular substrates are arranged in parallel in the horizontal direction; Disclosed is a substrate alignment method including an alignment step of aligning horizontal positions of the two rectangular substrates after the substrate introduction step.

The aligning step may include: arranging a center aligning member to position one or more center aligning members between the two rectangular substrates; A pressing step of pressing in the horizontal direction at each vertex of the first rectangle formed by the two rectangular substrates and bringing the two rectangular substrates into close contact with the inner sides facing each other in the horizontal direction; After the pressing step may include a pressing release step for releasing the pressing state at the vertex of the two rectangular substrates.

After the pressing step, the center aligning member may be retracted from the center sides before the substrate is taken out.

The central alignment member is rotatably installed around a rotation axis perpendicular to the placement direction of the two rectangular substrates, and the central alignment member is rotated in the pressing step to be in close contact with the inner sides, and the pressing After the step, it may be rotated before the substrate is taken out, and may include an adhesion release step of releasing adhesion with the inner sides.

The center alignment member is installed in 2n pieces (n is a natural number of 1 or more) along the inner sides, and the contact release step may rotate the 2n center alignment members in n different directions.

The pressure release step is preferably performed after the central alignment member retraction step or the close contact release step.

In the alignment module and the substrate alignment method according to the present invention, the alignment of the substrates is quickly performed by simultaneously aligning the two substrates introduced from the outside in a horizontally arranged state, minimizing the total process time, thereby minimizing the overall process time. There is an advantage that can improve productivity.

Specifically, in the alignment module and the substrate alignment method according to the present invention, the first to fourth alignment portions corresponding to the vertices of the first rectangle formed by the two rectangular substrates and the two alignment portions for aligning the substrate By configuring the central alignment part that is in contact between the substrates, it is possible to simultaneously align two substrates after two substrates are introduced from the outside, thereby minimizing the overall process time and improving the productivity of the substrate. have.

Furthermore, by retracting the central alignment member of the central alignment unit that comes into contact with the two substrates prior to substrate unloading after substrate alignment, it is possible to prevent a problem of substrate damage and misalignment caused by friction between the substrate and the central alignment member during substrate transportation. There is an advantage.

In addition, the alignment module and the substrate alignment method according to the present invention, the first to fourth alignment portions corresponding to the vertices of the first rectangle formed by two rectangular substrates for alignment of the substrate, and two rectangular substrates By configuring the central alignment part that is in contact with each other, by minimizing the change in the structure of the existing substrate processing system for processing the substrate before dividing it into two rectangular substrates, maximizing the recycling of existing equipment such as load lock modules for substrate introduction Despite the division of the substrate to be treated, there is an advantage of minimizing the equipment investment cost added to the divided substrate treatment.

In addition, the alignment module and the substrate alignment method according to the present invention, the first to fourth alignment portions corresponding to the vertices of the first rectangle formed by two rectangular substrates for alignment of the substrate, and two rectangular substrates By configuring the central alignment portion to be contacted therebetween, the size increase of the alignment chamber according to the installation of the alignment portion is minimized, thereby minimizing the pressure conversion time in the alignment chamber and significantly reducing the manufacturing cost.

1 is a conceptual diagram showing an example of a substrate processing system according to the present invention.
2 is a plan view showing the configuration of an alignment module according to the present invention.
3 is a vertical cross-sectional view of the alignment module of FIG. 2 in the III-III direction.
4A and 4B are examples of the first to fourth alignment units of the alignment module of FIG. 2, and are some plan views showing the configuration and operation.
5 is a side view showing an embodiment of the center alignment member of the alignment module of FIG. 2.
6A and 6B are some plan views showing other embodiments of the center alignment member of the alignment module of FIG. 2.
7 is a partial plan view showing another embodiment of the center alignment member of the alignment module of FIG. 2.
8A and 8B, as another embodiment of the center alignment member of the alignment module of FIG. 2, are partially side views and partial plan views, respectively, showing an operation process.

Hereinafter, the alignment module and the substrate alignment method according to the present invention will be described with reference to the accompanying drawings.

In particular, the alignment module 10 according to the present invention can be any module as well as a load lock module as long as the substrate 1 is introduced from the outside and then sorted and then taken out.

And the alignment module 10 according to the present invention can be applied to both substrate processing systems for substrate processing such as etching and deposition such as cluster type and inline type.

As an example, as an example of the substrate processing system in which the alignment module 10 according to the present invention is installed as a load lock module, as shown in FIG. 1, two substrates 1 by the transfer robot 11 from the outside ) Is introduced with the alignment module 10, the alignment module 10 is coupled to the transfer module 20 to withdraw the substrate 1 from the alignment module 10 by the transfer robot 22, and the transfer It may be configured to include a plurality of process modules 50 coupled to the module 20 to receive the substrate 1 by the transport robot 22 to perform substrate processing.

Here, the gate valves 31, 32, and 41 are installed in each of the modules for mutual isolation.

The transfer module 20 is coupled to the alignment module 10 and is configured to withdraw the substrate 1 from the alignment module 10 by the transfer robot 22, the transfer chamber 21 and the transfer chamber ( Various configurations are possible, including the transfer robot 22 installed on the 21).

The process module 50 is a module that performs a substrate processing process such as etching and deposition on the substrate 1 introduced by the transport robot 22, and includes a process chamber 51 and the like. Various configurations are possible depending on the type.

Alignment module 10 according to the present invention, as shown in Figures 1 to 8b, two rectangular substrates (1) from the outside in a state where two rectangular substrates (1) are arranged in parallel in the horizontal direction As an alignment module to align the horizontal position of the two rectangular substrates (1), the alignment chamber 100 to form a closed interior space; A plurality of substrate support members 130 installed in the alignment chamber 100 to support the two substrates 1; It includes an alignment unit 200 installed in the alignment chamber 100 to align the horizontal positions of the two rectangular substrates 1 supported by the substrate support members 130.

The alignment chamber 100 is configured to form a closed inner space, and the upper side is opened, and the upper body 120 is detachably coupled to the chamber body 110 having a rectangular parallelepiped shape and the chamber body 110. It can be configured to include.

The chamber body 110, one or more gates (111, 112) are formed for the introduction and discharge of the substrate 1, as shown in Figure 2, a pair of gates (111, in opposite directions) 112) can be formed.

On the other hand, the alignment chamber 100 may be combined with a pressure conversion device such as a vacuum pump for pressure conversion to allow the transfer of the transfer module 20 under vacuum pressure from outside under atmospheric pressure depending on the installation environment.

In addition, the alignment chamber 100 may be provided with a heater or the like for preheating according to the type of substrate processing.

The plurality of substrate support members 130 are installed in the alignment chamber 100 to support two substrates 1 introduced by the transfer robot 11 or the like, and various configurations are possible.

For example, the plurality of substrate support members 130 may be formed of lift pins protruding upward from the bottom of the alignment chamber 100.

In addition, the plurality of substrate support members 130 may be configured as a substrate support unit 3 disclosed in FIG. 3C or the like in Korean Patent Publication No. 10-2014-0119283.

On the other hand, the plurality of substrate support members 130 may be installed to enable movement.

In addition, the plurality of substrate support members 130, when supporting the two substrates 1, the two substrates 1 can support each other to have a height difference in the vertical direction.

The alignment unit 200 is installed in the alignment chamber 100 and is configured to align the horizontal positions of two rectangular substrates 1 supported by the substrate support members 130, and various configurations are possible.

In particular, the alignment unit 200, as shown in Figures 2 to 8b, the first to fourth alignment unit 210 for pressing in the horizontal direction at each vertex of the first rectangle formed by the two rectangular substrates (1) (210) ) And; When pressed by the first to fourth alignment units 210, two rectangular substrates 1 may include one or more central alignment units 220 supporting inner sides facing each other in the horizontal direction.

The first to fourth alignment units 210 are configured to press horizontally at each vertex of the first rectangle formed by the two rectangular substrates 1, and various configurations are possible.

For example, the first to fourth alignment parts 210, as disclosed in Korean Patent Publication No. 10-2014-0119283, a pair of contact member 211 is supported member 212 and, The support member 212 is rotatably supported by the hinge shaft 215, the chamber 20 is fixed to the hinge shaft 215 is fixed member 216 and a pair of contact members 211 and The connecting shaft 213 installed on the support member 212 between the hinge shaft 215, the connecting rod 214 connected to the connecting shaft 213, and the connecting rod 214 connected to the connecting rod 214 It may include a driving unit (not shown) for linearly moving.

Here, the pair of contact members 211 are portions that are in close contact with the horizontal and vertical sides of the apex portion of the substrate 1, respectively, so as to absorb shock when the apex portion of the substrate 1 is in close contact. It is preferably made of a material having elasticity, and more preferably, it is preferably made of an engineering plastic such as polyether ketone (PEK).

The first to fourth alignment parts 210 having the above-described configuration are formed at the corners of the first rectangle formed by two rectangular substrates 1 supported by the support member 130, that is, at four corners. The substrate 1 is in close contact by rotation of the pair of contact members 211.

At this time, the substrate 1, the inner sides are supported by the central alignment unit 220, which will be described later, so that the alignment of the two rectangular substrates 1 is performed at the same time.

The central alignment unit 220 is installed in one or more between the inner sides, various configurations are possible as the configuration to support the inner sides when pressed by the first to fourth alignment units 210.

In particular, the central alignment unit 220, various embodiments are possible depending on the support method for the inner sides.

The center alignment part 220 is in close contact with the inner sides, and a horizontal cross-sectional shape or a vertical cross-sectional shape perpendicular to the inner side forms a polygon such as a rectangle, or as shown in FIGS. 2, 6A, and 7 , It may include a central alignment member 221 forming a shape of a circular, oval, and the like.

As a specific example, that is, the central alignment member 221 may be formed of a plurality of rectangles arranged along the inner sides or a rectangular bar when the inner sides are both sides when viewed from the upper side.

As another specific example, the central alignment member 221 may have a horizontal cross-sectional shape perpendicular to the longitudinal direction or a vertical cross-sectional shape perpendicular to the inner side, or may have a circular or elliptical shape, and the length of the central alignment member 221 The direction may be perpendicular to the substrate substrate surface or parallel to the inner side.

At this time, the central alignment member 221 may be installed in a variety of ways, such as two or three at regular intervals, symmetrical to each other in consideration of balance during substrate alignment.

Meanwhile, the two substrates 1 introduced into the alignment module 10 are carried out by the transport robot 22 after substrate alignment, and at this time, the bottom surfaces of the substrates 1 supported by the support members 130 are supported. Thus, after being elevated to the upper side, it may be taken out through the gate 112.

Here, since the substrate 1 is in contact with the central alignment member 221, when the substrate 1 is lifted upward by the transport robot 22, a problem such as scratches or damage to the substrate 1 may occur. Can be.

Thus, the center alignment member 221, it is desirable to minimize the contact area with the substrate 1, as described above, the horizontal cross-sectional shape perpendicular to the longitudinal direction or vertical cross-sectional shape perpendicular to the inner side Or it is preferable to have an oval, or as illustrated in FIG. 5, the horizontal width of the two rectangular substrates 1 in the arrangement direction is reduced while going from the contact portion to the end contacting the inner sides.

In other words, the center alignment member 221, based on the arrangement direction of the two rectangular substrates 1, it is preferable that the horizontal width decreases as it goes from the contact portion contacting the inner sides to the end.

In addition, the center alignment member 221 is preferably retracted between the inner sides before being carried out by the transfer robot 22 after substrate alignment.

That is, the alignment part 200 is an alignment member for positioning the central alignment member 221 between the inner sides when aligning the substrate, and retracting the central alignment member 221 from the inner sides before being taken out after the substrate alignment. Eastern (not shown).

The alignment member moving part is installed in the side or bottom side of the alignment chamber 100, the center alignment member 221 is installed at the end of the connecting member 222 parallel to the inner side or in a direction perpendicular to the substrate surface By linearly moving in either direction, the central alignment member 221 may be positioned between the inner sides or retracted.

In addition, when the substrate 1 is lifted upward by the transport robot 22, as a method for solving the problem of damage to the substrate 1 such as scratches or disorders, the center alignment member 221 is shown in FIG. As shown in, it is rotated around a rotation axis that is perpendicular to the arrangement direction of the two rectangular substrates 1, is in close contact with the inner sides when aligning the substrate, is rotated and aligned with the inner sides before being taken out after substrate alignment. The adhesion can be released.

To this end, the alignment unit 200 rotates the center alignment member 221 around a rotation axis perpendicular to the arrangement direction of the two rectangular substrates 1, and is in close contact with the inner sides when aligning the substrate, It may include an alignment member rotation moving unit to rotate the central alignment member 221 to release the close contact with the inner sides before being carried out after the substrate alignment.

The alignment member rotation moving unit is configured to rotate the central alignment member 221 around a rotation axis that is perpendicular to the arrangement direction of the two rectangular substrates 1, and various configurations are possible.

Particularly, when the center alignment member is installed in 2n pieces (n is a natural number of 1 or more) along the inner sides, it is preferable that the alignment member rotation moving part rotates 2n center alignment members in n different directions.

Here, in the center alignment members, one of the centers may be rotated in opposite directions with respect to each other, with one center positioned along the inner sides and opposite to each other with the center alignment member positioned at the center.

On the other hand, when the substrate 1 is lifted upward by the transport robot 22, the two substrates 1 are in contact with the central alignment member 221, and the substrate 1, such as scratches, is damaged. Alternatively, as another configuration for preventing the problem of misalignment, it may be configured as shown in FIGS. 8A and 8B.

That is, the central alignment unit 220 includes a pair of central alignment members 221 in which two rectangular substrates respectively contact the inner sides located inside in the arrangement direction; A pair of central alignment members 221 coupled and a rotation member 223 rotatably installed with an axis parallel to the inner side as a rotation axis; When aligning, a pair of central aligning members 221 are in contact with the inner sides, respectively, and when rotating, the rotating member is released to release contact with the substrate 1 by the pair of center aligning members 221 A rotation driving unit (not shown) for rotating 223; When the substrate 1 is introduced and discharged, the center alignment members 221 are moved up and down the region of the substrate 1 in order to prevent interference with the pair of center alignment members 221 according to the movement of the substrate 1 up and down. It may include a linear moving portion (not shown) to retract from.

Here, the two substrates 1 are arranged parallel to each other and are supported by the substrate support members 130 to have a height difference in the vertical direction.

The pair of central alignment members 221 may be any structure as long as two rectangular substrates are configured to be in contact with the inner sides, so that they can sufficiently support the inner sides located inside in the arrangement direction. .

For example, it may be formed of a rectangular plate attached to the outer circumferential surface of the rotating member 223 and rotated by rotation of the rotating member 223.

The rotation member 223 is a configuration in which a pair of central alignment members 221 are coupled and rotatably installed with an axis parallel to the inner side as a rotation axis, and various configurations are possible.

The rotating member 223 stably supports the substrate 1 so that a pair of central alignment members 221 supporting the substrate 1 is perpendicular to the surface of the substrate 1 when the substrate is aligned. Then, the pair of central alignment members 221 are rotated to release contact with the substrate 1 to prevent friction with the substrate 1 when the substrate is taken out.

In the rotation driving part, a pair of central alignment members 221 are in contact with the inner sides, respectively, during alignment, and the substrate 1 is contacted by the pair of central alignment members 221 when carrying out the substrate after alignment. As a configuration of rotating the rotating member 223 so as to release it, various configurations such as a rotating motor are possible.

The linear moving part, the substrate (1) to the central alignment member 221 in order to prevent interference with the pair of central alignment members 221 along the vertical movement of the substrate 1 during the introduction and discharge of the substrate (1) ( 1) As a configuration to retreat from the Shanghai East area, various configurations such as a linear movement module are possible.

When the central alignment unit 220 has a configuration as shown in FIGS. 8A and 8B, the spacing between two substrates is minimized, so that the alignment chamber 100, the transport chamber 21, and the process chamber 51 are minimized. ) Has the advantage of minimizing the size of the substrate, reducing the processing time and reducing the manufacturing cost.

On the other hand, the embodiment of the present invention has been described with respect to a load lock module that transfers a substrate introduced from the outside to a transfer module or a process module, but if two rectangular substrates are introduced and aligned and then taken out, a buffer module, etc. All can be applied

In addition, although the present invention has been specifically described and described as an alignment module, it is characterized by aligning two substrates arranged in the horizontal direction at the same time, and thus can be implemented as an alignment method of the substrate.

Hereinafter, the alignment method according to the present invention will be described.

The alignment method according to the present invention includes: a substrate introduction step (S10) in which two rectangular substrates 1 are introduced from the outside and the two rectangular substrates 1 are arranged in parallel in the horizontal direction; And an alignment step S20 of aligning the horizontal positions of the two rectangular substrates 1 after the substrate introduction step S10.

The substrate introducing step S10 is a step in which two rectangular substrates 1 are introduced from the outside and the two rectangular substrates 1 are disposed in parallel in the horizontal direction, and may be performed by various methods.

For example, the substrate introduction step (S10) is introduced into the alignment chamber 100 by the transfer robot 11 and then supported by the supporting members 130 installed in the alignment chamber 100 to form two rectangles. The substrates 1 may be arranged in parallel in the horizontal direction.

As the step of aligning the horizontal positions of the two rectangular substrates 1 after the alignment step (S20) and the substrate introduction step (S10), it may be performed by various methods.

For example, the alignment step (S20) includes: a center alignment member placement step (S21) for positioning one or more center alignment members 221 between two rectangular substrates 1; A pressing step (S22) in which the two rectangular substrates 1 are brought into close contact with the inner sides facing each other in the horizontal direction by pressing in the horizontal direction at each vertex of the first rectangle formed by the two rectangular substrates 1, and the pressing step After (S22) it may include a pressure release step (S23) for releasing the pressing state at the vertex of the two rectangular substrates (1).

On the other hand, after the pressing step (S22), as shown in FIGS. 5, 6A and 6B, the center alignment member retracts the center alignment member 221 from among the inner sides before retreating the substrate 1 Step S24 may be performed.

In addition, when the central alignment member 221 is rotatably installed around a rotation axis perpendicular to the arrangement direction of the two rectangular substrates 1, as shown in FIG. 7, the central alignment member 221 Is rotated in the pressing step (S22) and is in close contact with the inner sides.

Then, after the pressing step (S22) is rotated before the substrate 1 is taken out may be carried out a contact release step (S25) to release the contact with the inner side.

And, the central alignment member 221, as shown in Figure 7, may be installed in even numbers so as to be symmetrical with each other along the inner side, wherein the disengagement step (S25), the close contact with the inner side It is preferable to rotate the central alignment members 221 that are symmetrical to each other in opposite directions.

That is, the center alignment member 221 is installed in 2n pieces (n is a natural number of 1 or more) along the inner sides, and the disengagement step (S25), 2n center alignment members 221 in n different directions Can be rotated.

On the other hand, with respect to the center alignment member retreating step (S24) or the close contact release step (S25), the pressure release step (S23) is preferably performed after the central alignment member retreating step (S24).

According to the present invention, by performing the above-described method, two substrates introduced from the outside are simultaneously aligned in a horizontally arranged state, so that alignment to the substrate is quickly minimized, thereby minimizing the overall process time and productivity of the substrate. There is an advantage that can be improved.

The above is only a description of some of the preferred embodiments that can be implemented by the present invention, and as is well known, the scope of the present invention should not be construed as being limited to the above embodiments, and the present invention described above. It will be said that both the technical idea and the technical idea together with the fundamental are included in the scope of the present invention.

1: Board 10: Load lock module
100: alignment chamber
200: alignment part
210: first to fourth alignment unit 220: central alignment unit
221: Central alignment member

Claims (15)

As an alignment module that aligns the horizontal positions of the two rectangular substrates in a state in which they are arranged parallel to the horizontal direction after the two rectangular substrates are introduced from the outside,
An alignment chamber forming a closed interior space;
A plurality of substrate support members installed in the alignment chamber to support the two substrates;
It includes an alignment unit that is installed in the alignment chamber to align the horizontal position of the two rectangular substrates supported by the substrate support members,
The alignment portion,
First to fourth alignment parts for pressing in the horizontal direction by at least one of rotation and linear movement at each vertex of the first rectangle formed by the two rectangular substrates;
A central alignment unit including at least one central alignment member supporting inner sides facing each other in the horizontal direction when the two rectangular substrates are pressed by the first to fourth alignment units,
An alignment module comprising an alignment member moving part that positions the central alignment member between the inner sides during substrate alignment, and retracts the central alignment member from between the inner sides before being carried out after substrate alignment. delete The method according to claim 1,
The central alignment member,
Alignment module, characterized in that the horizontal cross-sectional shape or the vertical cross-sectional shape perpendicular to the inner side has any one of polygonal, circular and elliptical shapes in close contact with the inner sides. The method according to claim 1,
The central alignment member,
Based on the arrangement direction of the two rectangular substrates, the alignment module, characterized in that the horizontal width decreases from the contact portion in contact with the inner side to the end. delete As an alignment module that aligns the horizontal positions of the two rectangular substrates in a state in which they are arranged parallel to the horizontal direction after the two rectangular substrates are introduced from the outside,
An alignment chamber forming a closed interior space;
A plurality of substrate support members installed in the alignment chamber to support the two substrates;
It includes an alignment unit that is installed in the alignment chamber to align the horizontal position of the two rectangular substrates supported by the substrate support members,
The alignment portion,
First to fourth alignment parts for pressing in the horizontal direction by at least one of rotation and linear movement at each vertex of the first rectangle formed by the two rectangular substrates;
A central alignment unit including at least one central alignment member supporting inner sides facing each other in the horizontal direction when the two rectangular substrates are pressed by the first to fourth alignment units,
The alignment portion,
The center alignment member is rotated around an axis of rotation perpendicular to the placement direction of the two rectangular substrates, the substrate is aligned with the inner sides, and the center alignment member is rotated before being unloaded after alignment. Alignment module, characterized in that it comprises an alignment member rotation moving portion to release the contact with the inner side. The method according to claim 6,
The central alignment member is installed in 2n pieces (n is a natural number of 1 or more) along the inner sides,
The alignment member rotation moving unit, the alignment module, characterized in that for rotating the 2n of the central alignment members in n different directions. As an alignment module that aligns the horizontal positions of the two rectangular substrates in a state in which they are arranged parallel to the horizontal direction after the two rectangular substrates are introduced from the outside,
An alignment chamber forming a closed interior space;
A plurality of substrate support members installed in the alignment chamber to support the two substrates;
It is installed in the alignment chamber includes an alignment unit for aligning the horizontal position of the two rectangular substrates supported by the substrate support members,
The two substrates are parallel to each other and supported by the substrate support members to have a height difference in the vertical direction,
A pair of central alignment members in which the two rectangular substrates respectively contact the inner sides located inside in the arrangement direction;
A rotating member in which the pair of central alignment members are coupled and rotatably installed with an axis parallel to the inner side as a rotation axis;
When aligning, the pair of central alignment members are in contact with each of the inner sides, and after rotation, the rotation driving unit rotates the rotating member to release contact with the substrate by the pair of central alignment members when the substrate is taken out. Wow;
And a linear moving unit for retracting the pair of central alignment members from the movable region of the substrate to prevent interference with the pair of central alignment members due to the movement of the substrate during introduction and discharge of the substrate. Alignment module, characterized in that. A substrate introduction step in which two rectangular substrates are introduced from the outside and the two rectangular substrates are arranged in parallel in the horizontal direction;
And an alignment step of aligning the horizontal positions of the two rectangular substrates after the substrate introduction step,
The alignment step,
A center alignment member placement step of positioning at least one center alignment member between the two rectangular substrates;
A pressing step of pressing in the horizontal direction at each vertex of the first rectangle formed by the two rectangular substrates and bringing the two rectangular substrates into close contact with the inner sides facing each other in the horizontal direction;
And a pressing release step for releasing the pressing state at the vertex of the two rectangular substrates after the pressing step,
And a center aligning member retracting step of retreating the center aligning member from among the inner sides before the substrate is taken out after the pressing step. delete delete The method according to claim 9,
The pressure release step, the substrate alignment method, characterized in that is performed after the center alignment member retreat step. A substrate introduction step in which two rectangular substrates are introduced from the outside and the two rectangular substrates are arranged in parallel in the horizontal direction;
And an alignment step of aligning the horizontal positions of the two rectangular substrates after the substrate introduction step,
The alignment step,
A center alignment member placement step of positioning at least one center alignment member between the two rectangular substrates;
A pressing step of pressing in the horizontal direction at each vertex of the first rectangle formed by the two rectangular substrates and bringing the two rectangular substrates into close contact with the inner sides facing each other in the horizontal direction;
And a pressing release step for releasing the pressing state at the vertex of the two rectangular substrates after the pressing step,
The central alignment member is rotatably installed around a rotation axis that is perpendicular to the arrangement direction of the two rectangular substrates, and the central alignment member is rotated in the pressing step to be in close contact with the inner sides,
After the pressing step is rotated before the substrate is taken out of the substrate alignment method, characterized in that it comprises a release step of releasing the contact with the inner side. The method according to claim 13,
The central alignment member is installed in 2n pieces (n is a natural number of 1 or more) along the inner sides,
In the step of releasing the adhesion, the substrate alignment method is characterized in that the 2n central alignment members are rotated in n different directions. The method according to claim 13 or claim 14,
The pressure release step, the substrate alignment method, characterized in that is performed after the adhesion release step.

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