KR102105283B1 - 3 dimensional coordinate measuring machine with cleaning unit for encoder - Google Patents

Abstract

The present invention relates to a three-dimensional measuring machine. The three-dimensional measuring machine of the present invention, by allowing a scale to be kept clean at all times without a cleaning process accompanied by disassembly of components, increases reading accuracy of a linear encoder, thereby improving measurement accuracy of a measurement object of the three-dimensional measuring machine which requires a high degree of precision. At the same time, the three-dimensional measuring machine provides ease of maintenance. The three-dimensional measuring machine of the present invention comprises: a stage; a frame; a detector; a carrier; an x-axis moving unit; a z-axis moving unit; and a y-axis moving unit.

Description

{3 dimensional coordinate measuring machine with cleaning unit for encoder}

The present invention relates to a three-dimensional measuring device, and a three-dimensional measuring device that moves along a multi-axis direction and measures shape information of a measurement object in a three-dimensional coordinate form, and more specifically, cleaning accompanied with disassembly of components. It relates to a three-dimensional measuring device having an encoder cleaning device that can always keep the scale of the encoder in a clean state without a process.

In general, a 3D measuring device derives the size, position, direction, etc. of an object as data by detecting and calculating the coordinates of a measurement point of an object while a sensor capable of detecting the surface position of the object is moved around the object. Equipment.

The data measured by a 3D measuring machine is used to evaluate processing precision through comparison with pre-designed shape dimensions, or used for reverse engineering of products without design data such as drawings.

As a method of measuring an object of a 3D measuring device, three measurement methods of a vision system including a touch probe, a laser sensor, and a vision camera are mainly adopted and used, which are divided into a contact method and a non-contact method.

The touch probe, which is a contact method, can obtain precise measurement information, and the laser sensor, which is a non-contact method, is characterized by having a high measurement speed and high precision as a linear measurement method.

A general three-dimensional measuring device is capable of moving the detector in three dimensions so that the detector (probe) reads the spatial coordinate values of the object to be measured, measures the position, distance, and direction, and allows the detector to move the three-dimensional space around the object to be measured. It is equipped with a structure including the means.

The conventional three-dimensional measuring device is equipped with a main body on which a platen for placing an object on the top is supported on the base, an encoder for moving a detector on x, y and z spatial coordinates and measuring the amount of movement, and the main body It is composed of a detector that is moved within spatial coordinates and is in contact with an object to generate a signal, and a controller that mathematically calculates the position of the object and the coordinates of the object.

When the detector is moved by the main body, the moving coordinates of the detector are measured in real time by an encoder, and the measured coordinate values of the detector are used as data for determining the relative position of the detector in the measurement space.

In order to precisely measure the movement coordinates of the detector, the encoder is usually arranged on a path in which the detector moves linearly. However, if contamination occurs due to exposure to dust in weak spots, lubricants for lubrication of various parts, etc. A problem occurs that significantly lowers the measurement precision of a three-dimensional measuring instrument that requires precision. Particularly, due to problems in the structure in which the encoder easily adsorbs dust to the surroundings due to the generation of a microcurrent, the conventional 3D measuring machine disassembles the body on a regular basis to clean the encoder, but it is combined between the components of the 3D measuring machine. Since this is made precisely and sensitively, there is a fear that the bonding zero point between various members is distorted every time the main body is disassembled, and because the overall system configuration is complicated, the 3D measuring instrument is related to maintenance and maintenance. As starch knowledge was required, it was difficult to maintain and repair.

Republic of Korea Registered Patent Publication No. 10-1656256 Republic of Korea Patent Publication No. 10-2019-0025205

The present invention was created in consideration of the above-mentioned problems in the prior art, and it is possible to keep the scale in a clean state at all times without a cleaning process accompanied by disassembly of components, thereby improving the reading accuracy of the linear encoder and improving The aim is to improve the measurement accuracy of an object to be measured by a 3D measuring device that requires precision, and at the same time, to provide ease of maintenance and repair of the 3D measuring device.

The present invention is a means for achieving the above object, a stage on which the object to be measured is seated, a frame extending to the top of the stage, a detector that measures the object on the stage in three dimensions, and supports the detector A carrier that is slidably installed on the frame with one frame, an x-axis moving part that reciprocates the detector supported by the carrier in the x-axis direction, a z-axis moving part that reciprocates the detector in the z-axis direction, and a y-axis of the frame. In the three-dimensional measuring device including a y-axis moving portion to reciprocate in the direction, the y-axis moving portion, the rail is formed extending along the y-axis and the scale is installed extending in the longitudinal direction on the upper surface; And in the state in which the frame is supported, the compressed air supplied from the outside is injected into the rail and reciprocated along the extending direction of the rail by the driving force of the driving member in the floating state from the rail. It characterized in that it comprises a; gantry portion for spraying with a scale.

In addition, the gantry portion, an arc-shaped cover covering the outside of the rail; An air block installed adjacent to the rail while laying on the inner surface of the cover and guiding compressed air supplied from the outside to the rail; And a nozzle member mounted in communication with the air block and receiving a portion of the compressed air supplied to the air block to spray the scale.

In addition, the inside of the air block is characterized in that the inlet passage is formed in which compressed air flows, and the injection passage toward the rail and the supply passage toward the nozzle member are branched from each other.

Further, at least one of the side surfaces of the rail is inclined at an acute angle with respect to the upper surface of the rail, and any one of the plurality of air blocks is characterized in that it is arranged parallel to the side surface of the inclined rail.

In addition, the nozzle member, the first through-hole and the second through-hole toward the air block is formed with a predetermined interval spaced apart, a nozzle body provided with an injection nozzle communicating with the supply path; A central axis inserted into the first through hole and fixedly installed in the air block; An operating member inserted into the second through hole but having an eccentric hole spaced apart from the center; And a fixed shaft inserted into the eccentric hole and fixed to the air block.

The present invention provides the following effects.

First, a member that constitutes a 3D measuring device by automatically cleaning the scale during reciprocation of the gantry in the rail by letting the nozzle member receive part of the compressed air supplied from the rail to the air block for injuries from the rail and spraying it on the scale. The scale can always be kept in a clean state without a cleaning process accompanied by separate disassembly of them.

Second, it is possible to have a safety structure in which the nozzle member does not deviate from the gantry that is reciprocated by sufficiently guaranteeing the bonding force between the air block and the nozzle member, and also, the injection angle of the compressed air injected from the injection nozzle within a predetermined range. In order to be able to be adjusted in, the spray direction of compressed air injected from the spray nozzle can be appropriately adjusted according to the area of the scale and the installation direction.

1 is a view showing the overall appearance of a three-dimensional measuring device according to the present invention.
Fig. 2 is a front view of the three-dimensional measuring device as viewed from the y-axis.
Figure 3 is a view showing a side of the three-dimensional measuring device viewed from the x-axis.
Figure 4 is a view showing the overall appearance of the y-axis moving housing is omitted.
FIG. 5 is a schematic exploded view of the y-axis moving part shown in FIG. 4;
FIG. 6 is a schematic view showing a plane viewed from the z-axis in the y-axis moving part shown in FIG. 4;
FIG. 7A is a view showing a configuration of a combination of an air block and a nozzle member assembly, FIG. 7B is a view schematically showing a cross-sectional configuration of the assembly shown in FIG. 7A, and FIG. 7C is a cross-sectional configuration in which the nozzle member is omitted in the air block of FIG. 7A. The schematic drawing.
Figure 8a is a view showing a coupling configuration according to another embodiment of the air block and the nozzle member assembly, Figure 8b is a schematic view showing a cross-sectional configuration of the assembly shown in Figure 8a.
9 is a view schematically showing the overall appearance of the nozzle member.
10 is a view schematically showing an exploded configuration of the nozzle member shown in FIG. 9;
11 is a view for explaining the action of the nozzle member rotated on the air block.
12A is a view showing a plane of the nozzle member to which the first fixing hole and the second fixing hole in the form of a simple hole are applied, and FIG. 12B is a diagram showing the nozzle member in a state in which the second fixing hole is excluded.
13 is a view showing a state of use of the nozzle member for spraying compressed air toward the scale.
14 is an enlarged view showing a main portion of a y-axis moving part viewed in the y-axis direction.

In order to fully understand the present invention, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be interpreted as being limited to the embodiments described in detail below. This embodiment is provided to more fully describe the present invention to those skilled in the art. Accordingly, the shape of the elements in the drawings may be exaggerated to emphasize a clearer description. It should be noted that in each drawing, the same members may be indicated by the same reference numerals. Detailed descriptions of well-known functions and configurations that are judged to unnecessarily obscure the subject matter of the present invention are omitted.

1 is a view showing the overall appearance of a 3D measuring device according to the present invention, FIG. 2 is a view showing the front view of the 3D measuring device on the y-axis, and FIG. 3 is a side view of the 3D measuring device seen on the x-axis One view and FIG. 4 is a view showing the overall appearance of the y-axis moving part with the housing omitted, FIG. 5 is a view showing a schematic exploded configuration of the y-axis moving part shown in FIG. 4, and FIG. 6 is a view showing in FIG. 4 The y-axis moving part is a schematic view showing the plane viewed from the z-axis, FIG. 7A is a schematic view showing the configuration of the air block and the nozzle member assembly, and FIG. 7B is a schematic view showing the cross-sectional structure of the assembly shown in FIG. 7A. 8a is a combination configuration according to another embodiment of the air block and the nozzle member assembly, FIG. 8b is a view schematically showing a cross-sectional configuration of the assembly shown in FIG. 8a, and FIG. 9 is a schematic view showing the overall appearance of the nozzle member. FIG. 10 is a view schematically showing an exploded configuration of the nozzle member shown in FIG. 9, FIG. 11 is a view for explaining the operation of the nozzle member rotated on the air block, and FIG. 12A is a simple hole type agent. 1 is a view showing the plane of the nozzle member to which the fixing hole and the second fixing hole are applied, FIG. 12B is a diagram showing the nozzle member in a state in which the second fixing hole is excluded, and FIG. 13 is a nozzle for spraying compressed air toward the scale 14 is a view showing a state of use of the member and FIG. 14 is an enlarged view showing a main portion of the y-axis moving part viewed from the y-axis direction.

The three-dimensional measuring device according to the present invention, as shown in Figures 1 to 3, the stage 10 to which the object to be measured is largely placed, the frame 20 formed to extend above the stage 10, the stage 10 ) A detector 30 for measuring a measurement object mounted in three dimensions, a carrier 40 slidably installed on a frame while supporting the detector 30, and a detector 30 supported on the carrier 40 ), The x-axis moving part 50 reciprocating in the x-axis direction, the z-axis moving part 60 reciprocating the detector 30 in the z-axis direction, and the frame 20 reciprocating in the y-axis direction It can be defined as including the y-axis moving unit 70.

When the object to be measured is seated on the stage 10, the x, z, y-axis moving parts 50, 60, and 70 move the detector 30 to measure the three-dimensional coordinates of the object to be measured. The principle of measuring three-dimensional coordinates, calculating and processing the measured coordinates as data is the same as is known, and detailed descriptions thereof will be omitted.

More specifically, the frame 20 is a horizontal connecting the upper end of the pair of vertical frames 21 and a pair of vertical frames 21, centered on the stage 10, as shown in Figure 2, a pair of left and right. It can be made of a frame 22. At this time, the carrier 40 may be slidably installed on the horizontal frame 22, and an x-axis moving part 50 may be built in the horizontal frame 22. That is, the detector 30 has a structure that can be reciprocated in the up and down, left and right directions by the x-axis moving unit 50 and the z-axis moving unit 60.

Since the x-axis moving part 50 and the z-axis moving part 60 can be referred to from the structure of a known linear guide, a detailed description thereof will be omitted.

 The y-axis moving unit 70 is configured to reciprocate the frame 20 itself in the y-axis direction, and for this purpose, the y-axis moving unit 70 extends along the y-axis as shown in FIGS. 4 to 5. It is formed and the scale SC is extended in the longitudinal direction, and the rail 71 and the frame 20 are supported, and the compressed air supplied from the outside is injected into the rail 71 to float from the rail 71. In the reciprocating motion along the extending direction of the rail 71 by the driving force of the driving member 72, it may be defined as including a gantry 73 that rotates a part of the supplied compressed air and sprays it with a scale SC. You can.

The gantry portion 73 may be floated from the rail 71 by using compressed air provided from a compressed air supply means (not shown), and the driving member 72 may be installed on the gantry portion 73 floating from the rail 71. By reciprocating, smooth reciprocation is possible without generating frictional resistance between the rail 71 and the gantry 73.

A read header RH for reading the reference of the scale SC may be interlocked with the gantry unit 73, and may be reciprocated on the scale SC according to the reciprocating movement of the gantry unit 73. The scale SC and the read header RH may be referred to as linear encoders.

The rail 71, the driving member 72, the gantry part 73, and the like may be embedded in the moving part housing (not illustrated).

On the other hand, when a specific foreign substance is attached to the scale SC, physical interference occurs between the scale SC and the lead header RH, so that the lead header RH cannot accurately read the reference of the scale SC, As a result, the absolute position of the detector 30 cannot be accurately calculated. Accordingly, a complicated process of disassembling the rail 71 and the gantry unit 73 to clean the scale SC is required, but the 3D measuring device according to the present invention performs separate disassembly of members constituting the 3D measuring device. The scale (SC) can be kept clean at all times without the accompanying cleaning process.

As a configuration for this, the gantry portion 73 is installed adjacent to the rail 71 in a state laid on the inner surface of the cover 100, the cover 100 in the form of an arch covering the outside of the rail 71, and from the outside The air block 200 that guides the compressed air supplied to the rail 71 and is communicatively mounted on the air block 200 and receives a portion of the compressed air supplied to the air block 200 to receive the scale SC It may be exemplified as including a nozzle member 300 for spraying.

It is preferable that the assembly composed of the air block 200 and the nozzle member 300 is installed in plurality along the inner surface of the cover 100.

Although not shown, the compressed air pipe connected to the external compressor can be connected to the air block 200 through the cover 100, and a solenoid valve (not shown) and a switch for controlling compressed air on the path of the compressed air pipe (SW) can be installed.

The driving member 72 serves to provide a moving force for reciprocating the gantry 73 in the rail 71. As an example, the driving member 72 is a belt 72b to which a pair of rollers 72a and a pair of rollers 72a are wound in a caterpillar and the gantry 73 is connected as shown in FIG. 6. It can be illustrated as including.

At this time, the belt 72b may be formed of a closed loop type metal wire group to prevent sagging due to repeated use.

On the other hand, the compressed air provided from the compressor is supplied to the air block 200 and the nozzle member 300 through the compressed air piping respectively, more specifically, after being primarily supplied to the air block 200, the air block ( 200) may be secondarily supplied to the nozzle member 300. Through this, the compressed air injected from the nozzle member 300 may inject the compressed air decompressed compared to the compressed air injected from the air block 200.

Each of the plurality of air blocks 200 may be mounted on the cover 100 via a mount screw (MTS) in the form of a rectangular block. 7 to 8, the inside of the air block 200 is formed with an inflow path 210 through which compressed air flows, and an injection path 220 from the inflow path 210 toward the rail 71. ) And the supply path 230 toward the nozzle member 300 may be branched, respectively.

The inflow path 210 may be directly connected to the compressed air pipe, and the compressed air supplied to the compressed air pipe may be supplied to the injection path 220 and the supply path 230 through the inflow path 210.

Compressed air that is injected to the outside through the injection path 220 provides a floating force to the carriage portion 73, and compressed air supplied to the supply path 230 is supplied to the nozzle member 300 and then scales (SC) It can be used to clean the scale (SC) by spraying towards it.

The injection path 220 may be formed open toward the outside, and the supply path 230 may have a structure directly connected to the nozzle member 300.

The nozzle member 300 is responsible for receiving a portion of the compressed air supplied to the air block 200 and spraying it in a direction toward the scale SC.

To this end, the nozzle member 300 is formed with the first through hole 311 and the second through hole 312 spaced apart from each other toward the air block 200 as shown in FIGS. 9 to 10. , The nozzle body 310 is provided with the injection nozzle 313 in communication with the supply path 230, the central shaft 320 is inserted into the first through-hole 311 and fixed to the air block 200, It is inserted into the second through hole 312 but is fixed to the air block 200 by being inserted into the eccentric hole 331 and the operating member 330 through which the eccentric hole 331 spaced apart from the center is formed. It may be exemplified to include an axis 340.

The nozzle body 310 may be fixed in the air block 200 by the central axis 320 and the fixed axis 340. In particular, the nozzle body 310 is rotated a predetermined angle on the air block 200 has a structure that can adjust the injection angle of the compressed air.

The injection nozzle 313 may have a structure in which one end is exposed to the outside of the nozzle body 310 and the other end is directly connected to the supply path 230 of the air block 200. At this time, one end of the nozzle body 310 is preferably formed by bending a predetermined angle.

The connection of the injection nozzle 313 and the supply path 230 is an embodiment connected through a separate connection pipe 350 connecting the other end of the injection nozzle 313 and the supply path 230 as shown in FIG. 7 It can be made of. In the embodiment illustrated in FIG. 7, the outlet point of the supply path 230 is inclined at a predetermined angle, so that compressed air can be injected toward the scale SC without the nozzle member 300. If necessary, if the nozzle member 300 is excluded and configured to block the supply path 230, compressed air may be configured to be injected only through the injection path 220. That is, even if the nozzle member 300 is omitted, as shown in FIG. 7C, if necessary, all of the compressed air for levitation of the gantry 73 in the air block 200 and cleaning of the scale SC can be injected. Since the structure is provided, the structure of the gantry 73 can be simplified, but when the nozzle member 300 is mounted on the air block 200, compressed air directed to the scale SC through the nozzle member 200 is provided. The injection direction of can be adjusted elastically.

In addition, the compressed air directed to the injection nozzle 313 may be depressurized by forming the outlet point of the supply path 230 to be inclined at a certain angle.

On the other hand, the connection of the injection nozzle 313 and the supply path 230, as shown in Figure 8, the injection nozzle 313 is directly connected to the supply path 230 of the air block 200 inside the nozzle body 310 It may be made of an embodiment.

When the compressed air that is strong enough to float the gantry 73 to clean the foreign matter attached to the scale SC is injected into the scale SC without decompression, dust attached to the scale SC is rather unspecified. Since the problem of being re-attached to other members while being scattered widely in the direction occurs, the compressed air injected through the injection nozzle 313 has a structure capable of being injected in a depressurized state compared to the compressed air injected from the air block 200 Is required.

Accordingly, a structure in which a compressor providing compressed air as the air block 200 and a separate compressor attached with a pressure reducer are directly connected to the injection nozzle 313 may be considered, but this comes from having to simultaneously drive a plurality of compressors. The efficiency is significantly reduced due to the complexity, occupied area and noise increase.

However, the present invention utilizes compressed air coming from a single compressor to lift the gantry unit 73 and clean the scale SC, respectively. In particular, compressed air for cleaning the scale SC is an air block 200. Since it is supplied to the injection nozzle 313 in a state of being sufficiently depressurized in the inflow path 210, the injection path 220, and the supply path 230, the installation of a separate compressor and a pressure reducer for cleaning the scale SC is omitted. The solution structure can be simplified.

For example, compressed air supplied to the air block 200 moves through the inflow path 210, and is first depressurized at the branching point of the injection path 220 and the supply path 230, and then exits again of the supply path 230 Secondary decompression can be achieved at the point.

On the other hand, the first through hole 311 may be formed approximately through the center of the nozzle body 310, and the second through hole 312 is a nozzle body at a point spaced apart from the first through hole 311 by a certain distance. It may be formed through the 310.

The central shaft 320 inserted into the first through hole 311 extends toward the air block 200 and is fixed to the air block 200 and the operating member 330 inserted into the second through hole 312 is made of 2 It is equipped with a structure that can be independently rotated in the second through hole 312 without being fixed to the air block 200 in the state inserted into the through hole 312.

For example, the operating member 330 is formed on the top of the insertion member 332 and the insertion member 332 is inserted into the second through-hole 312, based on Figure 10, the upper surface of the nozzle body 310 It is made of a head member 333 seated at this time, the eccentric hole 331 may be formed through the insertion member 332 and the head member 333 at the same time.

Since the fixed shaft 340 is inserted into the eccentric hole 331 of the operation member 330 configured as described above and fixed to the air block 200, the nozzle member 300 has two parts, the central shaft 320 and the fixed shaft 340. Can be provided with a fixing force.

At this time, the second through hole 312 is configured to pass through in a substantially key groove-like shape to ensure eccentric rotational movement of the operation member 330 inserted therein. When the operating member 330 is rotated, the nozzle body 310 has a structure that can be rotated at a predetermined angle relative to the central axis 320.

When the operating member 330 is rotated in the CCW or CW direction in the state shown in FIG. 11A, the operating member 330 is eccentrically moved relative to the fixed shaft 340 inside the second through hole 312, wherein the nozzle body 310 may be rotated relative to the central axis 320 as shown in Figure 11b or 11c by eccentric movement of the operating member 330. Accordingly, the injection angle of the compressed air injected from the injection nozzle 313 can be adjusted within a predetermined range, whereby the injection of compressed air injected from the injection nozzle 313 according to the area of the scale SC, the installation direction, etc. The direction can be adjusted appropriately.

If the first fixing hole and the second fixing hole in the form of a simple hole are provided as shown in FIG. 12A, and only the central shaft 320 and the fixing shaft 340 are removed with the operating member 330 excluded. When applied, or when the eccentric hole 331 of the operating member 330 is not formed eccentrically with respect to the center of the operating member 330, but is formed in the center of the operating member 330, the operating member 330 Eccentric movement cannot be guaranteed, and eventually the nozzle body 310 cannot be rotated at a certain angle.

In addition, as shown in FIG. 12B, if only the central axis 320 inserted into the first fixing hole is formed for rotation of the nozzle body 310, rotation of the nozzle body 310 is possible, but in this case, the nozzle body ( Since 310) is rotated with an unspecified rotation radius, the injection direction cannot be easily specified, or the nozzle member 300 and the air block 200 are fixed only by the central axis 320, so it is difficult to provide sufficient coupling force between them. It becomes structure.

On the other hand, the three-dimensional measuring device according to the present invention, through the configuration of the above-described nozzle member 300, the air block 200 and the nozzle member 300 to ensure sufficient bonding force within the gantry unit 73 reciprocating movement The nozzle member 300 is provided with a safety structure that does not deviate, and it is possible to have a convenient structure capable of rotating the nozzle body 310 at a predetermined angle by rotating the operation member 330 as necessary.

Meanwhile, as illustrated in FIG. 14, at least one of the side surfaces of the rail 71 is inclined at an acute angle with respect to the upper surface of the rail 71, and one of the plurality of air blocks 200 is inclined at the rail ( 71). Accordingly, it is possible to prevent the phenomenon in which the gantry portion 73 completely detaches from the rail 71.

The embodiments of the present invention described above are merely exemplary, and those skilled in the art to which the present invention pertains will appreciate that various modifications and other equivalent embodiments are possible. Therefore, it will be understood that the present invention is not limited to the forms mentioned in the above detailed description. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims. It is also to be understood that the invention includes all modifications and equivalents and alternatives within the spirit and scope of the invention as defined by the appended claims.

10: Stage 20: Frame
30: detector 40: carrier
50: x-axis moving portion 60: z-axis moving portion
70: y-axis moving portion 71: rail
72: driving member 73: gantry
100: cover 200: air block
300: nozzle member 210: inlet
220: injection path 230: supply path
310: nozzle body 320: central axis
330: operating member 340: fixed shaft
350: connecting pipe 311: first through hole
312: second through-hole 313: spray nozzle

Claims (5)

A stage on which the object to be measured is seated, a frame extending to the top of the stage, a detector for measuring the object on the stage in three dimensions, a carrier slidably installed on the frame while supporting the detector, the 3 including an x-axis moving part for reciprocating the detector supported by the carrier in the x-axis direction, a z-axis moving part for reciprocating the detector in the z-axis direction, and a y-axis moving part for reciprocating the frame in the y-axis direction. In the dimension measuring machine,
The y-axis moving unit,
a rail extending along the y-axis and having a scale extending in the longitudinal direction; And
While the frame is supported, the compressed air supplied from the outside is injected into the rail and reciprocated along the extending direction of the rail by the driving force of the driving member in the floating state from the rail. Gantry portion for spraying with; includes,
The gantry unit,
An arch-shaped cover covering the outside of the rail;
An air block installed adjacent to the rail while laying on the inner surface of the cover and guiding compressed air supplied from the outside to the rail; And
It includes a nozzle member that is mounted to be communicatively connected to the air block and receives a portion of compressed air supplied to the air block and sprays it on a scale.
Inside the air block, an inflow path through which compressed air flows is formed, and an injection path toward the rail and a supply path towards the nozzle member are branched from the inflow path, respectively. Dimension measuring machine. delete delete The method according to claim 1,
At least one of the side surfaces of the rail is inclined at an acute angle with respect to the upper surface of the rail, and any one of the plurality of air blocks is provided with an encoder cleaning device, characterized in that arranged parallel to the side of the inclined rail 3 Dimension measuring machine. The method according to claim 1,
The nozzle member,
A nozzle body in which a first through hole and a second through hole are formed with a predetermined interval toward the air block, and an injection nozzle communicating with the supply passage is provided;
A central axis inserted into the first through hole and fixedly installed in the air block;
An operating member inserted into the second through hole but having an eccentric hole spaced apart from the center; And
A three-dimensional measuring instrument having an encoder cleaning device comprising a; fixed shaft that is inserted into the eccentric hole and fixed to the air block.

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