KR101995812B1 - 플라스마 처리 장치 및 플라스마 처리 방법 - Google Patents

플라스마 처리 장치 및 플라스마 처리 방법 Download PDF

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KR101995812B1
KR101995812B1 KR1020170037372A KR20170037372A KR101995812B1 KR 101995812 B1 KR101995812 B1 KR 101995812B1 KR 1020170037372 A KR1020170037372 A KR 1020170037372A KR 20170037372 A KR20170037372 A KR 20170037372A KR 101995812 B1 KR101995812 B1 KR 101995812B1
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South Korea
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wafer
sample
plasma
film
heat transfer
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Korean (ko)
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KR20170113227A (ko
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다쿠미 단도우
게네츠 요코가와
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가부시키가이샤 히다치 하이테크놀로지즈
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H01L21/3065—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01J37/32724—Temperature
    • H01L21/67069—
    • H01L21/67098—
    • H01L21/67248—
    • H01L21/6831—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0421—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0602—Temperature monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Plasma Technology (AREA)
KR1020170037372A 2016-03-28 2017-03-24 플라스마 처리 장치 및 플라스마 처리 방법 Active KR101995812B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2016062978 2016-03-28
JPJP-P-2016-062978 2016-03-28
JP2016241887A JP6877133B2 (ja) 2016-03-28 2016-12-14 プラズマ処理装置およびプラズマ処理方法
JPJP-P-2016-241887 2016-12-14

Publications (2)

Publication Number Publication Date
KR20170113227A KR20170113227A (ko) 2017-10-12
KR101995812B1 true KR101995812B1 (ko) 2019-07-03

Family

ID=60006448

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KR1020170037372A Active KR101995812B1 (ko) 2016-03-28 2017-03-24 플라스마 처리 장치 및 플라스마 처리 방법

Country Status (3)

Country Link
JP (1) JP6877133B2 (https=)
KR (1) KR101995812B1 (https=)
TW (1) TWI666679B (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7073098B2 (ja) 2017-12-27 2022-05-23 株式会社日立ハイテク ウエハ処理方法およびウエハ処理装置
JP7083080B2 (ja) * 2018-01-11 2022-06-10 株式会社日立ハイテク プラズマ処理装置
JP7018801B2 (ja) * 2018-03-29 2022-02-14 東京エレクトロン株式会社 プラズマ処理装置、及び被処理体の搬送方法
JP7214021B2 (ja) * 2018-03-29 2023-01-27 東京エレクトロン株式会社 プラズマ処理装置、及び被処理体の搬送方法
JP7170449B2 (ja) * 2018-07-30 2022-11-14 東京エレクトロン株式会社 載置台機構、処理装置及び載置台機構の動作方法
WO2020092005A1 (en) * 2018-10-30 2020-05-07 Lam Research Corporation Substrate state detection for plasma processing tools
JP7236845B2 (ja) * 2018-11-15 2023-03-10 株式会社Kelk 温調装置
KR102211817B1 (ko) * 2018-12-14 2021-02-05 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
CN111383885B (zh) * 2018-12-27 2023-03-31 中微半导体设备(上海)股份有限公司 一种能提高控温精度的基片安装台及等离子体处理设备
JP7134863B2 (ja) * 2018-12-27 2022-09-12 東京エレクトロン株式会社 プラズマ処理装置およびプラズマ処理方法
US10784089B2 (en) 2019-02-01 2020-09-22 Applied Materials, Inc. Temperature and bias control of edge ring
KR102370471B1 (ko) * 2019-02-08 2022-03-03 주식회사 히타치하이테크 플라스마 처리 장치
TWI701751B (zh) * 2019-03-12 2020-08-11 力晶積成電子製造股份有限公司 晶圓夾盤裝置、晶圓形變量的量測方法及半導體製造方法
JP7341043B2 (ja) * 2019-12-06 2023-09-08 東京エレクトロン株式会社 基板処理方法及び基板処理装置
CN112951739B (zh) * 2019-12-10 2024-12-06 圆益Ips股份有限公司 基板支撑架及基板处理装置
JP7512037B2 (ja) * 2019-12-27 2024-07-08 東京エレクトロン株式会社 載置台、基板処理装置及び伝熱ガス供給方法
WO2022265882A1 (en) * 2021-06-14 2022-12-22 Lam Research Corporation Frontside and backside pressure monitoring for substrate movement prevention
KR102865817B1 (ko) * 2022-03-31 2025-09-30 세메스 주식회사 기판처리장치 및 기판처리방법
JP7734644B2 (ja) * 2022-11-02 2025-09-05 三菱電機株式会社 半導体製造装置および半導体装置の製造方法
CN121237674A (zh) * 2024-06-27 2025-12-30 盛美半导体设备(上海)股份有限公司 基板边缘刻蚀装置
CN120749063B (zh) * 2025-09-03 2025-11-04 上海谙邦半导体设备有限公司 多区控温静电吸盘和等离子体处理装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080280453A1 (en) * 2007-05-09 2008-11-13 Applied Materials, Inc. Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
US20090168292A1 (en) * 2007-12-27 2009-07-02 Shinko Electric Industries Co., Ltd. Electrostatic chuck and substrate temperature adjusting-fixing device
JP2012094690A (ja) 2010-10-27 2012-05-17 Tokyo Electron Ltd プラズマ処理装置
US20150004794A1 (en) * 2013-06-26 2015-01-01 Tokyo Electron Limited Method of controlling temperature and plasma processing apparatus

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JPH08264626A (ja) 1994-04-28 1996-10-11 Hitachi Ltd 試料保持方法及び試料表面の流体処理方法並びにそれらの装置
JPH09143674A (ja) * 1995-11-24 1997-06-03 Tokyo Electron Ltd 成膜装置及びその使用方法
GB0108002D0 (en) * 2001-03-30 2001-05-23 Trikon Holdings Ltd A method of etching a substrate
JP4815298B2 (ja) * 2006-07-31 2011-11-16 株式会社日立ハイテクノロジーズ プラズマ処理方法
US8941969B2 (en) * 2012-12-21 2015-01-27 Applied Materials, Inc. Single-body electrostatic chuck
CN104377155B (zh) * 2013-08-14 2017-06-06 北京北方微电子基地设备工艺研究中心有限责任公司 静电卡盘以及等离子体加工设备
GB201402126D0 (en) * 2014-02-07 2014-03-26 Spts Technologies Ltd Method of processing a substrate
KR20160015510A (ko) * 2014-07-30 2016-02-15 삼성전자주식회사 정전척 어셈블리, 이를 구비하는 반도체 제조장치, 및 이를 이용한 플라즈마 처리방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080280453A1 (en) * 2007-05-09 2008-11-13 Applied Materials, Inc. Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
US20090168292A1 (en) * 2007-12-27 2009-07-02 Shinko Electric Industries Co., Ltd. Electrostatic chuck and substrate temperature adjusting-fixing device
JP2012094690A (ja) 2010-10-27 2012-05-17 Tokyo Electron Ltd プラズマ処理装置
US20150004794A1 (en) * 2013-06-26 2015-01-01 Tokyo Electron Limited Method of controlling temperature and plasma processing apparatus

Also Published As

Publication number Publication date
JP6877133B2 (ja) 2021-05-26
TWI666679B (zh) 2019-07-21
KR20170113227A (ko) 2017-10-12
TW201801130A (zh) 2018-01-01
JP2017183700A (ja) 2017-10-05

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