KR101990219B1 - 부상 반송 장치 및 기판 처리 장치 - Google Patents

부상 반송 장치 및 기판 처리 장치 Download PDF

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Publication number
KR101990219B1
KR101990219B1 KR1020170178373A KR20170178373A KR101990219B1 KR 101990219 B1 KR101990219 B1 KR 101990219B1 KR 1020170178373 A KR1020170178373 A KR 1020170178373A KR 20170178373 A KR20170178373 A KR 20170178373A KR 101990219 B1 KR101990219 B1 KR 101990219B1
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KR
South Korea
Prior art keywords
floating
float
substrate
blocks
gap
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KR1020170178373A
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English (en)
Korean (ko)
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KR20180077052A (ko
Inventor
유이치 이마오카
아키노리 이소
Original Assignee
시바우라 메카트로닉스 가부시끼가이샤
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Publication of KR20180077052A publication Critical patent/KR20180077052A/ko
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Publication of KR101990219B1 publication Critical patent/KR101990219B1/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
KR1020170178373A 2016-12-28 2017-12-22 부상 반송 장치 및 기판 처리 장치 Active KR101990219B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2016254564 2016-12-28
JPJP-P-2016-254564 2016-12-28
JP2017227757A JP2018108892A (ja) 2016-12-28 2017-11-28 浮上搬送装置および基板処理装置
JPJP-P-2017-227757 2017-11-28

Publications (2)

Publication Number Publication Date
KR20180077052A KR20180077052A (ko) 2018-07-06
KR101990219B1 true KR101990219B1 (ko) 2019-06-17

Family

ID=62845087

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020170178373A Active KR101990219B1 (ko) 2016-12-28 2017-12-22 부상 반송 장치 및 기판 처리 장치

Country Status (3)

Country Link
JP (1) JP2018108892A (https=)
KR (1) KR101990219B1 (https=)
TW (1) TWI668173B (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016161007A (ja) * 2015-02-27 2016-09-05 株式会社日本製鋼所 ガス浮上ワーク支持装置および非接触ワーク支持方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101195628B1 (ko) * 2004-04-14 2012-10-30 코레플로우 사이언티픽 솔루션스 리미티드 편평한 물체의 대향면상에 광학 장치를 포커싱하는 방법
KR20100123196A (ko) * 2009-05-14 2010-11-24 엘지디스플레이 주식회사 기판 표면 처리장치 및 그 처리방법
JP2011084352A (ja) 2009-10-14 2011-04-28 Myotoku Ltd ワーク浮上装置
JP2012096920A (ja) * 2010-11-05 2012-05-24 Hitachi High-Technologies Corp ガラス基板欠陥検査装置及びガラス基板欠陥検査方法並びにガラス基板欠陥検査システム
JP2014047020A (ja) 2012-08-31 2014-03-17 Tanken Seal Seiko Co Ltd 浮上装置
JP6315547B2 (ja) * 2013-12-17 2018-04-25 芝浦メカトロニクス株式会社 基板処理装置
JP6258892B2 (ja) * 2014-05-13 2018-01-10 芝浦メカトロニクス株式会社 基板処理装置及び基板処理方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016161007A (ja) * 2015-02-27 2016-09-05 株式会社日本製鋼所 ガス浮上ワーク支持装置および非接触ワーク支持方法

Also Published As

Publication number Publication date
JP2018108892A (ja) 2018-07-12
KR20180077052A (ko) 2018-07-06
TW201840458A (zh) 2018-11-16
TWI668173B (zh) 2019-08-11

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