KR101896710B1 - 레이저 다이싱용 웨이퍼 보호막 조성물 - Google Patents

레이저 다이싱용 웨이퍼 보호막 조성물 Download PDF

Info

Publication number
KR101896710B1
KR101896710B1 KR1020120095120A KR20120095120A KR101896710B1 KR 101896710 B1 KR101896710 B1 KR 101896710B1 KR 1020120095120 A KR1020120095120 A KR 1020120095120A KR 20120095120 A KR20120095120 A KR 20120095120A KR 101896710 B1 KR101896710 B1 KR 101896710B1
Authority
KR
South Korea
Prior art keywords
protective film
composition
water
wafer
film composition
Prior art date
Application number
KR1020120095120A
Other languages
English (en)
Korean (ko)
Other versions
KR20140030451A (ko
Inventor
권기진
양진석
이경호
Original Assignee
동우 화인켐 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=50304935&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR101896710(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 동우 화인켐 주식회사 filed Critical 동우 화인켐 주식회사
Priority to KR1020120095120A priority Critical patent/KR101896710B1/ko
Priority to JP2013174580A priority patent/JP6310657B2/ja
Priority to CN201310379594.7A priority patent/CN103666136B/zh
Priority to TW102130796A priority patent/TWI599627B/zh
Publication of KR20140030451A publication Critical patent/KR20140030451A/ko
Application granted granted Critical
Publication of KR101896710B1 publication Critical patent/KR101896710B1/ko

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/08—Anti-corrosive paints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Wood Science & Technology (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
KR1020120095120A 2012-08-29 2012-08-29 레이저 다이싱용 웨이퍼 보호막 조성물 KR101896710B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020120095120A KR101896710B1 (ko) 2012-08-29 2012-08-29 레이저 다이싱용 웨이퍼 보호막 조성물
JP2013174580A JP6310657B2 (ja) 2012-08-29 2013-08-26 レーザダイシング用ウエハ保護膜組成物
CN201310379594.7A CN103666136B (zh) 2012-08-29 2013-08-27 激光切割用晶圆保护膜组合物和半导体元件的制造方法
TW102130796A TWI599627B (zh) 2012-08-29 2013-08-28 雷射切割用晶圓保護膜組合物及半導體元件製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120095120A KR101896710B1 (ko) 2012-08-29 2012-08-29 레이저 다이싱용 웨이퍼 보호막 조성물

Publications (2)

Publication Number Publication Date
KR20140030451A KR20140030451A (ko) 2014-03-12
KR101896710B1 true KR101896710B1 (ko) 2018-09-10

Family

ID=50304935

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120095120A KR101896710B1 (ko) 2012-08-29 2012-08-29 레이저 다이싱용 웨이퍼 보호막 조성물

Country Status (4)

Country Link
JP (1) JP6310657B2 (zh)
KR (1) KR101896710B1 (zh)
CN (1) CN103666136B (zh)
TW (1) TWI599627B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4097755A4 (en) * 2020-01-30 2024-03-06 Applied Materials, Inc. FORMULATIONS FOR WATER-SOLUBLE ORGANIC-INORGANIC HYBRID MASKS AND THEIR APPLICATIONS

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6242776B2 (ja) * 2014-09-26 2017-12-06 富士フイルム株式会社 保護膜組成物、半導体装置の製造方法およびレーザーダイシング方法
US10442899B2 (en) * 2014-11-17 2019-10-15 Silbond Corporation Stable ethylsilicate polymers and method of making the same
CN104526891B (zh) * 2014-12-18 2017-01-11 浙江中纳晶微电子科技有限公司 采用机械刀具切割晶圆的方法
KR101947091B1 (ko) * 2014-12-18 2019-02-12 저지앙 마이크로테크 머테리얼 컴퍼니 리미티드 기계식 절단 도구를 사용하여 웨이퍼를 절단하는 방법
CN106048618A (zh) * 2016-05-31 2016-10-26 合肥正浩机械科技有限公司 一种后处理简单方便的金属防锈剂
CN106048619A (zh) * 2016-05-31 2016-10-26 合肥正浩机械科技有限公司 一种高效冷却金属表面处理剂
CN105908163A (zh) * 2016-05-31 2016-08-31 合肥正浩机械科技有限公司 一种多功能金属表面处理剂
CN105839088A (zh) * 2016-05-31 2016-08-10 合肥正浩机械科技有限公司 一种环保金属表面处理剂
CN106011825A (zh) * 2016-05-31 2016-10-12 合肥正浩机械科技有限公司 一种润滑型金属表面处理剂
TWI638870B (zh) * 2016-10-06 2018-10-21 奇美實業股份有限公司 用以形成作為皮秒雷射加工之保護層的溶液與其製造方法
KR101764167B1 (ko) * 2017-01-26 2017-08-02 (주)엠티아이 레이저 스크라이빙 공정의 웨이퍼 보호용 코팅제 조성물
CN108690421A (zh) * 2017-03-09 2018-10-23 深圳怡钛积科技股份有限公司 高热稳定性的激光切割保护膜组成物
JP7065311B2 (ja) * 2017-11-22 2022-05-12 パナソニックＩｐマネジメント株式会社 素子チップの製造方法
WO2020176457A1 (en) * 2019-02-27 2020-09-03 John Cleaon Moore Water washable thermal and plasma resistant coating for laser interactive applications
JP7412915B2 (ja) * 2019-07-30 2024-01-15 東京応化工業株式会社 保護膜形成剤、及び半導体チップの製造方法
CN110587157A (zh) * 2019-08-28 2019-12-20 东莞南玻太阳能玻璃有限公司 一种太阳能压花玻璃激光钻孔辅助液及其制备方法
CN112831261B (zh) * 2021-01-13 2022-05-03 科纳瑞雅(昆山)新材料科技有限公司 用于激光诱导超临界液体烧蚀加工的保护液膜组合物及激光切割工艺
CN112898853A (zh) * 2021-02-02 2021-06-04 深圳市化讯半导体材料有限公司 一种激光切割保护液及其制备方法和应用
CN114015312B (zh) * 2021-10-26 2022-06-24 大连奥首科技有限公司 一种凸块晶圆的激光切割保护材料及其制备方法与用途
CN115895356B (zh) * 2022-11-23 2023-12-26 昆山汉品电子有限公司 一种用于硅晶圆切割的保护材料及其制备方法
CN116004072B (zh) * 2022-12-26 2024-04-02 浙江奥首材料科技有限公司 一种组合物、制备方法及其在晶圆激光切割中的应用

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009267389A (ja) 2008-03-31 2009-11-12 Mitsui Chemicals Inc ダイシングフィルム

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS538634A (en) 1976-07-14 1978-01-26 Nippon Electric Co Coating liquid for laser scriber
JPH07201787A (ja) * 1993-12-28 1995-08-04 Lintec Corp ウエハ表面保護シートおよびその利用方法
US20050205835A1 (en) * 2004-03-19 2005-09-22 Tamboli Dnyanesh C Alkaline post-chemical mechanical planarization cleaning compositions
JP4571850B2 (ja) * 2004-11-12 2010-10-27 東京応化工業株式会社 レーザーダイシング用保護膜剤及び該保護膜剤を用いたウエーハの加工方法
TW200800584A (en) * 2006-04-03 2008-01-01 Gunze Kk Surface protective tape used for back grinding of semiconductor wafer and base film for the surface protective tape
KR101539763B1 (ko) * 2008-05-29 2015-07-27 동우 화인켐 주식회사 웨이퍼 다이싱용 보호막 조성물
KR101600088B1 (ko) * 2009-10-08 2016-03-07 동우 화인켐 주식회사 레이저 다이싱용 보호막 조성물
KR20120055601A (ko) * 2010-08-06 2012-05-31 닛토덴코 가부시키가이샤 전자 부품의 제조 방법

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009267389A (ja) 2008-03-31 2009-11-12 Mitsui Chemicals Inc ダイシングフィルム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4097755A4 (en) * 2020-01-30 2024-03-06 Applied Materials, Inc. FORMULATIONS FOR WATER-SOLUBLE ORGANIC-INORGANIC HYBRID MASKS AND THEIR APPLICATIONS

Also Published As

Publication number Publication date
JP2014049761A (ja) 2014-03-17
JP6310657B2 (ja) 2018-04-11
CN103666136B (zh) 2019-08-13
TW201412899A (zh) 2014-04-01
TWI599627B (zh) 2017-09-21
CN103666136A (zh) 2014-03-26
KR20140030451A (ko) 2014-03-12

Similar Documents

Publication Publication Date Title
KR101896710B1 (ko) 레이저 다이싱용 웨이퍼 보호막 조성물
US10696933B2 (en) Cleaning formulation for removing residues on surfaces
EP3060642B1 (en) Cleaning formulations for removing residues on surfaces
JP5511799B2 (ja) ウエハーダイシング用保護膜組成物
JP2017513238A (ja) エッチング組成物
JP2019012807A (ja) レーザー加工用保護膜剤
KR101600088B1 (ko) 레이저 다이싱용 보호막 조성물
KR20220058948A (ko) 에칭 조성물
KR101539763B1 (ko) 웨이퍼 다이싱용 보호막 조성물

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant