KR101881980B1 - 웨이퍼 파손 방지용 카세트 - Google Patents

웨이퍼 파손 방지용 카세트 Download PDF

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Publication number
KR101881980B1
KR101881980B1 KR1020160137328A KR20160137328A KR101881980B1 KR 101881980 B1 KR101881980 B1 KR 101881980B1 KR 1020160137328 A KR1020160137328 A KR 1020160137328A KR 20160137328 A KR20160137328 A KR 20160137328A KR 101881980 B1 KR101881980 B1 KR 101881980B1
Authority
KR
South Korea
Prior art keywords
cassette
wafer
preventing broken
broken
preventing
Prior art date
Application number
KR1020160137328A
Other languages
English (en)
Other versions
KR20180043919A (ko
Inventor
우태규
하민철
Original Assignee
전북대학교산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 전북대학교산학협력단 filed Critical 전북대학교산학협력단
Priority to KR1020160137328A priority Critical patent/KR101881980B1/ko
Publication of KR20180043919A publication Critical patent/KR20180043919A/ko
Application granted granted Critical
Publication of KR101881980B1 publication Critical patent/KR101881980B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
KR1020160137328A 2016-10-21 2016-10-21 웨이퍼 파손 방지용 카세트 KR101881980B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160137328A KR101881980B1 (ko) 2016-10-21 2016-10-21 웨이퍼 파손 방지용 카세트

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160137328A KR101881980B1 (ko) 2016-10-21 2016-10-21 웨이퍼 파손 방지용 카세트

Publications (2)

Publication Number Publication Date
KR20180043919A KR20180043919A (ko) 2018-05-02
KR101881980B1 true KR101881980B1 (ko) 2018-07-25

Family

ID=62183717

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160137328A KR101881980B1 (ko) 2016-10-21 2016-10-21 웨이퍼 파손 방지용 카세트

Country Status (1)

Country Link
KR (1) KR101881980B1 (ko)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100358512B1 (ko) * 2000-07-14 2002-10-30 삼성전자 주식회사 운송장치용 웨이퍼카세트 지지장치
KR20100010965A (ko) 2008-07-24 2010-02-03 주식회사 동부하이텍 웨이퍼 카세트의 웨이퍼 적재구조
KR101015363B1 (ko) 2008-11-12 2011-02-16 금호타이어 주식회사 비공기입 타이어 일체형 바퀴구조
JP2013008920A (ja) 2011-06-27 2013-01-10 Mitsubishi Electric Corp ウェハカセット
KR101411367B1 (ko) * 2012-01-17 2014-06-27 비아이 이엠티 주식회사 웨이퍼 카세트용 쿠션
JP2013183138A (ja) 2012-03-05 2013-09-12 Toshiba Corp 半導体装置およびその製造方法
KR101511731B1 (ko) * 2013-04-12 2015-04-15 주식회사 더시스템 웨이퍼 운반장치
WO2015037136A1 (ja) * 2013-09-13 2015-03-19 ミライアル株式会社 基板収納容器を梱包するための梱包構造体

Also Published As

Publication number Publication date
KR20180043919A (ko) 2018-05-02

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
AMND Amendment
X701 Decision to grant (after re-examination)
GRNT Written decision to grant