KR101796535B1 - 자기 정렬 방법 - Google Patents

자기 정렬 방법 Download PDF

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Publication number
KR101796535B1
KR101796535B1 KR1020177024470A KR20177024470A KR101796535B1 KR 101796535 B1 KR101796535 B1 KR 101796535B1 KR 1020177024470 A KR1020177024470 A KR 1020177024470A KR 20177024470 A KR20177024470 A KR 20177024470A KR 101796535 B1 KR101796535 B1 KR 101796535B1
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KR
South Korea
Prior art keywords
self
coil assembly
angle
coil
phase current
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KR1020177024470A
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English (en)
Korean (ko)
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KR20170103041A (ko
Inventor
장린
장샤오원
궈린
천쥔
장즈강
Original Assignee
상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49014—Superconductor

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Linear Motors (AREA)
  • Control Of Linear Motors (AREA)
KR1020177024470A 2013-01-25 2014-01-22 자기 정렬 방법 Active KR101796535B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201310030302.9A CN103973172B (zh) 2013-01-25 2013-01-25 一种动线圈式磁浮平面电机磁对准系统及其对准方法
CN201310030302.9 2013-01-25
PCT/CN2014/071089 WO2014114231A1 (zh) 2013-01-25 2014-01-22 一种磁对准系统及其对准方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020157021133A Division KR20150103731A (ko) 2013-01-25 2014-01-22 자기 정렬 시스템 및 그 정렬 방법

Publications (2)

Publication Number Publication Date
KR20170103041A KR20170103041A (ko) 2017-09-12
KR101796535B1 true KR101796535B1 (ko) 2017-11-10

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ID=51226935

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020177024470A Active KR101796535B1 (ko) 2013-01-25 2014-01-22 자기 정렬 방법
KR1020157021133A Ceased KR20150103731A (ko) 2013-01-25 2014-01-22 자기 정렬 시스템 및 그 정렬 방법

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KR1020157021133A Ceased KR20150103731A (ko) 2013-01-25 2014-01-22 자기 정렬 시스템 및 그 정렬 방법

Country Status (8)

Country Link
US (1) US9893596B2 (https=)
EP (1) EP2950441B1 (https=)
JP (1) JP6219968B2 (https=)
KR (2) KR101796535B1 (https=)
CN (1) CN103973172B (https=)
SG (1) SG11201505237UA (https=)
TW (1) TW201440413A (https=)
WO (1) WO2014114231A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106533274A (zh) * 2015-09-11 2017-03-22 德昌电机(深圳)有限公司 电动工具
DE102015222482A1 (de) * 2015-11-13 2017-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Planar-Positioniervorrichtung und Positioniertisch
CN105871257B (zh) * 2016-05-05 2017-11-17 江苏大学 一种动圈式磁悬浮永磁平面电机的转矩电流分配方法
CN106292736A (zh) * 2016-08-19 2017-01-04 联想(北京)有限公司 一种控制方法、控制器及电子设备
CN109728752B (zh) * 2017-10-31 2020-04-10 上海微电子装备（集团）股份有限公司 一种磁对准方法及一种磁浮电机
DE102018209403A1 (de) * 2018-06-13 2019-12-19 Robert Bosch Gmbh Aus Unterbaugruppen zusammengesetzte Bewegungsvorrichtung
CN111490642B (zh) * 2019-01-29 2022-05-20 苏州隐冠半导体技术有限公司 一种基于霍尔效应传感器和平面电机的位移装置
CN111835177A (zh) * 2019-04-17 2020-10-27 上海微电子装备（集团）股份有限公司 磁浮电机及其控制方法
CN116260369A (zh) * 2023-02-27 2023-06-13 飞翎智能科技(广东)有限公司 平面永磁电机的控制方法、装置、存储介质及电子设备

Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2006014592A (ja) 2004-06-24 2006-01-12 Asml Netherlands Bv 平面モータの初期化方法、平面モータ、リソグラフィ装置、およびデバイス製造方法
JP2009545939A (ja) 2006-07-31 2009-12-24 シーメンス アクチエンゲゼルシヤフト 力脈動補償を備えたリニアモータ
JP2012002554A (ja) 2010-06-15 2012-01-05 Kumamoto Univ ３次元ロードセル

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JPH04285878A (ja) * 1991-03-14 1992-10-09 Meidensha Corp リニア誘導モータの特性算定方式
US6128174A (en) * 1997-08-29 2000-10-03 Stereotaxis, Inc. Method and apparatus for rapidly changing a magnetic field produced by electromagnets
JPH11153136A (ja) * 1997-11-18 1999-06-08 Nippon Seiko Kk 超電導磁気軸受の浮上力計算法及び装置並びに記録媒体
JP4295883B2 (ja) * 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
US7134349B2 (en) * 2003-07-08 2006-11-14 Board Of Trustees Operating Michigan State University Micro-force sensing system
JP2007068256A (ja) * 2005-08-29 2007-03-15 Canon Inc ステージ装置の制御方法
CN101610054B (zh) * 2009-07-21 2011-02-16 清华大学 采用三维永磁阵列的平面电机
CN101750187B (zh) * 2010-01-19 2011-04-06 清华大学 一种基于磁钢阵列的运动平台二维定位方法
US9465305B2 (en) * 2010-05-18 2016-10-11 Nikon Corporation Method for determining a commutation offset and for determining a compensation map for a stage
JP5864878B2 (ja) 2011-03-30 2016-02-17 本田技研工業株式会社 自動二輪車
CN102607388B (zh) * 2012-02-17 2014-09-24 清华大学 平面电机动子位移测量装置及方法
CN102739122B (zh) * 2012-07-09 2014-11-26 哈尔滨工业大学 双边初级结构磁悬浮平面电机
CN102800368B (zh) * 2012-07-12 2014-08-13 清华大学 一种气浮平面电机初始零位的定位方法
CN102801369B (zh) * 2012-07-12 2015-05-20 清华大学 一种基于双台交换系统的电流环辅助整定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006014592A (ja) 2004-06-24 2006-01-12 Asml Netherlands Bv 平面モータの初期化方法、平面モータ、リソグラフィ装置、およびデバイス製造方法
JP2009545939A (ja) 2006-07-31 2009-12-24 シーメンス アクチエンゲゼルシヤフト 力脈動補償を備えたリニアモータ
JP2012002554A (ja) 2010-06-15 2012-01-05 Kumamoto Univ ３次元ロードセル

Also Published As

Publication number Publication date
SG11201505237UA (en) 2015-08-28
US20150340931A1 (en) 2015-11-26
KR20170103041A (ko) 2017-09-12
EP2950441A4 (en) 2016-11-23
JP2016504009A (ja) 2016-02-08
US9893596B2 (en) 2018-02-13
WO2014114231A1 (zh) 2014-07-31
EP2950441A1 (en) 2015-12-02
CN103973172A (zh) 2014-08-06
CN103973172B (zh) 2016-09-28
KR20150103731A (ko) 2015-09-11
TW201440413A (zh) 2014-10-16
EP2950441B1 (en) 2018-03-14
JP6219968B2 (ja) 2017-10-25
TWI513173B (https=) 2015-12-11

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