TWI513173B - - Google Patents

Info

Publication number
TWI513173B
TWI513173B TW103102435A TW103102435A TWI513173B TW I513173 B TWI513173 B TW I513173B TW 103102435 A TW103102435 A TW 103102435A TW 103102435 A TW103102435 A TW 103102435A TW I513173 B TWI513173 B TW I513173B
Authority
TW
Taiwan
Application number
TW103102435A
Other languages
Chinese (zh)
Other versions
TW201440413A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of TW201440413A publication Critical patent/TW201440413A/zh
Application granted granted Critical
Publication of TWI513173B publication Critical patent/TWI513173B/zh

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49014—Superconductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Linear Motors (AREA)
  • Control Of Linear Motors (AREA)
TW103102435A 2013-01-25 2014-01-23 磁對準系統及其對準方法 TW201440413A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310030302.9A CN103973172B (zh) 2013-01-25 2013-01-25 一种动线圈式磁浮平面电机磁对准系统及其对准方法

Publications (2)

Publication Number Publication Date
TW201440413A TW201440413A (zh) 2014-10-16
TWI513173B true TWI513173B (https=) 2015-12-11

Family

ID=51226935

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103102435A TW201440413A (zh) 2013-01-25 2014-01-23 磁對準系統及其對準方法

Country Status (8)

Country Link
US (1) US9893596B2 (https=)
EP (1) EP2950441B1 (https=)
JP (1) JP6219968B2 (https=)
KR (2) KR101796535B1 (https=)
CN (1) CN103973172B (https=)
SG (1) SG11201505237UA (https=)
TW (1) TW201440413A (https=)
WO (1) WO2014114231A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106533274A (zh) * 2015-09-11 2017-03-22 德昌电机(深圳)有限公司 电动工具
DE102015222482A1 (de) * 2015-11-13 2017-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Planar-Positioniervorrichtung und Positioniertisch
CN105871257B (zh) * 2016-05-05 2017-11-17 江苏大学 一种动圈式磁悬浮永磁平面电机的转矩电流分配方法
CN106292736A (zh) * 2016-08-19 2017-01-04 联想(北京)有限公司 一种控制方法、控制器及电子设备
CN109728752B (zh) * 2017-10-31 2020-04-10 上海微电子装备（集团）股份有限公司 一种磁对准方法及一种磁浮电机
DE102018209403A1 (de) * 2018-06-13 2019-12-19 Robert Bosch Gmbh Aus Unterbaugruppen zusammengesetzte Bewegungsvorrichtung
CN111490642B (zh) * 2019-01-29 2022-05-20 苏州隐冠半导体技术有限公司 一种基于霍尔效应传感器和平面电机的位移装置
CN111835177A (zh) * 2019-04-17 2020-10-27 上海微电子装备（集团）股份有限公司 磁浮电机及其控制方法
CN116260369A (zh) * 2023-02-27 2023-06-13 飞翎智能科技(广东)有限公司 平面永磁电机的控制方法、装置、存储介质及电子设备

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7205741B2 (en) * 2004-06-24 2007-04-17 Asml Netherlands B.V. Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
US7436135B2 (en) * 2005-08-29 2008-10-14 Canon Kabushiki Kaisha Method for controlling stage apparatus
CN101610054A (zh) * 2009-07-21 2009-12-23 清华大学 采用三维永磁阵列的平面电机
CN101750187A (zh) * 2010-01-19 2010-06-23 清华大学 一种基于磁钢阵列的运动平台二维定位方法
TW201202872A (en) * 2010-05-18 2012-01-16 Nikon Corp Method for determining a commutation offset and for determining a compensation map for a stage
CN102607388A (zh) * 2012-02-17 2012-07-25 清华大学 平面电机动子位移测量装置及方法
CN102739122A (zh) * 2012-07-09 2012-10-17 哈尔滨工业大学 双边初级结构磁悬浮平面电机
CN102800368A (zh) * 2012-07-12 2012-11-28 清华大学 一种气浮平面电机初始零位的定位方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04285878A (ja) * 1991-03-14 1992-10-09 Meidensha Corp リニア誘導モータの特性算定方式
US6128174A (en) * 1997-08-29 2000-10-03 Stereotaxis, Inc. Method and apparatus for rapidly changing a magnetic field produced by electromagnets
JPH11153136A (ja) * 1997-11-18 1999-06-08 Nippon Seiko Kk 超電導磁気軸受の浮上力計算法及び装置並びに記録媒体
JP4295883B2 (ja) * 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
US7134349B2 (en) * 2003-07-08 2006-11-14 Board Of Trustees Operating Michigan State University Micro-force sensing system
DE102006035676A1 (de) 2006-07-31 2008-02-14 Siemens Ag Linearmotor mit Kraftwelligkeitsausgleich
JP2012002554A (ja) 2010-06-15 2012-01-05 Kumamoto Univ ３次元ロードセル
JP5864878B2 (ja) 2011-03-30 2016-02-17 本田技研工業株式会社 自動二輪車
CN102801369B (zh) * 2012-07-12 2015-05-20 清华大学 一种基于双台交换系统的电流环辅助整定装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7205741B2 (en) * 2004-06-24 2007-04-17 Asml Netherlands B.V. Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
US7436135B2 (en) * 2005-08-29 2008-10-14 Canon Kabushiki Kaisha Method for controlling stage apparatus
CN101610054A (zh) * 2009-07-21 2009-12-23 清华大学 采用三维永磁阵列的平面电机
CN101750187A (zh) * 2010-01-19 2010-06-23 清华大学 一种基于磁钢阵列的运动平台二维定位方法
TW201202872A (en) * 2010-05-18 2012-01-16 Nikon Corp Method for determining a commutation offset and for determining a compensation map for a stage
CN102607388A (zh) * 2012-02-17 2012-07-25 清华大学 平面电机动子位移测量装置及方法
CN102739122A (zh) * 2012-07-09 2012-10-17 哈尔滨工业大学 双边初级结构磁悬浮平面电机
CN102800368A (zh) * 2012-07-12 2012-11-28 清华大学 一种气浮平面电机初始零位的定位方法

Also Published As

Publication number Publication date
SG11201505237UA (en) 2015-08-28
US20150340931A1 (en) 2015-11-26
KR101796535B1 (ko) 2017-11-10
KR20170103041A (ko) 2017-09-12
EP2950441A4 (en) 2016-11-23
JP2016504009A (ja) 2016-02-08
US9893596B2 (en) 2018-02-13
WO2014114231A1 (zh) 2014-07-31
EP2950441A1 (en) 2015-12-02
CN103973172A (zh) 2014-08-06
CN103973172B (zh) 2016-09-28
KR20150103731A (ko) 2015-09-11
TW201440413A (zh) 2014-10-16
EP2950441B1 (en) 2018-03-14
JP6219968B2 (ja) 2017-10-25

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