KR101654860B1 - Exposure device - Google Patents

Exposure device Download PDF

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Publication number
KR101654860B1
KR101654860B1 KR1020150046350A KR20150046350A KR101654860B1 KR 101654860 B1 KR101654860 B1 KR 101654860B1 KR 1020150046350 A KR1020150046350 A KR 1020150046350A KR 20150046350 A KR20150046350 A KR 20150046350A KR 101654860 B1 KR101654860 B1 KR 101654860B1
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KR
South Korea
Prior art keywords
exposure
exposure area
unwinder
area
exposure device
Prior art date
Application number
KR1020150046350A
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Korean (ko)
Inventor
송남호
Original Assignee
주식회사 필옵틱스
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Priority to KR1020150046350A priority Critical patent/KR101654860B1/en
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Publication of KR101654860B1 publication Critical patent/KR101654860B1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Abstract

The present invention relates to an exposure apparatus, and an exposure apparatus according to an embodiment of the present invention is characterized in that the exposure apparatus according to an embodiment of the present invention stores a flexible object for exposure, A first exposure device for transferring the exposure light to the exposure area; A second exposure device for storing a second object having flexibility for exposure and for transferring the second object to an exposure area; And a lamp unit located on one side of the first and second exposure apparatuses for irradiating light for exposing an object in each of the exposure regions of the first and second exposure apparatuses. According to the present invention, it is possible to expose two or more objects during a single process using a plurality of exposure apparatuses in an exposure apparatus, thereby shortening the processing time for exposure.

Description

EXPOSURE DEVICE [0002]

The present invention relates to an exposure apparatus, and more particularly to an exposure apparatus for exposing an object such as a flexible film.

Recently, integration density of semiconductor integrated circuits is developing in the field of electronic industry. As a result, surface mount technology that directly mounts small chip components has developed, and electronic devices have become smaller, requiring printed circuit boards that can be embedded in complex and narrow spaces. One of them is a flexible printed circuit board, and flexible printed circuit boards are continuously used in electronic equipment such as portable terminals, LCD cameras, printer heads, and the like.

When the flexible printed circuit board is manufactured, a dry film is laminated on a copper clad laminate having a copper foil layer formed on one side or both sides of an insulating film such as a polyimide resin, and sequentially patterned using a circuit pattern . The present invention relates to an exposure apparatus used in an exposure process in the process of forming a circuit pattern as described above. The conventional exposure apparatus is an exposure apparatus in which a film is transferred from one side to the other as in Korean Patent Registration No. 10-0146610 (circuit pattern continuous exposure apparatus of flexible printed wiring board, Accordingly, there is a problem that the volume of the exposure apparatus is increased and the installation space is accordingly occupied.

Korean Patent No. 10-0146610 (Registered on May 05, 1998)

An object of the present invention is to provide an exposure apparatus which can be installed in a small space by reducing the volume of the exposure apparatus.

An exposure apparatus according to an embodiment of the present invention includes: a first exposure device that stores a flexible object for exposure and transfers the object to an exposure area; A second exposure device for storing a second object having flexibility for exposure and for transferring the second object to an exposure area; And a lamp unit located on one side of the first and second exposure apparatuses for irradiating light for exposing an object in each of the exposure regions of the first and second exposure apparatuses.

Here, the first exposure device may include a first un-winder wound around the first object; A first carrier for transferring the first object from the first unwinder to an exposure area; A first optical unit that receives light emitted from the lamp unit and irradiates the light to an exposure area; And a rewinder for rewinding and storing the first object exposed in the exposure area, wherein the first unwinder and the first rewinder can be disposed on one side of the optical unit , The first unwinder may be disposed on top of the first rewinder.

The first optical unit may be disposed between the first unwinder and the exposure region, and may be a mirror receiving light emitted from the lamp unit and reflecting the light to the exposure region.

A first controller for controlling the first unwinder so that the tension of the first object to be transferred from the first unwinder to the exposure area is maintained, and a second controller for controlling the first unwinder to be transferred from the exposure area to the first rewinder, And a second controller for controlling the first rewinder so as to maintain the tension of the first object in the exposure area, and may further comprise an alignment unit for aligning the first object in the exposure area.

The second exposure device may further include: a second unwinder to which the second object is wound and stored; A second carrier for transferring the second object from the second unwinder to an exposure area; A second optical unit that receives light emitted from the lamp unit and irradiates the light to an exposure area; And a second rewinder for retracting and storing the second object exposed in the exposure area, wherein the light emitted from the lamp unit selectively transmits light to one of the first and second optical units And an inversion mirror for controlling the irradiation.

At this time, the first exposure device and the second exposure device may be arranged in the directions opposite to each other, or may be arranged in the same direction.

The first and second exposure devices may expose the first and second objects at a time when they are staggered from each other.

In addition, the first and second exposers may transport the first and second objects in a roll-to-roll manner.

According to the present invention, it is possible to expose two or more objects during a single process using a plurality of exposure apparatuses in an exposure apparatus, thereby shortening the processing time for exposure. Furthermore, since the size of the exposure device can be reduced by positioning the unwinder and the rewinder of the exposure device at the same position, the exposure process can be performed more quickly by operating a plurality of exposure devices using one lamp.

1 is a schematic view showing an exposure apparatus according to an embodiment of the present invention.
2 is a schematic view showing a first exposure device of an exposure apparatus according to an embodiment of the present invention.
3 is a schematic view showing an arrangement of an exposure apparatus according to an embodiment of the present invention.
4 is a schematic view showing the arrangement of an exposure apparatus according to another embodiment of the present invention.

Preferred embodiments of the present invention will be described more specifically with reference to the accompanying drawings.

FIG. 1 is a schematic view showing an exposure apparatus according to an embodiment of the present invention, FIG. 2 is a schematic view showing a first exposure device of an exposure apparatus according to an embodiment of the present invention, and FIG. 3 is a cross- FIG. 3 is a schematic view showing the arrangement of an exposure apparatus according to an embodiment;

1 to 3, an exposure apparatus 100 according to an embodiment of the present invention includes a housing 110, a first exposure apparatus 120a, a second exposure apparatus 120b, and a lamp unit 130 .

The housing 110 is provided with an accommodation space for accommodating the first and second exposure apparatuses 120a and 120b. In an embodiment of the present invention, two accommodating spaces are separately provided. The first accommodating space 112 and the second accommodating space 114 are separated from each other by the partition 116. The first accommodating space 112 is accommodated in the first accommodating space 112, 2 exposure unit 120b is accommodated. The door 110 may be provided with a door so that one side of the receiving space can be opened and closed. Light emitted from the lamp unit 130 is received in the first and second receiving spaces 112 and 114 The through holes may be formed or opened.

The first and second exposure devices 120a and 120b are provided to expose a flexible object F. For this purpose, the first exposure device 120a includes an un-winder 121a, a cleaner, A second carrier 124a, an aligning unit 125a, a re-winder 126a and an optical unit 127a, and the second exposure unit 120b includes a first carrier 122a, a first carrier 124a, a second carrier 124a, And is configured in the same manner as the first exposure device 120a.

With reference to FIG. 2, only the configuration of the first exposure device 120a will be described, and the difference and arrangement structure between the first exposure device 120a and the second exposure device 120b will be described with reference to FIG.

The un-winder 121a is placed on one side of the first accommodating space 112 while the object F for exposure is wound and stored. At this time, the object F may be a flexible film or the like, and the object F is transported to the exposure area E to be uncoiled in the un-winder 121a and exposed through the plurality of rollers R. The unwinder 121a allows the tension of the object F to be kept constant so that the object F can be stably transported to the exposure area E. [ Accordingly, the unwinder 121a can control the operation of unrolling the object F by the first controller C1.

The first controller C1 controls the unwinder 121a such that both ends of the object F are constantly wound or unwound. To this end, the first controller C1 controls the ultrasonic sensor The position of the object F can be detected.

The cleaner 122a removes foreign matter or the like that may be present on the surface of the object F when the object F is unwound from the unwinder 121a and the object F is transported to the exposure area E, Clean the surface. Accordingly, the cleaner 122a is positioned adjacent to the unwinder 121a.

The first and second carriers 123a and 124a are provided for conveying the object F by a predetermined distance and the first carrier 123a is provided for conveying the object F conveyed via the cleaner 122a. And the second carrier 124a is disposed below the exposure area E to transport the object F to be transferred to the rewinder 126a.

As described above, the object F is conveyed by the first and second carriers 123a and 124a. When the object F passes the exposure region E, the object F is moved to the exposure region E), the first and second carriers 123a, 124a control the conveyance of such an object F. Therefore,

The aligning unit 125a is provided for aligning the object F transferred to the exposure area E and is disposed on one side of the exposure area E. Accordingly, the horizontal / vertical direction of the conveyed object F is adjusted. For this purpose, a plurality of cameras may be provided. The alignment unit 125a aligns the object F so that the object F can be accurately exposed.

The rewinder 126a rewinds the object F after exposure in the exposure area E when the object F is transferred through the second carrier 124a. The rewinder 126a is controlled by the second controller C2 to rewind the object F such that the object F can be wound in a state in which a predetermined tension is maintained as in the unwinder 121a. The second controller C2 detects the position of the object F by using an ultrasonic sensor or the like so that both ends of the object F are constantly wound or unwound by the rewinder 126a as in the first controller C1 .

At this time, the rewinder 126a is disposed on one side of the first accommodating space 112, like the unwinder 121a. In an embodiment of the present invention, the unwinder 121a and the rewinder 126a are disposed on the same side, and after the object F is transferred from one side to the other side, In addition, in the embodiment of the present invention, the unwinder 121a is disposed at the upper portion and the rewinder 126a is disposed at the lower portion, but this may be changed as required. That is, in an embodiment of the present invention, the object F is transported in a roll-to-roll manner using an unwinder 121a, a rewinder 126a and a plurality of rollers R.

The optical unit 127a is installed in the first accommodation space 112 of the housing 110 and reflects incident light so that light emitted from the lamp unit 130 can be irradiated to the exposure area E. [ The optical unit 127a is disposed between the one side where the unwinder 121a and the rewinder 126a are located and the other side where the exposure area E is located, And arranged so as to be tilted so as to reflect the emitted light to the exposure region (E). In addition, the optical unit 127a can convert light emitted from the lamp unit 130 into light necessary for exposure.

The exposure apparatus 100 according to an embodiment of the present invention includes a first exposure apparatus 120a, a second exposure apparatus 120b and a lamp unit 130 as shown in FIG. 3, and the first exposure apparatus 120a And the second exposure device 120b are arranged to face each other in the direction opposite to each other. That is, the exposure area of the first exposure device 120a and the exposure area of the second exposure device 120b are disposed opposite to each other. Accordingly, light emitted from one lamp unit 130 can be used in both the first exposure apparatus 120a and the second exposure apparatus 120b.

The lamp unit 130 may be installed in the lamp housing 130a, and emits light for exposing the object F. FIG. The lamp housing 130a may be disposed on the rear surface of the housing 110 in a state where the first exposure device 120a and the second exposure device 120b face each other in a direction opposite to the first exposure device 120a. The lamp housing 130a may be formed with holes or one side thereof so that the light emitted from the lamp unit 130 can be irradiated to the first and second accommodation spaces 112 and 114 of the housing 110. [

The light emitted from the lamp unit 130 is irradiated to the first and second exposure units 120a and 120b so that exposure is performed at a time when the exposure in the first exposure unit 120a and the exposure in the second exposure unit 120b are staggered from each other Lt; / RTI > The second exposure device 120b transfers the object F to the exposure area while the object F is being transferred from the first exposure device 120a while the second exposure device 120b is performing exposure in the first exposure device 120a, 120b expose the object F. [ That is, the light emitted from the lamp unit 130 is not irradiated to the first exposure apparatus 120a and the second exposure apparatus 120b at the same time point, and is selectively applied to one of the first exposure apparatus 120a and the second exposure apparatus 120b . For this purpose, an inversion mirror or the like for controlling the light irradiated from the lamp unit 130 to be irradiated to the first exposure apparatus 120a and the second exposure apparatus 120b may be used.

4 is a schematic view showing the arrangement of an exposure apparatus according to another embodiment of the present invention.

Referring to FIG. 4, an exposure apparatus 200 according to another embodiment of the present invention includes a housing 210, a first exposure device 220a, a second exposure device 220b, and a lamp unit 230. Description will be given of the exposure apparatus 9200 according to another embodiment of the present invention, and a description of the same constitution will be omitted.

In the exposure apparatus 200 according to another embodiment of the present invention, the first exposure device 220a and the second exposure device 220b are arranged in parallel in the same direction. That is, the exposure area of the first exposure device 220a and the exposure area of the second exposure device 220b are disposed in the same direction. The lamp unit 230 is disposed on the rear side of each exposure area of the first exposure device 220a and the second exposure device 220b. Accordingly, the light emitted from the lamp unit 230 is directly irradiated to the exposure area, so that the exposure of the object F can be performed, the light is reflected by the optical unit disposed on the front side of the exposure area, .

In another embodiment of the present invention, an optical unit is provided so that light emitted from the lamp unit 230 is reflected through the optical unit to be irradiated to the exposure area, so that the exposure area of the first and second exposure devices 220a and 220b Are disposed between the optical unit of the first exposure device 220a and the optical unit of the second exposure device 220b and the lamp part 230, respectively.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It should be understood that the scope of the present invention is to be understood as the scope of the following claims and their equivalents.

100: Exposure device
110: housing 112: first accommodation space
114: second accommodation space 116: partition wall
120a: First Exposure Machine 120b: Second Exposure Machine
121a: Unwinder 122a: Cleaner
123a: first carrier 124a: second carrier
125a: Aligning unit 126a: Rewinder
127a: optical unit E: exposure area
130: lamp part 130a: lamp housing
C1: first controller C2: second controller
F: object R: roller

Claims (13)

delete A first exposure device for storing a first object having flexibility for exposure and for transferring the first object to an exposure area;
A second exposure device for storing a second object having flexibility for exposure and for transferring the second object to an exposure area; And
And a lamp unit located on one side of the first and second exposure apparatuses for irradiating light for exposing the first or second object in each of the exposure regions of the first and second exposure apparatuses,
The first exposure device includes:
A first un-winder in which the first object is wound and stored;
A first carrier for transferring the first object from the first unwinder to an exposure area;
A first optical unit that receives light emitted from the lamp unit and irradiates the light to an exposure area; And
And a first rewinder for rewinding and storing the first object exposed in the exposure area,
Wherein the second exposure device comprises:
A second unwinder in which the second object is wound and stored;
A second carrier for transferring the second object from the second unwinder to an exposure area;
A second optical unit that receives light emitted from the lamp unit and irradiates the light to an exposure area; And
And a second rewinder for rewinding and storing the second object exposed in the exposure area,
And an inversion mirror for controlling the light emitted from the lamp unit to be selectively irradiated to one of the first and second optical units. The method of claim 2,
Wherein the first unwinder is disposed on an upper portion of the first rewinder. The method of claim 2,
Wherein the first optical unit is disposed between the first un-winder and the exposure area. The method of claim 2,
Wherein the first optical unit is a mirror that receives light emitted from the lamp unit and reflects the light to the exposure area. The method of claim 2,
Further comprising a first controller for controlling the first unwinder so that the tension of the first object transferred from the first unwinder to the exposure area is maintained. The method of claim 6,
Further comprising a second controller for controlling the first rewinder so that the tension of the first object transferred to the first rewinder in the exposure area is maintained. The method of claim 2,
And an alignment unit for aligning the first object in an exposure area. delete The method of claim 2,
Wherein the first exposure device and the second exposure device are arranged in directions opposite to each other. The method of claim 2,
Wherein the first exposure device and the second exposure device are arranged in parallel in the same direction. The method of claim 2,
Wherein the first and second exposure devices respectively expose the first and second objects at a time when they are staggered from each other. The method of claim 2,
Wherein the first and second exposers transport the first and second objects in a roll to roll manner.
KR1020150046350A 2015-04-01 2015-04-01 Exposure device KR101654860B1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0146610B1 (en) 1995-03-15 1998-10-01 원우연 Continuous exposing apparatus for circuit pattern of flexible print wired board
KR20120012668A (en) * 2010-08-02 2012-02-10 한국기계연구원 In-line exposure system using virtual irradiating pattern and method for in-line printing using the same
KR20120138247A (en) * 2010-04-12 2012-12-24 에이에스엠엘 네델란즈 비.브이. Substrate handling apparatus and lithographic apparatus
KR101243354B1 (en) * 2012-12-04 2013-03-13 주식회사 쓰리디플러스 Roll to roll type alignment stage apparatus
KR101291703B1 (en) * 2012-12-04 2013-07-31 주식회사 남영기계 Flexible printed circuit substrate for the production of roll-to-roll winder device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0146610B1 (en) 1995-03-15 1998-10-01 원우연 Continuous exposing apparatus for circuit pattern of flexible print wired board
KR20120138247A (en) * 2010-04-12 2012-12-24 에이에스엠엘 네델란즈 비.브이. Substrate handling apparatus and lithographic apparatus
KR20120012668A (en) * 2010-08-02 2012-02-10 한국기계연구원 In-line exposure system using virtual irradiating pattern and method for in-line printing using the same
KR101243354B1 (en) * 2012-12-04 2013-03-13 주식회사 쓰리디플러스 Roll to roll type alignment stage apparatus
KR101291703B1 (en) * 2012-12-04 2013-07-31 주식회사 남영기계 Flexible printed circuit substrate for the production of roll-to-roll winder device

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