KR101642898B1 - 광배향 처리장치 - Google Patents

광배향 처리장치 Download PDF

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Publication number
KR101642898B1
KR101642898B1 KR1020140137520A KR20140137520A KR101642898B1 KR 101642898 B1 KR101642898 B1 KR 101642898B1 KR 1020140137520 A KR1020140137520 A KR 1020140137520A KR 20140137520 A KR20140137520 A KR 20140137520A KR 101642898 B1 KR101642898 B1 KR 101642898B1
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KR
South Korea
Prior art keywords
substrate
traveling
substrate support
alignment treatment
photo
Prior art date
Application number
KR1020140137520A
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English (en)
Korean (ko)
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KR20150137951A (ko
Inventor
키요시 미즈노야
신이치로 우노
타카히로 후쿠나가
Original Assignee
가부시키가이샤이이누마게이지세이사쿠쇼
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Publication of KR20150137951A publication Critical patent/KR20150137951A/ko
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Publication of KR101642898B1 publication Critical patent/KR101642898B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020140137520A 2014-05-29 2014-10-13 광배향 처리장치 KR101642898B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014111714A JP5734494B1 (ja) 2014-05-29 2014-05-29 光配向処理装置
JPJP-P-2014-111714 2014-05-29

Publications (2)

Publication Number Publication Date
KR20150137951A KR20150137951A (ko) 2015-12-09
KR101642898B1 true KR101642898B1 (ko) 2016-07-26

Family

ID=53487048

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140137520A KR101642898B1 (ko) 2014-05-29 2014-10-13 광배향 처리장치

Country Status (4)

Country Link
JP (1) JP5734494B1 (ja)
KR (1) KR101642898B1 (ja)
CN (1) CN105278168A (ja)
TW (1) TWI553385B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6484851B2 (ja) * 2014-12-22 2019-03-20 株式会社ブイ・テクノロジー 偏光光照射装置
JP5983810B1 (ja) * 2015-04-02 2016-09-06 ウシオ電機株式会社 光照射装置
JP2017015880A (ja) * 2015-06-30 2017-01-19 アイグラフィックス株式会社 光照射装置、及び光照射システム
JP6455396B2 (ja) * 2015-10-30 2019-01-23 東芝ライテック株式会社 光配向用偏光光照射装置
WO2017204131A1 (ja) * 2016-05-27 2017-11-30 シャープ株式会社 液晶表示装置の製造方法
CN107585550B (zh) * 2017-08-28 2023-06-02 北京华夏视科技术股份有限公司 印刷电路板检测设备的传动装置及印刷电路板检测设备
CN110297362B (zh) * 2019-05-31 2021-08-24 惠科股份有限公司 液晶配向方法及液晶面板

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011233938A (ja) * 2011-08-22 2011-11-17 Mitsubishi Heavy Ind Ltd 真空処理装置およびこれを用いた基板搬送方法
JP2013080215A (ja) 2011-09-30 2013-05-02 Gunko Kagi (Shenzhen) Yugenkoshi 光配向装置、および配向層の形成方法、および液晶ディスプレイの形成方法
KR101352243B1 (ko) * 2013-03-08 2014-01-17 우시오덴키 가부시키가이샤 광 배향용 편광광 조사 장치 및 광 배향용 편광광 조사 방법
JP2014026133A (ja) 2012-07-27 2014-02-06 V Technology Co Ltd 光配向装置及び光配向方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6144439A (en) * 1997-07-29 2000-11-07 Kaiser Electro-Optics, Inc. Method and apparatus for reducing ghost images with a tilted cholesteric liquid crystal panel
US6903787B2 (en) * 2002-02-20 2005-06-07 Fujitsu Display Technologies Corporation Liquid crystal display device's substrate, liquid crystal display device including the same, and manufacturing method of the same
JP4493697B2 (ja) * 2006-01-26 2010-06-30 シャープ株式会社 液晶表示装置の製造方法及び液晶表示装置
JP2012173693A (ja) * 2011-02-24 2012-09-10 Hitachi High-Technologies Corp 露光装置及び露光方法
JP5884398B2 (ja) * 2011-10-18 2016-03-15 ウシオ電機株式会社 紫外線照射装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011233938A (ja) * 2011-08-22 2011-11-17 Mitsubishi Heavy Ind Ltd 真空処理装置およびこれを用いた基板搬送方法
JP2013080215A (ja) 2011-09-30 2013-05-02 Gunko Kagi (Shenzhen) Yugenkoshi 光配向装置、および配向層の形成方法、および液晶ディスプレイの形成方法
JP2014026133A (ja) 2012-07-27 2014-02-06 V Technology Co Ltd 光配向装置及び光配向方法
KR101352243B1 (ko) * 2013-03-08 2014-01-17 우시오덴키 가부시키가이샤 광 배향용 편광광 조사 장치 및 광 배향용 편광광 조사 방법

Also Published As

Publication number Publication date
CN105278168A (zh) 2016-01-27
TW201544879A (zh) 2015-12-01
TWI553385B (zh) 2016-10-11
KR20150137951A (ko) 2015-12-09
JP2015225313A (ja) 2015-12-14
JP5734494B1 (ja) 2015-06-17

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